CN210105998U - Metering valve with displacement self-detection function based on capacitive sensor - Google Patents

Metering valve with displacement self-detection function based on capacitive sensor Download PDF

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CN210105998U
CN210105998U CN201920458825.6U CN201920458825U CN210105998U CN 210105998 U CN210105998 U CN 210105998U CN 201920458825 U CN201920458825 U CN 201920458825U CN 210105998 U CN210105998 U CN 210105998U
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valve
pole plate
static
bushing
plate
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赵世迁
郑会龙
张谭
杨肖芳
裴宇
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Institute of Engineering Thermophysics of CAS
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Abstract

一种基于电容传感器的具有位移自检测功能的计量活门,包括:活门,整体呈柱状,其外壁面加工有平台面,侧壁面设置有活门出油阀口和活门进油阀口;活门衬套,整体呈筒状,衬套于活门外,对应活门出油阀口和活门进油阀口分别设置有活门衬套出油阀口和活门衬套进油阀口;活门在活门衬套中沿轴向滑动,通过调节活门和活门衬套的相对位置,控制活门进油阀口和活门衬套进油阀口重叠面积的大小,以及活门出油阀口和活门衬套出油阀口重叠面积的大小;活门衬套对应平台面设置有开口;动极板,固定于平台面上,平行于沿活门的轴线;位移检测模块,对应设置在动极板外侧,位移检测模块用于与动极板形成电容组,电容组值与活门的绝对位移量相关。

Figure 201920458825

A metering valve with displacement self-detection function based on capacitive sensor, comprising: a valve, which is cylindrical as a whole, a platform surface is machined on its outer wall, and a valve oil outlet valve and a valve oil inlet valve port are arranged on the side wall surface; a valve bushing , the whole is cylindrical, the bushing is outside the valve, the valve bushing oil outlet valve and the valve bushing oil inlet valve port are respectively set corresponding to the valve oil outlet valve port and the valve oil inlet valve port; the valve is in the middle edge of the valve bushing. Axial sliding, by adjusting the relative position of the valve and the valve bushing, to control the overlapping area of the valve inlet valve port and the valve bushing inlet valve port, as well as the overlapping area of the valve outlet valve port and the valve bushing outlet valve port The valve bushing is provided with an opening corresponding to the platform surface; the moving pole plate is fixed on the platform surface and is parallel to the axis along the valve; the displacement detection module is correspondingly arranged on the outside of the moving pole plate, and the displacement detection module is used to connect with the moving pole The plates form a capacitor bank whose value is related to the absolute displacement of the valve.

Figure 201920458825

Description

基于电容传感器的具有位移自检测功能的计量活门Metering valve with displacement self-detection function based on capacitive sensor

技术领域technical field

本实用新型涉及机械结构及其制造领域,尤其涉及一种基于电容传感器的具有位移自检测功能的计量活门,用于航空、航天及自动化机械中气、液压机械结构中。The utility model relates to the field of mechanical structures and their manufacture, in particular to a metering valve with displacement self-detection function based on capacitive sensors, which is used in pneumatic and hydraulic mechanical structures in aviation, aerospace and automated machinery.

背景技术Background technique

计量活门在航空航天控制系统中起到计量供往发动机燃油的作用。目前,其计量原理是在衬套侧壁开槽,通过齿轮-齿条系相连接的角位移传感器或活门后端连接的线位移传感器将活门位移量转化为反馈电压信号,实现对燃油流量大小的测量及反馈。The metering valve plays the role of metering fuel to the engine in the aerospace control system. At present, the measurement principle is to make a groove on the side wall of the bushing, and convert the displacement of the valve into a feedback voltage signal through the angular displacement sensor connected by the gear-rack system or the linear displacement sensor connected at the rear end of the valve, so as to realize the adjustment of the fuel flow rate. measurement and feedback.

然而传统直线式或旋转式计量活门其活门与位置传感器是独立开的,即传感器置于计量活门外侧,虽然稳定性较好,但重量及余度设计均有其局限性,传感器自重较大,空间占用也较大,面对现阶段集成化、小型化、轻量化的控制要求,其应用已显示出劣势。However, the valve and the position sensor of the traditional linear or rotary metering valve are opened independently, that is, the sensor is placed outside the metering valve. Although the stability is good, the weight and redundancy design have their limitations. The sensor has a large self-weight. The space occupation is also large, and its application has shown disadvantages in the face of the current control requirements of integration, miniaturization, and light weight.

电容式位移传感原理已在我国发展多年并已获得了广泛的应用,其稳定性和准确性已经在实际应用中得到了有效验证。将电容式位移传感器集成到计量活门上,由原分体式结构变成一体式组合部件,保证原有分体式元器件的各个功能,减小了其所占的重量和空间,提高综合性能。The principle of capacitive displacement sensing has been developed in my country for many years and has been widely used, and its stability and accuracy have been effectively verified in practical applications. The capacitive displacement sensor is integrated into the metering valve, and the original split structure is turned into an integrated component, which ensures the various functions of the original split components, reduces the weight and space occupied by them, and improves the overall performance.

目前电容式位移传感器,例如中国专利ZL106762161所示的具有位移自检测功能的计量活门,利用容栅位移测量技术来实现测量计量活门位移的目的,但它的“定栅”结构复杂,驱动信号复杂,且位移量是相对于当前零点(上电时所在位置或者手动设置的清零位置)处的位移值,遇到雷击、掉电等情形时会丢失零点,若此期间活门发生了位移,上电复位时测得的位移量无法反应出真实的位移量,即无法实现绝对位移的测量,存在隐患,不适用于需要测量绝对位移、可靠性要求高的场合。At present, capacitive displacement sensors, such as the metering valve with displacement self-detection function shown in Chinese patent ZL106762161, use capacitive grid displacement measurement technology to achieve the purpose of measuring the displacement of the metering valve, but its "fixed grid" structure is complex and the driving signal is complex , and the displacement is the displacement value relative to the current zero point (the position at power-on or the reset position manually set), the zero point will be lost in the event of lightning strike, power failure, etc. If the valve is displaced during this period, the upper The displacement measured during electrical reset cannot reflect the real displacement, that is, the measurement of absolute displacement cannot be realized, and there are hidden dangers. It is not suitable for occasions where absolute displacement needs to be measured and reliability requirements are high.

实用新型内容Utility model content

(一)要解决的技术问题(1) Technical problems to be solved

基于上述问题,本实用新型提供了一种基于电容传感器的具有位移自检测功能的计量活门,以缓解现有技术中自检测功能的计量活门结构复杂,驱动信号复杂,恶劣环境中易受干扰,不适用于需要测量绝对位移、可靠性要求高的场合等技术问题。Based on the above problems, the present utility model provides a metering valve with a displacement self-detection function based on a capacitive sensor, so as to alleviate the complex structure of the metering valve with the self-detection function in the prior art, the complex driving signal, and the easy interference in harsh environments. It is not suitable for technical problems such as the need to measure absolute displacement and high reliability requirements.

