CN210105998U - Metering valve with displacement self-detection function based on capacitance sensor - Google Patents
Metering valve with displacement self-detection function based on capacitance sensor Download PDFInfo
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- CN210105998U CN210105998U CN201920458825.6U CN201920458825U CN210105998U CN 210105998 U CN210105998 U CN 210105998U CN 201920458825 U CN201920458825 U CN 201920458825U CN 210105998 U CN210105998 U CN 210105998U
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Abstract
A metering shutter with displacement self-detection function based on a capacitive sensor comprises: the valve is integrally columnar, the outer wall surface of the valve is provided with a platform surface, and the side wall surface is provided with a valve oil outlet valve port and a valve oil inlet valve port; the valve bush is integrally cylindrical, is arranged outside the valve and is respectively provided with a valve bush oil outlet valve port and a valve bush oil inlet valve port corresponding to the valve oil outlet valve port and the valve oil inlet valve port; the valve slides in the valve bush along the axial direction, and the size of the overlapping area of the valve oil inlet valve port and the valve bush oil inlet valve port and the size of the overlapping area of the valve oil outlet valve port and the valve bush oil outlet valve port are controlled by adjusting the relative positions of the valve and the valve bush; the valve bushing is provided with an opening corresponding to the platform surface; the movable polar plate is fixed on the platform surface and is parallel to the axis along the valve; and the displacement detection module is correspondingly arranged on the outer side of the movable polar plate and is used for forming a capacitor bank with the movable polar plate, and the value of the capacitor bank is related to the absolute displacement of the valve.
Description
Technical Field
The utility model relates to a mechanical structure and manufacturing field especially relate to a measurement valve with displacement self test function based on capacitance sensor for among aviation, space flight and the automatic machine, among the hydraulic machine structure.
Background
The metering valve plays a role in metering fuel oil supplied to an engine in an aerospace control system. At present, the metering principle is to open a slot on the side wall of a bushing, and convert the displacement of a valve into a feedback voltage signal through an angular displacement sensor connected with a gear-rack system or a linear displacement sensor connected with the rear end of the valve, so as to realize measurement and feedback of the fuel flow.
However, the valve and the position sensor of the traditional linear or rotary metering valve are independently opened, namely the sensor is arranged outside the metering valve, although the stability is better, the weight and the redundancy design have limitations, the dead weight of the sensor is larger, the space occupation is larger, and the application of the traditional linear or rotary metering valve has disadvantages in meeting the control requirements of integration, miniaturization and light weight at the present stage.
The capacitive displacement sensing principle has been developed for many years in China and has been widely applied, and the stability and accuracy of the capacitive displacement sensing principle have been effectively verified in practical application. The capacitance type displacement sensor is integrated on the metering valve, and an original split type structure is changed into an integrated combined component, so that each function of an original split type component is ensured, the occupied weight and space of the component are reduced, and the comprehensive performance is improved.
At present, a capacitance displacement sensor, such as a metering valve with a displacement self-detection function shown in chinese patent ZL106762161, utilizes a capacitance grating displacement measurement technology to achieve the purpose of measuring the displacement of the metering valve, but its "fixed grating" structure is complex, a driving signal is complex, and the displacement is a displacement value relative to the current zero point (the position where the valve is located when power is on or the reset position set manually), and the zero point will be lost when lightning strike, power failure, and other situations occur, if the valve is displaced during this period, the displacement measured when power is on and reset cannot reflect the true displacement, that is, the measurement of absolute displacement cannot be achieved, so that there is a hidden danger, and the capacitance displacement sensor is not suitable for occasions where the absolute displacement needs to be measured and.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Based on the problem, the utility model provides a measurement valve with displacement self test function based on capacitance sensor to alleviate among the prior art measurement valve structure of self test function complicated, drive signal is complicated, easily receives the interference among the adverse circumstances, is not suitable for technical problem such as the occasion that absolute displacement, reliability requirement are high need be measured to needs.
