CN210166211U - Multifunctional wafer shearing force testing machine - Google Patents
Multifunctional wafer shearing force testing machine Download PDFInfo
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- CN210166211U CN210166211U CN201920969650.5U CN201920969650U CN210166211U CN 210166211 U CN210166211 U CN 210166211U CN 201920969650 U CN201920969650 U CN 201920969650U CN 210166211 U CN210166211 U CN 210166211U
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Abstract
The utility model discloses a multi-functional wafer shear force test machine relates to the microelectronics testing arrangement field. The device comprises a base, a supporting seat, a supporting pile arranged between the base and the supporting seat, a testing arm, an observer, a displacement platform, a display screen, a spotlight and a data processing module arranged in a testing machine, wherein the testing arm is arranged on the base; the base is provided with a support rod, a sliding ring is sleeved on the support rod, a support plate is horizontally arranged on the sliding ring, one end of the support plate is provided with an observer, the other end of the support plate is provided with a display screen, and the display screen is connected with the support plate through a rotating mechanism; the base is further provided with a displacement platform, a displacement mechanism is arranged on the displacement platform, the bottom end of the displacement mechanism is provided with a sliding foot, the sliding foot and the displacement platform are connected through a sliding clamp, and the top end of the displacement mechanism further comprises a placing platform; the support pile is internally provided with a hydraulic lifting mechanism, and the side wall of the support pile is provided with a spot lamp fixedly connected through a metal hose.
Description
Technical Field
The utility model relates to a microelectronics testing arrangement field, in particular to multi-functional wafer shear force test machine.
Background
The wafer shearing force tester is a special dynamic testing instrument used in the fields of microelectronic packaging, PCBA electronic assembly manufacturing and failure analysis, and is important instrument equipment in the fields of microelectronic and electronic manufacturing for promoting domestic development. The device has the advantages of rapid and accurate test, wide application range and high test precision, is suitable for semiconductor IC packaging test, LED packaging test, optoelectronic device packaging test, PCBA electronic assembly test, automotive electronics, aerospace, military industry and the like, and can be used for tension test, press test, thrust test, peeling test, rolling test, distance measurement and the like.
The traditional wafer shearing force testing machine has the advantages of single testing function, inflexible movement of a testing arm, inaccurate testing result, complex testing operation and no consideration for details of working habits in use.
Disclosure of Invention
The utility model aims to provide a: a multifunctional wafer shear force testing machine is provided, which can test various push-pull forces and shear forces, and has a simple, convenient and effective operation mode. The utility model discloses having attached the display screen, having made the experiment test process more humanized, the display screen passes through rotary mechanism joint support, and rotary mechanism can make the display screen realize the displacement in the three-dimensional space to rotary mechanism's support intensity can support the quality of display screen completely. The utility model discloses having attached the shot-light, having satisfied the demand to light among the experimental test process, the illumination intensity of this shot-light is controllable, when need not use the shot-light to provide the light source, can hold in the palm the shot-light clamp in the clamp, is convenient for accomodate.
The utility model adopts the technical scheme as follows:
the multifunctional wafer shearing force testing machine comprises a base, a supporting seat, a supporting pile arranged between the base and the supporting seat, a testing arm, an observer, a displacement platform, a display screen, a spotlight and a data processing module arranged in the testing machine, wherein the data processing module is electrically connected with the display screen;
the base is provided with a support rod, a sliding ring is sleeved on the support rod, a support plate is horizontally arranged on the sliding ring, one end of the support plate is provided with an observer, the other end of the support plate is provided with a display screen, the display screen is connected with the support plate through a rotating mechanism, and the sliding ring is further provided with a manual lifting wrench;
the base is further provided with a displacement platform, a displacement mechanism is arranged on the displacement platform, a sliding foot is arranged at the bottom end of the displacement mechanism and connected with the displacement platform through a sliding clamp, the top end of the displacement mechanism further comprises a placing platform, and a chip clamp is further arranged on the placing platform;
the support pile is internally provided with a hydraulic lifting mechanism, and the side wall of the support pile is provided with a spot lamp fixedly connected through a metal hose.