(二)技术方案(2) Technical solutions

本实用新型提供一种基于电容传感器的具有位移自检测功能的计量活门,其特征在于,包括:活门(1),整体呈柱状,其外壁面加工有平台面,侧壁面设置有活门出油阀口(101)和活门进油阀口(102);活门衬套(2),整体呈筒状,衬套于所述活门(1)外,对应所述活门出油阀口(101)和活门进油阀口(102)分别设置有活门衬套出油阀口(201)和活门衬套进油阀口(202);所述活门(1)在活门衬套(2)中沿轴向滑动,通过调节活门(1)和活门衬套(2)的相对位置,控制活门进油阀口(102)和活门衬套进油阀口(202)重叠面积的大小,以及活门出油阀口(101)和活门衬套出油阀口(201)重叠面积的大小;所述活门衬套(2)对应所述平台面设置有开口;动极板(4),固定于所述平台面上,平行于沿活门(1)的轴线;位移检测模块(3),对应设置在所述动极板(4)外侧,包括:所述位移检测模块(3)用于与动极板(4)形成电容组,所述电容组值与活门(1)的绝对位移量相关。The utility model provides a metering valve with a displacement self-detection function based on a capacitive sensor, which is characterized by comprising: a valve (1), which is in the shape of a column as a whole, its outer wall surface is machined with a platform surface, and the side wall surface is provided with a valve oil outlet valve Port (101) and valve inlet valve port (102); valve bushing (2), the whole is cylindrical, the bushing is outside the valve (1), corresponding to the valve outlet (101) and the valve The oil inlet valve port (102) is respectively provided with a valve bushing oil outlet valve port (201) and a valve bushing oil inlet valve port (202); the valve (1) slides axially in the valve bushing (2) , By adjusting the relative position of the valve (1) and the valve bushing (2), the overlapping area of the valve inlet valve port (102) and the valve bushing inlet valve port (202), as well as the valve outlet valve port ( 101) and the size of the overlapping area of the valve bushing oil outlet valve port (201); the valve bushing (2) is provided with an opening corresponding to the platform surface; the moving pole plate (4) is fixed on the platform surface, parallel to the axis along the shutter (1); a displacement detection module (3), correspondingly arranged on the outer side of the movable pole plate (4), comprising: the displacement detection module (3) is used for forming with the movable pole plate (4) A capacitance group, the value of the capacitance group is related to the absolute displacement of the shutter (1).

在本实用新型实施例中,所述位移检测模块(3),包括:第一静极板(301),以及第二静极板(302),与所述第一静极板(301)沿活门(1)轴向相邻间隔设置且相互绝缘。In the embodiment of the present invention, the displacement detection module (3) includes: a first static electrode plate (301), and a second static electrode plate (302), which are along the edge of the first static electrode plate (301). The shutters (1) are axially adjacent and spaced apart and insulated from each other.

在本实用新型实施例中,所述第一静极板(301)以及第二静极板(302)的宽度不小于动极板(4)的宽度。In the embodiment of the present invention, the width of the first static pole plate (301) and the second static pole plate (302) is not less than the width of the moving pole plate (4).

在本实用新型实施例中,所述动极板(4)为机加工方式获得,厚度不小于0.3mm。In the embodiment of the present invention, the moving pole plate (4) is obtained by machining, and the thickness is not less than 0.3 mm.

在本实用新型实施例中,所述动极板(4)通过表面镀膜工艺获得,厚度小于0.3mm,包括:绝缘层(401),位于所述平台面上;反射极(402),位于所述绝缘层(401)上。In the embodiment of the present utility model, the moving electrode plate (4) is obtained by a surface coating process, the thickness is less than 0.3 mm, and includes: an insulating layer (401), located on the platform surface; a reflector (402), located on the on the insulating layer (401).

在本实用新型实施例中,所述动极板(4)的宽度和/或厚度按线性和/或正弦函数曲线规律变化;所述动极板(4)与活门(1)、活门衬套(2)及位移检测模块(3)相互绝缘。In the embodiment of the present utility model, the width and/or thickness of the movable pole plate (4) changes according to the law of linear and/or sinusoidal function curve; (2) and the displacement detection module (3) are insulated from each other.

在本实用新型实施例中,所述绝缘层的制备材料包括:TiO2、Al2O3、SiO2、聚酰亚胺中任意一种或其混合物;所述反射极(402)的制备材料包括铝、金、铜、银、石墨烯中任意一种或其混合物。In the embodiment of the present invention, the preparation material of the insulating layer includes: any one of TiO2, Al2O3, SiO2, polyimide or a mixture thereof; the preparation material of the reflector (402) includes aluminum, gold, Any one of copper, silver, graphene or a mixture thereof.

在本实用新型实施例中,所述第一静极板(301)、第二静极板(302)位于动极板(4)的上方但不直接接触,与之正相对,形成电容组,第一静极板(301)与动极板(4)形成电容C1,第二静极板(302)与动极板(4)形成电容C2,第一静极板(301)与第二静极板(302)正对面积部分形成电容C3,第一静极板(301)与第二静极板(302)间的综合电容Cm是电容C1与电容C2串联后与电容C3并联而成,计算公式为:In the embodiment of the present invention, the first static pole plate (301) and the second static pole plate (302) are located above the moving pole plate (4) but are not in direct contact with them, so as to form a capacitor group, The first static pole plate (301) and the moving pole plate (4) form a capacitor C1, the second static pole plate (302) and the moving pole plate (4) form a capacitor C2, and the first static pole plate (301) and the second static pole plate (301) and the second static pole plate (301) form a capacitor C2. A capacitor C3 is formed in the area facing the polar plate (302), and the integrated capacitance Cm between the first static electrode plate (301) and the second static electrode plate (302) is formed by the capacitor C1 and the capacitor C2 in series and then the capacitor C3 in parallel. The calculation formula is:

Figure BDA0002018127500000031
Figure BDA0002018127500000031

式中Cr是电容C1、C2串联后的等效电容,通过检测位移检测模块(3)输出的Cm信号即可解算得到活门(1)与活门衬套(2)的位置关系。In the formula, Cr is the equivalent capacitance after the capacitors C1 and C2 are connected in series. By detecting the Cm signal output by the displacement detection module (3), the positional relationship between the valve (1) and the valve bushing (2) can be calculated.

在本实用新型实施例中,所述动极板(4)的宽度和/或厚度按线性规律变化,第一静极板301与第二静极板302间的综合电容Cm计算如公式(2):In the embodiment of the present invention, the width and/or thickness of the moving pole plate (4) changes according to a linear law, and the comprehensive capacitance Cm between the first static pole plate 301 and the second static pole plate 302 is calculated as in formula (2 ):

Cm=kx+b (2);Cm=kx+b(2);

式中x是活门1与活门衬套2的相对移动距离;k是与系统结构尺寸及介电常数相关的参数,b是当x=0时Cm的初始值。In the formula, x is the relative moving distance between the shutter 1 and the shutter bushing 2; k is the parameter related to the system structure size and dielectric constant, and b is the initial value of Cm when x=0.

