CN210220157U - Integrated circuit production is with energy-saving equipment of airing exhaust - Google Patents
Integrated circuit production is with energy-saving equipment of airing exhaust Download PDFInfo
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- CN210220157U CN210220157U CN201920704792.9U CN201920704792U CN210220157U CN 210220157 U CN210220157 U CN 210220157U CN 201920704792 U CN201920704792 U CN 201920704792U CN 210220157 U CN210220157 U CN 210220157U
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Abstract
The utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust. The integrated circuit production is with energy-conserving equipment of airing exhaust includes: a clean room and a clean room air conditioning unit; the testing machine is arranged inside the dust-free chamber; the cover body is arranged in the dust-free chamber and is positioned on the surface of the testing machine; and one end of the air supply pipe is communicated with the air inlet end of the dust-free room air conditioning unit. The utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust, through the connecting pipe through the updraft ventilator work, the discharge tube of airing exhaust, exhaust pipe and exhaust column carry thermal gas near the test machine and send into to the blast pipe in, send into to the dust free room air conditioning unit by the blast pipe again, utilize dust free room air conditioning unit control heat demand, changing waste into valuables, can effectively reduce energy resource loss, reach energy saving and emission reduction effect, at last by dust free room air conditioning unit toward supplementing the gas of constant temperature and humidity in the dust free room.
Description
Technical Field
The utility model relates to an integrated circuit seals surveys the auxiliary assembly field, especially relates to an integrated circuit production is with energy-saving equipment of airing exhaust.
Background
The production environment of the integrated circuit sealing and measuring process is a dust-free room (the temperature is 23 ℃ and the humidity is 50%) with constant temperature and humidity, most areas (east China, North China and southwest China) are high-temperature, high-humidity and high-humidity in summer and low-temperature and low-humidity in winter, the temperature and the humidity are adjusted to meet the specified requirements, extremely large energy is consumed for adjustment and maintenance (water, electric power and gas), and the energy consumption cost reaches 200 ten thousand RMB/year according to the statistics of the dust-free room with 2000 square meters.
In the existing production equipment of part of integrated circuit sealing and testing processes, a testing host can bring great influence on the constant-temperature and constant-humidity environment of a dust-free room due to large heat productivity of a machine (about 35000KJ/h heat of a single machine), the testing host is directly discharged into the atmosphere by a fan in the traditional method, and meanwhile, adjusted environment gas is taken away, so that the temperature and humidity of newly-fed air are required to be adjusted again and sent into a workshop, and energy waste is brought.
Therefore, it is necessary to provide an exhaust energy-saving device for integrated circuit production to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust has solved present integrated circuit and has sealed the technological production equipment that surveys at the during operation, the great problem of power consumption.
In order to solve the technical problem, the utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust, include: a clean room and a clean room air conditioning unit; the testing machine is arranged inside the dust-free chamber; the cover body is arranged in the dust-free chamber and is positioned on the surface of the testing machine; one end of the blast pipe is communicated with the air inlet end of the dust-free chamber air conditioning unit; and the air exhaust mechanism is arranged in the dust-free room and is respectively communicated with the cover body and the air supply pipe.
Preferably, the exhaust mechanism includes an exhaust gas collecting pipe, an exhaust pump, a connecting pipe, an exhaust pipe and an exhaust pipe, one end of the exhaust pipe is communicated with the cover body, the exhaust gas collecting pipe is arranged in the dust-free chamber, the bottom of the exhaust pump is fixed on the top of one side of the dust-free chamber through a connecting seat, and one end of the exhaust pipe is communicated with the surface of the air supply pipe.
Preferably, one end of the exhaust pipe is communicated with the air outlet end of the air suction pump, and one end of the exhaust pipe is communicated with the surface of the air exhaust collecting pipe.
Preferably, one end of the connecting pipe is communicated with the air inlet end of the air suction pump, and the other end of the connecting pipe is communicated with one end of the air exhaust gas collecting pipe.
Preferably, the air outlet end of the clean room air conditioning unit is communicated with a through pipe, one end of the through pipe is communicated with one side of the clean room, and the surface of the cover body is provided with an air circulation hole.
