CN210097672U

CN210097672U - Atomic-level powder modification equipment

Info

Publication number: CN210097672U
Application number: CN201920732752.5U
Authority: CN
Inventors: 不公告发明人
Original assignee: Jiangsu Mynard Micro Nano Technology Co Ltd
Current assignee: Jiangsu Mynard Micro Nano Technology Co Ltd
Priority date: 2019-05-21
Filing date: 2019-05-21
Publication date: 2020-02-21
Anticipated expiration: 2029-05-21

Abstract

The utility model discloses an atomic level powder modification equipment, including precursor source injection pipe, sliding seat, the rotatory chamber of stainless steel and quartz glass reaction chamber main part, the inside both ends of sliding seat all are provided with the sliding tray, and the inside of sliding tray all is provided with the base, the output of pressure sensor and switch board all passes through wire and PLC control system's input electric connection, PLC control system's output passes through wire and rotating electrical machines's input electric connection. The utility model discloses a closing cap before one side at quartz glass reaction chamber is provided with, be provided with the back closing cap simultaneously at the opposite side of quartz glass reaction chamber main part, all through assembly bolt fixed connection between quartz glass reaction chamber and preceding closing cap and the back closing cap simultaneously, stainless steel rotation chamber's both sides all are through stainless steel rotary joint and intake pipe and rotation axis fixed connection simultaneously for this device can be dismantled, convenient to overhaul.

Description

Atomic-level powder modification equipment

Technical Field

The utility model relates to a modified technical field of nano-material specifically is an atomic level powder modification equipment.

Background

The development of nano science has become the focus of the scientific and technological community attention of various countries, along with the requirement of social development, the nano science has been mutually fused and permeated with other subjects such as materials science, pharmacy, medicine, electronics, biology and the like to form nano materials science, nano medicine, nano electronics and nano biology, wherein, the application of nano materials in various fields has made a great progress, the nano materials are widely applied in various technical fields because of strong thermal property and mechanical property, but because the particle size is smaller and easy to agglomerate, the use of the nano materials is limited, proper means must be selected to carry out surface modification, the application of the nano materials in the technical fields is enhanced, the modification of the nano materials has good development momentum and is a research hotspot at present, the modification research of the nano materials can bring great impetus to the development and progress of the society, the market prospect of the nano modified material product is extremely optimistic.

Existing powder modification equipment suffers from a number of problems or drawbacks: 1. the conventional methods for surface modification of bulk materials include: a surface chemical coating method, a precipitation reaction modification method, a mechanochemical modification method, a composite method and the like, wherein a plurality of surface modifiers are required to be used in the modification process, and a large amount of waste gas and sewage are also generated; 2. the traditional powder modification equipment cannot realize surface modification at an atomic level and cannot accurately control the film thickness and chemical components of powder modification; 3. the traditional powder modification equipment cannot be used in thermal field atmospheres of different specifications, and can realize film coating in a low temperature range and post-treatment in a high temperature range;

now a new atomic scale powder modification device is proposed, which is based on atomic layer deposition technology, the research and modification system of the micro-nano powder material is designed to improve the dispersibility of the nano powder, reduce the agglomeration phenomenon of the powder, improve the interface associativity and greatly improve the surface performance of the nano powder, the project designs a rotatable internal reaction cavity with adjustable specification and a thermal field atmosphere, adopts the design of a plurality of independent precursor source reaction pipelines to realize the transportation of different precursor sources to the reaction cavity, the nano powder modification system can be equipped with a remote plasma system, can realize pretreatment before modification of the micro-nano powder material, and then the surface of the powder material is modified, the intelligent degree and the automation degree are higher, the obtained nano powder has excellent interface binding property improvement effect and stronger dispersion performance, and after the modification is finished, post-treatment such as high-temperature annealing can be carried out as required.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an atomic level powder modification equipment to propose traditional processing method and can produce a large amount of waste gas and sewage, the membrane thickness and the chemical composition that can't the accurate control powder is modified and can't be in the thermal field atmosphere of different specifications in solving above-mentioned background art, both can realize the film cladding in low temperature range and can realize the problem of aftertreatment in high temperature range again.