(II) technical scheme
The utility model provides a measurement valve with displacement self test function based on capacitance sensor, a serial communication port, include: the whole valve (1) is columnar, the outer wall surface of the valve (1) is provided with a platform surface, and the side wall surface is provided with a valve oil outlet valve port (101) and a valve oil inlet valve port (102); the valve bush (2) is integrally cylindrical, is sleeved outside the valve (1), and is provided with a valve bush oil outlet valve port (201) and a valve bush oil inlet valve port (202) corresponding to the valve oil outlet valve port (101) and the valve oil inlet valve port (102) respectively; the valve (1) slides in the valve bushing (2) along the axial direction, and the size of the overlapping area of the valve oil inlet valve port (102) and the valve bushing oil inlet valve port (202) and the size of the overlapping area of the valve oil outlet valve port (101) and the valve bushing oil outlet valve port (201) are controlled by adjusting the relative positions of the valve (1) and the valve bushing (2); the valve bushing (2) is provided with an opening corresponding to the platform surface; the movable polar plate (4) is fixed on the platform surface and is parallel to the axis of the valve (1); the displacement detection module (3) is correspondingly arranged on the outer side of the movable polar plate (4) and comprises: the displacement detection module (3) is used for forming a capacitor bank with the movable polar plate (4), and the value of the capacitor bank is related to the absolute displacement of the valve (1).
In an embodiment of the present invention, the displacement detecting module (3) includes: the first static polar plate (301) and the second static polar plate (302) are arranged along the axial direction of the valve (1) at intervals and are mutually insulated.
In the embodiment of the present invention, the width of the first static polar plate (301) and the second static polar plate (302) is not less than the width of the movable polar plate (4).
In the embodiment of the utility model, the dynamic polar plate (4) is obtained for the machining mode, and thickness is not less than 0.3 mm.
In the embodiment of the utility model, the dynamic polar plate (4) is obtained through surface coating process, and thickness is less than 0.3mm, include: an insulating layer (401) on the mesa face; a repeller (402) on the insulating layer (401).
In the embodiment of the utility model, the width and/or thickness of the movable polar plate (4) are/is changed according to the linear and/or sine function curve rule; the movable polar plate (4) is insulated from the valve (1), the valve bushing (2) and the displacement detection module (3).
In an embodiment of the present invention, the preparation material of the insulating layer includes: any one of TiO2, Al2O3, SiO2 and polyimide or a mixture thereof; the preparation material of the reflecting electrode (402) comprises any one of aluminum, gold, copper, silver and graphene or a mixture thereof.
In the embodiment of the utility model, first static polar plate (301), second static polar plate (302) are located the top of moving polar plate (4) but direct contact not, just relative with it, form the electric capacity group, first static polar plate (301) form electric capacity C1 with moving polar plate (4), second static polar plate (302) with move polar plate (4) and form electric capacity C2, first static polar plate (301) just form electric capacity C3 to the area part with second static polar plate (302), comprehensive electric capacity Cm between first static polar plate (301) and second static polar plate (302) is parallelly connected with electric capacity C3 after electric capacity C1 and electric capacity C2 establish ties and forms, the computational formula is:
cr is an equivalent capacitor formed by serially connecting capacitors C1 and C2, and the position relation between the valve (1) and the valve bushing (2) can be obtained by calculating through detecting a Cm signal output by the displacement detection module (3).
In the embodiment of the present invention, the width and/or thickness of the movable plate (4) is changed according to the linear rule, and the integrated capacitance Cm between the first static plate 301 and the second static plate 302 is calculated as formula (2):
Cm＝kx+b (2)；
wherein x is the relative movement distance of the valve 1 and the valve bushing 2; k is a parameter related to the system structure size and dielectric constant, and b is an initial value of Cm when x is 0.
