CN210104070U - Evaporation system of TMA medium - Google Patents
Evaporation system of TMA medium Download PDFInfo
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- CN210104070U CN210104070U CN201920717405.5U CN201920717405U CN210104070U CN 210104070 U CN210104070 U CN 210104070U CN 201920717405 U CN201920717405 U CN 201920717405U CN 210104070 U CN210104070 U CN 210104070U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses an evaporation system of TMA medium, comprising a TMA evaporation bottle and a control conveying pipeline, wherein the TMA evaporation bottle is provided with an evaporation bottle inlet and an evaporation bottle outlet, and pneumatic valves are arranged at the evaporation bottle inlet and the evaporation bottle outlet; the control delivery pipeline comprises a second TMA liquid pipeline, a TMA gas pipeline and a second gas pipeline; the second TMA liquid pipeline is connected with the inlet of the evaporation bottle; the TMA gas pipeline is provided with two ports, one port is connected with the outlet of the evaporation bottle, the other port is connected with the reaction tube, and a TMA gas mass flow meter, a seventh pneumatic valve and a third manual valve are also connected in series on the pipeline between the outlet of the evaporation bottle and the reaction tube; the second gas pipeline is connected to a pipeline between the seventh pneumatic valve and the third manual valve, and is also connected with an inert gas mass flowmeter; the utility model has the advantages that: by adding an independent evaporation system, the production process is improved, and the aim of improving the conversion efficiency is fulfilled.
Description
Technical Field
The utility model relates to a solar cell equipment technical field, more specifically say, relate to an evaporation system of TMA medium.
Background
PECVD (plasma Enhanced Chemical Vapor deposition) plasma Enhanced Chemical Vapor deposition is to use low-temperature plasma as an energy source, place a silicon wafer on a cathode of glow discharge under low pressure, heat the silicon wafer to a preset temperature by using the glow discharge (or adding a heating element), then introduce a proper amount of reaction gas, and form a solid film on the silicon wafer by a batch of Chemical and plasma reactions of the gas.
With the development of PECVD equipment technology, the requirements for reducing cost and improving efficiency are higher and higher, the conversion efficiency of a cell is also improved, and the PREC cell is a new process route which is currently most effective for improving the conversion efficiency of a crystalline silicon cell and is expected to form mass production. In order to improve the conversion efficiency of the battery silicon wafer, an independent gas evaporation system needs to be added outside the original equipment, and the production process needs to be improved so as to achieve the purpose of improving the conversion efficiency.
SUMMERY OF THE UTILITY MODEL
In order to overcome the not enough of prior art, the utility model provides an evaporation system of TMA medium improves production technology, has improved conversion efficiency, practices thrift the cost.
The utility model provides a technical scheme that its technical problem adopted is: in an evaporation system for TMA medium, the improvement comprising: comprises a TMA evaporation bottle and a control conveying pipeline,
the TMA evaporation bottle is provided with an evaporation bottle inlet and an evaporation bottle outlet, the evaporation bottle inlet is provided with an evaporation bottle inlet pneumatic valve, and the evaporation bottle outlet is provided with an evaporation bottle outlet pneumatic valve;
the control delivery pipeline comprises a second TMA liquid pipeline, a TMA gas pipeline and a second gas pipeline;
the second TMA liquid pipeline is connected with the inlet of the evaporation bottle, a second manual valve is arranged on the second TMA liquid pipeline, and a sixth pneumatic valve is also arranged between the second manual valve and the pneumatic valve at the inlet of the evaporation bottle;
the TMA gas pipeline is provided with two ports, one port is connected with the outlet of the evaporation bottle, the other port is connected with the reaction tube, and a TMA gas mass flow meter, a seventh pneumatic valve and a third manual valve are also connected in series on the pipeline between the outlet of the evaporation bottle and the reaction tube;
the second gas pipeline is connected to a pipeline between the seventh pneumatic valve and the third manual valve, a first node is arranged at the joint, and a fourth manual valve, a second pressure reducing valve, an inert gas mass flow meter and a ninth pneumatic valve are further connected to the second gas pipeline in series.
As a further improvement of the above technical solution, a second pipeline accessory is further disposed between the second pressure reducing valve and the inert gas mass flow meter.
As a further improvement of the above technical solution, a channel is further provided between the second pipeline attachment and the inert gas mass flow meter, the channel is connected between the second manual valve and the sixth pneumatic valve, and the channel is further connected in series with a second check valve and a fifth manual valve.