In order to achieve the above object, the utility model provides a following technical scheme: an atomic-level powder modification device comprises a precursor source injection pipe, a sliding seat, a stainless steel rotating cavity and a quartz glass reaction cavity body, wherein sliding grooves are formed in two ends of the inside of the sliding seat, a base is arranged in each sliding groove, sliding rollers are arranged at two ends of the bottom of the base, a supporting rod is connected to the top end of the base, a fixing rod is fixed to one side of the top end of the sliding seat, a bottom plate is arranged at the top end of the fixing rod, a control cabinet is arranged on one side of the fixing rod, a PLC control system is arranged in the control cabinet, a rotating motor is arranged at the top end of the bottom plate, the output end of the rotating motor is fixedly connected with a rotating shaft through a rotating shaft, the quartz glass reaction cavity body is arranged above the supporting rod, and the top end of the supporting rod is fixedly connected with the bottom end of the, the quartz glass reaction chamber comprises a quartz glass reaction chamber body, wherein heating and heat-insulating devices are respectively arranged on two sides of the inner part of the quartz glass reaction chamber body, a front sealing cover is arranged on one side of the quartz glass reaction chamber body, a precursor source injection pipe is uniformly connected to one side of the front sealing cover, a manual valve is arranged on the precursor source injection pipe, a pressure sensor is arranged on one side of the manual valve, a rear sealing cover is arranged on the other side of the quartz glass reaction chamber body, an exhaust pipe is connected to the bottom end of one side of the rear sealing cover, the quartz glass reaction chamber body and the front sealing cover as well as the quartz glass reaction chamber body and the rear sealing cover are fixedly connected through assembling bolts, positioning rings are respectively arranged on two sides of the inner part of the quartz glass reaction chamber body, guide rollers are uniformly arranged in the inner parts of the positioning rings, a stainless steel rotating cavity, one side of solid panel is provided with solid panel, and one side of solid panel evenly is provided with the intake pipe, the one end that solid panel was kept away from to the intake pipe all is linked together with the precursor source injection pipe, the opposite side in stainless steel rotation chamber is provided with porous panel, one side of solid panel and one side of porous panel are respectively through stainless steel rotary joint and intake pipe and rotation axis fixed connection, the output of pressure sensor and switch board all passes through wire and PLC control system's input electric connection, PLC control system's output passes through wire and rotating electrical machines's input electric connection.

Preferably, the front cover and the rear cover and the quartz glass reaction chamber body form a dismounting and mounting structure through assembling bolts, and the front cover and the rear cover have the same size.

Preferably, the holding ring is provided with 2 groups in the inside of quartz glass reaction chamber main part, and the holding ring is simultaneously around the central line symmetric distribution in the rotatory chamber of stainless steel, and guide roller is equidistant range in the inboard of holding ring, and the lateral wall in the rotatory chamber of stainless steel is laminated with guide roller's lateral wall.

Preferably, the quartz glass reaction chamber body and the stainless steel rotating cavity are in the same central axis.

Preferably, the distance between the sliding rollers is smaller than the width of the inside of the sliding groove, and the base and the inside of the base form a sliding structure through the sliding rollers.

Compared with the prior art, the beneficial effects of the utility model are that: the atomic-level powder modification equipment has a reasonable structure and has the following advantages:

1. the front sealing cover is arranged on one side of the quartz glass reaction cavity, the rear sealing cover is arranged on the other side of the quartz glass reaction cavity, the quartz glass reaction cavity is fixedly connected with the front sealing cover and the rear sealing cover through the assembling bolts, and the two sides of the stainless steel rotating cavity are fixedly connected with the air inlet pipe and the rotating shaft through the stainless steel rotating joint, so that the device can be disassembled and is convenient to overhaul;