在本实用新型实施例中,所述动极板(4)的宽度和/或厚度按正弦函数曲线规律变化,则动极板4的宽度表达式为:In the embodiment of the present utility model, the width and/or thickness of the moving pole plate (4) changes according to the law of the sine function curve, then the expression of the width of the moving pole plate 4 is:

Figure BDA0002018127500000032
Figure BDA0002018127500000032

式中x是活门1与活门衬套2的相对移动距离;h是x位置处动极板4的宽度值,A为正弦函数的幅值,ω为角频率,

Figure BDA0002018127500000033
为x=0时对应的相位值,h0为x=0时动极板4的宽度值。当动极板4的结构确定时,A、ω、
Figure BDA0002018127500000034
及h0均是确定的值;对于C1及C2,有如下计算公式:where x is the relative moving distance between the valve 1 and the valve bushing 2; h is the width of the moving pole plate 4 at the x position, A is the amplitude of the sine function, ω is the angular frequency,
Figure BDA0002018127500000033
is the corresponding phase value when x=0, h 0 is the width value of the moving pole plate 4 when x=0. When the structure of the moving pole plate 4 is determined, A, ω,
Figure BDA0002018127500000034
and h 0 are determined values; for C1 and C2, there are the following formulas:

Figure BDA0002018127500000041
Figure BDA0002018127500000041

Figure BDA0002018127500000042
Figure BDA0002018127500000042

其中,C代表C1,C2在活门1与活门衬套2的相对移动距离不同时的电容值,S是第一静极板301、第二静极板302与动极板4的相对面积,ε为第一静极板301、第二静极板302与动极板4间介质的介电常数,d为第一静极板301、第二静极板302与动极板4的间距,a为第一静极板301、第二静极板302的宽度,

Figure BDA0002018127500000043
定义动极板4最左端边界为位移的零点,x1、x2分别为位移发生时第一静极板301、第二静极板302左边沿的位置,第一静极板301、第二静极板302间距为dc,则有dc=x2-x1-a,公式(5)转化为Cm与x1的函数关系Cm(x1);活门1与活门衬套2的相对移动距离x与x1是一致对应的关系,是由x1减去一个固定的偏移量δ得到,由此建立了Cm与x的计算关系Cm(x+δ)。Among them, C represents the capacitance values of C1 and C2 when the relative moving distances of the valve 1 and the valve bushing 2 are different, S is the relative area of the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, ε is the dielectric constant of the medium between the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, d is the distance between the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, a is the width of the first static pole plate 301 and the second static pole plate 302,
Figure BDA0002018127500000043
Define the leftmost boundary of the moving pole plate 4 as the zero point of displacement, x 1 and x 2 are the positions of the left edge of the first static pole plate 301 and the second static pole plate 302 when the displacement occurs, respectively. The first static pole plate 301 and the second static pole plate 301 If the distance between the static pole plates 302 is dc, then there is dc=x 2 -x 1 -a, and formula (5) is converted into Cm(x 1 ), a functional relationship between Cm and x 1 ; the relative moving distance between the shutter 1 and the shutter bushing 2 The relationship between x and x 1 is consistent and corresponding, which is obtained by subtracting a fixed offset δ from x 1 , thereby establishing the calculation relationship Cm(x+δ) between Cm and x.

(三)有益效果(3) Beneficial effects

从上述技术方案可以看出,本实用新型基于电容传感器的具有位移自检测功能的计量活门至少具有以下有益效果其中之一或其中一部分:It can be seen from the above technical solutions that the metering valve with displacement self-detection function based on the capacitive sensor of the present invention has at least one or a part of the following beneficial effects:

(1)利用电容原理将电容所需的基本结构集成在计量活门组件的结构上,实现结构件与传感器的集成设计;(1) The basic structure required by the capacitor is integrated into the structure of the metering valve assembly by using the principle of capacitance, and the integrated design of the structural member and the sensor is realized;

(2)结构简单、重量轻、体积小,适用于批量生产,尤其适用于需要检测绝对位移量、可靠性要求高、安装空间狭小的场合。(2) Simple structure, light weight and small volume, suitable for mass production, especially suitable for occasions where absolute displacement needs to be detected, high reliability requirements, and small installation space.

附图说明Description of drawings

图1为本实用新型实施例基于电容传感器的具有位移自检测功能的计量活门的结构示意图。FIG. 1 is a schematic structural diagram of a metering shutter with a displacement self-detection function based on a capacitive sensor according to an embodiment of the present invention.

图2为本实用新型实施例基于电容传感器的具有位移自检测功能的计量活门的活门结构示意图。2 is a schematic structural diagram of a metering valve with a displacement self-detection function based on a capacitive sensor according to an embodiment of the present invention.

图3为本实用新型实施例基于电容传感器的具有位移自检测功能的计量活门的活门衬套结构示意图。3 is a schematic structural diagram of a valve bushing of a metering valve with displacement self-detection function based on a capacitive sensor according to an embodiment of the present invention.

图4为本实用新型实施例一种动极板结构的俯视图。4 is a top view of a moving pole plate structure according to an embodiment of the present invention.

图5为本实用新型实施例动极板的另一种结构的俯视图。FIG. 5 is a top view of another structure of the movable electrode plate according to the embodiment of the present invention.

图6为本实用新型实施例位移检测模块的结构示意图。FIG. 6 is a schematic structural diagram of a displacement detection module according to an embodiment of the present invention.

图7为本实用新型实施例基于电容传感器的具有位移自检测功能的计量活门中位移检测模块与动极板配合关系示意图。FIG. 7 is a schematic diagram of the cooperation relationship between the displacement detection module and the movable electrode plate in the metering valve with the displacement self-detection function based on the capacitive sensor according to the embodiment of the present invention.

图8为本实用新型实施例基于电容传感器的具有位移自检测功能的计量活门中动极板与位移检测模块构成的电容组核心组成部件示意图。8 is a schematic diagram of the core components of the capacitance group composed of the moving plate and the displacement detection module in the metering valve with displacement self-detection function based on the capacitance sensor according to the embodiment of the present invention.

图9为本实用新型实施例电容组电气连接及其等效电路原理示意图。FIG. 9 is a schematic diagram of the electrical connection of the capacitor bank and its equivalent circuit principle according to the embodiment of the present invention.

图10为本实用新型实施例动极板与位移检测模块构成的电容组输出信号与活门位移量关系示意图。FIG. 10 is a schematic diagram of the relationship between the output signal of the capacitor group formed by the movable electrode plate and the displacement detection module and the displacement of the shutter according to the embodiment of the present invention.

图11为本实用新型实施例通过表面镀膜工艺获得的动极板的结构示意图示意图。11 is a schematic structural diagram of a moving electrode plate obtained by a surface coating process according to an embodiment of the present invention.

