CN210085560U

CN210085560U - Cavity device for simulating vacuum conveying cavity

Info

Publication number: CN210085560U
Application number: CN201920656104.6U
Authority: CN
Inventors: 翁林
Original assignee: Wuxi Yubang Semiconductor Technology Co Ltd
Current assignee: Wuxi Yubang Semiconductor Technology Co Ltd
Priority date: 2019-05-05
Filing date: 2019-05-05
Publication date: 2020-02-18
Anticipated expiration: 2029-05-05

Abstract

The utility model provides a cavity device for simulating a vacuum conveying cavity, which comprises a cavity shell, wherein a vacuum cover is arranged at the top of the cavity shell, a through hole is formed in the bottom of the cavity shell, an annular base is arranged at the inner edge of the through hole, an isolation cover is arranged at the inner side of the annular base, the isolation cover is positioned in the cavity and has a downward opening, a driving motor is arranged at the inner side of the isolation cover, the driving motor is connected with a PLC (programmable logic controller), a driven motor is arranged at the outer side of the isolation cover, and the driven motor is connected with; the cavity shell is connected with a cavity pressure gauge; the cavity shell is connected with a vacuum pump through a first hand valve, and a pipeline pressure gauge is arranged between the vacuum pump and the first hand valve; the cavity shell is connected with a nitrogen tank through a flow limiting valve and a second hand valve. The utility model provides a replacement arm is placed in advance to simulation vacuum low pressure environment to the cavity device in simulation vacuum conveying chamber, shortens the time of replacement arm adaptation equipment to the time of resume production has improved production efficiency.

Description

Cavity device for simulating vacuum conveying cavity

Technical Field

The utility model relates to a mechanical device especially relates to a cavity device in simulation vacuum conveying chamber.

Background

The vacuum degree requirement of the transmission cavity is very high by the equipment of the semiconductor PVD (physical Vapor deposition) coating process, and once the vacuum degree requirement is larger than the standard parameters, the product is abnormal, so that the wafer is scrapped. The mechanical arm used for conveying and used for conveying in the conveying cavity needs to be maintained once every year, the bearing inside the conveying cavity is mainly replaced, and the high-vacuum grease on the new bearing contains some water vapor, so that production can be recovered by pumping the vacuum pump for one circle after each replacement, and the production efficiency is greatly reduced.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome current defect, provide a cavity device in simulation vacuum conveying chamber for resume the time of production, improve production efficiency.

In order to solve the technical problem, the utility model provides a following technical scheme:

a cavity device for simulating a vacuum conveying cavity comprises a cavity shell, wherein a vacuum cover is arranged at the top of the cavity shell, a through hole is formed in the bottom of the cavity shell, an annular base is arranged at the inner edge of the through hole, an isolation cover is arranged on the inner side of the annular base, the isolation cover is positioned in the cavity and has a downward opening, a driving motor is arranged on the inner side of the isolation cover, the driving motor is connected with a PLC (programmable logic controller), a driven motor is arranged on the outer side of the isolation cover, and the driven motor is connected with a replacement mechanical arm; the cavity shell is connected with a cavity pressure gauge; the cavity shell is connected with a vacuum pump through a first hand valve, and a pipeline pressure gauge is arranged between the vacuum pump and the first hand valve; and the cavity shell is connected with a nitrogen tank through a flow limiting valve and a second hand valve.

Further, the cavity shell is connected with a helium leak detector through a third hand valve.

The utility model relates to a cavity device in simulation vacuum conveying chamber, simulation vacuum low pressure environment place the replacement arm in advance, shorten the time of replacement arm adaptation equipment to the time of resume production has improved production efficiency.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural diagram of the present invention.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.

As shown in fig. 1, a cavity device for simulating a vacuum transfer cavity comprises a cavity housing 1, a vacuum cover 2 is arranged at the top of the cavity housing 1, a through hole is arranged at the bottom of the cavity housing 1, an annular base 3 is arranged at the inner edge of the through hole, an isolation cover 4 is arranged at the inner side of the annular base 3, the isolation cover 4 is positioned in the cavity and has a downward opening, a driving motor 5 is arranged at the inner side of the isolation cover 4, the driving motor 5 is connected with a PLC6, a driven motor 7 is arranged at the outer side of the isolation cover 4, and the driven motor 7 is connected with a replacement mechanical arm a; the cavity shell 1 is connected with a cavity pressure gauge 8; the cavity shell 1 is connected with a vacuum pump 10 through a first hand valve 9, and a pipeline pressure gauge 11 is arranged between the vacuum pump 10 and the first hand valve 9; the chamber housing 1 is connected with a nitrogen tank 14 through a flow limiting valve 12 and a second hand valve 13.

The cavity shell 1 is connected with a helium leak detector 16 through a third hand valve 15, secondary leak detection is achieved, and the sealing performance of the cavity is guaranteed.

The working principle is as follows:

the cavity shell is hermetically connected with the annular base, the annular base is hermetically connected with the isolation cover, when the vacuum chuck is used, the replacement mechanical arm is placed into the cavity and is connected with the driven motor, and the vacuum cover is covered and sealed; starting a vacuum pump, observing the reading of a pipeline pressure gauge, slowly opening a first hand valve when the reading meets the requirement (is determined according to actual conditions), observing the reading of a cavity pressure gauge, if the reading of the cavity pressure gauge is not reduced, indicating that the cavity has a leakage condition, closing the first hand valve, avoiding the damage of the vacuum pump due to overload, and simultaneously checking the sealing property of a sealing part; if the reading of the cavity pressure gauge continuously decreases and meets the requirement (determined according to the actual condition), opening the third hand valve, performing secondary leak detection by using a helium leak detector, closing the third hand valve after the leak detection is completed, and closing the helium leak detector; open the second hand valve, let high-purity nitrogen gas get into the cavity via the current-limiting valve, operation PLC control initiative motor operation, drive the operation of driven motor through the magnetic coupling, make the replacement arm keep synchronous rotation, release the steam in the bearing when the pivoted, be taken away by the vacuum pump along with high-purity nitrogen gas, realized so far that the removal steam preliminary treatment before the replacement arm is gone up the computer, when the arm in conveying chamber needs to be changed, only need carry out whole change with the replacement arm, carry out the evacuation to the conveying chamber again and can resume production.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a cavity device of simulation vacuum transfer chamber which characterized in that: the vacuum cavity comprises a cavity shell, wherein a vacuum cover is arranged at the top of the cavity shell, a through hole is formed in the bottom of the cavity shell, an annular base is arranged at the inner edge of the through hole, an isolation cover is arranged on the inner side of the annular base, the isolation cover is positioned in the cavity and is downward in opening, a driving motor is arranged on the inner side of the isolation cover, the driving motor is connected with a PLC (programmable logic controller), a driven motor is arranged on the outer side of the isolation cover, and the driven motor is connected with a replacement mechanical arm;

the cavity shell is connected with a cavity pressure gauge;

the cavity shell is connected with a vacuum pump through a first hand valve, and a pipeline pressure gauge is arranged between the vacuum pump and the first hand valve;

and the cavity shell is connected with a nitrogen tank through a flow limiting valve and a second hand valve.

2. A chamber body assembly for simulating a vacuum transfer chamber as set forth in claim 1, wherein: and the cavity shell is connected with a helium leakage detector through a third hand valve.