CN210156346U - Plasma processing system with high discharge efficiency - Google Patents

Abstract

A plasma processing system with high discharge efficiency belongs to the technical field of plasma equipment. The method is characterized in that: the electrode tube vacuum pump comprises a box body (4) and at least two groups of electrode tubes, wherein both ends of each electrode tube are connected with a water inlet tube (16) and a water outlet tube (15), a sealing element (14) is arranged between each water inlet tube (16) and each water outlet tube (15) and the box body (4), and the box body (4) is also connected with a negative pressure pumping device; the electrode tube comprises an upper electrode tube (2) and a lower electrode tube (7) which are respectively positioned at the upper part and the lower part of the box body (4), and is also provided with a driving circuit, wherein an alternating current signal output by the output end of the driving motor is connected into the upper electrode tube (2) and the lower electrode tube (7) to excite the upper electrode tube (2) and the lower electrode tube (7) to discharge. The plasma processing system with high discharge efficiency enables the temperature of the whole electrode tube to be uniform, the discharge is more stable, the opposite area of the corresponding electrode tube is increased, the discharge area of the electrode tube is further increased, and the discharge efficiency is greatly improved.

Description

Plasma processing system with high discharge efficiency

Technical Field

A plasma processing system with high discharge efficiency belongs to the technical field of plasma equipment.

Background

The plasma has wide application range, and has important application value from daily life to the aspects of industry, agriculture, environmental protection, military, medicine and the like, and relates to high-concentration treatment of industrial waste gas VOC, modification of industrial and civil materials, disinfection and sterilization of medical instruments and medical devices in hospital operating rooms and pharmaceutical factories, indoor air purification, disinfection and insurance of agricultural and sideline products and the like in the environmental protection field.

The plasma discharge type is many, and the technologies of corona needle point discharge, double-medium barrier discharge and single-medium discharge which are commonly used in the market at present are all discharged under normal pressure and are only limited to discharge within the range of 0.3-20 mm of distance between two electrodes. Corona needle point discharge is generally that an electric field is generated between a direct current pulse anode and a cathode, then glow discharge of one point or a plurality of points is generated on a needle point, the electron energy of the glow discharge is extremely limited, and the corona needle point discharge technology is generally used in the fields of dust removal and oil smoke removal treatment and the like. The application of dual dielectric barrier discharge and single dielectric discharge technology to industrial waste gas treatment is a new technology which is researched in 1997, and the single dielectric technology is not applied because the electron discharge density is not large enough. The double-dielectric barrier discharge has two modes, namely sleeve type dielectric barrier discharge and discharge type dielectric barrier discharge, and the discharge type double-dielectric barrier discharge is widely applied to industrial waste gas treatment in the field of environmental protection at home at present.

The above techniques have the disadvantages of high energy consumption, high heat, large wind resistance and low frequency, and the reasons are mainly reflected in four aspects: 1. the medium covered on the two electrodes is made of inorganic materials, such as quartz glass and ceramics, the mechanical strength and the service life are not considered in practical application, the thickness of the medium is generally designed to be 1-2 mm, the thicker the medium is, the larger the dielectric constant is, the higher the voltage supplied between the two electrodes is, the larger the energy consumption is, and the higher the temperature is. 2. The double-dielectric barrier discharge or the single-dielectric discharge is generally discharged under normal pressure, most of the electron energy is consumed on the moisture in the air, the energy is not effectively utilized, and the energy consumption is increased. 3. The dielectric barrier discharge is applied to normal pressure discharge, and the movement distance of electrons or ions between the electrodes cannot be prolonged due to the influence of oxygen and water in the air, so the discharge distance is not large and can be generally controlled to be between 0.3 and 20mm, the smaller the discharge distance, the larger the wind resistance is, the smaller the ventilation quantity is, and the application is limited.

Disclosure of Invention

The to-be-solved technical problem of the utility model is: the plasma processing system overcomes the defects of the prior art, has good cooling effect, ensures the temperature of the electrode tube to be uniform, and ensures the high discharge efficiency of the electrode tube to be high through the driving circuit.

The utility model provides a technical scheme that its technical problem adopted is: the plasma processing system with high discharge efficiency is characterized in that: the negative pressure pumping device comprises a box body and an electrode tube arranged in the box body, wherein both ends of the electrode tube are connected with a water inlet tube and a water outlet tube, sealing elements are arranged between the water inlet tube and the box body and between the water outlet tube and the box body, and the box body is also connected with a negative pressure pumping device;

the electrode tubes comprise an upper electrode tube and a lower electrode tube which are respectively positioned at the upper part and the lower part of the box body, and are also provided with a driving circuit;

in the driving circuit, three-phase alternating current is connected with a high-frequency anti-interference circuit in parallel and then is connected into a three-phase rectification circuit through a contact of a circuit breaker, the output end of the three-phase rectification circuit is connected with the input end of a filter circuit, the output end of the filter circuit is connected with the input end of a DC-DC conversion circuit, the output end of the DC-DC circuit is connected with the input end of an inverter circuit, the output end of the inverter circuit is connected with the input end of an inverter booster circuit, and the output end of the inverter booster circuit is.