【附图中本实用新型实施例主要元件符号说明】[Description of the main components of the embodiment of the present utility model in the accompanying drawings]

1-活门;101-活门出油阀口;102-活门进油阀口;1-valve; 101-valve oil outlet; 102-valve inlet valve;

2-活门衬套;201-活门衬套出油阀口;202-活门衬套进油阀口;2-valve bushing; 201-valve bushing outlet valve; 202-valve bushing inlet valve;

3-位移检测模块;301-第一静极板;302-第二静极板;3-displacement detection module; 301-first static plate; 302-second static plate;

4-动极板;401-绝缘层,402-反射极。4-moving plate; 401-insulating layer, 402-reflector.

具体实施方式Detailed ways

本实用新型提供了一种基于电容传感器的具有位移自检测功能的计量活门,所述基于电容传感器的具有位移自检测功能的计量活门利用电容原理将电容所需的基本结构集成在计量活门组件的结构上,实现结构件与传感器的集成设计。基于传统精密制造技术,结合特种加工工艺,采用镀膜、喷涂等先进制备手段,在计量活门组件中集成动极板和位移检测模块,使其与计量活门组件基体牢固接合,成为具备绝对位移自检测功能的计量活门,即使在掉电后活门发生了移动,上电复位后,位移信号也不会丢失,能够反映活门与活门衬套的真实位置关系。可用于燃油计量工作环境,结构简单、重量轻、体积小,适用于批量生产,尤其适用于需要检测绝对位移量、可靠性要求高、安装空间狭小的场合。The utility model provides a metering valve with displacement self-detection function based on capacitance sensor, which utilizes the principle of capacitance to integrate the basic structure required by capacitance into the metering valve assembly. Structurally, the integrated design of structural components and sensors is realized. Based on traditional precision manufacturing technology, combined with special processing technology, advanced preparation methods such as coating and spraying are used to integrate the moving electrode plate and displacement detection module in the metering valve assembly, so that it is firmly bonded to the base of the metering valve assembly, and it becomes a self-detection system with absolute displacement. The functional metering valve, even if the valve moves after power failure, the displacement signal will not be lost after power-on reset, which can reflect the real positional relationship between the valve and the valve bushing. It can be used in the working environment of fuel metering, with simple structure, light weight and small volume, suitable for mass production, especially suitable for occasions where absolute displacement needs to be detected, high reliability requirements, and small installation space.

为使本实用新型的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本实用新型进一步详细说明。In order to make the purpose, technical solutions and advantages of the present utility model more clearly understood, the present utility model will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

在本实用新型实施例中,提供一种基于电容传感器的具有位移自检测功能的计量活门,结合图1至图8所示,所述基于电容传感器的具有位移自检测功能的计量活门,包括:In an embodiment of the present utility model, a capacitive sensor-based metering valve with displacement self-detection function is provided. With reference to FIGS. 1 to 8 , the capacitive sensor-based metering valve with displacement self-detection function includes:

活门1,整体呈柱状,包括:The valve 1, which is cylindrical as a whole, includes:

活门出油阀口101,位于所述活门1的侧壁,以及The valve outlet 101 is located on the side wall of the valve 1, and

活门进油阀口102,位于所述活门1的侧壁,与所述活门出油阀口101沿活门1的轴线排列;The valve inlet valve port 102 is located on the side wall of the valve 1, and is arranged along the axis of the valve 1 with the valve outlet valve port 101;

平台面,其平行于活门1的轴线,垂直于所述活门1径向,由活门1的外壁面加工而成;The platform surface, which is parallel to the axis of the shutter 1 and perpendicular to the radial direction of the shutter 1, is processed from the outer wall surface of the shutter 1;

活门衬套2,整体呈筒状,衬套于所述活门1外,包括:The valve bushing 2 is cylindrical as a whole, and the bushing is outside the valve 1, including:

活门衬套出油阀口201,位于所述活门衬套2的侧壁,对应所述活门出油阀口设置;The valve bushing oil outlet valve port 201 is located on the side wall of the valve bushing 2, and is set corresponding to the valve oil outlet valve port;

活门衬套进油阀口202;位于所述活门衬套2的侧壁,与所述活门衬套出油阀口201沿活门衬套2的轴线排列;The valve bushing oil inlet valve port 202; is located on the side wall of the valve bushing 2, and is arranged with the valve bushing oil outlet valve port 201 along the axis of the valve bushing 2;

所述活门衬套2对应所述平台面的位置设置有开口。The shutter bushing 2 is provided with an opening corresponding to the position of the platform surface.

所述活门1在活门衬套2中沿轴向滑动,通过调节活门1和活门衬套2的相对位置,控制活门进油阀口102和活门衬套进油阀口202重叠面积的大小,以及活门出油阀口101和活门衬套出油阀口201重叠面积的大小。The valve 1 slides in the valve bushing 2 along the axial direction, and by adjusting the relative positions of the valve 1 and the valve bushing 2, the overlapping area of the valve inlet valve port 102 and the valve bushing inlet valve port 202 is controlled, and The size of the overlapping area of the valve oil outlet valve port 101 and the valve bushing oil outlet valve port 201 .

动极板4,固定于所述平台面上,平行于沿活门1的轴线。The movable pole plate 4 is fixed on the platform surface and is parallel to the axis along the shutter 1 .

位移检测模块3,对应所述动极板4设置于所述活门衬套2上,包括:The displacement detection module 3 is arranged on the shutter bushing 2 corresponding to the movable pole plate 4, and includes:

第一静极板301,以及the first static plate 301, and

第二静极板302,与所述第一静极板301相邻间隔设置且相互绝缘;The second static electrode plate 302 is disposed adjacent to the first static electrode plate 301 at intervals and insulated from each other;

所述动极板4的宽度不大于所述位移检测模块3的宽度。The width of the moving pole plate 4 is not greater than the width of the displacement detection module 3 .

所述位移检测模块3用于与动极板4形成电容组,通过测量电容组值进而推导出活门1的绝对位移量。The displacement detection module 3 is used to form a capacitance group with the movable electrode plate 4, and the absolute displacement of the shutter 1 is deduced by measuring the capacitance group value.

所述动极板4由导电材料机加工方式获得,厚度大于0.3mm;The moving pole plate 4 is obtained by machining a conductive material, and the thickness is greater than 0.3 mm;

所述动极板4的表面绝缘处理;The surface insulation treatment of the moving pole plate 4;

所述动极板4以及位移检测模块中的第一静极板301及第二静极板302沿活门1轴向尺寸为其长度,平行与平台面且垂直于活门1轴向为其宽度;沿垂直平台面延伸的尺寸为其厚度。The movable pole plate 4 and the first static pole plate 301 and the second static pole plate 302 in the displacement detection module have their lengths along the axial direction of the shutter 1, and their widths are parallel to the platform surface and perpendicular to the axial direction of the shutter 1; The dimension extending along the vertical deck face is its thickness.

所述第一静极板301与第二静极板302形状、尺寸相同。The first static pole plate 301 and the second static pole plate 302 have the same shape and size.

所述动极板4的宽度和/或厚度按线性和/或正弦等函数曲线规律变化;The width and/or thickness of the moving pole plate 4 change according to the function curve law such as linearity and/or sine;

所述动极板4与活门1、活门衬套2及位移检测模块3相互绝缘。The moving pole plate 4 is insulated from the shutter 1 , the shutter bushing 2 and the displacement detection module 3 .

