CN101967893A - Purification workshop - Google Patents
Purification workshop Download PDFInfo
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- CN101967893A CN101967893A CN 201010502369 CN201010502369A CN101967893A CN 101967893 A CN101967893 A CN 101967893A CN 201010502369 CN201010502369 CN 201010502369 CN 201010502369 A CN201010502369 A CN 201010502369A CN 101967893 A CN101967893 A CN 101967893A
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Abstract
The invention discloses a purification workshop. The purification workshop comprises a workshop body and an air supply system and is characterized in that: the internal space of the workshop body comprises a working space and a circulating air supply space positioned around the working space; the circulating air supply space comprises an air return area and a static pressure area positioned over the working space; at least two air inlets are reserved at the top of the working space; at least two air outlets are reserved at the bottom of the working space; the air supply system comprises a cooling device, an air cabinet, an air supply pipeline and at least two fan filter units; a cooling water pipe of the cooling device passes through the air cabinet; the air cabinet is connected with the static pressure area through the air supply pipeline; and each air inlet is provided with a fan filter unit. Compared with the prior art, due to the adoption of the fan filter unit (FFU), the purification workshop has the advantages of very flexible system, adjustability at any time, uniform and stable air supply, obvious energy conservation, saved space, seal by negative pressure and no influence on cleanliness when one fan filter unit (FFU) goes wrong.
Description
Technical field
The present invention relates to a kind of structure of factory building, more specifically to a kind of purification factory building.
Background technology
Purify factory building, be meant contaminant exclusion such as airborne particulate, noxious air, bacterium in the certain space scope, and with indoor temperature, cleanliness factor, room pressure, air velocity and air-flow distribution, noise vibration and illumination, Electrostatic Control in a certain range of needs, and give specially designed factory building.That is be no matter how external air conditions changes, it is indoor all to have the characteristic of keeping the performances such as cleanliness factor, humiture and pressure that originally set requirement.Purify the main effect of factory building be to control product (as LCD, silicon etc.) the cleanliness factor and the humiture of contact atmosphere, make product can in a good environment space, produce, make, we are referred to as to purify factory building this space.
As shown in Figure 2, existing purification factory building, comprise room body and air supply system, body middle and upper part, room is provided with ceiling, ceiling with room body 5 ' the inner space be separated into be positioned at the top pipeline space 51 ' and be positioned at the below working space 52 ', working space 52 ' in be typically provided with a plurality of partition walls 7 ', described partition wall 7 ' with working space 52 ' interior space be divided into a plurality of workshops 521 ', partition wall 7 ' adopt usually color steel, the ceiling at each top, workshop all has air intake, the bottom surface all has air outlet, air intake be equipped with filter 4 '.Air supply system comprise wind group 2 ', cooling unit 1 ', a plurality of return air duct 6 ', a plurality of air supply duct 3 ', cooling unit 1 ' cooling water pipe pass wind group 2 ' each wind cabinet, each air supply duct 3 ' inlet connect respectively wind group 2 ' in corresponding wind cabinet, each air supply duct 3 ' outlet connect at least one air intake at 521 ' top, corresponding workshop respectively, each workshop 521 ' the air outlet of bottom surface connect respectively corresponding return air duct 6 ' inlet, each return air duct 6 ' outlet connect wind group 2 ' in corresponding wind cabinet.Cooling unit 1 ' adopt usually cooling-water machine.
But, the shortcoming of above-mentioned technology is that each workshop all needs to adopt color steel to separate, in order to control the blast in different workshops, described each workshop all needs corresponding separately wind cabinet, the return air duct of a correspondence and the air supply duct of a correspondence, controls the blast in corresponding workshop by control wind cabinet.Therefore the steel that expend are very many, and the quantity of required wind cabinet, return air duct and air supply duct is big, and manufacturing cost height, running cost electric energy also very high, that expend is also very many.