As a further improvement of the technical scheme, a third channel is further arranged between the second one-way valve and the fifth manual valve and connected to a pipeline between the TMA gas mass flow meter and the outlet of the evaporation bottle, and a tenth pneumatic valve is further arranged on the channel.
As a further improvement of the above technical solution, a channel is further provided at a connection between the third channel, the TMA gas mass flow meter and the outlet of the evaporation flask, the channel is connected to a pipe between the TMA gas mass flow meter and the seventh pneumatic valve, and a sixth manual valve is further provided on the channel.
As a further improvement of the technical scheme, a second tail gas treatment pipeline is further arranged between the first node and the third manual valve.
As a further improvement of the above technical solution, the evaporation bottle is further provided with a pressure sensor and a temperature sensor.
The utility model has the advantages that: by adding an independent gas evaporation system in the prior art, the production process is improved, the conversion efficiency is improved, and the cost is saved.
Drawings
Figure 1 is a front view of an evaporation system for TMA medium of the present invention.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.
Referring to fig. 1, the utility model discloses an evaporation system of TMA medium, comprising a TMA evaporation bottle 1 and a control conveying pipeline, wherein the TMA evaporation bottle 1 is provided with an evaporation bottle inlet and an evaporation bottle outlet, the evaporation bottle inlet is provided with an evaporation bottle inlet pneumatic valve, and the evaporation bottle outlet is provided with an evaporation bottle outlet pneumatic valve; the control transfer lines comprise a second TMA liquid line 20, a TMA gas line 30 and a second gas line 40; the second TMA liquid pipeline 20 is connected with the inlet of the evaporation bottle, a second manual valve 200 is arranged on the second TMA liquid pipeline 20, and a sixth pneumatic valve 201 is also arranged between the second manual valve 200 and the pneumatic valve at the inlet of the evaporation bottle; the TMA gas pipeline 30 is provided with two ports, one port is connected with the outlet of the evaporation bottle, the other port is connected with the reaction tube 300, and a TMA gas mass flow meter 301, a seventh pneumatic valve 302 and a third manual valve 303 are further connected in series on the pipeline between the outlet of the evaporation bottle and the reaction tube 300; the second gas pipeline 40 is connected to a pipeline between the seventh pneumatic valve 302 and the third manual valve 303, a first node is arranged at the connection position, and a fourth manual valve 400, a second pressure reducing valve 401, an inert gas mass flow meter 402 and a ninth pneumatic valve 403 are further connected in series to the second gas pipeline 40. When the TMA medium evaporation system is started, TMA liquid flows into the evaporation bottle from the second TMA liquid pipeline 20, TMA liquid entering the evaporation bottle is evaporated to be converted into TMA gas, an outlet pneumatic valve of the evaporation bottle is opened, the TMA gas is led out from an outlet of the evaporation bottle to enter the TMA gas mass flow meter 301 to control the flow rate of the TMA gas, meanwhile, the second gas pipeline 40 is filled with inert gas, the fourth manual valve 400 is opened, the inert gas enters the second pressure reducing valve 401, the pressure reducing valve relieves the pressure caused by excessive inert gas, the inert gas enters the inert gas mass flow meter 402, the mass flow rate further controls the flow rate of the inert gas, the ninth pneumatic valve 403 and the seventh pneumatic valve 302 are opened, at the moment, the inert gas and the TMA gas meet at the position of the two pipeline, and the two gases enter the reaction pipe.
Further, a second pipeline attachment 309 is arranged between the second pressure reducing valve 401 and the inert gas mass flow meter 402. A channel is further arranged between the second pipeline accessory 309 and the inert gas mass flow meter 402, the channel is connected between the second manual valve 200 and the sixth manual valve 201, and the channel is further connected with a second one-way valve 202 and a fifth manual valve 203 in series.