如图7~图9所示,所述第一静极板301、第二静极板302位于动极板4的外侧但不直接接触,与之正相对,因此形成了电容组,第一静极板301与动极板4形成电容C1,第二静极板302与动极板4形成电容C2,第一静极板301与第二静极板302正对面积部分形成电容C3,第一静极板301与第二静极板302间的综合电容Cm可认为是C1与C2串联后与C3并联而成,其电气连接如图9所示,计算公式(1)为:As shown in FIGS. 7 to 9 , the first static pole plate 301 and the second static pole plate 302 are located outside the moving pole plate 4 but are not in direct contact with them, so they are opposite to each other, thus forming a capacitor group. The pole plate 301 and the moving pole plate 4 form a capacitor C1, the second static pole plate 302 and the moving pole plate 4 form a capacitor C2, and the area facing the first static pole plate 301 and the second static pole plate 302 forms a capacitor C3. The comprehensive capacitance Cm between the static pole plate 301 and the second static pole plate 302 can be considered to be formed by C1 and C2 in series and then in parallel with C3. Its electrical connection is shown in Figure 9, and the calculation formula (1) is:

式中Cr是C1、C2串联后的等效电容。In the formula, Cr is the equivalent capacitance of C1 and C2 in series.

结合图8所示,在介质不变时,C3仅和第一静极板301与第二静极板302正对面积有关,是一个定值,与动极板4无关;因动极板4宽度是变化的,C1、C2与动极板4、第一静极板301以及第二静极板302相对位置关系有关,即与活门1与活门衬套2相对位置有关,当活门1移动时,C1、C2呈线性变化,Cm也呈线性变化,如图10所示。As shown in FIG. 8 , when the medium remains unchanged, C3 is only related to the area facing the first static pole plate 301 and the second static pole plate 302 , which is a fixed value and has nothing to do with the moving pole plate 4 ; The width varies. C1 and C2 are related to the relative positional relationship between the movable pole plate 4, the first static pole plate 301 and the second static pole plate 302, that is, related to the relative position of the valve 1 and the valve bushing 2. When the valve 1 moves , C1 and C2 change linearly, and Cm also changes linearly, as shown in Figure 10.

当动极板4为图4中所示的结构形式,其一条边为直线,第一静极板301与第二静极板302间的综合电容Cm计算如公式(2):When the movable electrode plate 4 is in the structural form shown in FIG. 4 , and one side thereof is a straight line, the comprehensive capacitance Cm between the first static electrode plate 301 and the second static electrode plate 302 is calculated as formula (2):

Cm=kx+b (2)Cm=kx+b (2)

式中x是活门1与活门衬套2的相对移动距离;k是与系统结构尺寸及介电常数相关的参数,当系统确定时,该参数是确定值;b是当x=0时Cm的初始值。In the formula, x is the relative moving distance between the valve 1 and the valve bushing 2; k is a parameter related to the structure size and dielectric constant of the system. When the system is determined, this parameter is a determined value; b is the Cm when x=0. initial value.

当动极板4为图5中所示的结构形式,其一条边为弧线,则动极板4的宽度表达式为:When the moving pole plate 4 is in the structural form shown in FIG. 5, and one of its sides is an arc, the width expression of the moving pole plate 4 is:

式中x是活门1与活门衬套2的相对移动距离;h是x位置处动极板4的宽度值,A为正弦函数的幅值,ω为角频率,

Figure BDA0002018127500000081
为x=0时对应的相位值,h0为x=0时动极板4的宽度值。当动极板4的结构确定时,A、ω、
Figure BDA0002018127500000082
及h0均是确定的值。对于C1及C2,有如下计算公式:where x is the relative moving distance between the valve 1 and the valve bushing 2; h is the width of the moving pole plate 4 at the x position, A is the amplitude of the sine function, ω is the angular frequency,
Figure BDA0002018127500000081
is the corresponding phase value when x=0, h 0 is the width value of the moving pole plate 4 when x=0. When the structure of the moving pole plate 4 is determined, A, ω,
Figure BDA0002018127500000082
and h 0 are determined values. For C1 and C2, there are the following calculation formulas:

Figure BDA0002018127500000083
Figure BDA0002018127500000083

Figure BDA0002018127500000084
Figure BDA0002018127500000084

式中,C代表C1,C2在活门1与活门衬套2的相对移动距离不同时的电容值,S是第一静极板301、第二静极板302与动极板4的相对面积,ε为第一静极板301、第二静极板302与动极板4间介质的介电常数,d为第一静极板301、第二静极板302与动极板4的间距,a为第一静极板301、第二静极板302的宽度,t的取值区间为x~x+a;

Figure BDA0002018127500000085
假定动极板4最左端边界为位移的零点,x1、x2分别为位移发生时第一静极板301、第二静极板302左边沿的位置,设第一静极板301、第二静极板302间距为dc,则有dc=x2-x1-a,公式(5)转化为Cm与x1的函数关系Cm(x1)。显然活门1与活门衬套2的相对移动距离x与x1是一致对应的关系,可由x1减去一个固定的偏移量δ得到,如图7所示,由此建立了Cm与x的计算关系Cm(x+δ)。In the formula, C represents the capacitance values of C1 and C2 when the relative moving distances of the valve 1 and the valve bushing 2 are different, S is the relative area of the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, ε is the dielectric constant of the medium between the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, d is the distance between the first static pole plate 301, the second static pole plate 302 and the moving pole plate 4, a is the width of the first static pole plate 301 and the second static pole plate 302, and the value interval of t is x~x+a;
Figure BDA0002018127500000085
It is assumed that the leftmost boundary of the moving pole plate 4 is the zero point of displacement, and x 1 and x 2 are the positions of the left edges of the first static pole plate 301 and the second static pole plate 302 respectively when the displacement occurs. The distance between the two static electrode plates 302 is dc, then dc=x 2 -x 1 -a, and the formula (5) is converted into Cm(x 1 ), which is a functional relationship between Cm and x 1 . Obviously, the relative moving distance x of the valve 1 and the valve bushing 2 is consistent with x 1 , which can be obtained by subtracting a fixed offset δ from x 1 , as shown in Figure 7, thus establishing the relationship between Cm and x. Calculate the relation Cm(x+δ).

当动极板(4)的厚度按照线性或者正弦函数变化时,也会产生同公式(2)和公式(5)类似的表达式,这里不再重复表述。When the thickness of the moving pole plate (4) changes according to a linear or sine function, expressions similar to those of formula (2) and formula (5) will also be generated, which will not be repeated here.

通过检测位移检测模块3输出的Cm信号即可解算得到活门1与活门衬套2的位置关系。显然,无论是否掉电,该映射关系都会一直存在,即使在掉电后活门1发生了移动,上电复位后,位移信号也不会丢失,能够反映活门1与活门衬套2的真实位置关系。By detecting the Cm signal output by the displacement detection module 3, the positional relationship between the valve 1 and the valve bushing 2 can be obtained through calculation. Obviously, the mapping relationship will always exist no matter whether the power is off or not. Even if the valve 1 moves after the power is off, the displacement signal will not be lost after the power-on reset, which can reflect the real positional relationship between the valve 1 and the valve bushing 2. .

