CN210173537U

CN210173537U - Marking device of automatic probe station

Info

Publication number: CN210173537U
Application number: CN201921101953.1U
Authority: CN
Inventors: Zhaoman Liu; 刘召满
Original assignee: Chengdu Sino Tech Integrated Technology Co Ltd
Current assignee: Chengdu Sino Tech Integrated Technology Co Ltd
Priority date: 2019-07-15
Filing date: 2019-07-15
Publication date: 2020-03-24
Anticipated expiration: 2029-07-15

Abstract

The utility model discloses an automatic mark device of probe station, including installing the workstation at the probe bench, set up the mark subassembly in the workstation top, the mark subassembly is including the mount of dotting mark spare, test probe and being used for fixed test probe, the dotting mark spare is including probe, pressure sensor, mark probe, the dotting mark spare is provided with at least 3, test probe with the matching of dotting mark spare one by one, each distance between test probe and the mark probe is the length of a piece that awaits measuring. The utility model discloses can solve traditional mark device, to the needle difficulty, and a to one to the needle mode, influence work efficiency's problem.

Description

Marking device of automatic probe station

Technical Field

The utility model belongs to the technical field of the probe station, especially, relate to an automatic marking device of probe station.

Background

The full-automatic probe station is mainly applied to the quality test of semiconductor industry, photoelectric industry, integrated circuits and electronic components. Along with the development of science and technology, electronic components's volume is littleer and more, integrates a plurality of electronic components on a slice shape bottom plate in order to form the piece that awaits measuring usually, makes things convenient for follow-up the detection. The automatic probe station is special equipment for semiconductor test, and a probe is used for contacting a specific point on a wafer to perform probe test; the precondition for the probes to contact specific points on the wafer requires manual or automatic one-to-one correspondence of the two.

The traditional alignment mode that a traditional alignment system adopts manual observation through a microscope to control a movable working platform to enable specific points on a wafer to correspond to probes on a probe card above the wafer one by one (the probe card is arranged above the working platform, and the microscope is arranged above the probe card) is adopted, because the field of view of the microscope is limited, the probe card with more probe distribution is difficult to align, the accuracy and the contact height of the probe are completely manually controlled, the efficiency is low, and when a test piece is marked, only one probe marks one test piece and then marks the next test piece, therefore, the low working efficiency is influenced, and the production cost is increased.

Disclosure of Invention

The utility model aims to provide a: to above-mentioned traditional mark device, to the needle difficulty, and a to one to the needle mode, influenced work efficiency's problem, the utility model provides an automatic mark device of probe station.

The utility model adopts the technical scheme as follows:

the utility model provides an automatic mark device of probe station, is including installing the workstation on the probe station, sets up the mark subassembly in the workstation top, the mark subassembly is including marking piece, test probe and the mount that is used for fixed test probe of dotting, marking piece includes probe, pressure sensor, mark probe, marking piece is provided with 3 at least, test probe with marking piece one-to-one matching, each is beaten to the point distance between test probe and the mark probe is the length of a piece that awaits measuring.

The working principle is as follows: when the utility model is used, a to-be-tested piece placing area is arranged on the workbench corresponding to the marking assembly, after the to-be-tested piece is placed, the marking device marks the to-be-tested piece, a plurality of marking pieces are arranged, a plurality of to-be-tested pieces can be tested simultaneously and transmitted to the connected test equipment, if the to-be-tested pieces are all qualified, the workbench moves the distance corresponding to the plurality of to-be-tested pieces, the marking pieces do not act, and then the next group of tests are carried out; if the first chip of the piece to be tested is unqualified in test, the moving distance of the workbench is the distance of a single piece to be tested, the test program is not tested, and only the dotting action is carried out and then the next group of tests are carried out by moving the distance of one piece to be tested; if the second piece to be tested is not qualified, the moving distance of the workbench is the distance between the two pieces to be tested, the test program is not moved, and the dotting action is carried out while the test probe carries out the next group of tests; if a plurality of pieces to be tested are unqualified in simultaneous test, the workbench moves by the distance of one piece to be tested, the marking probe is used for dotting, the program is not tested, and then the workbench moves by the distance of one piece to be tested to dotting a second piece to be tested; simultaneously carrying out the next group of tests by the test probes; because the product test yield is more than 98%, the whole equipment operation efficiency is hardly influenced by the program judgment time in the whole motion process. Meanwhile, in the test process, data are transmitted to an externally connected computer through the contact height between the workbench and the probe and the contact height between the piece to be tested and the probe, and the height difference between the workbench and the probe is calculated so as to calculate the thickness of a product and ensure that the probe is in good contact with the piece to be tested; the reliability of the whole marking device is improved, and in addition, the probe is connected with an external high-power lens, so that the imaging definition is high, and the precise positioning marking is realized.