The embodiment of the utility model provides an in, the width and/or the thickness of moving polar plate (4) change according to sine function curve law, then move the width expression of polar plate 4 and be:
wherein x is the relative movement distance of the valve 1 and the valve bushing 2; h is the width of the moving plate 4 at the position x, A is the amplitude of the sine function, omega is the angular frequency,
the corresponding phase value when x is 0, h0The width of the movable plate 4 is 0. When the structure of the movable polar plate 4 is determined, A, omega,
And h0Are all determined values; for C1 and C2, the following calculation formula is given:
wherein C represents C1, C2 represents the capacitance value when the relative moving distance of the valve 1 and the valve bush 2 is different, S is the relative area of the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, and epsilon is the secondThe dielectric constant of the medium between the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, d is the distance between the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, a is the width of the first static polar plate 301 and the second static polar plate 302,
defining the boundary of the leftmost end of the movable polar plate 4 as the zero point, x, of displacement1、x2The left edges of the first static polar plate 301 and the second static polar plate 302 are respectively the positions when the displacement occurs, the distance between the first static polar plate 301 and the second static polar plate 302 is dc, and then dc is x2-x1A, conversion of equation (5) into Cm and x1Is a functional relationship Cm (x)1) (ii) a The relative movement distances x and x of the valve 1 and the valve bushing 21Is a consistent corresponding relation, is represented by x1Subtracting a fixed offset delta to establish a calculated relationship Cm (x + delta) with x.
(III) advantageous effects
According to the above technical scheme, the utility model discloses measurement valve with displacement self test function based on capacitance sensor has one of them or one of them part of following beneficial effect at least:
(1) the basic structure required by the capacitor is integrated on the structure of the metering valve assembly by utilizing the capacitor principle, so that the integrated design of the structural part and the sensor is realized;
(2) the device has the advantages of simple structure, light weight and small volume, is suitable for batch production, and is particularly suitable for occasions requiring absolute displacement detection, high reliability requirements and narrow installation space.
Drawings
Fig. 1 is the embodiment of the utility model provides a measurement valve's that has displacement self test function structural schematic based on capacitive sensor.
Fig. 2 is the embodiment of the utility model provides a valve structure sketch map of measurement valve with displacement self test function based on capacitive sensor.
Fig. 3 is the embodiment of the utility model provides a valve bush structure sketch map of metering valve with displacement self test function based on capacitive sensor.
Fig. 4 is a top view of a movable plate structure according to an embodiment of the present invention.
Fig. 5 is a top view of another structure of the movable plate according to the embodiment of the present invention.
Fig. 6 is a schematic structural diagram of a displacement detection module according to an embodiment of the present invention.
Fig. 7 is the embodiment of the utility model provides a displacement detection module and dynamic plate cooperation relation sketch map in the measurement valve with displacement self test function based on capacitive sensor.
Fig. 8 is the embodiment of the utility model provides an electric capacity group core component part sketch that moves polar plate and displacement detection module constitute in the measurement valve that has displacement self test function based on capacitive sensor.
Fig. 9 is a schematic diagram of an electrical connection and an equivalent circuit of a capacitor bank according to an embodiment of the present invention.
Fig. 10 is a schematic diagram illustrating a relationship between an output signal of a capacitor bank and a displacement of the valve, the capacitor bank being composed of a movable plate and a displacement detection module according to an embodiment of the present invention.
Fig. 11 is a schematic structural diagram of a movable electrode plate obtained by a surface coating process according to an embodiment of the present invention.
[ description of the main reference numerals in the drawings ] for the embodiments of the present invention
1-a valve; 101-valve oil outlet valve port; 102-valve inlet valve port;
2-valve bush; 201-valve bush oil outlet valve port; 202-valve liner oil inlet valve port;
3-a displacement detection module; 301-a first stationary plate; 302-a second stationary plate;
4-moving the polar plate; 401-insulating layer, 402-repeller.