Preferably, the high-frequency anti-interference circuit comprises capacitors C1-C6, the capacitors C1-C2 are connected between the phase A of the three-phase alternating current and the ground terminal in parallel, the capacitors C3-C4 are connected between the phase B of the three-phase alternating current and the ground terminal in parallel, and the capacitors C5-C6 are connected between the phase C of the three-phase alternating current and the ground terminal in parallel.

Preferably, the inverter booster circuit is a transformer B1, a primary coil of the transformer B1 is connected to an output end of the inverter circuit, and a secondary coil is connected to the upper electrode tube and the lower electrode tube; a transformer for detecting a primary-side current signal is provided in the primary-side coil of the transformer B1, and a transformer for detecting a secondary-side voltage signal is provided in the secondary side of the transformer.

Preferably, the electrode tubes comprise a plurality of square tubes which are arranged in parallel and at intervals, the square tubes of the two groups of electrode tubes are in one-to-one correspondence, the corresponding square tubes on the two groups of electrode tubes are arranged oppositely, one end of each square tube is communicated with the water inlet pipe, and the other end of each square tube is communicated with the water outlet pipe;

the water inlet pipe and the water outlet pipe are respectively communicated with the communicating pipes on the corresponding sides; a plurality of reinforcing ribs are arranged around the outer wall of the box body at intervals.

Preferably, the sealing member establish at the outer sealed section of thick bamboo, interior locking cylinder and the outer locking cylinder of inlet tube or the play water pipe that corresponds including the cover, interior locking cylinder and outer locking cylinder all with sealed section of thick bamboo threaded connection, all be provided with the sealing ring between interior locking cylinder and the outer locking cylinder and the sealed section of thick bamboo, interior locking cylinder sets up in the box.

Preferably, the sealing element further comprises a locking ring, the diameter of one end of each sealing cylinder is larger than that of the other end of each sealing cylinder to form a positioning table, the positioning table is arranged outside the box body, the other end of each sealing cylinder extends into the box body and is in sealing connection with the box body, the locking ring is arranged in the box body and is in threaded connection with the sealing cylinders, the water inlet pipes or the water outlet pipes respectively penetrate through the corresponding sealing cylinders to extend into the box body, and the water inlet pipes or the water outlet pipes are respectively in sealing connection with the corresponding sealing cylinders.

Preferably, the box body is externally provided with a first flange plate and a second flange plate, the first flange plate is fixedly connected with the box body, the second flange plate is detachably connected with the first flange plate, and the first flange plate and the second flange plate are sleeved outside the corresponding sealing cylinders and are arranged between the sealing cylinders in a sealing manner.

Preferably, the inner diameter of one end of the sealing cylinder arranged in the box body is larger than that of the middle part of the sealing cylinder, an inner connecting part is formed, one end of the inner locking cylinder extends into the inner connecting part and is in threaded connection with the inner connecting part, and the sealing ring on the corresponding side is pressed tightly.

Preferably, the length of the water inlet pipe and the water outlet pipe is greater than or equal to 7 m.

Preferably, the box body is a cuboid box body with an opening at one side, a cover plate is detachably arranged at the open side of the box body, a sealing plate is arranged between the cover plate and the box body, a box body sealing ring is arranged around the open side of the box body, and the box body sealing ring is hermetically connected with the sealing plate; the sealing plate is connected with the cover plate in a sliding mode, and a spring for pushing the sealing plate to compress the box body sealing ring is arranged between the cover plate and the sealing plate.

Compared with the prior art, the utility model discloses the beneficial effect who has is:

1. in the plasma processing system with high discharge efficiency, the electrode tube has high discharge efficiency through the driving circuit, and simultaneously has the advantages of good cooling effect and uniform temperature of the electrode tube.