Traditional wafer shear force test machine during operation need connect peripheral hardware computer equipment to realize experimental data's output and the input of controlling the instruction, the utility model discloses a multi-functional wafer shear force tester has set up the display screen of connecting on equipment to this display screen passes through rotary mechanism and is connected with the backup pad, and rotary mechanism can make the display screen realize the displacement in the three-dimensional space, and rotary mechanism's support intensity can support the quality of display screen completely. In consideration of the requirement on light in the experimental process, the spotlight is arranged, the illumination intensity of the spotlight is controllable, and the spotlight is connected with the metal hose of the spotlight, can be bent freely and can support the fixation of the spotlight at a required position; when the spotlight is not needed to provide a light source, the spotlight can be clamped on the clamp support, so that the spotlight is convenient to store; the supporting plate is also provided with a file folder for a user to conveniently clamp file data and the like.
Further, the support pile comprises an upper part and a lower part, the upper part and the lower part are connected through a lifting rod, and the lifting rod extends into the lower part and is connected with a hydraulic lifting mechanism arranged in the lower part. The utility model discloses the height of supporting seat is changed to the hydraulic pressure elevating system in the accessible support stake.
Furthermore, a hoop support is further arranged on the side wall of the support pile, a groove is formed in the hoop support, and the radial width of the groove is larger than that of the metal hose and smaller than that of the spotlight; the distance from the hoop support to the root of the metal hose is matched with the length of the metal hose. When the spotlight is not needed to be used for providing a light source, the spotlight hoop can be clamped on the hoop support, and the spotlight hoop is convenient to store.
Furthermore, rotary mechanism includes horizontal rotation mechanism and vertical rotary mechanism, and wherein horizontal rotation mechanism sets up in the backup pad, and vertical rotary mechanism's one end is connected in horizontal rotation mechanism's pivot, and the other end is connected the display screen.
The horizontal rotating mechanism of the utility model needs to be vertically installed and is internally provided with a rotating shaft, and the rotating shaft can rotate by taking the central axis of the rotating shaft as an axis, thereby realizing the displacement of the display screen in the horizontal direction; one end of the vertical rotating mechanism is connected with the rotating shaft of the horizontal rotating mechanism, and the other end of the vertical rotating mechanism, namely the rotating shaft of the vertical rotating mechanism, is connected with the display screen, so that the displacement of the display screen in the vertical direction is realized.
Furthermore, a folder is arranged on the supporting plate.
Furthermore, the test arm is arranged on a test device seat, the test device seat is fixed at two ends of the supporting seat, a multi-shaft linkage device is arranged at the top end of the test device seat, a limiting device is arranged at the tail end of the multi-shaft linkage device, and the test device further comprises an annular clamp part which can be fixed on the limiting device in a sliding manner; the tail end of the annular clamp piece is provided with a test needle.
The test arm of the utility model can realize the movement of the test needle in the three-dimensional space through the multi-axis linkage device, and meet the requirements of various test functions of the wafer shearing force test machine in the use process; the multi-axis linkage device mainly comprises a rotation adjusting device in the horizontal direction and a rotation adjusting device in the vertical direction, and is controlled by a control system in a linkage mode. In addition, the test needle fixed at the tail end of the annular hoop piece can be replaced, and the test needle with different needle heads can be replaced according to tests with different requirements; and the annular through groove on the annular hoop piece can slide along the limiting device, and after the annular through groove slides to a proper position, the annular hoop piece can be fixed by screwing the clamping piece on the limiting device.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model relates to a multi-functional wafer shear force test machine can carry out various push-pull power and shear force test to the mode of operation is simple and easy, convenient, effective.
2. The utility model relates to a multi-functional wafer shear force test machine has attached the display screen, makes the experiment test process more humanized, and the display screen passes through rotary mechanism joint support, and rotary mechanism can make the display screen realize the displacement in the three-dimensional space to rotary mechanism's support intensity can support the quality of display screen completely.