Preferably, one end of the blast pipe is communicated with a filtering mechanism, the filtering mechanism comprises a filtering frame, two U-shaped frames, a filtering plate, an air inlet pipe and a box door, one side of the filtering frame is communicated with one end of the blast pipe, the two separated sides of the U-shaped frames are respectively fixed at the top and the bottom of the inner wall of the filtering frame, and the filtering plate is arranged between the two opposite sides of the U-shaped frames.
Preferably, one end of the air inlet pipe is communicated with one side of the filter frame, and the box door is hinged to the surface of the filter frame through a hinge.
Compared with the prior art, the utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust has following beneficial effect:
the utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust, through the connecting pipe through the updraft ventilator work, the discharge tube of airing exhaust, near test machine carries thermal gas with exhaust column and sends into to the blast pipe in, send into to the dust free room air conditioning unit by the blast pipe again, utilize dust free room air conditioning unit control heat demand, changing waste into valuables, can effectively reduce energy resource loss, reach energy saving and emission reduction effect, at last by dust free room air conditioning unit toward supplementing the gas of constant temperature and humidity in the dust free room.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of an exhaust energy-saving device for integrated circuit production according to the present invention;
FIG. 2 is a flow chart of the air exhaust energy-saving device for producing integrated circuits according to the present invention;
fig. 3 is a schematic structural diagram of a second embodiment of the exhaust energy-saving device for integrated circuit production according to the present invention;
FIG. 4 is a schematic structural view of the filter mechanism shown in FIG. 3;
fig. 5 is a schematic structural view of the surface of the filter frame shown in fig. 3.
Reference numbers in the figures: 1. the air conditioner comprises a dust-free room, 2, a dust-free room air conditioning unit, 3, a testing machine, 4, a cover body, 5, an air supply pipe, 6, an air exhaust mechanism, 61, an air exhaust collecting pipe, 62, an air exhaust pump, 63, a connecting pipe, 64, an air exhaust pipe, 65, an air exhaust pipe, 7, a through pipe, 8, an air flow hole, 9, a filtering mechanism, 91, a filtering frame, 92, a U-shaped frame, 93, a filtering plate, 94, an air inlet pipe, 95 and a box door.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and embodiments.
Please refer to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5 in combination, wherein fig. 1 is a schematic structural diagram of a first embodiment of an exhaust energy-saving device for integrated circuit production according to the present invention; FIG. 2 is a flow chart of the air exhaust energy-saving device for producing integrated circuits according to the present invention; fig. 3 is a schematic structural diagram of a second embodiment of the exhaust energy-saving device for integrated circuit production according to the present invention; fig. 4 is a schematic structural diagram of a second embodiment of the exhaust energy-saving device for integrated circuit production according to the present invention; fig. 5 is a schematic structural view of the surface of the filter frame shown in fig. 3.
The utility model provides an integrated circuit production is with energy-saving equipment of airing exhaust.
First embodiment
Referring to fig. 1-2, in a first embodiment of the present invention, an exhaust energy-saving device for integrated circuit production includes: a clean room 1 and a clean room air conditioning unit 2; a testing machine 3, wherein the testing machine 3 is arranged inside the dust-free chamber 1; the cover body 4 is arranged in the dust free chamber 1 and is positioned on the surface of the testing machine 3; one end of the blast pipe 5 is communicated with the air inlet end of the dust-free chamber air conditioning unit 2; and the air exhaust mechanism 6 is arranged in the dust-free chamber 1, and the air exhaust mechanism 6 is respectively communicated with the cover body 4 and the air supply pipe 5.
The exhaust mechanism 6 comprises an exhaust gas collecting pipe 61, an exhaust pump 62, a connecting pipe 63, an exhaust pipe 64 and an exhaust pipe 65, one end of the exhaust pipe 65 is communicated with the cover body 4, the exhaust gas collecting pipe 61 is arranged in the dust-free chamber 1, the bottom of the exhaust pump 62 is fixed on the top of one side of the dust-free chamber 1 through a connecting seat, and one end of the exhaust pipe 64 is communicated with the surface of the blast pipe 5.