2. The electrode tube of the plasma processing system with high discharge efficiency comprises a plurality of square tubes which are arranged in parallel and at intervals, wherein two ends of each square tube are respectively communicated with the water inlet tube and the water outlet tube, so that the retention time of cooling water in the electrode tube is reduced, the cooling effect of the cooling water on the electrode tube is good, the length of each square tube is shorter, the temperature difference of the cooling water at two ends of each square tube is small, the temperature of the whole electrode tube is uniform, discharge is more stable, the square tubes of the two groups of electrode tubes are arranged oppositely, the opposite area of the corresponding electrode tubes is increased, the discharge area of the electrode tubes is increased, and the discharge efficiency is greatly improved; the water inlet pipe and the water outlet pipe are sealed with the box body through the sealing piece, the negative pressure pumping device can pump negative pressure to the box body to maintain the negative pressure state in the box body, discharge occurs under the negative pressure condition, no medium is blocked between the electrode pipes, energy consumption is low, and temperature is low; moisture in the air is reduced, and the electronic energy consumed on the moisture is reduced, so that the energy utilization rate is improved, and the relative energy consumption is reduced; oxygen and water vapor in the air are reduced, the influence on electrons or ions between the electrode tubes during movement is weakened, the movement distance is prolonged, the discharge distance is increased, the discharge distance can be between 20mm and 600mm, namely, the distance between the electrode tubes is increased, the ventilation quantity between the electrode tubes is increased, and the discharge efficiency is improved; the medium-high frequency alternating current can be applied, the discharge frequency is improved, and the generated electronic energy is improved.

3. The water inlet pipe and the water outlet pipe are simultaneously communicated with the plurality of square pipes of the electrode pipe through the communicating pipes, so that the square pipes are conveniently connected with the water inlet pipe and the water outlet pipe.

4. The strengthening rib has improved the intensity of box, avoids leading to the box to warp because the box internal gas pressure is low excessively.

5. The inner locking cylinder and the outer locking cylinder are both connected with the sealing cylinder in a sealing mode, double sealing is achieved, sealing effect is better compared with single-layer sealing, sealing effect between the water inlet pipe or the water outlet pipe and the sealing cylinder is guaranteed, the sealing problem of the box body is solved, stable negative pressure state is maintained in the box body, and discharging stability is guaranteed.

6. The locking ring is matched with the positioning table, so that the sealing barrel is firmly combined with the box body, the sealing barrel is connected with the box body in a sealing manner, the sealing effect is prevented from being influenced due to looseness between the box body and the sealing barrel, and the sealing piece is convenient to overhaul.

7. Through setting up first ring flange and second ring flange, avoided because the tank wall thickness of box is not enough, lead to the not enough problem of sealed, guaranteed the sealed effect between sealing member and the box.

8. The inner locking cylinder connecting cylinder is in threaded connection with the sealing cylinder and compresses the sealing ring, so that sealing between the water inlet pipe or the water outlet pipe and the sealing cylinder is realized.

9. The length of the water inlet pipe and the water outlet pipe is larger than or equal to 7m, and the water resistance is large enough when the water is electrified, so that short circuit is avoided.

10. The cover plate is detachably connected with the box body, so that the maintenance of internal elements of the box body is facilitated, sterilization devices can be placed or taken out of the box body, the sealing plate is matched with the box body sealing ring, and the sealing performance between the cover plate and the box body is guaranteed.

11. The spring can guarantee that the closing plate compresses tightly the box sealing washer all the time, avoids because being connected not hard up between apron and the box and appearing sealed not tight problem.

Drawings

FIG. 1 is a schematic cross-sectional front view of a high discharge efficiency plasma processing system.

Fig. 2 is a partially enlarged view of a portion a in fig. 1.

Fig. 3 is a schematic left side cross-sectional view of a discharge efficient plasma processing system.

Fig. 4 is a partially enlarged view of fig. 3 at B.

Fig. 5 is a front cross-sectional schematic view of the seal.

Fig. 6 is a front cross-sectional view of a sealing cartridge.

FIG. 7 is a schematic block diagram of a plasma processing system driver circuit with high discharge efficiency.

FIGS. 8 to 9 are schematic diagrams of driving circuits of a plasma processing system with high discharge efficiency.

Wherein: 1. the sealing structure comprises an insulator 2, an upper electrode tube 3, a reinforcing rib 4, a box body 5, an exhaust pipe 6, a communication hole 7, a lower electrode tube 8, a mounting groove 9, a box body sealing ring 10, a sealing plate 11, a cover plate 12, a spring 13, a connecting column 14, a sealing piece 15, a water outlet pipe 16, a water inlet pipe 17, a communication pipe 18, a box wall 19, a first flange plate 20, a second flange plate 21, a sleeve 22, a locking ring 23, an outer locking cylinder connecting cylinder 24, an outer locking cylinder clamping ring 25, an outer locking cylinder 26, a sealing cylinder 27, an inner locking cylinder clamping ring 28, an inner locking cylinder 29, an inner locking cylinder connecting cylinder 30, a positioning table 31, an inner connecting part 32, a sealing groove 33 and an outer connecting.

Detailed Description

Fig. 1 to 9 are preferred embodiments of the present invention, and the present invention will be further explained with reference to fig. 1 to 9.

