CN210073801U

CN210073801U - Clamping device with heating function

Info

Publication number: CN210073801U
Application number: CN201920309879.6U
Authority: CN
Inventors: 许峯嘉; 庄海云; 黎嘉豪
Original assignee: SHANGHAI PNC PROCESS SYSTEMS CO Ltd; Zhiwei Semiconductor Shanghai Co Ltd
Current assignee: SHANGHAI PNC PROCESS SYSTEMS CO Ltd; Zhiwei Semiconductor Shanghai Co Ltd
Priority date: 2019-03-12
Filing date: 2019-03-12
Publication date: 2020-02-14
Anticipated expiration: 2029-03-12

Abstract

The utility model discloses a gripper with heating function, which comprises a gripper hand for gripping wet wafer boxes in a cleaning tank and a carrying mechanism for driving the gripper hand to move; the clamping hand is connected with the conveying mechanism through the cross rod. The utility model discloses press from both sides and get the ware from taking heating function, when pressing from both sides the ware clamp and get wet wafer box, press from both sides the ware and can remove the in-process, rely on the heating temperature of its self to evaporate the moisture on wet wafer box surface, then alright with will doing the wafer box and remove to the target location, press from both sides the ware by original configuration and reduce to press from both sides for one and get the ware, reduced manufacturing cost for wet two clamp.

Description

Clamping device with heating function

Technical Field

The utility model relates to a wet cleaning technical field especially relates to a press from both sides and get ware with heating function.

Background

In the process of global shift of semiconductor industry to continent, localization of semiconductor devices has important strategic significance. With the continuous support of national policies and capital, the continuous and high-intensity research and development investment of the domestic equipment and the autonomous grasping of core technology are increasingly promoted, wherein particularly wet tank type cleaning equipment is required to be produced by various newly designed and newly created equipment products according to the years of experience of domestic senior engineers.

In the present wet process slot type cleaning equipment, two modes are mainly adopted to carry dry and wet wafer boxes: one is to adopt two grippers to respectively convey a wet wafer cassette and a dry wafer cassette, namely, one gripper is adopted to take out the wet wafer cassette, and after the wet wafer cassette is dried, the other gripper is used to convey the dry wafer cassette; and the other method is that the cleaned wet wafer box is taken out by a clamping device and then is dried by a drying device. The two modes have higher production cost and low production efficiency, and the whole clamping and carrying equipment has larger volume and needs to occupy larger production space.

Disclosure of Invention

In view of the above, the present invention provides a gripper with heating function, which is used to solve the problems existing in the above background art.

A gripper with a heating function comprises a gripping hand for gripping a wet wafer box in a cleaning tank and a conveying mechanism for driving the gripping hand to move; the clamping device comprises a clamping mechanism, a transverse rod, a clamping component and a clamping rod, wherein the clamping mechanism is connected with the conveying mechanism through the transverse rod, the clamping mechanism comprises a fixing component and a clamping rod with a heating function, the fixing component is installed on the transverse rod, and the clamping rod is installed on the fixing component.

Preferably, the fixing component comprises a supporting block and a fixing block, a first clamping groove is formed in the supporting block, a second clamping groove is formed in the fixing block, the supporting block and the fixing block are fixed into a whole through a fastener, so that the first clamping groove and the second clamping groove are combined into a groove hole for the cross rod to pass through, a fixing groove is longitudinally formed in the fixing block, and the end portion of the clamping rod is fixed in the fixing groove.

Preferably, the clamping rod is a heating rod, and a protective layer is sleeved on the outer side of the heating rod.

Preferably, the protective layer is made of PFA plastic.

Preferably, the heating rod comprises a stainless steel shell, an insulating inner container, a heating wire and a sealing material layer which are sequentially arranged from outside to inside, wherein a thermocouple alloy wire and a connecting wire used for being connected with the heating wire are arranged in the sealing material layer.

Preferably, the heating rod is U-shaped.

Preferably, the clamping hand is further provided with a limit switch, and the limit switch is fixed on the supporting block through a supporting frame.

Preferably, the bottom of the limit switch is also fixed with a limit rod.

Preferably, the conveying mechanism comprises a lifting mechanism and a linkage clamping mechanism fixed on the lifting mechanism, and the lifting mechanism and the linkage clamping mechanism are electrically connected with a control system of the wet cleaning equipment.