在本实用新型的另一实施例中,如图11所示,动极板4通过表面镀膜工艺(如磁控溅射、喷涂等方式)获得,厚度小于0.3mm,所述动极板4包括:In another embodiment of the present invention, as shown in FIG. 11 , the moving pole plate 4 is obtained by a surface coating process (such as magnetron sputtering, spraying, etc.), and the thickness is less than 0.3 mm. The moving pole plate 4 includes :

绝缘层401,位于所述平台面上,制备材料包括:TiO2、Al2O3、聚酰亚胺等绝缘材料;The insulating layer 401 is located on the platform surface, and the preparation materials include: TiO2, Al2O3, polyimide and other insulating materials;

反射极402,位于所述绝缘层401上,制备材料包括铝、金、铜、银、石墨烯等导电材料;The reflector 402 is located on the insulating layer 401, and the preparation materials include conductive materials such as aluminum, gold, copper, silver, and graphene;

所述绝缘层401和反射极402组合后形成的复合动极板功能与所述动极板4等效。The function of the composite moving electrode plate formed by the combination of the insulating layer 401 and the reflector 402 is equivalent to that of the moving electrode plate 4 .

所述反射极402的宽度不大于第一静极板301、以及第二静极板302的宽度,如图6所示。第一静极板301、以及第二静极板302位于反射极402的上方但不直接接触,与之正相对,形成了电容组,如图7至图8所示。检测该电容组的值即可解算出活门1的绝对位移量。The width of the reflector 402 is not greater than the width of the first static electrode plate 301 and the width of the second static electrode plate 302 , as shown in FIG. 6 . The first static electrode plate 301 and the second static electrode plate 302 are located above the reflector electrode 402 but not in direct contact, and are opposite to each other, forming a capacitor group, as shown in FIGS. 7 to 8 . The absolute displacement of the shutter 1 can be calculated by detecting the value of the capacitance group.

至此,已经结合附图对本实用新型实施例进行了详细描述。需要说明的是,在附图或说明书正文中,未绘示或描述的实现方式,均为所属技术领域中普通技术人员所知的形式,并未进行详细说明。此外,上述对各元件和方法的定义并不仅限于实施例中提到的各种具体结构、形状或方式,本领域普通技术人员可对其进行简单地更改或替换。So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings. It should be noted that, in the accompanying drawings or the text of the description, the implementations that are not shown or described are in the form known to those of ordinary skill in the technical field, and are not described in detail. In addition, the above definitions of various elements and methods are not limited to various specific structures, shapes or manners mentioned in the embodiments, and those of ordinary skill in the art can simply modify or replace them.

依据以上描述,本领域技术人员应当对本实用新型基于电容传感器的具有位移自检测功能的计量活门有了清楚的认识。Based on the above description, those skilled in the art should have a clear understanding of the metering valve with displacement self-detection function based on the capacitive sensor of the present invention.

综上所述,本实用新型提供了一种基于电容传感器的具有位移自检测功能的计量活门,将电容所需的基本结构集成在计量活门组件的结构上,实现结构件与传感器的集成设计,以缓解现有技术中自检测功能的计量活门结构复杂,驱动信号复杂,恶劣环境中易受干扰,不适用于需要测量绝对位移、可靠性要求高的场合等技术问题。To sum up, the present utility model provides a metering valve with displacement self-detection function based on capacitive sensor, which integrates the basic structure required by the capacitance on the structure of the metering valve assembly, and realizes the integrated design of the structural member and the sensor. In order to alleviate the technical problems of the self-detection function of the metering valve in the prior art, the structure is complex, the driving signal is complex, and it is easily interfered in harsh environments, and it is not suitable for the occasions that need to measure absolute displacement and have high reliability requirements.

还需要说明的是,实施例中提到的方向用语,例如“上”、“下”、“前”、“后”、“左”、“右”等,仅是参考附图的方向,并非用来限制本实用新型的保护范围。贯穿附图,相同的元素由相同或相近的附图标记来表示。在可能导致对本实用新型的理解造成混淆时,将省略常规结构或构造。It should also be noted that the directional terms mentioned in the embodiments, such as "up", "down", "front", "rear", "left", "right", etc., only refer to the directions of the drawings, not It is used to limit the protection scope of the present invention. Throughout the drawings, the same elements are denoted by the same or similar reference numbers. Conventional structures or constructions will be omitted when it may cause confusion in the understanding of the present invention.

并且图中各部件的形状和尺寸不反映真实大小和比例,而仅示意本实用新型实施例的内容。另外,在权利要求中,不应将位于括号之间的任何参考符号构造成对权利要求的限制。Moreover, the shapes and sizes of the components in the figures do not reflect the actual size and proportion, but merely illustrate the contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.

除非有所知名为相反之意,本说明书及所附权利要求中的数值参数是近似值,能够根据通过本实用新型的内容所得的所需特性改变。具体而言,所有使用于说明书及权利要求中表示组成的含量、反应条件等等的数字,应理解为在所有情况中是受到「约」的用语所修饰。一般情况下,其表达的含义是指包含由特定数量在一些实施例中±10%的变化、在一些实施例中±5%的变化、在一些实施例中±1%的变化、在一些实施例中±0.5%的变化。Unless known to the contrary, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained from the teachings of the present disclosure. Specifically, all numbers used in the specification and claims to indicate compositional contents, reaction conditions, etc., should be understood as being modified by the word "about" in all cases. In general, the meaning expressed is meant to include a change of ±10% in some embodiments, a change of ±5% in some embodiments, a change of ±1% in some embodiments, and a change of ±1% in some embodiments. Example ±0.5% variation.

再者,单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.

说明书与权利要求中所使用的序数例如“第一”、“第二”、“第三”等的用词,以修饰相应的元件,其本身并不意味着该元件有任何的序数,也不代表某一元件与另一元件的顺序、或是制造方法上的顺序,该些序数的使用仅用来使具有某命名的一元件得以和另一具有相同命名的元件能做出清楚区分。The ordinal numbers such as "first", "second", "third", etc. used in the description and the claims are used to modify the corresponding elements, which themselves do not mean that the elements have any ordinal numbers, nor do they Representing the order of a certain element and another element, or the order in the manufacturing method, the use of these ordinal numbers is only used to clearly distinguish an element with a certain name from another element with the same name.

此外,除非特别描述或必须依序发生的步骤,上述步骤的顺序并无限制于以上所列,且可根据所需设计而变化或重新安排。并且上述实施例可基于设计及可靠度的考虑,彼此混合搭配使用或与其他实施例混合搭配使用,即不同实施例中的技术特征可以自由组合形成更多的实施例。Furthermore, unless the steps are specifically described or must occur sequentially, the order of the above steps is not limited to those listed above, and may be varied or rearranged according to the desired design. And the above embodiments can be mixed and matched with each other or with other embodiments based on the consideration of design and reliability, that is, the technical features in different embodiments can be freely combined to form more embodiments.