Detailed Description
The utility model provides a measurement valve with displacement self test function based on capacitance sensor, the measurement valve with displacement self test function based on capacitance sensor utilizes the electric capacity principle to integrate the required basic structure of electric capacity at the structure of measurement valve subassembly, realizes the integrated design of structure and sensor. Based on the traditional precision manufacturing technology, a special processing technology is combined, advanced preparation means such as film coating and spraying are adopted, a movable polar plate and a displacement detection module are integrated in a metering valve assembly, the movable polar plate and the displacement detection module are firmly connected with a metering valve assembly base body, the metering valve with an absolute displacement self-detection function is formed, even if the valve moves after power failure, a displacement signal cannot be lost after power on and reset, and the real position relation between the valve and a valve bushing can be reflected. The device can be used for fuel metering working environment, has simple structure, light weight and small volume, is suitable for batch production, and is particularly suitable for occasions needing to detect absolute displacement, high reliability requirement and narrow installation space.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.
The embodiment of the utility model provides an in, provide a measurement valve with displacement self test function based on capacitance sensor, it is shown in combination fig. 1 to 8, the measurement valve with displacement self test function based on capacitance sensor, include:
a valve outlet port 101 in the side wall of the valve 1, an
The valve oil inlet valve port 102 is positioned on the side wall of the valve 1 and is arranged with the valve oil outlet valve port 101 along the axis of the valve 1;
the platform surface is parallel to the axis of the valve 1, is perpendicular to the radial direction of the valve 1, and is formed by processing the outer wall surface of the valve 1;
the valve bush oil outlet valve port 201 is positioned on the side wall of the valve bush 2 and is arranged corresponding to the valve bush oil outlet valve port;
valve liner inlet port 202; the valve bush oil outlet valve port 201 and the side wall of the valve bush 2 are arranged along the axis of the valve bush 2;
and an opening is formed in the position, corresponding to the platform surface, of the valve bushing 2.
The valve 1 slides in the valve liner 2 along the axial direction, and the size of the overlapping area of the valve oil inlet valve port 102 and the valve liner oil inlet valve port 202 and the size of the overlapping area of the valve oil outlet valve port 101 and the valve liner oil outlet valve port 201 are controlled by adjusting the relative positions of the valve 1 and the valve liner 2.
And the movable polar plate 4 is fixed on the platform surface and is parallel to the axis along the valve 1.
The displacement detection module 3, correspond move polar plate 4 set up in on the valve bush 2, include:
a first stationary plate 301, and
the second static polar plate 302 is arranged adjacent to the first static polar plate 301 at intervals and is insulated from the first static polar plate 301;
the width of the movable polar plate 4 is not more than that of the displacement detection module 3.
The displacement detection module 3 is used for forming a capacitor bank with the movable electrode plate 4, and the absolute displacement of the valve 1 is deduced by measuring the value of the capacitor bank.
The movable polar plate 4 is obtained by a conductive material processing mode, and the thickness is more than 0.3 mm;
the surface of the movable polar plate 4 is subjected to insulation treatment;
the movable polar plate 4 and the first and second static polar plates 301 and 302 in the displacement detection module have the length along the axial dimension of the valve 1, and have the width parallel to the platform surface and perpendicular to the axial direction of the valve 1; the dimension extending along the vertical platform face is its thickness.
The first static polar plate 301 and the second static polar plate 302 have the same shape and size.
The width and/or thickness of the movable polar plate 4 are/is changed according to the linear and/or sine isofunction curve rule;
and the movable polar plate 4 is insulated from the valve 1, the valve bushing 2 and the displacement detection module 3.