2. the front sealing cover is uniformly connected with the precursor source injection pipes on one side, and the first pressure sensors are arranged on the precursor source injection pipes, so that the device can convey different precursor sources to the stainless steel rotating cavity for precursor source reaction pipelines with different performances;

3. one side through at the rotatory chamber of stainless steel is provided with porous panel, the porous panel that adopts different specifications can be handled the powder of equidimension not, the rotatory chamber of stainless steel all passes through stainless steel rotary joint swivelling joint with intake pipe and rotation axis simultaneously, make the rotatory chamber of stainless steel can dismantle, adopt the rotatory chamber of stainless steel of different specifications according to actual conditions, the thermal field atmosphere that atomic level powder modification equipment can't be at different specifications has been solved, both can realize the film cladding in low temperature range and can realize the problem of aftertreatment in high temperature range.

Drawings

Fig. 1 is a schematic front view of a cross-sectional structure of the present invention;

FIG. 2 is a schematic side view of the connection between the stainless steel rotating cavity and the positioning ring according to the present invention;

FIG. 3 is a schematic side view of the connection between the base and the sliding roller according to the present invention;

fig. 4 is a system block diagram of the present invention.

In the figure: 1. a manual valve; 2. a pressure sensor; 3. a precursor source injection tube; 4. an air exhaust pipe; 5. a front cover; 6. a support bar; 7. a base; 8. a sliding seat; 9. an air inlet pipe; 10. a heating and heat-preserving device; 11. assembling a bolt; 12. fixing the rod; 13. a PLC control system; 14. a control cabinet; 15. a base plate; 16. sealing the cover; 17. a rotating electric machine; 18. a rotating shaft; 19. a stainless steel rotary joint; 20. a porous panel; 21. a stainless steel rotating cavity; 22. a positioning ring; 23. a solid panel; 24. a quartz glass reaction chamber body; 25. a guide roller; 26. a sliding roller; 27. a sliding groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides an embodiment: an atomic-scale powder modification device, comprising a precursor source injection pipe 3, a sliding seat 8, a stainless steel rotary cavity 21 and a quartz glass reaction chamber body 24, and is characterized in that: sliding grooves 27 are formed in two ends of the inside of the sliding seat 8, the base 7 is arranged in the sliding grooves 27, sliding rollers 26 are mounted at two ends of the bottom of the base 7, the distance between the sliding rollers 26 is smaller than the width of the inside of the sliding grooves 27, and meanwhile the base 7 and the inside of the base 7 form a sliding structure through the sliding rollers 26;

the top end of the base 7 is connected with support rods 6, one side of the top end of the sliding seat 8 is fixed with a fixed rod 12, the top end of the fixed rod 12 is provided with a bottom plate 15, one side of the fixed rod 12 is provided with a control cabinet 14, a PLC control system 13 is arranged inside the control cabinet 14, the top end of the bottom plate 15 is provided with a rotating motor 17, the output end of the rotating motor 17 is fixedly connected with a rotating shaft 18 through a rotating shaft, a quartz glass reaction chamber body 24 is arranged above the support rods 6, the top end of each support rod 6 is fixedly connected with the bottom end of the quartz glass reaction chamber body 24, and the quartz glass reaction chamber body 24 and the stainless steel rotating chamber 21 are positioned;

the heating and heat-insulating device 10 is mounted on two sides inside the quartz glass reaction chamber body 24, the front sealing cover 5 is arranged on one side of the quartz glass reaction chamber body 24, the precursor source injection pipe 3 is uniformly connected to one side of the front sealing cover 5, the rear sealing cover 16 and the quartz glass reaction chamber body 24 form a dismounting and mounting structure through the assembling bolt 11, and meanwhile, the front sealing cover 5 and the rear sealing cover 16 are the same in size, so that the dismounting is convenient, and the maintenance is more convenient;