本领域那些技术人员可以理解,可以对实施例中的设备中的模块进行自适应性地改变并且把它们设置在与该实施例不同的一个或多个设备中。可以把实施例中的模块或单元或组件组合成一个模块或单元或组件,以及此外可以把它们分成多个子模块或子单元或子组件。除了这样的特征和/或过程或者单元中的至少一些是相互排斥之外,可以采用任何组合对本说明书(包括伴随的权利要求、摘要和附图)中公开的所有特征以及如此公开的任何方法或者设备的所有过程或单元进行组合。除非另外明确陈述,本说明书(包括伴随的权利要求、摘要和附图)中公开的每个特征可以由提供相同、等同或相似目的的替代特征来代替。并且,在列举了若干装置的单元权利要求中,这些装置中的若干个可以是通过同一个硬件项来具体体现。Those skilled in the art will understand that the modules in the device in the embodiment can be adaptively changed and arranged in one or more devices different from the embodiment. The modules or units or components in the embodiments may be combined into one module or unit or component, and further they may be divided into multiple sub-modules or sub-units or sub-assemblies. All features disclosed in this specification (including accompanying claims, abstract and drawings) and any method so disclosed may be employed in any combination, unless at least some of such features and/or procedures or elements are mutually exclusive. All processes or units of equipment are combined. Each feature disclosed in this specification (including accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also, in a unit claim enumerating several means, several of these means can be embodied by one and the same item of hardware.

类似地,应当理解,为了精简本实用新型并帮助理解各个公开方面中的一个或多个,在上面对本实用新型的示例性实施例的描述中,本实用新型的各个特征有时被一起分组到单个实施例、图、或者对其的描述中。然而,并不应将该公开的方法解释成反映如下意图:即所要求保护的本实用新型要求比在每个权利要求中所明确记载的特征更多的特征。更确切地说,如下面的权利要求书所反映的那样,公开方面在于少于前面公开的单个实施例的所有特征。因此,遵循具体实施方式的权利要求书由此明确地并入该具体实施方式,其中每个权利要求本身都作为本实用新型的单独实施例。Similarly, it will be appreciated that in the above description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together into a single Examples, figures, or descriptions thereof. However, this method of disclosure should not be construed to reflect an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the Detailed Description are hereby expressly incorporated into this Detailed Description, with each claim standing on its own as a separate embodiment of this invention.

以上所述的具体实施例,对本实用新型的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本实用新型的具体实施例而已,并不用于限制本实用新型,凡在本实用新型的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention, and are not intended to limit the present invention. In the utility model, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims (9)