As shown in FIGS. 1-2, a plasma processing system with high discharge efficiency comprises a box body 4 and at least two groups of electrode tubes arranged in the box body 4, wherein the box body 4 is a cuboid box body with an open left side, a cover plate 11 is arranged on the left side of the box body 4, and a sealing plate 10 is arranged on the cover plate 11. The outer wall interval that encircles box 4 is provided with a plurality of strengthening ribs 3, increases box 4's intensity, avoids box 4 to take place to warp. The cover plate 11 is detachably connected with the leftmost reinforcing rib 3 through bolts, the sealing plate 10 is arranged between the cover plate 11 and the box body 4, the length of the sealing plate 10 is smaller than that of the cover plate 11, and the width of the sealing plate 10 is smaller than that of the cover plate 11. The open side of the surrounding box body 4 is provided with a continuous mounting groove 8, a box body sealing ring 9 is arranged in the mounting groove 8, the cover plate 11 is detachably connected with the box body 4, the box body sealing ring 9 is tightly pressed by the sealing plate 10, and the sealing plate 10 is matched with the box body sealing ring 9 to realize the sealing between the cover plate 11 and the box body 4.

Connecting column 13 is installed to one side that closing plate 10 is close to apron 11, the middle part of connecting column 13 is fixed with the retaining ring, one side that apron 11 is close to closing plate 10 is provided with the mounting bracket, connecting column 13 slidable mounting is on the mounting bracket, and the retaining ring setting is between mounting bracket and apron 11, all the cover is equipped with spring 12 on every connecting column 13, the one end of spring 12 is supported on the retaining ring, the other end supports on apron 11, thereby can guarantee that closing plate 10 compresses tightly box sealing washer 9 all the time, and then sealed reliable between apron 11 and the box 4 has been guaranteed.

In this embodiment, two sets of electrode tubes are provided, each set being disposed on the upper portion of the case 4, the upper electrode tube 2 is disposed directly above the lower electrode tube 7, the insulator 1 on which the upper electrode tube 2 is disposed is detachably connected to the case 4, and the lower electrode tube 7 is detachably connected to the case 4 through the insulator 1 disposed on the lower side thereof.

The two ends of the upper electrode tube 2 and the lower electrode tube 7 are respectively connected with a water inlet tube 16 and a water outlet tube 15, so that the upper electrode tube 2 and the lower electrode tube 7 are cooled by circulating water, the overhigh temperature of the upper electrode tube 2 and the lower electrode tube 7 is avoided, the upper electrode tube 2 and the lower electrode tube 7 are respectively connected with a driving circuit, and the high-frequency alternating current emitted by the driving circuit is discharged by using the core.

The tank wall 18 of the tank body 4 is provided with a communication hole 6, and the water inlet pipe 16 and the water outlet pipe 15 are communicated with the upper electrode tube 2 or the lower electrode tube 7 through the communication hole 6. In the present embodiment, each of the communication holes 6 is provided two side by side in the vertical direction, so that the distance between the upper electrode tube 2 and the lower electrode tube 7 can be adjusted as needed, and the unused communication holes 6 are closed by a blind plate. A sealing member 14 is arranged between each water inlet pipe 16 and each water outlet pipe 15, and sealing is realized between the sealing member 14 and the box body 4, so that a closed discharge cavity is formed in the box body 4.

The inner walls of two opposite sides of the box body 4 are symmetrically provided with guide rails which are perpendicular to the cover plate 11, and a bearing disc can be installed in the box body 4 through the guide rails, so that medical instruments can be conveniently placed in the box body 4 for disinfection.

The right side of box 4 is provided with blast pipe 5, and blast pipe 5 is connected with takes out negative pressure device, takes out negative pressure device and can be fan or vacuum pump, in this embodiment, takes out negative pressure device and be the vacuum pump.

The water inlet pipe 16 and the water outlet pipe 15 are sealed with the box body 4 through the sealing piece 14, the negative pressure pumping device can pump negative pressure to the box body 4, so that the inside of the box body 4 is maintained in a negative pressure state, discharge occurs under the negative pressure condition, no medium is blocked between electrode pipes, the energy consumption is low, and the temperature is low; moisture in the air is reduced, and the electronic energy consumed on the moisture is reduced, so that the energy utilization rate is improved, and the relative energy consumption is reduced; oxygen and water vapor in the air are reduced, the influence on electrons or ions between the electrode tubes during movement is weakened, the movement distance is prolonged, the discharge distance is increased, the discharge distance can be between 20mm and 600mm, namely, the distance between the electrode tubes is increased, the ventilation quantity between the electrode tubes is increased, and the discharge efficiency is improved; the medium-high frequency alternating current can be applied, the discharge frequency is improved, and the generated electronic energy is improved.