a manual valve 1 is arranged on a precursor source injection pipe 3, a pressure sensor 2 is arranged on one side of the manual valve 1, the model of the pressure sensor 2 can be PSG500, a rear sealing cover 16 is arranged on the other side of a quartz glass reaction chamber main body 24, an exhaust pipe 4 is connected with the bottom end of one side of the rear sealing cover 16, the quartz glass reaction chamber main body 24 and a front sealing cover 5 as well as the quartz glass reaction chamber main body 24 and the rear sealing cover 16 are fixedly connected through an assembling bolt 11, positioning rings 22 are arranged on two sides of the inner part of the quartz glass reaction chamber main body 24, guide rollers 25 are uniformly arranged in the

positioning rings

22, 2 groups of the positioning rings 22 are arranged in the inner part of the quartz glass reaction chamber main body 24, the positioning rings 22 are symmetrically distributed about the central line of a stainless steel rotating cavity 21, the guide rollers 25 are arranged at equal intervals on the inner side of the positioning rings 22, the outer side wall of the stainless, the function of guiding and positioning is achieved, so that the stainless steel rotating cavity 21 is more stable during rotation;

be provided with the rotatory chamber 21 of stainless steel between the inside of holding ring 22, and solid panel 23 is installed to one side in the rotatory chamber 21 of stainless steel, one side of solid panel 23 is provided with solid panel 23, and one side of solid panel 23 evenly is provided with intake pipe 9, the one end that solid panel 23 was kept away from to intake pipe 9 all is linked together with precursor source injection pipe 3, the opposite side in the rotatory chamber 21 of stainless steel is provided with porous panel 20, one side of solid panel 23 and one side of porous panel 20 are respectively through stainless steel rotary joint 19 and intake pipe 9 and rotation axis 18 fixed connection, pressure sensor 2 and the output of switch board 14 are all through the input electric connection of wire and PLC control system 13, the output of PLC control system 13 passes through the input electric connection of wire and rotating electrical machines 17.