Summary of the invention
The objective of the invention is prior art is improved, a kind of purification factory building is provided, can significantly reduce manufacturing cost and running cost, the technical scheme of employing is as follows:
A kind of purification factory building of the present invention, comprise room body and air supply system, it is characterized in that: the inner space of described room body comprises working space and is positioned at working space circulation air-supply space on every side, circulation air-supply space comprises the return air district and is positioned at the static pressure district of working space top, the top of described working space has at least two air intakes, the bottom surface has at least two air outlets, described air supply system comprises cooling unit, the wind cabinet, air supply duct and at least two blower fan filtering units (FFU), the cooling water pipe of cooling unit passes the wind cabinet, the wind cabinet connects the static pressure district by air supply duct, and each air intake is equipped with a blower fan filtering unit.The number that is to say air intake is identical with the number of blower fan filtering unit, and corresponding one by one.
Described return air district also is provided with at least one return air cooling device.Described return air cooling device cools off the return air that air outlet comes out, and it is poor with the wind-warm syndrome of newly sending into to reduce return air, makes the wind of newly sending into mix the back temperature with return air and can obviously not raise.
A kind of preferable scheme, described return air cooling device is a cold water pipes.Cold water pipes connects external cold water.
Described working space is separated at least two workshops, and each workshop includes at least one air intake, at least one air outlet, and one to one blower fan filtering unit identical with the air intake number.
In order to effectively reduce manufacturing cost, described workshop is by soft honest and clean being separated.
The English full name of FFU is Fan Filter Unit, and its Chinese professional term is the blower fan filtering unit.FFU is provided with just, efficient double-filtration net.Blower fan sucks air from the FFU top and filters through first, high efficiency particulate air filter, and the wind speed of the pure air after the filtration about whole outlet air surface is with 0.45 meter per second at the uniform velocity sent.Be applicable to and in various environment, obtain high level clean environment.It is the different size size, and the toilet of different cleaniliness classses, microenvironment provide high-quality pure air.In newly-built toilet, clean room formula transformation renovation, can improve cleanliness class, reduce noise and vibration, also can reduce cost greatly, convenient for installation and maintenance, be the desirable parts of clean environment.
FFU is a high efficiency particulate air filter air outlet that carries ventilator (no shell blower fan), the mode of occupation of FFU is that the wind process wind cabinet processing of newly sending into is sent into to required state point, in the static pressure district, mix after send into indoor after the blower fan pressurization of FFU with return air, flow to the return air district again, after cold treatment, return to the static pressure district at this and finish circulation.Such system is usually used in having the toilet of super quiet requirement the most, as the manufacturing of the manufacturing of LCD (LCD), large-scale IC wafers, most advanced and sophisticated display such as TFT, PDP etc., the manufacturing of hard disk etc.
The present invention's beneficial effect against existing technologies is, because air supply system has adopted FFU, has therefore possessed following advantage:
1, system is very flexible, can adjust at any time.Because the wallboard of toilet is all arranged with the modulus of ceiling grid, and owing to its special joint structure, the wallboard of toilet can be adjusted the position at any time, changes the layout in room with this.If the cleanliness factor in room needs to adjust simultaneously, can realize by the method for increase and decrease FFU quantity.This almost is impossible for the cleaning system of concentrating air-supply usually.
2, air-out is uniform and stable.FFU is owing to carry blower fan, and air-out is evenly stablized.Avoided the problem of each air outlet air balance of concentrated air supply system.The toilet is particularly favourable for vertical way flow.
3, obvious energy conservation.FFU system airduct seldom, except that the wind of newly sending into was sent to by air supply duct, a large amount of return air in operation, had therefore significantly reduced the resistance consumption of airduct in the mode of partial circulating.Because the face wind speed of FFU is generally 0.35～0.45 meter per second, and filter resistance is little, and the no shell power of fan of FFU is very little, and novel FFU has adopted high-efficiency electric motor, simultaneously the draught fan impeller shape is also improved, its overall efficiency greatly improves simultaneously.The cleaning system of blowing in the general comparable aggregate of FFU system is energy-conservation more than 30%, makes the FFU system just can economize the initial cost part that increases (comparing with the cleaning system of concentrating air-supply) return by saving the electricity charge in two, three years.
4, save the space.Since saved huge give, backwind tube, so can save installing space.Reconstruction project for the floor height anxiety is most suitable.Another benefit of bringing shortens the duration because of the airduct little room is spacious relatively.
5, negative-pressure sealing.The static pressure district of FFU air supply system is a negative pressure, even therefore the existence leakage is installed in the air port, also is to leak from the toilet to the static pressure district, can not form the pollution to the toilet.
6, indivedual FFU break down to almost not influence of cleanliness factor.The blower fan quantity of FFU system is big, disperses because of One's name is legion, and common a spot of FFU breaks down, and can not cause serious destruction to cleanliness factor.Even can under the situation that cleanliness factor is not almost had influence, find and repair trouble unit.And concentrate air supply system as long as an AHU breaks down, and will cause large-area toilet out of service, very big to the influence of producing.In nearly all project, all rescue measures proved ineffectual can accomplish backup for refrigerator, air compressor machine, pure water equipment, water pump, vacuum pump, reduces the influence of equipment fault to producing as far as possible.The backup of air treatment system is almost useless only, and the FFU system has then reached this purpose to a certain extent.
Description of drawings
Fig. 1 is the structural representation of the preferred embodiment of the present invention;
Fig. 2 is a prior art constructions schematic diagram of the present invention.
The specific embodiment
As shown in Figure 1, purification factory building in this preferred embodiment, comprise room body 5 and air supply system, the inner space of room body 5 comprises working space 52 and is positioned at working space 52 circulation air-supply space 51 on every side, circulation air-supply space 51 comprises return air district 511 and is positioned at the static pressure district 512 of working space 52 tops, the top of described working space 52 has a plurality of air intakes, and the bottom surface has a plurality of air outlets.Described air supply system comprises cooling unit 1, wind cabinet 2, air supply duct 3 and a plurality of blower fan filtering unit 4 (FFU), the cooling water pipe of cooling unit 1 passes wind cabinet 2, wind cabinet 2 connects static pressure district 512 by air supply duct 3, and each air intake is equipped with a blower fan filtering unit 4.The number that is to say air intake is identical with the number of blower fan filtering unit 4, and corresponding one by one.
Described return air district 511 also is provided with a plurality of return air cooling devices 6.The return air that 6 pairs of air outlets of described return air cooling device come out cools off, and it is poor with the wind-warm syndrome of newly sending into to reduce return air, makes the wind of newly sending into mix the back temperature with return air and can obviously not raise.
Described return air cooling device 6 is a cold water pipes.Cold water pipes connects external cold water.
Described working space 52 is separated into a plurality of workshops 521, and described workshop 521 is separated by soft honest and clean 7.
Introduce the course of work below:
The wind of newly sending into is through wind cabinet 2, device 1 cooling processing that is cooled is to required state point, deliver to static pressure district 512 by air supply duct 3, in static pressure district 512, mix after send in each workshop 521 after the blower fan pressurization of FFU with return air, flow to return air district 511 again, after 6 cold treatments of return air cooling device, return to static pressure district 512 at this and finish circulation.
The above is preferred embodiment of the present invention only, is not to be used for limiting practical range of the present invention; Be all equivalents of being done according to claim scope of the present invention, be claim scope of the present invention and cover.
Claims (5)
1. purification factory building, comprise room body and air supply system, it is characterized in that: the inner space of described room body comprises working space and is positioned at working space circulation air-supply space on every side, circulation air-supply space comprises the return air district and is positioned at the static pressure district of working space top, the top of described working space has at least two air intakes, the bottom surface has at least two air outlets, described air supply system comprises cooling unit, the wind cabinet, air supply duct and at least two blower fan filtering units, the cooling water pipe of cooling unit passes the wind cabinet, the wind cabinet connects the static pressure district by air supply duct, and each air intake is equipped with a blower fan filtering unit.
2. purification factory building as claimed in claim 1 is characterized in that: described return air district also is provided with at least one return air cooling device.
3. purification factory building as claimed in claim 2 is characterized in that: described return air cooling device is a cold water pipes.
4. purification factory building as claimed in claim 3, it is characterized in that: described working space is separated at least two workshops, and each workshop includes at least one air intake, at least one air outlet, and one to one blower fan filtering unit identical with the air intake number.
5. purification factory building as claimed in claim 4 is characterized in that: described workshop is by soft honest and clean being separated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010502369 CN101967893A (en) | 2010-10-11 | 2010-10-11 | Purification workshop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010502369 CN101967893A (en) | 2010-10-11 | 2010-10-11 | Purification workshop |
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| CN101967893A true CN101967893A (en) | 2011-02-09 |
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| CN 201010502369 Pending CN101967893A (en) | 2010-10-11 | 2010-10-11 | Purification workshop |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105863315A (en) * | 2015-01-23 | 2016-08-17 | 重庆建工住宅建设有限公司 | High-cleanness plant construction process |
| CN106556085A (en) * | 2016-12-06 | 2017-04-05 | 惠科股份有限公司 | Clean room workshop and airflow adjusting method for clean room workshop |
| CN109061270A (en) * | 2018-08-13 | 2018-12-21 | 安徽诚意电气科技有限公司 | A kind of Intelligent central metal armouring withdrawing voltage sensing |
| CN112797551A (en) * | 2019-10-24 | 2021-05-14 | 夏泰鑫半导体(青岛)有限公司 | Air control cabinet module, clean room system and method for improving air quality of clean room |
| CN114137892A (en) * | 2021-11-26 | 2022-03-04 | 深圳市华净科技有限公司 | Air filter unit comprehensive control method, system and device and computer readable storage medium |
| CN114353201A (en) * | 2022-01-17 | 2022-04-15 | 中汽创智科技有限公司 | Low dew point toilet dehumidification system |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004184010A (en) * | 2002-12-05 | 2004-07-02 | Sony Corp | Clean room |
| JP2006308208A (en) * | 2005-04-28 | 2006-11-09 | Sanki Eng Co Ltd | Clean room device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105863315A (en) * | 2015-01-23 | 2016-08-17 | 重庆建工住宅建设有限公司 | High-cleanness plant construction process |
| CN106556085A (en) * | 2016-12-06 | 2017-04-05 | 惠科股份有限公司 | Clean room workshop and airflow adjusting method for clean room workshop |
| CN106556085B (en) * | 2016-12-06 | 2019-05-24 | 惠科股份有限公司 | Clean room workshop and airflow adjusting method for clean room workshop |
| US11378291B2 (en) | 2016-12-06 | 2022-07-05 | HKC Corporation Limited | Clean room and method for regulating airflow of clean room |
| CN109061270A (en) * | 2018-08-13 | 2018-12-21 | 安徽诚意电气科技有限公司 | A kind of Intelligent central metal armouring withdrawing voltage sensing |
| CN112797551A (en) * | 2019-10-24 | 2021-05-14 | 夏泰鑫半导体(青岛)有限公司 | Air control cabinet module, clean room system and method for improving air quality of clean room |
| CN114137892A (en) * | 2021-11-26 | 2022-03-04 | 深圳市华净科技有限公司 | Air filter unit comprehensive control method, system and device and computer readable storage medium |
| CN114353201A (en) * | 2022-01-17 | 2022-04-15 | 中汽创智科技有限公司 | Low dew point toilet dehumidification system |
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Application publication date: 20110209 |