One end of the exhaust pipe 64 is communicated with the air outlet end of the air pump 62, and one end of the exhaust pipe 65 is communicated with the surface of the exhaust gas collecting pipe 61.
One end of the connecting pipe 63 is communicated with the air inlet end of the air suction pump 62, and the other end of the connecting pipe 63 is communicated with one end of the air exhaust gas collecting pipe 61.
The air outlet end of the dust-free room air conditioning unit 2 is communicated with a through pipe 7, one end of the through pipe 7 is communicated with one side of the dust-free room 1, the surface of the cover body 4 is provided with an air through hole 8, the air through hole 8 is used for enabling the gas in the dust-free room 1 to enter the cover body 4, and the cover body 4 is used for enabling the gas pumped by the air exhaust mechanism 6 to have the heat emitted by the testing machine 3.
After the hot air is merged into the air supply section of the air conditioning unit 2 of the dust free room, the energy-saving resources are as follows: avoid increasing the new amount of wind and lead to the increase of dust free room air conditioning system fan energy consumption: the wind quantity can be saved by about 50 percent according to the calculation of 6 ten thousand wind quantities of 2 fans (60KW), the energy-saving electric quantity is about 30KWH, the annual cost is 30KWH 24H 365 days 0.75 yuan/KWH 20 ten thousand; the energy consumption of adjusting the temperature and the humidity of the outside air is saved: all the introduced outside air is fresh air, the annual energy consumption cost reaches 200 ten thousand, and after the hot exhaust of the testing machine is merged into the fresh air pipeline, because the quality of the temperature and the humidity of the exhaust air is superior to that of the outside air, the energy consumption for temperature and humidity adjustment is reduced by about 1/4, and the cost is about 50 ten thousand.
The utility model provides an integrated circuit production is with energy-saving equipment's that airs exhaust theory of operation as follows:
when the air-conditioning unit is used, the air pump 62 works to send the gas carrying heat near the testing machine 3 into the air supply pipe 5 through the connecting pipe 63, the air exhaust collecting pipe 61, the air exhaust pipe 64 and the air exhaust pipe 65, and then the gas is sent into the dust-free room air conditioning unit 2 through the air supply pipe 5, the dust-free room air conditioning unit 2 is used for controlling the heat energy requirement, waste is changed into wealth, energy resource loss can be effectively reduced, the energy-saving and emission-reducing effects are achieved, and finally the dust-free room air conditioning unit 2 supplies constant-temperature and constant-humidity gas into the dust-free room 1.
Compared with the prior art, the utility model provides an integrated circuit production is with energy-conserving equipment of airing exhaust has following beneficial effect:
the air carrying heat near the testing machine 3 is sent into the air supply pipe 5 through the connecting pipe 63, the air exhaust collecting pipe 61, the air exhaust pipe 64 and the air exhaust pipe 65 by the working of the air exhaust pump 62, and then is sent into the dust-free chamber air conditioning unit 2 through the air supply pipe 5, the heat energy requirement is controlled by the dust-free chamber air conditioning unit 2, waste is changed into wealth, energy resource loss can be effectively reduced, the energy-saving and emission-reducing effects are achieved, and finally, the dust-free chamber air conditioning unit 2 supplies constant-temperature and constant-humidity air to the dust-free chamber 1.
Second embodiment
Please refer to fig. 3-5 in combination, based on the utility model discloses an integrated circuit production is with energy-saving equipment of airing exhaust that the first embodiment provides, the utility model discloses an integrated circuit production is with energy-saving equipment of airing exhaust that the second embodiment provides, the difference lies in, the one end intercommunication of blast pipe 5 has filter mechanism 9, filter mechanism 9 includes filter frame 91, two U type frames 92, filter 93, air-supply line 94 and chamber door 95, one side of filter frame 91 communicate in the one end of blast pipe 5, two one side that U type frame 92 leaves is fixed in respectively the top and the bottom of the inner wall of filter frame 91, filter 93 sets up in two between one side that U type frame 92 is relative.