Through the above embodiment, the utility model discloses an evaporation system of TMA medium, TMA medium evaporation system is when starting up, open second manual valve 200 and the evaporation flask entry pneumatic valve, TMA liquid flows into the evaporation flask from second TMA liquid pipeline 20, the TMA liquid that gets into the evaporation flask becomes TMA gas through evaporating, open evaporation flask export pneumatic valve, TMA gas is derived from the evaporation flask export and gets into TMA gas mass flow meter 301, control TMA gas's flow, simultaneously, second gas pipeline 40 fills inert gas, open fourth manual valve 400, inert gas gets into second relief pressure valve 401, the pressure that the too much inert gas brought is alleviated to the relief pressure valve, inert gas gets into second pipeline annex 309 from second relief pressure valve 401, second pipeline annex 309 further detects 201 and measures and controls inert gas and gets into the pressure and the flow of reaction tube, inert gas comes out from second relief pressure valve 401, a portion of the gas enters the inert gas mass flow meter 402, which further controls the flow of inert gas, and the ninth and seventh pneumatic valves 403 and 302 are opened, at which time the inert gas and TMA gas meet at the point where the two pipes meet, and the two gases enter the reaction tube 300; another portion of the inert gas enters second one-way valve 202 and when fifth manual valve 203 is opened, the gas enters second TMA liquid conduit 20.
On the basis of the above embodiment, a third channel is further provided between the second one-way valve 202 and the fifth manual valve 203, the third channel is connected to the pipeline between the TMA gas mass flow meter 301 and the outlet of the evaporation bottle, and a tenth pneumatic valve 204 is further provided on the channel. A channel is further arranged at the connection part among the third channel, the TMA gas mass flow meter 301 and the outlet of the evaporation bottle, the channel is connected to a pipeline between the TMA gas mass flow meter 301 and the seventh pneumatic valve 302, and a sixth manual valve 311 is further arranged on the channel. A part of the inert gas enters from the third channel, the inert gas enters the junction through the third channel, the TMA gas mass flow meter 301 and the junction between the outlets of the evaporation bottles, the inert gas arriving at the junction is divided into three parts, one part enters the TMA mass flow meter 301, the other part enters the evaporation bottles from the outlets of the evaporation bottles, and the last part passes through the pipeline of the sixth manual valve 311 and then converges with the inert gas entering the TMA gas mass flow meter 301 to enter the reaction tube 300.
Further, a second exhaust gas treatment line 11 is provided between the first node and the third manual valve 303, and impurity gases other than TMA gas and inert gas are discharged from the exhaust gas treatment line.
Finally, still be provided with a pressure sensor and a temperature sensor on the evaporating flask, pressure sensor detects the pressure in the evaporating flask, and temperature sensor detects the temperature in the evaporating flask to gas reacts acutely in the evaporating flask, leads to the evaporating flask explosion to destroy.
The utility model discloses an evaporation system of TMA medium is when concrete implementation, open second manual valve 200 and fourth manual valve 400, TMA liquid and inert gas get into corresponding pipeline simultaneously, inert gas gets into second gas pipeline 40, come to second relief pressure valve 401, the pressure that too much inert gas brought is alleviated to the relief pressure valve, inert gas gets into second pipeline annex 309 from second relief pressure valve 401, second pipeline annex 309 further detects and controls inert gas and get into the pressure and the flow of reaction tube 300, inert gas comes out from second pipeline annex 309, some gas gets into inert gas mass flow meter 402, this mass flow further counts the flow of controlling inert gas, another part gets into the inert gas of second check valve 202, when opening fifth manual valve 203, inert gas and TMA liquid join at second TMA liquid pipeline 20, when opening the evaporation bottle entry pneumatic valve, the two merged gases react in the evaporation bottle to become TMA gas, the pneumatic valve at the outlet of the evaporation bottle is opened, the TMA gas comes out from the outlet of the evaporation bottle and comes to the connection part between the third channel, the TMA gas mass flow meter 301 and the outlet of the evaporation bottle, the sixth manual valve 311 is in a closed state at the moment, the TMA gas enters the TMA gas mass flow meter 301, the seventh pneumatic valve 302 is opened, the TMA gas and the inert gas which enters the TMA gas pipeline through the inert gas mass flow meter 402 are merged and enter the reaction tube 300 through the opened third manual valve 303.