3. The utility model relates to a multi-functional wafer shear force test machine has attached the shot-light, has satisfied the demand to light among the experimental test process, and the illumination intensity of this shot-light is controllable, when need not use the shot-light to provide the light source, can hold in the palm the shot-light clamp in the clamp, is convenient for accomodate.
Drawings
The invention will now be described, by way of example, with reference to the accompanying drawings, in which:
fig. 1 is a schematic view of the present invention;
FIG. 2 is a schematic view of a display screen of the present invention;
fig. 3 is a schematic view of the spot light and the support pile of the present invention;
fig. 4 is a schematic view of a test arm of the present invention;
in the figure, 1-base, 2-supporting base, 3-supporting pile, 31-spot light, 32-upper part, 33-lower part, 34-lifting rod, 35-hoop support, 4-supporting rod, 41-sliding ring, 411-manual lifting wrench, 42-supporting plate, 43-file folder, 5-testing arm, 51-testing needle, 52-testing device base, 53-multi-axis linkage device, 54-limiting device, 55-annular hoop member, 6-observation instrument, 7-displacement platform, 8-displacement mechanism, 81-placing platform, 82-sliding foot, 9-display screen, 91-rotating mechanism, 92-horizontal rotating mechanism and 93-vertical rotating mechanism.
Detailed Description
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The present invention will be described in detail with reference to fig. 1 to 4.
Example 1
A multifunctional wafer shearing force testing machine, as shown in fig. 1 to 4, comprises a base 1, a supporting base 2, a supporting pile 3 arranged between the base 1 and the supporting base 2, a testing arm 5, an observer 6, a displacement platform 7, a display screen 9, a spotlight 31, and a data processing module arranged in the testing machine, wherein the data processing module is electrically connected with the display screen 9;
a support rod 4 is arranged on the base 1, a sliding ring 41 is sleeved on the support rod 4, a support plate 42 is horizontally arranged on the sliding ring 41, an observation instrument 6 is arranged at one end of the support plate 42, a display screen 9 is arranged at the other end of the support plate 42, the display screen 9 is connected with the support plate 42 through a rotating mechanism 91, and a manual lifting wrench 411 is further arranged on the sliding ring 41;
the base 1 is further provided with a displacement platform 7, the displacement platform 7 is provided with a displacement mechanism 8, the bottom end of the displacement mechanism 8 is provided with a sliding foot 82, the sliding foot 82 is connected with the displacement platform 7 through a sliding clamp, the top end of the displacement mechanism 8 further comprises a placing platform 81, and the placing platform 81 is further provided with a chip clamp;
be equipped with hydraulic pressure elevating system in the support stake 3, be provided with shot-light 31 through metal collapsible tube fixed connection on the 3 lateral walls of support stake.
Example 2
The present embodiment is different from embodiment 1 in that:
the support pile 3 comprises an upper part 32 and a lower part 33, the upper part 32 and the lower part 33 are connected through a lifting rod 34, and the lifting rod 34 extends into the lower part 33 and is connected with a hydraulic lifting mechanism arranged in the lower part 33. The utility model discloses the hydraulic pressure elevating system in the accessible support stake 3 changes the height of supporting seat 2.
Example 3
The present embodiment is different from embodiment 1 in that:
a hoop support 35 is further arranged on the side wall of the support pile 3, a groove is formed in the hoop support 35, and the radial width of the groove is larger than that of the metal hose and smaller than that of the spot lamp 31; the distance from the hoop support 35 to the root of the metal hose is matched with the length of the metal hose.
In consideration of the requirement on light in the experimental process, the spotlight 31 is arranged, the illumination intensity of the spotlight 31 is controllable, and the metal hose connected with the spotlight 31 can be bent freely and can support the spotlight 31 to be fixed at a required position; when the spotlight 31 is not needed to be used for providing a light source, the spotlight 31 can be clamped on the clamp support 35, and the storage is convenient.
