CN210266377U - Vacuum pipeline visual window structure - Google Patents

Vacuum pipeline visual window structure Download PDF

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Publication number
CN210266377U
CN210266377U CN201920899733.1U CN201920899733U CN210266377U CN 210266377 U CN210266377 U CN 210266377U CN 201920899733 U CN201920899733 U CN 201920899733U CN 210266377 U CN210266377 U CN 210266377U
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China
Prior art keywords
hole
vacuum
quartz glass
mounting hole
vacuum tube
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CN201920899733.1U
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Chinese (zh)
Inventor
王浩明
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Suzhou Zishan Semiconductor Technology Co Ltd
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Suzhou Zishan Semiconductor Technology Co Ltd
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Abstract

The utility model relates to a vacuum tube visual window structure, which comprises a vacuum tube interface, a through hole which runs through the vacuum tube interface and is coaxially arranged, a connecting hole which is arranged at one end of the vacuum tube interface and is used for connecting a vacuum tube, and a mounting hole which is arranged at the other end of the vacuum tube interface and is used for mounting quartz glass; the diameters of the connecting hole and the mounting hole are larger than that of the through hole; the quartz glass is welded or bonded in the mounting hole and is positioned through the hole shoulder; the utility model discloses because directly with quartz glass welding or bond in the mounting hole, not only need not consider rubber seal's corrosion problems, the leakproofness is better, and has reduced whole thickness, the installation of being convenient for also can use in narrow and small space.

Description

Vacuum pipeline visual window structure
Technical Field
The utility model relates to a vacuum pipeline visual window field refers in particular to a vacuum pipeline visual window structure.
Background
The current vacuum pipeline visual window consists of vacuum pipeline series vacuum pipe interfaces 11 of CF, KF, NW and other specifications, a rubber sealing ring 12, quartz glass 13 and a rubber cover 14; as shown in fig. 1, the quartz glass 13 has the atmosphere on the left and the vacuum on the right, but the prior art has the following two disadvantages: 1. the existing visual window is sealed by a rubber sealing ring, when in production, a vacuum pump pumps out reaction chamber gas through a vacuum tube, and the reaction chamber gas contains CL2, Br2 and other gases, which have a corrosive effect on the rubber sealing ring, so that the sealing effect is poor due to the corrosion of the rubber sealing ring after a period of use; 2. the existing visual window is composed of four accessories, so that the size of the visual window is thicker, the space is occupied, and the visual window is inconvenient to mount and dismount.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects of the prior art and provide a visual window structure of a vacuum pipeline.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a visual window structure of a vacuum pipeline comprises a vacuum pipe interface, a through hole, a connecting hole and a mounting hole, wherein the through hole penetrates through the vacuum pipe interface and is coaxially arranged, the connecting hole is formed in one end of the vacuum pipe interface and is used for connecting the vacuum pipeline, and the mounting hole is formed in the other end of the vacuum pipe interface and is used for mounting quartz glass; the diameters of the connecting hole and the mounting hole are larger than that of the through hole; the quartz glass is welded or bonded in the mounting hole and is positioned through the hole shoulder.
Preferably, the thickness of the quartz glass is smaller than the depth of the mounting hole.
Preferably, the vacuum tube interface is made of 304 steel material.
Preferably, the vacuum tube interface is one of KF, NW, CF series interfaces.
Preferably, a sealing retainer ring is welded on the outer side of the quartz glass in the mounting hole.
Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage:
the utility model discloses because directly with quartz glass welding or bond in the mounting hole, not only need not consider rubber seal's corrosion problems, the leakproofness is better, and has reduced whole thickness, the installation of being convenient for also can use in narrow and small space.
Drawings
The technical scheme of the utility model is further explained by combining the attached drawings as follows:
FIG. 1 is a schematic structural diagram of a conventional vacuum pipeline viewing window;
FIG. 2 is a schematic structural view of the vacuum pipeline visual window structure of the present invention;
figure 3 is a schematic view of the structure of the medium vacuum tube interface of the present invention.
Wherein: 11. a vacuum tube interface; 12. a rubber seal ring; 13. quartz glass; 14. a rubber cover; 21. a vacuum tube interface; 22. connecting holes; 23. a through hole; 24. quartz glass; 25. mounting holes; 26. and (5) sealing the retainer ring.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The first embodiment is as follows:
fig. 2-3 show a visual window structure for vacuum pipeline according to the present invention, which comprises a vacuum tube interface 21, a through hole 23 penetrating the vacuum tube interface 21 and coaxially disposed, a connecting hole 22 disposed at one end of the vacuum tube interface 21 for connecting to a vacuum pipeline, and a mounting hole 25 disposed at the other end of the vacuum tube interface 21 for mounting a quartz glass 24; the diameters of the connecting hole 22 and the mounting hole 25 are larger than that of the through hole 23; the quartz glass 24 is welded in the mounting hole 25 and positioned through a hole shoulder, wherein the quartz glass 24 is welded on metal in the prior art, such as a scientist team from the university of Herrewatt in England, the welding of the glass and the metal is realized by an ultrafast laser system in the future, or the quartz glass 24 can be melted at high temperature and injected into the mounting hole 25 for recondensing, and the visual window processed by the method can be made thinner, so that the thickness of the lower rubber sealing ring mounting groove and the rubber cover plate is reduced.
Example two:
fig. 2-3 show a visual window structure for vacuum pipeline according to the present invention, which comprises a vacuum tube interface 21, a through hole 23 penetrating the vacuum tube interface 21 and coaxially disposed, a connecting hole 22 disposed at one end of the vacuum tube interface 21 for connecting to a vacuum pipeline, and a mounting hole 25 disposed at the other end of the vacuum tube interface 21 for mounting a quartz glass 24; the diameters of the connecting hole 22 and the mounting hole 25 are larger than that of the through hole 23; quartz glass 24 passes through UV shadowless adhesive bonding in mounting hole 25 to fix a position through the hole shoulder, have convenient to use, the time is controllable, and solidification speed is fast, and bonding strength is high, and the luminousness is high, and the bonding back is colorless no trace, advantages such as operation safety.
Further, the thickness of the quartz glass 24 is smaller than the depth of the mounting hole 25, so that foreign objects can be effectively prevented from impacting the quartz glass 24, a protection effect is achieved, and welding of the sealing check ring 26 is facilitated.
Further, the vacuum tube interface 21 is made of 304 steel material.
Further, the vacuum tube interface 21 is one of KF, NW, CF series interfaces, so that KF, NW, CF series vacuum tubes can be matched.
Furthermore, a sealing retainer ring 26 is welded on the outer side of the quartz glass 24 in the mounting hole 25, so that the sealing and fixing effects can be further achieved.
The above is only a specific application example of the present invention, and does not constitute any limitation to the protection scope of the present invention. All the technical solutions formed by equivalent transformation or equivalent replacement fall within the protection scope of the present invention.