As shown in FIGS. 3-4: go up electrode tube 2 and lower electrode tube 7 and all include many square pipes and communicating pipe 17 that parallel and interval set up, the both ends of square pipe seal the setting, communicating pipe 17 sets up with square steel pipe is perpendicular, the both ends of communicating pipe 17 seal the setting, go up the both ends of square pipe of electrode tube 2 and the square pipe of lower electrode tube 7 and be linked together with the communicating pipe 17 that corresponds the side respectively, inlet tube 16 and outlet pipe 15 are linked together with the communicating pipe 17 that corresponds the side respectively, thereby conveniently cool down last electrode tube 2 and lower electrode tube 7. The square pipe is a square steel pipe.

The square pipes of the two groups of electrode pipes are in one-to-one correspondence, the corresponding square pipes on the two groups of electrode pipes are arranged oppositely, one end of each square pipe is communicated with the water inlet pipe 16, and the other end of each square pipe is communicated with the water outlet pipe 15. This efficient plasma processing system's of discharging electrode tube includes many square pipes that parallel and interval set up, the both ends of square pipe are linked together with inlet tube 16 and outlet pipe 15 respectively, the dwell time of cooling water in the electrode tube has been reduced, the cooling effect of cooling water to the electrode tube is good, the length of square pipe is shorter, the difference in temperature of the cooling water at square pipe both ends is little, make the temperature of whole electrode tube even, it is more stable to discharge, the square pipe of two sets of electrode tubes is just to setting up, corresponding electrode tube has just to the area increased, and then increased the discharge area of electrode tube, discharge efficiency has been improved greatly.

As shown in FIGS. 5 to 6: seal 14 includes a seal barrel 26, a locking ring 22, an inner locking barrel 28, an outer locking barrel 25, and a sleeve 21.

The sealing cylinder 26 is cylindrical, and the outer diameter of the left end of the sealing cylinder 26 is larger than that of the right end, so that a positioning table 30 is formed at the left end of the sealing cylinder 26, and the right end of the positioning table 30 is tapered with a diameter gradually decreasing from left to right. And three sealing grooves 32 are formed around the middle part of the sealing cylinder 26, and the number of the sealing grooves 32 is three. The inner diameters of both ends of the sealing cylinder 26 are larger than the inner diameter of the middle part, so that an inner connecting part 31 is formed at the left end of the sealing cylinder 26, an outer connecting part 33 is formed at the right end of the sealing cylinder 26, the diameter of the inner end of the inner connecting part 31 is smaller than that of the outer end, and an inner sealing ring mounting part is formed; the diameter of the inner end of the outer connection 33 is smaller than the diameter of the outer end, forming an outer sealing ring mounting.

The outer wall of the box wall 18 is provided with a first flange 19 and a second flange 20, the first flange 19 corresponds to the sealing elements 14 one by one, the first flange 19 is coaxially arranged with the corresponding communicating hole 6, the first flange 19 is welded with the box wall 18 of the box body 4, the first flange 19 is sealed with the box wall 18 of the box body 4, a plurality of screws are uniformly distributed at intervals around the axis of the first flange 19, and the screws are welded with the first flange 19. The second flange 20 is disposed coaxially with the first flange 19 and is detachably connected to the first flange 19 by a screw. The water inlet pipe 16 or the water outlet pipe 15 penetrates through the corresponding first flange 19 and the second flange 20 and then extends into the box body 4 and is communicated with the corresponding communicating pipe 17, and the sealing element 14 is arranged between the corresponding first flange 19, the corresponding second flange 20 and the box body 4.

The positioning table 30 of the sealing cylinder 26 is arranged in the box body 4, and the other end of the sealing cylinder 26 passes through the corresponding communication hole 6, the first flange 19 and the second flange 20 and then extends out of the box body 4. The locking ring 22 is arranged outside the box body 4, and the locking ring 22 is coaxially sleeved outside the corresponding sealing cylinder 26 and is in threaded connection with the sealing cylinder 26, so as to be matched with the sealing cylinder 26 and fixedly connected with the box body 4.

The sleeve 21 is coaxially sleeved outside the corresponding sealing cylinder 26, the left end of the sleeve 21 is tapered to match with the right end of the positioning table 30, the left end of the sleeve 21 is supported on the positioning table 30, the right end of the sleeve 21 extends out of the second flange 20 and is welded with the second flange 20, and the locking ring 22 is tightly pressed on the right end of the corresponding locking ring 22, so that the sealing cylinder 26 is fixed.

An O-ring is bonded to each of the seal grooves 32 by an adhesive, thereby sealing between the seal cylinder 26 and the sleeve 21.