Example 4
The present embodiment is different from embodiment 1 in that:
the rotating mechanism 91 comprises a horizontal rotating mechanism 92 and a vertical rotating mechanism 93, wherein the horizontal rotating mechanism 92 is arranged on the supporting plate 42, one end of the vertical rotating mechanism 93 is connected to a rotating shaft of the horizontal rotating mechanism 92, and the other end of the vertical rotating mechanism 93 is connected with the display screen 9.
The utility model discloses a multi-functional wafer shear force tester has set up the display screen 9 of connecting on equipment to this display screen passes through rotary mechanism 91 and is connected with backup plate 42, and rotary mechanism 91 can make the displacement in the display screen 9 realization three-dimensional space, and rotary mechanism 91's support intensity can support the quality of display screen 9 completely. In addition, the horizontal rotating mechanism 92 needs to be vertically installed and is internally provided with a rotating shaft, and the rotating shaft can rotate by taking the central axis of the rotating shaft as an axis, so that the displacement of the display screen 9 in the horizontal direction is realized; one end of the vertical rotating mechanism 93 is connected to the rotating shaft of the horizontal rotating mechanism 92, and the other end, that is, the rotating shaft of the vertical rotating mechanism 93, is connected to the display screen 9, so that the display screen 9 can be displaced in the vertical direction.
Example 5
The present embodiment is different from embodiment 1 in that:
the testing arm 5 is arranged on a testing device seat 52, the testing device seat 52 is fixed at two ends of the supporting seat 2, a multi-axis linkage device 53 is arranged at the top end of the testing device seat 52, a limiting device 54 is arranged at the tail end of the multi-axis linkage device 53, and the testing device further comprises an annular clamp part 55 which can be fixed on the limiting device 54 in a sliding manner; the distal end of the annular collar member 55 is provided with a test needle 51.
The test arm of the utility model can realize the movement of the test needle 51 in the three-dimensional space through the multi-axis linkage device 53, and meet the requirements of various test functions of the wafer shearing force test machine in the use process; the multi-axis linkage 53 mainly includes a rotation adjusting device in the horizontal direction and a rotation adjusting device in the vertical direction, and the multi-axis linkage 53 is controlled by a control system in a linkage manner. In addition, the test needle 51 fixed at the tail end of the annular clamp piece 55 can be replaced, and the test needle 51 with different needle heads can be replaced according to tests with different requirements; and the annular through groove on the annular clamp member 55 can slide along the limiting device 54, and after the annular through groove slides to a proper position, the annular clamp member 55 can be fixed by screwing the clamping member on the limiting device 54.
The above description is only for the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can be covered within the protection scope of the present invention without the changes or substitutions conceived by the inventive work within the technical scope disclosed by the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope defined by the claims.
Claims (6)
1. The multifunctional wafer shearing force testing machine is characterized in that: the device comprises a base (1), a supporting seat (2), a supporting pile (3) arranged between the base (1) and the supporting seat (2), a testing arm (5), an observer (6), a displacement platform (7), a display screen (9), a spotlight (31) and a data processing module arranged in a testing machine, wherein the data processing module is electrically connected with the display screen (9);
the base (1) is provided with a support rod (4), the support rod (4) is sleeved with a sliding ring (41), a support plate (42) is horizontally arranged on the sliding ring (41), one end of the support plate (42) is provided with an observation instrument (6), the other end of the support plate is provided with a display screen (9), the display screen (9) is connected with the support plate (42) through a rotating mechanism (91), and the sliding ring (41) is also provided with a manual lifting wrench (411);
the chip detection device is characterized in that a displacement platform (7) is further arranged on the base (1), a displacement mechanism (8) is arranged on the displacement platform (7), sliding feet (82) are arranged at the bottom end of the displacement mechanism (8), the sliding feet (82) are connected with the displacement platform (7) through sliding clamps, a placing platform (81) is further arranged at the top end of the displacement mechanism (8), and a chip clamp is further arranged on the placing platform (81);
a hydraulic lifting mechanism is arranged in the supporting pile (3), and a spotlight (31) fixedly connected through a metal hose is arranged on the side wall of the supporting pile (3).