Wherein the evaporation system is still in a start-up state. Firstly, stopping TMA liquid from entering the second TMA liquid pipeline 20, opening all pneumatic valves and manual valves (except the second manual valve 200 and the sixth manual valve 311) of the evaporation system, filling a proper amount of inert gas into the second gas pipeline 40, enabling the TMA liquid staying in the second TMA liquid pipeline 20 to rapidly enter an evaporation bottle by the inert gas to fully react, and finally enabling the obtained TMA gas to enter the reaction tube 300 through the TMA mass flow meter 301; second, stopping the TMA liquid from entering the second TMA liquid pipe 20, and opening all the pneumatic valves and the manual valves (except the second manual valve 200), in which the inert gas passes through all the pipes, so that the gas remaining in the pipes enters the reaction tube 300 under the flush of the inert gas; finally, the heating of the vaporizer bottle is stopped, the second manual valve 200 and the third manual valve 303 are closed, all the manual valves and the pneumatic valves are opened, an appropriate amount of inert gas is introduced into the second gas line 40, and the gas remaining in the vaporizer bottle and between the lines is discharged from the second off-gas treatment line 11. By adding an independent gas evaporation system in the prior art and improving the production process, the filled inert gas improves the conversion efficiency and saves the cost.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (7)
1. An evaporation system for TMA medium, comprising: comprises a TMA evaporation bottle and a control conveying pipeline,
the TMA evaporation bottle is provided with an evaporation bottle inlet and an evaporation bottle outlet, the evaporation bottle inlet is provided with an evaporation bottle inlet pneumatic valve, and the evaporation bottle outlet is provided with an evaporation bottle outlet pneumatic valve;
the control delivery pipeline comprises a second TMA liquid pipeline, a TMA gas pipeline and a second gas pipeline;
the second TMA liquid pipeline is connected with the inlet of the evaporation bottle, a second manual valve is arranged on the second TMA liquid pipeline, and a sixth pneumatic valve is also arranged between the second manual valve and the pneumatic valve at the inlet of the evaporation bottle;
the TMA gas pipeline is provided with two ports, one port is connected with the outlet of the evaporation bottle, the other port is connected with the reaction tube, and a TMA gas mass flow meter, a seventh pneumatic valve and a third manual valve are also connected in series on the pipeline between the outlet of the evaporation bottle and the reaction tube;
the second gas pipeline is connected to a pipeline between the seventh pneumatic valve and the third manual valve, a first node is arranged at the joint, and a fourth manual valve, a second pressure reducing valve, an inert gas mass flow meter and a ninth pneumatic valve are further connected to the second gas pipeline in series.
2. The evaporation system of TMA medium of claim 1, wherein: and a second pipeline accessory is also arranged between the second pressure reducing valve and the inert gas mass flow meter.
3. The evaporation system of TMA medium of claim 2, wherein: and a channel is also arranged between the second pipeline accessory and the inert gas mass flow meter, the channel is connected between the second manual valve and the sixth pneumatic valve, and a second one-way valve and a fifth manual valve are also connected in series on the channel.
4. The evaporation system of TMA medium of claim 3, wherein: and a third channel is also arranged between the second one-way valve and the fifth manual valve, the third channel is connected to a pipeline between the TMA gas mass flow meter and the outlet of the evaporation bottle, and a tenth pneumatic valve is also arranged on the channel.
5. The evaporation system of TMA medium of claim 4, wherein: and a channel is also arranged at the joint among the third channel, the TMA gas mass flow meter and the outlet of the evaporation bottle, the channel is connected to a pipeline between the TMA gas mass flow meter and the seventh pneumatic valve, and a sixth manual valve is also arranged on the channel.
6. The evaporation system of TMA medium of claim 1, wherein: and a second tail gas treatment pipeline is also arranged between the first node and the third manual valve.
7. The evaporation system of TMA medium of claim 1, wherein: the evaporation bottle is also provided with a pressure sensor and a temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920717405.5U CN210104070U (en) | 2019-05-16 | 2019-05-16 | Evaporation system of TMA medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920717405.5U CN210104070U (en) | 2019-05-16 | 2019-05-16 | Evaporation system of TMA medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210104070U true CN210104070U (en) | 2020-02-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920717405.5U Active CN210104070U (en) | 2019-05-16 | 2019-05-16 | Evaporation system of TMA medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210104070U (en) |
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2019
- 2019-05-16 CN CN201920717405.5U patent/CN210104070U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210428 Address after: 518000 Room 101, building 4, Han's laser Industrial Park, Chongqing Road, Heping community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's photovoltaic equipment Co.,Ltd. Address before: 518000 201, building a, xingguanghui Technology Park, Fengtang Avenue, Tangwei community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN FULLSHARE EQUIPMENT Co.,Ltd. |
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| TR01 | Transfer of patent right |