Claims (5)

1. A visual window structure of a vacuum pipeline comprises a vacuum pipe interface, a through hole, a connecting hole and a mounting hole, wherein the through hole penetrates through the vacuum pipe interface and is coaxially arranged, the connecting hole is formed in one end of the vacuum pipe interface and is used for connecting the vacuum pipeline, and the mounting hole is formed in the other end of the vacuum pipe interface and is used for mounting quartz glass; the diameter of connecting hole and mounting hole all is greater than the diameter of through-hole, its characterized in that: the quartz glass is welded or bonded in the mounting hole and is positioned through the hole shoulder.
2. The vacuum conduit viewing window structure of claim 1, wherein: the thickness of the quartz glass is smaller than the depth of the mounting hole.
3. The vacuum line viewing window structure of claim 1 or 2, wherein: the vacuum pipe interface is made of 304 steel materials.
4. The vacuum line viewing window structure of claim 3, wherein: the vacuum pipe interface is one of KF, NW and CF series interfaces.
5. The vacuum conduit viewing window structure of claim 4, wherein: and a sealing check ring is welded on the outer side of the quartz glass in the mounting hole.
CN201920899733.1U 2019-06-15 2019-06-15 Vacuum pipeline visual window structure Active CN210266377U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920899733.1U CN210266377U (en) 2019-06-15 2019-06-15 Vacuum pipeline visual window structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920899733.1U CN210266377U (en) 2019-06-15 2019-06-15 Vacuum pipeline visual window structure

Publications (1)

Publication Number Publication Date
CN210266377U true CN210266377U (en) 2020-04-07

Family

ID=70042719

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920899733.1U Active CN210266377U (en) 2019-06-15 2019-06-15 Vacuum pipeline visual window structure

Country Status (1)

Country Link
CN (1) CN210266377U (en)

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