Preferably, the dotting marker is provided with 6 dotting markers. Through setting up a plurality of mark pieces of dotting, can mark a plurality of pieces of awaiting measuring simultaneously and dotting, avoided one-to-one to the needle mode of dotting to the job schedule has been accelerated, has improved work efficiency.

Preferably, a plurality of the dotting markers are arranged at equal intervals. The workbench is provided with a marking assembly to be detected and a placing area, a plurality of marking assemblies are arranged at equal intervals, so that the probe table can conveniently regulate and control the marking device, the to-be-detected parts can be accurately aligned, and the marking accuracy is improved.

In a preferred embodiment, the diameter of the labeled probe is 1mm to 2 mm.

Preferably, the probe is provided with a knob for adjusting the position of the marking probe.

Preferably, the knob includes an X-direction knob, a Y-direction knob, and a Z-direction knob for adjusting three directional positions of the marking probe, respectively. The marking probe is positioned right above the piece to be detected by adjusting the X-direction knob and the Y-direction knob; when the piece to be detected needs to be marked, the Z-direction knob is adjusted to enable the marking probe to move downwards to be in contact with the surface of the piece to be detected, and then marking can be finished; when a next piece to be tested needs to be tested, the probe is always positioned right above the piece to be tested, and the X-direction knob and the Y-direction knob do not need to be adjusted, so that the marking device can be better matched with the piece to be tested for needle alignment.

To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:

1. the marking device of the utility model, through setting the marking component, can mark the piece to be measured simply and conveniently, has high accuracy, can mark quickly and efficiently, can realize precise positioning marking, has high reliability and improves the working efficiency;

2. the utility model discloses a plurality of mark pieces of dotting are set up, can mark to a plurality of pieces to be measured simultaneously and dotting, have avoided one-to-one to the needle mode of dotting to quicken the job schedule, improved work efficiency;

3. the workbench is provided with a placing area for the to-be-detected part corresponding to the marking assembly, and the plurality of dotting marking parts are arranged at equal intervals, so that the probe table can conveniently regulate and control the marking device, the to-be-detected part can be accurately aligned, and the marking accuracy is improved;

4. the utility model makes the marking probe be positioned right above the piece to be measured by adjusting the X-direction knob and the Y-direction knob; when the piece to be detected needs to be marked, the Z-direction knob is adjusted to enable the marking probe to move downwards to be in contact with the surface of the piece to be detected, and then marking can be finished; when a next piece to be tested needs to be tested, the probe is always positioned right above the piece to be tested, and the X-direction knob and the Y-direction knob do not need to be adjusted, so that the marking device can be better matched with the piece to be tested for needle alignment.

Drawings

The invention will now be described, by way of example, with reference to the accompanying drawings, in which:

fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a plan view of the present invention.

Reference numerals: 1-knob, 2-dotting marking piece, 201-probe, 202-pressure sensor, 203-marking probe, 3-testing probe, 4-fixing frame and 5-working table.

Detailed Description

All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.

The present invention will be described in detail with reference to fig. 1 and 2.

Example 1

The utility model provides an automatic mark device of probe station, is including installing workstation 5 on the probe station, sets up the mark subassembly in workstation 5 top, the mark subassembly is including marking 2, test probe 3 and being used for fixed test probe 3's mount 4, marking 2 includes probe 201, pressure sensor 202, mark probe 203, marking 2 is provided with 3 at least, test probe 3 with marking 2 matches one by one, each distance between test probe 3 and the mark probe 203 is the length of a piece that awaits measuring.