As shown in fig. 7 to 9, the first static plate 301 and the second static plate 302 are located outside the moving plate 4 but not directly contacting with each other, and are directly opposite to each other, so that a capacitor group is formed, the first static plate 301 and the moving plate 4 form a capacitor C1, the second static plate 302 and the moving plate 4 form a capacitor C2, the facing area of the first static plate 301 and the second static plate 302 forms a capacitor C3, and the combined capacitance Cm between the first static plate 301 and the second static plate 302 can be considered as a combination of a series connection of C1 and C2 and a parallel connection of C3, and the electrical connection is as shown in fig. 9, and the calculation formula (1) is:
wherein Cr is the equivalent capacitance formed by serially connecting C1 and C2.
As shown in fig. 8, when the medium is unchanged, C3 is a fixed value only related to the facing area of the first static pole plate 301 and the second static pole plate 302, and is not related to the moving pole plate 4; since the width of the movable pole plate 4 is changed, C1 and C2 are related to the relative position relationship of the movable pole plate 4, the first stationary pole plate 301 and the second stationary pole plate 302, that is, the relative position of the shutter 1 and the shutter bushing 2, when the shutter 1 moves, C1 and C2 change linearly, and Cm also changes linearly, as shown in fig. 10.
When the movable plate 4 has the structural form shown in fig. 4, one side of the movable plate is a straight line, and the integrated capacitance Cm between the first static plate 301 and the second static plate 302 is calculated as formula (2):
Cm＝kx+b (2)
wherein x is the relative movement distance of the valve 1 and the valve bushing 2; k is a parameter related to the system structure size and dielectric constant, which is a determined value when the system is determined; b is an initial value of Cm when x is 0.
When the movable pole plate 4 is in the structural form shown in fig. 5, one side of the movable pole plate is an arc, the expression of the width of the movable pole plate 4 is:
wherein x is the relative movement distance of the valve 1 and the valve bushing 2; h is the width of the moving plate 4 at the position x, A is the amplitude of the sine function, omega is the angular frequency,
when x is 0, corresponds toPhase value of h0The width of the movable plate 4 is 0. When the structure of the movable polar plate 4 is determined, A, omega,
And h0Are all determined values. For C1 and C2, the following calculation formula is given:
in the formula, C represents C1, the capacitance value of C2 when the relative movement distance between the valve 1 and the valve bushing 2 is different, S is the relative area of the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, epsilon is the dielectric constant of the medium between the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, d is the distance between the first static polar plate 301, the second static polar plate 302 and the movable polar plate 4, a is the width of the first static polar plate 301 and the second static polar plate 302, and t has the value interval of x to x + a;
the boundary of the leftmost end of the movable polar plate 4 is assumed as the zero point, x, of displacement1、x2The left edges of the first static polar plate 301 and the second static polar plate 302 are respectively the positions when the displacement occurs, the distance between the first static polar plate 301 and the second static polar plate 302 is dc, and then dc is x2-x1A, conversion of equation (5) into Cm and x1Is a functional relationship Cm (x)1). Obviously, the relative movement distances x and x of the valve 1 and the valve bushing 2 are1Is a consistent corresponding relationship, which can be represented by x1Subtracting a fixed offset δ, as shown in fig. 7, establishes the calculated relationship Cm (x + δ) of Cm to x.
When the thickness of the movable pole plate (4) changes according to a linear or sinusoidal function, expressions similar to the expressions (2) and (5) are generated, and the expressions are not repeated.
The position relation between the valve 1 and the valve bushing 2 can be obtained by calculating through detecting the Cm signal output by the displacement detection module 3. Obviously, the mapping relation always exists no matter whether the power is off or not, even if the valve 1 moves after the power is off, the displacement signal cannot be lost after power-on reset, and the real position relation of the valve 1 and the valve bushing 2 can be reflected.
In another embodiment of the present invention, as shown in fig. 11, the movable electrode plate 4 is obtained by a surface coating process (such as magnetron sputtering, spraying, etc.), the thickness is less than 0.3mm, and the movable electrode plate 4 includes:
an insulating layer 401 on the mesa surface, the fabrication materials including: insulating materials such as TiO2, Al2O3, polyimide, and the like;
the reflector 402 is positioned on the insulating layer 401, and the preparation material comprises conductive materials such as aluminum, gold, copper, silver, graphene and the like;
the function of the composite movable polar plate formed by combining the insulating layer 401 and the reflecting electrode 402 is equivalent to that of the movable polar plate 4.