The working principle is as follows: when in use, the power supply is connected, then the stainless steel rotating cavity 21 with the proper inner container size is selected according to actual requirements, the stainless steel rotating cavity 21 is placed between the inner parts of the positioning rings 22, then the rotating shaft 18 and the air inlet pipe 9 are respectively and fixedly connected with the stainless steel rotating joint 19, the precursor source output pipe is connected with the precursor source injection pipe 3, meanwhile, the pressure sensor 2 detects the pressure intensity, the rotating motor 17 is started, the output end of the rotating motor 17 drives the stainless steel rotating cavity 21 to rotate through the rotating shaft 18, one side of the front sealing cover 5 is uniformly connected with a plurality of precursor source injection pipes 3, so that the device can realize the conveying of different precursor sources to the stainless steel rotating cavity 21 for precursor source reaction pipelines with different performances, meanwhile, the positioning rings 22 are arranged on two sides in the quartz glass reaction cavity 24, and the guide rollers 25 are uniformly arranged in the positioning rings 22, make stainless steel rotation cavity 21 stability when rotating higher, through increasing a flange on the closing cap between rotation axis 18 and quartz glass reaction chamber 24, then a flange mounting magnetic fluid is sealed, this magnetic fluid seals one end both can seal, can rotate again, one end is connected with rotation axis 18, one end is connected with rotating electrical machines 17, exhaust tube 4 comes out and can connect the vacuum valve, pressure sensor 2, the heat adsorption device, pressure tuning system and vacuum pump, its effect of pressure tuning system has two points: the powder part needing to be modified is nano-level, is light and easy to be pumped away, the pressure of the stainless steel rotary cavity 21 can be slowly reduced by the pressure tuning system during initial vacuum pumping, powder is prevented from being pumped away, in the modification process, the position of the air pumping pipe 4 can be arranged on the left side of the front sealing cover 5 or on the right side of the rear sealing cover 16, the front body source is preferably arranged on the right side of the rear sealing cover 16, the pressure of the front body source is adjusted when entering the stainless steel rotary cavity 21, so that the front body source can be effectively diffused and fully adsorbed on the powder surface, the system pressure is reduced after the adsorption reaction is finished, the cleaning of the residual front body source and byproducts is facilitated, and the modification efficiency is improved.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. An atomic-scale powder modification apparatus comprising a precursor source injection tube (3), a slide mount (8), a stainless steel spin chamber (21), and a quartz glass reaction chamber body (24), characterized in that: the quartz glass reaction chamber comprises a sliding seat (8), sliding grooves (27) are formed in two ends of the inside of the sliding seat (8), a base (7) is arranged in each sliding groove (27), sliding rollers (26) are installed at two ends of the bottom of the base (7), a supporting rod (6) is connected to the top end of the base (7), a fixing rod (12) is fixed to one side of the top end of the sliding seat (8), a bottom plate (15) is installed at the top end of the fixing rod (12), a control cabinet (14) is installed on one side of the fixing rod (12), a PLC control system (13) is installed in the control cabinet (14), a rotating motor (17) is installed at the top end of the bottom plate (15), the output end of the rotating motor (17) is fixedly connected with a rotating shaft (18) through a rotating shaft, a quartz glass reaction chamber main body (24) is arranged above the supporting rod (6), and the top end of the supporting rod (6) is fixedly connected, the quartz glass reaction chamber comprises a quartz glass reaction chamber body (24), wherein heating and heat-insulating devices (10) are respectively arranged on two sides of the inner part of the quartz glass reaction chamber body (24), a front sealing cover (5) is arranged on one side of the quartz glass reaction chamber body (24), a precursor source injection pipe (3) is uniformly connected to one side of the front sealing cover (5), a manual valve (1) is arranged on the precursor source injection pipe (3), a pressure sensor (2) is arranged on one side of the manual valve (1), a rear sealing cover (16) is arranged on the other side of the quartz glass reaction chamber body (24), an exhaust pipe (4) is connected to the bottom end of one side of the rear sealing cover (16), the quartz glass reaction chamber body (24) and the front sealing cover (5) are fixedly connected through assembling bolts (11), positioning rings (22) are respectively arranged on two sides of the inner part of the quartz glass reaction chamber body (24), and the inside of holding ring (22) all evenly is provided with guide roller (25), be provided with stainless steel rotation chamber (21) between the inside of holding ring (22), and solid panel (23) are installed to one side of stainless steel rotation chamber (21), one side of solid panel (23) is provided with solid panel (23), and one side of solid panel (23) evenly is provided with intake pipe (9), the one end that solid panel (23) were kept away from in intake pipe (9) all is linked together with precursor source injection pipe (3), the opposite side of stainless steel rotation chamber (21) is provided with porous panel (20), one side of solid panel (23) and one side of porous panel (20) are respectively through stainless steel rotary joint (19) and intake pipe (9) and rotation axis (18) fixed connection, the output of pressure sensor (2) and switch board (14) all is through the input electric connection of wire and PLC control system (13), the output end of the PLC control system (13) is electrically connected with the input end of the rotating motor (17) through a lead.

2. An atomic scale powder modification apparatus as defined in claim 1, further comprising: the front cover (5) and the rear cover (16) and the quartz glass reaction chamber body (24) form a dismounting and mounting structure through the assembling bolts (11), and the front cover (5) and the rear cover (16) are the same in size.

3. An atomic scale powder modification apparatus as defined in claim 1, further comprising: the locating ring (22) is provided with 2 groups in quartz glass reaction chamber main part (24), and locating ring (22) is simultaneously around the central line symmetric distribution of stainless steel rotation chamber (21), and guide rollers (25) are equidistant range in the inboard of locating ring (22), and the lateral wall in stainless steel rotation chamber (21) and the lateral wall laminating of guide rollers (25).

4. An atomic scale powder modification apparatus as defined in claim 1, further comprising: the quartz glass reaction chamber body (24) and the stainless steel rotating cavity (21) are positioned on the same central axis.

5. An atomic scale powder modification apparatus as defined in claim 1, further comprising: the distance between the sliding rollers (26) is smaller than the width of the inner part of the sliding groove (27), and meanwhile, the base (7) and the inner part of the base (7) form a sliding structure through the sliding rollers (26).