The utility model has the advantages that:

1. the utility model provides a press from both sides and get the ware from taking heating function, when getting the ware clamp and get wet wafer box, press from both sides the ware and can be in the in-process of sending, rely on the heating temperature of its self to fall the moisture evaporation on wet wafer box surface, then alright with carrying dry wafer box to the target location, press from both sides the ware by original configuration and reduce to one and get the ware, reduced the drying time of wet wafer box, improved drying efficiency, reduced manufacturing cost.

2. The number of the clamping devices used in the field production process is reduced, and the phenomenon that the same clamping device clamps liquid in different process washing tanks to cause cross infection is avoided.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic view of a gripper having a heating function.

Fig. 2 is a schematic view of the support block configuration.

Fig. 3 is a schematic structural view of a fixed block.

Fig. 4 is an end view of the clamping bar.

Fig. 5 is a longitudinal sectional view of the clamping bar.

The reference numerals in the figures have the meaning:

the device comprises a wet wafer box 1, a clamping hand 2, a cross rod 3, a clamping rod 4, a supporting block 5, a fixing block 6, a first clamping groove 7, a second clamping groove 8, a fixing groove 9, a stainless steel shell 10, an insulating liner 11, a heating wire 12, a sealing material layer 13, a thermocouple alloy wire 14, a connecting wire 15, a limit switch 16, a support frame 17, a limit rod 18, a lifting mechanism 19 and a linkage clamping mechanism 20.

Detailed Description

For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.

It should be clear that the described embodiments are only some, but not all embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

The present application is described in further detail below with reference to specific embodiments and with reference to the attached drawings.

In the description of the present application, unless explicitly stated or limited otherwise, the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless specified or indicated otherwise; the terms "connected," "fixed," and the like are to be construed broadly and may, for example, be fixedly connected, detachably connected, integrally connected, or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description of the present application, it should be understood that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described with reference to the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.

The embodiment of the utility model provides a press from both sides and get ware with heating function, the ware is got from taking heating function to the clamp of this application, gets the ware when getting the ware clamp and get wet wafer box, gets the ware and can remove the in-process, relies on the heating temperature of its self to remove the moisture evaporation on wet wafer box surface, will do the wafer box and remove to the target position.

Referring to fig. 1 and 2, fig. 1 is a schematic structural view of a gripper with a heating function according to the present invention, and fig. 2 is a schematic structural view of a gripper. As shown in the figure, the gripper comprises a gripping hand 2 and a conveying mechanism, and the gripping hand 2 is connected with the conveying mechanism through a cross rod 3. The clamping hand 2 is used for clamping the wet wafer box 1 in the cleaning tank; the conveying mechanism is used for driving the clamping hand 2 to move up and down according to the control of a control system of the wet groove type cleaning equipment, and the clamping hand 2 is enabled to perform clamping action.

Specifically, the conveying mechanism is a conveyor, and is composed of a lifting mechanism 19 and a linkage clamping mechanism 20, the linkage clamping mechanism 20 is fixed on the lifting mechanism 19, and the lifting mechanism 19 and the linkage clamping mechanism 20 are electrically connected with a control system of the wet cleaning equipment. Since the clamping hand 2 is fixed on the linkage clamping mechanism 20 through the cross bar 3, the lifting mechanism 19 can drive the linkage clamping mechanism 20 and the clamping hand 2 to move up and down under the instruction of the control system. The linkage clamping mechanism 20 is used for driving the clamping hand 2 to move so as to realize the clamping action.

The clamping hand 2 comprises a fixing component and a clamping rod 4 with a heating function, the fixing component is arranged on the cross rod 3, and the clamping rod 4 is arranged on the fixing component.

The fixing component comprises a supporting block 5 and a fixing block 6, a first clamping groove 7 is formed in the supporting block 5, a second clamping groove 8 is formed in the fixing block 6, the supporting block 5 and the fixing block 6 are fixed into a whole through a fastener, so that the first clamping groove 7 and the second clamping groove 8 are combined into a groove hole for the cross rod 3 to penetrate through, a fixing groove 9 is longitudinally formed in the fixing block 6, and the end portion of the clamping rod 4 is fixed in the fixing groove 9.

The clamping rod 4 has a heating function, and can be a mechanical handle with a heating device arranged inside or a heating rod. In this embodiment, the clamping rod 4 is a heating rod, and a protective layer is sleeved on the outer side of the heating rod. The protective layer can be made of PFA plastic, the surface tension of the PFA plastic is low, and the attachment amount of liquid on the surface of the clamping rod can be reduced, so that the drying time of the clamping rod 4 is shortened, and the drying work efficiency is improved. The heating rod is U-shaped, and two ends of the heating rod are respectively inserted and fixed in the fixing grooves 9 of the fixing blocks 6.