The width of the repeller 402 is no greater than the width of the first stationary plate 301 and the second stationary plate 302, as shown in fig. 6. The first static plate 301 and the second static plate 302 are located above but not in direct contact with the reflector 402, and directly opposite thereto, form a capacitor bank, as shown in fig. 7 to 8. The absolute displacement of the valve 1 can be calculated by detecting the value of the capacitor bank.
So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Further, the above definitions of the various elements and methods are not limited to the various specific structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by those of ordinary skill in the art.
From the above description, the person skilled in the art should have a clear understanding of the present invention based on a capacitive sensor with a displacement self-test function.
To sum up, the utility model provides a measurement valve with displacement self test function based on capacitance sensor integrates the required basic structure of electric capacity structurally at measurement valve subassembly, realizes the integrated design of structure and sensor to alleviate among the prior art measurement valve structure complicacy of self test function, drive signal is complicated, easily receives the interference among the adverse circumstances, is not suitable for technical problem such as the occasion that absolute displacement, reliability requirement are high need be measured to needs.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", etc., used in the embodiments are only directions referring to the drawings, and are not intended to limit the protection scope of the present invention. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present invention.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present invention. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
Those skilled in the art will appreciate that the modules in the device in an embodiment may be adaptively changed and disposed in one or more devices different from the embodiment. The modules or units or components of the embodiments may be combined into one module or unit or component, and furthermore they may be divided into a plurality of sub-modules or sub-units or sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or elements of any method or apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features and/or processes or elements are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the invention and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be interpreted as reflecting an intention that: rather, the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. A metering valve with displacement self-detection function based on a capacitance sensor is characterized by comprising:
the whole valve (1) is columnar, the outer wall surface of the valve (1) is provided with a platform surface, and the side wall surface is provided with a valve oil outlet valve port (101) and a valve oil inlet valve port (102);
the valve bush (2) is integrally cylindrical, is sleeved outside the valve (1), and is provided with a valve bush oil outlet valve port (201) and a valve bush oil inlet valve port (202) corresponding to the valve oil outlet valve port (101) and the valve oil inlet valve port (102) respectively;
the valve (1) slides in the valve bushing (2) along the axial direction, and the size of the overlapping area of the valve oil inlet valve port (102) and the valve bushing oil inlet valve port (202) and the size of the overlapping area of the valve oil outlet valve port (101) and the valve bushing oil outlet valve port (201) are controlled by adjusting the relative positions of the valve (1) and the valve bushing (2);
the valve bushing (2) is provided with an opening corresponding to the platform surface;
the movable polar plate (4) is fixed on the platform surface and is parallel to the axis of the valve (1);
the displacement detection module (3) is correspondingly arranged on the outer side of the movable polar plate (4) and comprises:
the displacement detection module (3) is used for forming a capacitor bank with the movable polar plate (4), and the value of the capacitor bank is related to the absolute displacement of the valve (1).
2. Metering shutter with self-test function of displacement based on capacitive sensors according to claim 1, characterized by the fact that the displacement detection module (3) comprises:
a first stationary plate (301), and
and the second static polar plate (302) and the first static polar plate (301) are arranged adjacent to each other at intervals along the axial direction of the valve (1) and are insulated from each other.
3. The metering shutter with displacement self-test function based on capacitive sensor according to claim 2, characterized in that the width of the first and second static plates (301, 302) is not less than the width of the movable plate (4).
4. Metering shutter with self-test function of displacement based on capacitive sensors according to claim 1, characterized in that said mobile plate (4) is obtained by machining, with a thickness not less than 0.3 mm.