The working principle is as follows: when the utility model is used, a to-be-tested piece placing area is arranged on the workbench 5 corresponding to the marking assembly, after the to-be-tested piece is placed, the marking device marks the to-be-tested piece, a plurality of marking pieces 2 are arranged, a plurality of to-be-tested pieces can be tested at the same time and transmitted to the connected testing equipment, if the to-be-tested pieces are all qualified, the workbench 5 moves the distance of the corresponding to-be-tested pieces, the marking pieces 2 do not move, and then the next group of tests are carried out; if the first chip of the piece to be tested is unqualified in test, the moving distance of the workbench 5 is the distance of a single piece to be tested, the test program is not tested, and only the dotting action is carried out and then the next group of tests are carried out by moving the distance of one piece to be tested; if the second piece to be tested is not qualified, the moving distance of the workbench 5 is the distance between the two pieces to be tested, the test program is not moved, the dotting action is carried out, and the test probe 3 carries out the next group of tests; if a plurality of pieces to be tested are unqualified in simultaneous test, the workbench 5 moves by the distance of one piece to be tested, the marking probe 203 performs dotting, the program does not perform test, and then moves by the distance of one piece to be tested to perform dotting on a second piece to be tested; simultaneously, the test probe 3 carries out the next group of tests; because the product test yield is more than 98%, the whole equipment operation efficiency is hardly influenced by the program judgment time in the whole motion process. Meanwhile, in the testing process, after the contact height of the workbench 5 and the probe 201 and the contact height of the piece to be tested and the probe 201 are sensed by the pressure sensor 202, data are transmitted to an externally connected computer, the height difference between the two is calculated, so that the thickness of a product is calculated, and the probe is ensured to be in good contact with the piece to be tested; the reliability of the whole marking device is improved, and in addition, the probe 201 is connected with an external high-power lens, so that the imaging definition is high, and the precise positioning marking is realized.

Example 2

On the basis of embodiment 1, the number of the dot markers 2 is 6. Through setting up a plurality of mark pieces of dotting 2, can mark a plurality of pieces of awaiting measuring simultaneously and dotting, avoided one-to-one to the needle mode of dotting to the job schedule has been accelerated, has improved work efficiency.

Example 3

On the basis of embodiment 2, a plurality of the dotting markers 2 are arranged at equal intervals. The last correspondence of workstation 5 the mark subassembly is provided with the waiting to measure and places the district, through setting up a plurality of 2 equidistances of marking part of dotting, makes things convenient for probe platform to marking device's regulation and control, is convenient for carry out more accurate to the waiting to measure and aims at, has improved the precision of mark.

Example 4

In example 1, the diameter of the labeled probe 203 is 1mm to 2 mm.

Example 5

In addition to embodiment 1, the probe 201 is provided with a knob 1 for adjusting the position of the marking probe 203.

Example 6

On the basis of the embodiment 5, the rotary knob 1 includes an X-direction rotary knob, a Y-direction rotary knob, and a Z-direction rotary knob which adjust three directional positions of the marking probe 203, respectively. The marking probe 203 is positioned right above the piece to be detected by adjusting the X-direction knob and the Y-direction knob; when the piece to be detected needs to be marked, the Z-direction knob is adjusted to enable the marking probe 203 to move downwards to be in contact with the surface of the piece to be detected, and then marking can be finished; when a next piece to be tested needs to be tested, the probe is always positioned right above the piece to be tested, and the X-direction knob and the Y-direction knob do not need to be adjusted, so that the marking device can be better matched with the piece to be tested for needle alignment.

Claims

1. The utility model provides an automatic mark device of probe platform, is including installing workstation (5) on the probe platform, sets up the mark subassembly in workstation (5) top, a serial communication port, the mark subassembly is including marking mark spare (2), test probe (3) and being used for fixed test probe (3) mount (4), mark spare (2) are including probe (201), pressure sensor (202), the mark probe (203) that connect gradually, mark spare (2) are provided with at least 3, test probe (3) with mark spare (2) are marked and are matched one by one, each distance between test probe (3) and mark probe (203) is the length of a piece that awaits measuring.

2. The marking device of an automated probe station according to claim 1, characterized in that 6 dotting markers (2) are provided.

3. A marking device for an automated probe station according to claim 2, characterized in that a plurality of said dotting markers (2) are arranged equidistantly.

4. The marking device of an automated probe station according to claim 1, wherein the marking probe (203) has a diameter of 1mm to 2 mm.

5. The marking device of an automatic probe station according to claim 1, characterized in that the probe head (201) is provided with a knob (1) for adjusting the position of the marking probe (203).

6. The marking device of an automatic probe station according to claim 5, characterized in that the knob (1) comprises an X-direction knob, a Y-direction knob and a Z-direction knob for respectively adjusting the three directional positions of the marking probe (203).