Interior locking cylinder 28 sets up in box 4 to with the coaxial setting of the sealed section of thick bamboo 26 that corresponds, interior locking cylinder 28 is including the interior locking cylinder connecting cylinder 29 and the interior locking cylinder clamp ring 27 of coaxial setting, and the external diameter of interior locking cylinder clamp ring 27 is greater than the internal diameter of interior connecting portion 31, and the external diameter of interior locking cylinder connecting cylinder 29 is less than the diameter of interior sealing ring installation department. Inlet tube 16 or outlet pipe 15 pass corresponding sealed section of thick bamboo 26 and stretch into in the box 4, install interior sealing ring in the interior sealing ring installation department, interior sealing ring cover is established outside corresponding inlet tube 16 or outlet pipe 15, interior locking cylinder clamp ring 27 and interior locking cylinder connecting cylinder 29 are all established outside corresponding inlet tube 16 or outlet pipe 15, interior locking cylinder connecting cylinder 29 stretches into in-connection portion 31, and with sealed section of thick bamboo 26 threaded connection, interior locking cylinder connecting cylinder 29 compresses tightly interior sealing ring, thereby it is sealed between inlet tube 16 or outlet pipe 15 and the sealed section of thick bamboo 26 that make interior sealing ring will correspond, interior locking cylinder clamp ring 27 compresses tightly the left end of sealed section of thick bamboo 26.

Outer locking cylinder 25 sets up outside box 4 to with the coaxial setting of the sealed section of thick bamboo 26 that corresponds, outer locking cylinder 25 is greater than the internal diameter of outer connecting portion 33 including the outer locking cylinder connecting cylinder 23 and the outer locking cylinder clamp ring 24 of coaxial setting, the external diameter of outer locking cylinder clamp ring 24, the external diameter of outer locking cylinder connecting cylinder 23 is less than the diameter of outer seal ring installation department. The outer sealing ring is arranged in the outer sealing ring mounting portion, the outer sealing ring is sleeved outside the corresponding water inlet pipe 16 or water outlet pipe 15, the outer locking cylinder clamping ring 24 and the outer locking cylinder connecting cylinder 23 are both sleeved outside the corresponding water inlet pipe 16 or water outlet pipe 15, the outer locking cylinder connecting cylinder 23 extends into the corresponding outer connecting portion 33, the outer locking cylinder connecting cylinder 23 compresses the outer sealing ring, therefore, the outer sealing ring seals the position between the corresponding water inlet pipe 16 or water outlet pipe 15 and the sealing cylinder 26, the right end of the locking ring 22 extends out of the sealing cylinder 26, and the outer locking cylinder clamping ring 24 compresses the right end of the locking ring 22.

The inner locking cylinder 28 is matched with the outer locking cylinder 25, double sealing is carried out between the corresponding water inlet pipe 16 or water outlet pipe 15 and the sealing cylinder 26, the sealing effect is ensured, and then stable air pressure in the discharge cavity is ensured.

The sealing cylinder 26, the locking ring 22, the inner locking cylinder 28 and the outer locking cylinder 25 are all made of insulating materials, and in the embodiment, the sealing cylinder 26, the locking ring 22, the inner locking cylinder 28 and the outer locking cylinder 25 are all made of polytetrafluoroethylene.

As shown in fig. 7, the driving circuit for generating the high-frequency alternating current includes a high-frequency self-excited interference rejection circuit, a surge absorption circuit, a three-phase rectification circuit, a filter circuit, a DC-DC conversion circuit, a snubber circuit, an inverter circuit, and an inverter booster circuit. The three-phase alternating current passes through the high-frequency self-excitation anti-interference circuit and the surge absorption circuit in sequence to be connected to the input end of the three-phase rectification circuit, the alternating current is converted into direct current through the three-phase rectification circuit, a power supply output by the output end of the three-phase rectification circuit passes through the filter circuit and then is connected into the DC-DC conversion circuit to complete the conversion of direct current voltage, the output end of the DC-DC conversion circuit is connected into the inverter circuit through the buffer circuit, the DC signal is converted into an alternating current signal again through the inverter circuit, the alternating current signal output by the inverter circuit is connected into the inverter booster circuit again to be boosted, the boosted power supply is connected into the upper electrode tube 2 and the lower electrode tube 7.

As shown in FIGS. 8-9, A, B, C three-phase AC is connected to the input end of the rectifier bridge circuit composed of diodes D1-D6 through the contact of the breaker QK 1. When the alternating currents A are the same, the parallel capacitors C1-C2 are grounded, when the alternating currents B are the same, the parallel capacitors C3-C4 are grounded, and when the alternating currents C are the same, the parallel capacitors C5-C6 are grounded. And piezoresistors RV 1-RV 3 are further arranged between the circuit breaker QK1 and the rectifier bridge circuit, wherein the piezoresistor RV1 is connected between the A phase and the B phase in parallel, the piezoresistor RV2 is connected between the B phase and the C phase in parallel, and the piezoresistor RV3 is connected between the A phase and the C phase in parallel. The capacitors C1-C6 form the high-frequency self-excitation anti-interference circuit, the piezoresistors RV 1-RV 3 form the surge absorption circuit, and the diodes D1-D6 form the three-phase rectification circuit.