5. The metering shutter with displacement self-test function based on capacitive sensor according to claim 1, characterized in that said mobile plate (4) is obtained by means of a surface coating process, with a thickness of less than 0.3mm, comprising:
an insulating layer (401) on the mesa face;
a repeller (402) on the insulating layer (401).
6. The metering shutter with self-test function of displacement based on capacitive sensors according to claim 1, characterized in that the width and/or thickness of the mobile plate (4) varies according to a linear and/or sinusoidal function curve law; the movable polar plate (4) is insulated from the valve (1), the valve bushing (2) and the displacement detection module (3).
7. The metering valve with displacement self-detection function based on the capacitance sensor according to any one of claims 2 or 3, characterized in that the first static plate (301) and the second static plate (302) are located above the movable plate (4) but not directly contacted with each other, and are directly opposite to each other to form a capacitance group, the first static plate (301) and the movable plate (4) form a capacitance C1, the second static plate (302) and the movable plate (4) form a capacitance C2, the facing area portions of the first static plate (301) and the second static plate (302) form a capacitance C3, and the integrated capacitance Cm between the first static plate (301) and the second static plate (302) is formed by connecting the capacitance C1 and the capacitance C2 in series and then connecting the capacitance C3 in parallel, and the calculation formula is as follows:
cr is an equivalent capacitor formed by serially connecting capacitors C1 and C2, and the position relation between the valve (1) and the valve bushing (2) can be obtained by calculating through detecting a Cm signal output by the displacement detection module (3).
8. The metering shutter with displacement self-test function based on capacitive sensor according to claim 6, characterized in that the width and/or thickness of the movable plate (4) varies according to a linear law, the integrated capacitance Cm between the first static plate (301) and the second static plate (302) being calculated as formula (2):
Cm＝kx+b (2)；
wherein x is the relative movement distance of the valve (1) and the valve bushing (2); k is a parameter related to the system structure size and dielectric constant, and b is an initial value of Cm when x is 0.
9. The metering shutter with displacement self-test function based on capacitive sensor according to claim 6, characterized in that the width and/or thickness of the movable plate (4) varies according to a sine function curve, and the expression of the width of the movable plate (4) is:
wherein x is the relative movement distance of the valve (1) and the valve bushing (2); h is the width value of the movable polar plate (4) at the position x, A is the amplitude of the sine function, omega is the angular frequency,
the corresponding phase value when x is 0, h0When x is 0, the width value of the movable polar plate (4) is obtained; when the structure of the movable polar plate (4) is determined, A, omega,
And h0Are all determined values; for C1 and C2, the following calculation formula is given:
wherein C represents C1, C2 represents the capacitance value when the relative movement distance between the valve (1) and the valve bush (2) is different, S is the relative area of the first static polar plate (301), the second static polar plate (302) and the movable polar plate (4), epsilon is the dielectric constant of the medium among the first static polar plate (301), the second static polar plate (302) and the movable polar plate (4), d is the distance between the first static polar plate (301), the second static polar plate (302) and the movable polar plate (4), a is the width of the first static polar plate (301) and the second static polar plate (302),
defining the boundary of the leftmost end of the movable polar plate (4) as the zero point of displacement, x1、x2Respectively a first static polar plate (301) and a second static polar plate when displacement occursThe left edge of the two static polar plates (302) is positioned, the distance between the first static polar plate (301) and the second static polar plate (302) is dc, and then dc is equal to x2-x1A, conversion of equation (5) into Cm and x1Is a functional relationship Cm (x)1) (ii) a The relative movement distance x and x between the valve (1) and the valve bushing (2)1Is a consistent corresponding relation, is represented by x1Subtracting a fixed offset delta to establish a calculated relationship Cm (x + delta) with x.
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| CN109958537B (en) * | 2019-04-04 | 2024-05-07 | 中国科学院工程热物理研究所 | Metering valve with displacement self-detection function based on capacitance sensor |
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