2. The multifunctional wafer shear force testing machine of claim 1, wherein: the support pile (3) comprises an upper part (32) and a lower part (33), the upper part (32) and the lower part (33) are connected through a lifting rod (34), and the lifting rod (34) extends into the lower part (33) and is connected with a hydraulic lifting mechanism arranged in the lower part (33).
3. The multifunctional wafer shear force testing machine of claim 1, wherein: a hoop support (35) is further arranged on the side wall of the support pile (3), a groove is formed in the hoop support (35), and the diameter width of the groove is larger than that of the metal hose and smaller than that of the spot lamp (31); the distance from the hoop support (35) to the root of the metal hose is matched with the length of the metal hose.
4. The multifunctional wafer shear force testing machine of claim 1, wherein: the rotating mechanism (91) comprises a horizontal rotating mechanism (92) and a vertical rotating mechanism (93), wherein the horizontal rotating mechanism (92) is arranged on the supporting plate (42), one end of the vertical rotating mechanism (93) is connected to a rotating shaft of the horizontal rotating mechanism (92), and the other end of the vertical rotating mechanism is connected with the display screen (9).
5. The multifunctional wafer shear force testing machine of claim 1, wherein: the supporting plate (42) is also provided with a file folder (43).
6. The multifunctional wafer shear force testing machine of claim 1, wherein: the test arm (5) is arranged on a test device base (52), the test device base (52) is fixed at two ends of the support base (2), a multi-axis linkage device (53) is arranged at the top end of the test device base (52), a limiting device (54) is arranged at the tail end of the multi-axis linkage device (53), and the test device further comprises an annular clamp part (55) which can be fixed on the limiting device (54) in a sliding manner; the tail end of the annular clamp piece (55) is provided with a test needle (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201920969650.5U CN210166211U (en) | 2019-06-26 | 2019-06-26 | Multifunctional wafer shearing force testing machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920969650.5U CN210166211U (en) | 2019-06-26 | 2019-06-26 | Multifunctional wafer shearing force testing machine |
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| CN210166211U true CN210166211U (en) | 2020-03-20 |
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| CN201920969650.5U Active CN210166211U (en) | 2019-06-26 | 2019-06-26 | Multifunctional wafer shearing force testing machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111426554A (en) * | 2020-03-23 | 2020-07-17 | 天津大学 | Semiconductor chip high temperature shear test anchor clamps |
| CN114034540A (en) * | 2021-06-21 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Chip performance testing method and device |
| CN114839085A (en) * | 2022-03-16 | 2022-08-02 | 科力芯(苏州)半导体设备有限公司 | Wafer shearing force test machine |
| CN114935498A (en) * | 2022-07-19 | 2022-08-23 | 天津金海通半导体设备股份有限公司 | Test arm dynamic moment locking device |
-
2019
- 2019-06-26 CN CN201920969650.5U patent/CN210166211U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111426554A (en) * | 2020-03-23 | 2020-07-17 | 天津大学 | Semiconductor chip high temperature shear test anchor clamps |
| CN111426554B (en) * | 2020-03-23 | 2021-10-08 | 天津大学 | Semiconductor chip high temperature shear test anchor clamps |
| CN114034540A (en) * | 2021-06-21 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Chip performance testing method and device |
| CN114839085A (en) * | 2022-03-16 | 2022-08-02 | 科力芯(苏州)半导体设备有限公司 | Wafer shearing force test machine |
| CN114935498A (en) * | 2022-07-19 | 2022-08-23 | 天津金海通半导体设备股份有限公司 | Test arm dynamic moment locking device |
| CN114935498B (en) * | 2022-07-19 | 2022-10-25 | 天津金海通半导体设备股份有限公司 | Test arm dynamic moment locking device |
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