The output positive electrode of the rectifier bridge circuit is connected with the inductors L1 in series and then is simultaneously connected with capacitors C7-C10, one ends of resistors R1-R4 and a terminal A1, the output negative electrode of the rectifier bridge circuit is simultaneously connected with one ends of a contact KJ1 and a resistor R9, the other ends of the contact KJ1 and a resistor R9 are simultaneously connected with the capacitors C11-C14, one ends of the resistors R5-R8 and the terminal A2, the capacitors C7-C14 and the other ends of the resistors R1-R8 are connected at one position, and the inductors L1, the capacitors C7-C14 and the resistors R1-R8 form the filter circuit.

The terminals a 1-a 2 are connected to the terminals B1-B2 in fig. 8, respectively, and it should be noted that the terminals a 1-a 2 and the terminals B1-B2 are not actually terminals in the circuit, but are shown in the present application as two parts for the sake of length limitation of the drawings and clarity of the circuit.

In fig. 8, the positive output terminals of the rectifier bridge circuit are connected to the cathodes of diodes D7 to D9 and the collector of IGBT W1, the positive anode of diode D9 and the emitter of IGBT W1 are connected to the cathode of diode D10 and one end of inductor L2, and the positive anode of diode D10 is connected to the negative output terminal of the rectifier bridge circuit. The other end of the inductor L2 is connected in series with the inductor L3 and then simultaneously: anodes of the diodes D11-D12 and one ends of the resistors R9-R11 are connected, one ends of the IGBT tubes W2-W3, cathodes of the diodes D13-D14 and anodes of the diodes D7-D8 are connected.

The cathodes of the diodes D11-D12 and the other ends of the resistors R9-R11 are connected together and are also connected with one ends of the capacitors C15-C18, and the other ends of the capacitors C15-C18 are connected with the output cathode of the rectifier bridge circuit. The anode of the diode D13 is connected to the emitter of the IGBT tube W2, and the anode of the diode D14 is connected to the emitter of the IGBT tube W3.

The emitter of the IGBT tube W2 is simultaneously connected with the collector of the IGBT tube W4 and the cathode of the diode D15, and the collector of the IGBT tube W4 and the cathode of the diode D15 are connected with the output negative electrode of the rectifier bridge circuit; the emitter of the IGBT tube W3 is simultaneously connected with the collector of the IGBT tube W5 and the cathode of the diode D16, and the collector of the IGBT tube W5 and the cathode of the diode D16 are connected with the output negative electrode of the rectifier bridge circuit; a capacitor C19 is also connected in parallel between the collector and the emitter of the IGBT tube W4, and a capacitor C20 is also connected in parallel between the collector and the emitter of the IGBT tube W5. A resistor R12 is connected between the capacitor C18 and the emitter of the IGBT W4, and ammeters are connected in parallel to both ends of the resistor R12. The control ends of the IGBT tubes W1-W5 are connected with an external controller.

The diodes D7-D10, the inductors L2-L3 and the IGBT tube W1 form the DC-DC conversion circuit, and the diodes D11-D12, the resistors R9-R11 and the capacitors C15-C18 form the buffer circuit; the IGBT tubes W2-W5, the diodes D13-D16 and the capacitors C19-C20 form the inverter circuit.

Transformer B1 is provided, transformer B1 is the above-described inverter booster circuit, and transformer B1 has its primary coil connected between the emitter of IGBT W2 and the collector of IGBT W4 at one end and between the emitter of IGBT W3 and the collector of IGBT W5 at the other end. A transformer T1 is connected to the primary winding of the transformer B1, and detects a primary current value. The two ends of the secondary side coil of the transformer B1 are connected to the upper electrode tube 2 and the lower electrode tube 7, respectively. A transformer T2 is further provided on the secondary side of the transformer B1, and is used for detecting the voltage value of the secondary side.

While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical substance of the present invention still belong to the protection scope of the technical solution of the present invention.

Claims (10)

1. A discharge-efficient plasma processing system, characterized by: the electrode tube type vacuum pump comprises a box body (4) and electrode tubes arranged in the box body (4), wherein both ends of each electrode tube are connected with a water inlet tube (16) and a water outlet tube (15), sealing elements (14) are arranged between the water inlet tube (16) and the water outlet tube (15) and the box body (4), and the box body (4) is also connected with a negative pressure pumping device;

the electrode tubes comprise an upper electrode tube (2) and a lower electrode tube (7), the upper electrode tube (2) is positioned at the upper part of the box body (4), the lower electrode tube (7) is positioned at the lower part of the box body (4), and the driving circuit is further arranged, alternating current signals output by the output end of the driving motor are connected into the upper electrode tube (2) and the lower electrode tube (7), and the upper electrode tube (2) and the lower electrode tube (7) are excited to discharge;

in the driving circuit, three-phase alternating current is connected with a high-frequency anti-interference circuit in parallel and then is connected into a three-phase rectification circuit through a contact of a circuit breaker, the output end of the three-phase rectification circuit is connected with the input end of a filter circuit, the output end of the filter circuit is connected with the input end of a DC-DC conversion circuit, the output end of the DC-DC circuit is connected with the input end of an inverter circuit, the output end of the inverter circuit is connected with the input end of an inverter booster circuit, and the output end of the inverter booster circuit is connected with an upper electrode.