1.一种基于电容传感器的具有位移自检测功能的计量活门,其特征在于,包括:1. a metering valve with displacement self-detection function based on capacitive sensor, is characterized in that, comprises: 活门(1),整体呈柱状,其外壁面加工有平台面,侧壁面设置有活门出油阀口(101)和活门进油阀口(102);The valve (1) is cylindrical as a whole, and its outer wall surface is machined with a platform surface, and the side wall surface is provided with a valve oil outlet valve port (101) and a valve oil inlet valve port (102); 活门衬套(2),整体呈筒状,衬套于所述活门(1)外,对应所述活门出油阀口(101)和活门进油阀口(102)分别设置有活门衬套出油阀口(201)和活门衬套进油阀口(202);The valve bushing (2) has a cylindrical shape as a whole, the bushing is outside the valve (1), and corresponding to the valve oil outlet valve port (101) and the valve oil inlet valve port (102), a valve bushing outlet port (102) is respectively provided. Oil valve port (201) and valve bushing oil inlet valve port (202); 所述活门(1)在活门衬套(2)中沿轴向滑动,通过调节活门(1)和活门衬套(2)的相对位置,控制活门进油阀口(102)和活门衬套进油阀口(202)重叠面积的大小,以及活门出油阀口(101)和活门衬套出油阀口(201)重叠面积的大小;The valve (1) slides axially in the valve bushing (2), and by adjusting the relative positions of the valve (1) and the valve bushing (2), the valve oil inlet valve port (102) and the valve bushing inlet are controlled. The size of the overlapping area of the oil valve port (202), and the size of the overlapping area of the valve oil outlet valve port (101) and the valve bushing oil outlet valve port (201); 所述活门衬套(2)对应所述平台面设置有开口;The shutter bushing (2) is provided with an opening corresponding to the platform surface; 动极板(4),固定于所述平台面上,平行于沿活门(1)的轴线;A moving pole plate (4), fixed on the platform surface, parallel to the axis along the shutter (1); 位移检测模块(3),对应设置在所述动极板(4)外侧,包括:A displacement detection module (3), correspondingly arranged on the outside of the moving pole plate (4), includes: 所述位移检测模块(3)用于与动极板(4)形成电容组,所述电容组值与活门(1)的绝对位移量相关。The displacement detection module (3) is used to form a capacitance group with the movable electrode plate (4), and the capacitance group value is related to the absolute displacement of the shutter (1). 2.根据权利要求1所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述位移检测模块(3),包括:2. The metering valve with displacement self-detection function based on capacitive sensor according to claim 1, wherein the displacement detection module (3) comprises: 第一静极板(301),以及a first static plate (301), and 第二静极板(302),与所述第一静极板(301)沿活门(1)轴向相邻间隔设置且相互绝缘。The second static electrode plate (302) and the first static electrode plate (301) are disposed adjacent to each other along the axial direction of the shutter (1) and are insulated from each other. 3.根据权利要求2所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述第一静极板(301)以及第二静极板(302)的宽度不小于动极板(4)的宽度。3. The metering valve with displacement self-detection function based on capacitive sensor according to claim 2, characterized in that the width of the first static electrode plate (301) and the second static electrode plate (302) is not less than the width of the moving plate The width of the plate (4). 4.根据权利要求1所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述动极板(4)为机加工方式获得,厚度不小于0.3mm。4. The metering valve with displacement self-detection function based on capacitive sensor according to claim 1, characterized in that, the movable electrode plate (4) is obtained by machining, and the thickness is not less than 0.3mm. 5.根据权利要求1所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述动极板(4)通过表面镀膜工艺获得,厚度小于0.3mm,包括:5. The metering valve with displacement self-detection function based on capacitive sensor according to claim 1, characterized in that, the movable electrode plate (4) is obtained by a surface coating process, and the thickness is less than 0.3mm, comprising: 绝缘层(401),位于所述平台面上;an insulating layer (401), located on the platform surface; 反射极(402),位于所述绝缘层(401)上。The reflector (402) is located on the insulating layer (401). 6.根据权利要求1所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述动极板(4)的宽度和/或厚度按线性和/或正弦函数曲线规律变化;所述动极板(4)与活门(1)、活门衬套(2)及位移检测模块(3)相互绝缘。6. The metering valve with displacement self-detection function based on capacitive sensor according to claim 1, characterized in that, the width and/or thickness of the moving pole plate (4) change according to the law of linearity and/or sine function curve ; The movable pole plate (4) and the shutter (1), the shutter bushing (2) and the displacement detection module (3) are insulated from each other. 7.根据权利要求2或3任一项所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述第一静极板(301)、第二静极板(302)位于动极板(4)的上方但不直接接触,与之正相对,形成电容组,第一静极板(301)与动极板(4)形成电容C1,第二静极板(302)与动极板(4)形成电容C2,第一静极板(301)与第二静极板(302)正对面积部分形成电容C3,第一静极板(301)与第二静极板(302)间的综合电容Cm是电容C1与电容C2串联后与电容C3并联而成,计算公式为:7. The metering valve with displacement self-detection function based on capacitive sensor according to any one of claims 2 or 3, characterized in that the first static electrode plate (301) and the second static electrode plate (302) Located above the moving pole plate (4) but not in direct contact with it, it is directly opposite to form a capacitor group, the first static pole plate (301) and the moving pole plate (4) form a capacitor C1, and the second static pole plate (302) A capacitor C2 is formed with the moving electrode plate (4), a capacitor C3 is formed on the area facing the first static electrode plate (301) and the second static electrode plate (302), and the first static electrode plate (301) and the second static electrode plate (301) The comprehensive capacitance Cm between (302) is formed by the capacitor C1 and the capacitor C2 in series and then the capacitor C3 in parallel. The calculation formula is:
Figure DEST_PATH_FDA0002293437440000021
Figure DEST_PATH_FDA0002293437440000021
式中Cr是电容C1、C2串联后的等效电容,通过检测位移检测模块(3)输出的Cm信号即可解算得到活门(1)与活门衬套(2)的位置关系。In the formula, Cr is the equivalent capacitance after the capacitors C1 and C2 are connected in series. By detecting the Cm signal output by the displacement detection module (3), the positional relationship between the valve (1) and the valve bushing (2) can be calculated.
8.根据权利要求6所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述动极板(4)的宽度和/或厚度按线性规律变化,第一静极板(301)与第二静极板(302)间的综合电容Cm计算如公式(2):8. The metering valve with displacement self-detection function based on capacitive sensor according to claim 6, characterized in that, the width and/or thickness of the moving pole plate (4) change according to a linear law, and the first static pole plate The comprehensive capacitance Cm between (301) and the second static plate (302) is calculated as formula (2): Cm=kx+b (2);Cm=kx+b(2); 式中x是活门(1)与活门衬套(2)的相对移动距离;k是与系统结构尺寸及介电常数相关的参数,b是当x=0时Cm的初始值。where x is the relative moving distance between the valve (1) and the valve bushing (2); k is a parameter related to the system structure size and dielectric constant, and b is the initial value of Cm when x=0. 9.根据权利要求6所述的基于电容传感器的具有位移自检测功能的计量活门,其特征在于,所述动极板(4)的宽度和/或厚度按正弦函数曲线规律变化,则动极板(4)的宽度表达式为:9. The metering valve with displacement self-detection function based on capacitive sensor according to claim 6, characterized in that, the width and/or thickness of the moving pole plate (4) change according to the sine function curve law, then the moving pole The expression for the width of the plate (4) is:
Figure DEST_PATH_FDA0002293437440000031
Figure DEST_PATH_FDA0002293437440000031
式中x是活门(1)与活门衬套(2)的相对移动距离;h是x位置处动极板(4)的宽度值,A为正弦函数的幅值,ω为角频率,
Figure DEST_PATH_FDA0002293437440000032
为x=0时对应的相位值,h0为x=0时动极板(4)的宽度值;当动极板(4)的结构确定时,A、ω、
Figure DEST_PATH_FDA0002293437440000033
及h0均是确定的值;对于C1及C2,有如下计算公式:
where x is the relative moving distance between the valve (1) and the valve bushing (2); h is the width of the movable plate (4) at the x position, A is the amplitude of the sine function, ω is the angular frequency,
Figure DEST_PATH_FDA0002293437440000032
is the corresponding phase value when x=0, h 0 is the width value of the moving pole plate (4) when x=0; when the structure of the moving pole plate (4) is determined, A, ω,
Figure DEST_PATH_FDA0002293437440000033
and h 0 are determined values; for C1 and C2, there are the following formulas:
Figure DEST_PATH_FDA0002293437440000034
Figure DEST_PATH_FDA0002293437440000034
Figure DEST_PATH_FDA0002293437440000035
Figure DEST_PATH_FDA0002293437440000035
其中,C代表C1,C2在活门(1)与活门衬套(2)的相对移动距离不同时的电容值,S是第一静极板(301)、第二静极板(302)与动极板(4)的相对面积,ε为第一静极板(301)、第二静极板(302)与动极板(4)间介质的介电常数,d为第一静极板(301)、第二静极板(302)与动极板(4)的间距,a为第一静极板(301)、第二静极板(302)的宽度,
Figure DEST_PATH_FDA0002293437440000036
Figure DEST_PATH_FDA0002293437440000041
定义动极板(4)最左端边界为位移的零点,x1、x2分别为位移发生时第一静极板(301)、第二静极板(302)左边沿的位置,第一静极板(301)、第二静极板(302)间距为dc,则有dc=x2-x1-a,公式(5)转化为Cm与x1的函数关系Cm(x1);活门(1)与活门衬套(2)的相对移动距离x与x1是一致对应的关系,是由x1减去一个固定的偏移量δ得到,由此建立了Cm与x的计算关系Cm(x+δ)。
Among them, C represents the capacitance values of C1 and C2 when the relative moving distances of the valve (1) and the valve bushing (2) are different, and S is the first static plate (301), the second static plate (302) and the moving distance. The relative area of the pole plate (4), ε is the dielectric constant of the medium between the first static pole plate (301), the second static pole plate (302) and the moving pole plate (4), d is the first static pole plate ( 301), the distance between the second static pole plate (302) and the moving pole plate (4), a is the width of the first static pole plate (301) and the second static pole plate (302),
Figure DEST_PATH_FDA0002293437440000036
Figure DEST_PATH_FDA0002293437440000041
The leftmost boundary of the moving pole plate (4) is defined as the zero point of displacement, and x 1 and x 2 are the positions of the left edges of the first static pole plate (301) and the second static pole plate (302) when the displacement occurs, respectively. If the distance between the pole plate (301) and the second static pole plate (302) is dc, then there is dc=x 2 -x 1 -a, and formula (5) is converted into Cm(x 1 ), a functional relationship between Cm and x 1 ; (1) The relative movement distance x of the valve bushing (2) is consistent with x 1 , which is obtained by subtracting a fixed offset δ from x 1 , thus establishing the calculation relationship Cm between Cm and x. (x+δ).
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CN109958537A (en) * 2019-04-04 2019-07-02 中国科学院工程热物理研究所 Metering valve with displacement self-detection function based on capacitive sensor
CN109958537B (en) * 2019-04-04 2024-05-07 中国科学院工程热物理研究所 Metering valve with displacement self-detection function based on capacitance sensor

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