The heating rod comprises a stainless steel shell 10, an insulating inner container 11, a heating wire 12 and a sealing material layer 13 which are sequentially arranged from outside to inside. The sealing material layer 13 may be a ceramic or high-temperature-resistant metal sealing material layer. The sealing material layer 13 is internally provided with thermocouple alloy wires 14 and connecting leads 15, the connecting leads 15 are connected with the heating wires 12, the number of the thermocouple alloy wires 14 is two, the thermocouple alloy wires 14 are used for sensing the heating temperature of the heating rod, and the connecting leads 15 comprise positive leads and negative leads.

In this embodiment, the linkage clamping mechanism 20 is provided with two parallel cross rods 3, each cross rod is provided with two supporting blocks 5, and the supporting blocks on the cross rod on the left side and the supporting blocks on the cross rod on the right side are arranged in a one-to-one correspondence manner. Each supporting shoe all is equipped with at least one fixed block, and the supporting shoe cooperatees with the fixed block to fix on the horizontal pole. The clamping mechanism 20 can move the left and right cross rods to adjust the gap between the left and right clamping rods, thereby realizing the clamping action.

The clamping hand 2 can be further provided with a limit switch 16, and the limit switch 16 is fixed on the supporting block 5 through a supporting frame 17. The bottom of the limit switch 16 is also fixed with a limit rod 18.

When the wet groove type cleaning device is used, under the control of a control system of the wet groove type cleaning device, the lifting mechanism 19 can adjust the height position of the clamping hand 2, adjust the clamping hand 2 to a proper clamping height, and then the linkage clamping mechanism 20 adjusts the gap between the left clamping rod 4 and the right clamping rod 4 to realize the clamping action. In the process of conveying the wet wafer cassette, the heating temperature of the clamping hand 2 per se evaporates the moisture on the surface of the wet wafer cassette, so that the dry wafer cassette can be directly conveyed to a target position (the internal heating temperature of the clamping hand is controlled to be 80-100 ℃).

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A clamping device with a heating function is characterized by comprising

A clamping hand (2) for clamping the wet wafer box (1) in the cleaning tank,

and a conveying mechanism for driving the clamping hand (2) to act;

the clamping device comprises a clamping hand (2), a conveying mechanism, a cross rod (3), a clamping rod (4) and a fixing assembly, wherein the clamping hand (2) is connected with the conveying mechanism through the cross rod (3), the clamping hand (2) comprises the fixing assembly and the clamping rod (4) with a heating function, the fixing assembly is installed on the cross rod (3), and the clamping rod (4) is installed on the fixing assembly.

2. The gripper with the heating function as claimed in claim 1, wherein the fixing component comprises a supporting block (5) and a fixing block (6), the supporting block (5) is provided with a first slot (7), the fixing block (6) is provided with a second slot (8), the supporting block (5) and the fixing block (6) are fixed together by a fastener so that the first slot (7) and the second slot (8) are combined into a slot for the cross bar (3) to pass through,

the fixing block (6) is longitudinally provided with a fixing groove (9), and the end part of the clamping rod (4) is fixed in the fixing groove (9).

3. The gripper with heating function as claimed in claim 1 or 2, wherein said gripping rod (4) is a heating rod, and a protective layer is sleeved on the outer side of said heating rod.

4. The gripper with heating function as claimed in claim 3, wherein said protecting layer is made of PFA plastic.

5. The gripper with the heating function as claimed in claim 3, wherein the heating rod comprises a stainless steel shell (10), an insulating inner container (11), a heating wire (12) and a sealing material layer (13) which are arranged in sequence from outside to inside, and a thermocouple alloy wire (14) and a connecting wire (15) for connecting with the heating wire (12) are arranged in the sealing material layer (13).

6. The gripper with heating function as claimed in claim 5, wherein said heating rod is U-shaped.

7. The gripper with heating function as claimed in claim 6, wherein the gripper (2) is further provided with a limit switch (16), and the limit switch (16) is fixed on the supporting block (5) through a supporting frame (17).

8. The gripper with heating function as claimed in claim 7, wherein a limit bar (18) is further fixed to the bottom of said limit switch (16).

9. The gripper with the heating function as claimed in claim 1, wherein the conveying mechanism comprises a lifting mechanism (19) and a linkage clamping mechanism (20) fixed on the lifting mechanism (19), and the lifting mechanism (19) and the linkage clamping mechanism (20) are both electrically connected with a control system of the wet cleaning equipment.