2. The discharge-efficient plasma processing system of claim 1, wherein: the high-frequency anti-interference circuit comprises capacitors C1-C6, the capacitors C1-C2 are connected between the phase A of the three-phase alternating current and a grounding terminal in parallel, the capacitors C3-C4 are connected between the phase B of the three-phase alternating current and the grounding terminal in parallel, and the capacitors C5-C6 are connected between the phase C of the three-phase alternating current and the grounding terminal in parallel.

3. The discharge-efficient plasma processing system of claim 1, wherein: the inverter booster circuit is a transformer B1, a primary side coil of a transformer B1 is connected to the output end of the inverter circuit, and a secondary side coil of the transformer B1 is connected to the upper electrode tube (2) and the lower electrode tube (7); a transformer for detecting a primary-side current signal is provided in the primary-side coil of the transformer B1, and a transformer for detecting a secondary-side voltage signal is provided in the secondary side of the transformer.

4. The discharge-efficient plasma processing system of claim 1, wherein: the electrode tubes comprise a plurality of square tubes which are arranged in parallel and at intervals, the square tubes of the two groups of electrode tubes are in one-to-one correspondence, the corresponding square tubes on the two groups of electrode tubes are arranged oppositely, one end of each square tube is communicated with the water inlet tube (16), and the other end of each square tube is communicated with the water outlet tube (15);

the water inlet pipe (16) and the water outlet pipe (15) are respectively communicated with the communicating pipes (17) on the corresponding sides; a plurality of reinforcing ribs (3) are arranged around the outer wall of the box body (4) at intervals.

5. The discharge-efficient plasma processing system of claim 1, wherein: sealing member (14) including the cover establish at the outer sealed section of thick bamboo (26) of inlet tube (16) or outlet pipe (15) that correspond, interior locking cylinder (28) and outer locking cylinder (25) all with sealed section of thick bamboo (26) threaded connection, all be provided with the sealing ring between interior locking cylinder (28) and outer locking cylinder (25) and sealed section of thick bamboo (26), interior locking cylinder (28) set up in box (4).

6. The discharge-efficient plasma processing system of claim 5, wherein: the sealing element (14) further comprises a locking ring (22), the diameter of one end of the sealing cylinder (26) is larger than that of the other end of the sealing cylinder, a positioning table (30) is formed, the positioning table (30) is arranged outside the box body (4), the other end of the sealing cylinder (26) extends into the box body (4) and is in sealing connection with the box body (4), the locking ring (22) is arranged in the box body (4) and is in threaded connection with the sealing cylinder (26), the water inlet pipe (16) or the water outlet pipe (15) penetrates through the corresponding sealing cylinder (26) and extends into the box body (4), and the water inlet pipe (16) or the water outlet pipe (15) is in sealing connection with the corresponding sealing cylinder (26).

7. The discharge-efficient plasma processing system of claim 5, wherein: the box (4) be provided with first ring flange (19) and second ring flange (20) outward, first ring flange (19) and box (4) fixed connection, second ring flange (20) are connected with first ring flange (19) detachable, first ring flange (19) and second ring flange (20) all overlap and establish outside corresponding sealed section of thick bamboo (26) to and sealed setting between a sealed section of thick bamboo (26).

8. The discharge-efficient plasma processing system of claim 5, wherein: the inner diameter of one end of the sealing cylinder (26) arranged in the box body (4) is larger than that of the middle part of the sealing cylinder to form an inner connecting part (31), one end of the inner locking cylinder (28) extends into the inner connecting part (31) and is in threaded connection with the inner connecting part (31), and the sealing ring on the corresponding side is pressed tightly.

9. The discharge-efficient plasma processing system of claim 4, wherein: the length of the water inlet pipe (16) and the water outlet pipe (15) is more than or equal to 7 m.

10. The discharge-efficient plasma processing system of claim 1, wherein: the box body (4) is a cuboid box body with one open side, the open side of the box body (4) is detachably provided with a cover plate (11), a sealing plate (10) is arranged between the cover plate (11) and the box body (4), a box body sealing ring (9) is arranged around the open side of the box body (4), and the box body sealing ring (9) is hermetically connected with the sealing plate (10); the sealing plate (10) is connected with the cover plate (11) in a sliding mode, and a spring (12) for pushing the sealing plate (10) to compress the box body sealing ring (9) is arranged between the cover plate (11) and the sealing plate (10).

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