One end of the air inlet pipe 94 is communicated with one side of the filter frame 91, the box door 95 is hinged to the surface of the filter frame 91 through a hinge, the air sent into the dust-free room air conditioning unit 2 from the outside can be filtered for the first time through the filter plate 93, large impurities in the air are removed, the cleaning frequency of the dust-free room air conditioning unit 2 can be effectively reduced, the workload of workers is reduced, meanwhile, the box door 95 can be opened to clean the filter frame 91, and the filter plate 93 is convenient to clean and replace.
The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes of the present invention are used in the specification and the attached drawings, or directly or indirectly applied to other related technical fields, and the same principle is included in the protection scope of the present invention.
Claims (7)
1. An energy-saving exhaust device for integrated circuit production, comprising:
a clean room and a clean room air conditioning unit;
the testing machine is arranged inside the dust-free chamber;
the cover body is arranged in the dust-free chamber and is positioned on the surface of the testing machine;
one end of the blast pipe is communicated with the air inlet end of the dust-free chamber air conditioning unit;
and the air exhaust mechanism is arranged in the dust-free room and is respectively communicated with the cover body and the air supply pipe.
2. The exhaust energy-saving device for integrated circuit production according to claim 1, wherein the exhaust mechanism comprises an exhaust gas collecting pipe, an exhaust pump, a connecting pipe, an exhaust pipe and an exhaust pipe, one end of the exhaust pipe is connected to the hood body, the exhaust gas collecting pipe is arranged inside the dust-free chamber, the bottom of the exhaust pump is fixed to the top of one side of the dust-free chamber through a connecting seat, and one end of the exhaust pipe is connected to the surface of the air supply pipe.
3. The exhaust energy-saving device for integrated circuit production according to claim 2, wherein one end of the exhaust duct is communicated with the air outlet end of the exhaust pump, and one end of the exhaust duct is communicated with the surface of the exhaust gas collecting duct.
4. An exhaust energy-saving device for integrated circuit production according to claim 2, wherein one end of the connecting pipe is communicated with the air inlet end of the air pump, and the other end of the connecting pipe is communicated with one end of the exhaust gas collecting pipe.
5. An air exhaust energy-saving device for integrated circuit production according to claim 1, wherein the air outlet end of the air conditioning unit of the dust-free chamber is communicated with a through pipe, one end of the through pipe is communicated with one side of the dust-free chamber, and the surface of the cover body is provided with an air circulation hole.
6. An exhaust energy-saving device for integrated circuit production according to claim 1, wherein one end of the air supply pipe is communicated with a filtering mechanism, the filtering mechanism comprises a filtering frame, two U-shaped frames, a filtering plate, an air inlet pipe and a box door, one side of the filtering frame is communicated with one end of the air supply pipe, the separated sides of the two U-shaped frames are respectively fixed on the top and the bottom of the inner wall of the filtering frame, and the filtering plate is arranged between the two opposite sides of the U-shaped frames.
7. The exhaust energy-saving device for integrated circuit production according to claim 6, wherein one end of the air inlet pipe is communicated with one side of the filter frame, and the box door is hinged to the surface of the filter frame through a hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920704792.9U CN210220157U (en) | 2019-05-17 | 2019-05-17 | Integrated circuit production is with energy-saving equipment of airing exhaust |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920704792.9U CN210220157U (en) | 2019-05-17 | 2019-05-17 | Integrated circuit production is with energy-saving equipment of airing exhaust |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210220157U true CN210220157U (en) | 2020-03-31 |
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ID=69926259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920704792.9U Active CN210220157U (en) | 2019-05-17 | 2019-05-17 | Integrated circuit production is with energy-saving equipment of airing exhaust |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210220157U (en) |
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2019
- 2019-05-17 CN CN201920704792.9U patent/CN210220157U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 230000 in Hefei Comprehensive Bonded Zone, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei xinhuicheng Microelectronics Co.,Ltd. Address before: 230000 in Hefei Comprehensive Bonded Zone, Xinzhan District, Hefei City, Anhui Province Patentee before: Hefei Xinhuicheng Microelectronics Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |