CN210176942U

CN210176942U - Cathode fixing improved structure of magnetron sputtering winding film plating machine

Info

Publication number: CN210176942U
Application number: CN201920945719.0U
Authority: CN
Inventors: Lei Ding; 丁磊; Xiaozhe Li; 李晓哲
Original assignee: Xiamen Yu Tong Photoelectric Co Ltd
Current assignee: Xiamen Yu Tong Photoelectric Co Ltd
Priority date: 2019-06-22
Filing date: 2019-06-22
Publication date: 2020-03-24
Anticipated expiration: 2029-06-22

Abstract

The utility model discloses a fixed improvement structure of magnetron sputtering coiling coating machine negative pole, including shield cover, magnet and target, magnet and shield cover are fixed through a plurality of fastening of taking the thread nut, take the thread nut to squeeze into upwards and extend to the magnet middle part from the shield cover bottom, take the thread nut outside and be equipped with the thread, inside is equipped with the internal thread, the target is located in the shield cover and is located magnet, target and magnet are fixed through a plurality of fastening screw, fastening screw quantity is unanimous with taking the thread nut, fastening screw twists downwards from the target top and extends to taking the thread nut in, the external screw thread of fastening screw bottom matches completely with the internal thread of taking the thread nut inside; the shielding cover and the magnet are fastened through the nut with the rolling teeth, the rolling teeth generate large friction force, the shielding cover is not easy to loosen and fall off when being detached and replaced, the whole device is not required to be detached, the replacement is simple and efficient, the time and the labor are saved, the labor intensity is low, the labor cost is low, and the device is not easy to bruise and injure the potential safety hazard.

Description

Cathode fixing improved structure of magnetron sputtering winding film plating machine

Technical Field

The utility model belongs to the coating equipment auxiliary member field, in particular to improvement structure is fixed to easy operation is simple and direct, labour saving and time saving's magnetron sputtering coiling coating machine negative pole.

Background

The negative pole of magnetron sputtering coiling coating machine includes the shield cover, magnet and target, different targets are used to the membrane of difference when in-service use, consequently, need carry out the target and change, current negative pole is fixed that shield cover and magnet pass through plain noodles nut and bolt fastening, unscrew the bolt shield cover when changing the target and can produce not hard up the drop, in order to prevent that the shield cover is not hard up to drop the damage, will all dismantle the three when the target is changed, certain operation requirement can be satisfied to this kind of mode that wholly dismantles, but also there is great defect, shield cover and magnet are very heavy, it is very troublesome to dismantle, need the cooperation of a plurality of workman, waste time and energy, intensity of labour is big, the cost of labor is high, change inefficiency, it damages to bump easily, it has great potential safety hazard to smash to injure.

The to-be-solved technical problem of the utility model is to provide a shield cover is difficult not hard up to drop and need not pull down, change simple efficient, labour saving and time saving, the little low in labor cost of intensity of labour, difficult bruising smash the fixed improvement structure of magnetron sputtering coiling coating machine negative pole that the potential safety hazard is little.

SUMMERY OF THE UTILITY MODEL

For solving above-mentioned prior art shield cover easily not hard up drop need pull down, pull down troublesome inconvenient, waste time and energy, the big cost of labor of intensity of labour is high, change inefficiency, easily bump to hinder and injure by a crashing object and have great potential safety hazard scheduling problem, the utility model discloses a following technical scheme:

the utility model provides a cathode fixing improved structure of a magnetron sputtering winding film plating machine, which comprises a shielding cover, a magnet and a target material, the two sides of the bottom of the shielding cover are symmetrically and respectively provided with a fixing screw, the shielding cover is fixed on a mounting plate of a magnetron sputtering winding coating machine through the fixing screws, the magnet is arranged in the shielding cover and is fastened and fixed through a plurality of screw caps with the rolling teeth, the screw caps with the rolling teeth are driven upwards from the bottom of the shielding cover and extend to the middle part of the magnet, the screw cap with the thread is provided with the thread outside and an internal thread inside, the target material is arranged in the shielding case and positioned on the magnet, the target material and the magnet are fixed through a plurality of fastening screws, the number of the fastening screws is consistent with that of the nuts with the rolling teeth, the fastening screw is screwed downwards from the top of the target and extends into the screw cap with the thread rolling, and the external thread at the bottom of the fastening screw is completely matched with the internal thread inside the screw cap with the thread rolling.

As an improvement of the present invention, the number of the nuts with rolling teeth is more than four and is an even number.

The beneficial effects of the utility model reside in that: the shielding cover and the magnet are fastened through the nut with the rolling teeth, the rolling teeth generate large friction force, the shielding cover is not easy to loosen and fall off when being detached and replaced, the whole device is not required to be detached, the replacement is simple and efficient, the time and the labor are saved, the labor intensity is low, the labor cost is low, and the device is not easy to bruise and injure the potential safety hazard.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of the present invention.

Detailed Description

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

Referring to fig. 1, an improved cathode fixing structure of a magnetron sputtering winding film plating machine comprises a shielding case 1, a magnet 2 and a target 3, wherein fixing screws 11 are symmetrically arranged on two sides of the bottom of the shielding case 1 respectively, the shielding case 1 is fixed on a mounting plate of the magnetron sputtering winding film plating machine through the fixing screws 11, the magnet 2 is arranged in the shielding case 1 and is fastened and fixed through a plurality of nuts 21 with rolling teeth, the nuts 21 with rolling teeth are driven upwards from the bottom of the shielding case 1 and extend to the middle part of the magnet 2, rolling teeth are arranged outside the nuts 21 with rolling teeth, internal threads are arranged inside the nuts, the target 3 is arranged in the shielding case 1 and is positioned on the magnet 2, the target 3 and the magnet 2 are fixed through a plurality of fastening screws 31, the number of the fastening screws 31 is consistent with that of the nuts 21 with rolling teeth, the fastening screws 31 are screwed downwards from the top of the target 3 and extend into the nuts 21 with rolling, the external thread at the bottom of the fastening screw rod 31 is completely matched with the internal thread inside the nut 21 with the rolling teeth, the rolling teeth can generate large friction force, so that the shielding case is not easy to loosen and fall off, the target can be directly replaced, and the operation is simple and convenient.

Wherein, the number of the screw nuts 21 with rolling teeth is more than four and is even.

The above embodiments and drawings are not intended to limit the form and style of the present invention, and any suitable changes or modifications made by those skilled in the art should not be construed as departing from the scope of the present invention.

Claims

1. The utility model provides a fixed improvement structure of magnetron sputtering winding coating machine negative pole which characterized in that: including shield cover (1), magnet (2) and target (3), shield cover (1) bottom bilateral symmetry is equipped with set screw (11) respectively, shield cover (1) is fixed on the mounting panel of magnetron sputtering coiling coating machine through set screw (11), magnet (2) set up in shield cover (1) and through a plurality of belt roller nut (21) fastening fixed, belt roller nut (21) upwards squeeze into and extend to magnet (2) middle part from shield cover (1) bottom, belt roller nut (21) outside is equipped with roller tooth, inside is equipped with the internal thread, target (3) are located in shield cover (1) and are located magnet (2), target (3) are fixed through a plurality of fastening screw (31) with magnet (2), fastening screw (31) quantity is unanimous with belt roller nut (21), fastening screw (31) are twisted the nut from target (3) top downwards and extend to belt roller nut (21) in, fastening screw (31) are twisted into from target (3) top And the external thread at the bottom of the fastening screw rod (31) is completely matched with the internal thread inside the screw cap with the thread rolling (21).

2. The improved cathode fixing structure of the magnetron sputtering winding film plating machine as claimed in claim 1, wherein: the number of the screw nuts (21) with the rolling teeth is more than four and is even.