CN210065193U - Tail gas heat recovery system of polycrystalline silicon production equipment - Google Patents
Tail gas heat recovery system of polycrystalline silicon production equipment Download PDFInfo
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- CN210065193U CN210065193U CN201920028251.9U CN201920028251U CN210065193U CN 210065193 U CN210065193 U CN 210065193U CN 201920028251 U CN201920028251 U CN 201920028251U CN 210065193 U CN210065193 U CN 210065193U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract
The utility model relates to a tail gas heat recovery system of polycrystalline silicon production equipment. The system comprises a reduction furnace, wherein a tail gas outlet of the reduction furnace is connected with a tail gas conveying pipeline with a jacketed pipe, and the jacketed pipe is connected with a cooling water inlet and a high-temperature water outlet; the tail gas conveying pipeline is connected to a tail gas discharge port through a heat exchanger; the inlet and the outlet of a heat exchange medium of the heat exchanger are respectively connected with a cooling water inlet and a high-temperature water outlet; a raw material inlet pipeline of the reducing furnace is connected with the main feed inlet through a buffer and a vaporizer; two branches are arranged between the buffer and the raw material inlet pipeline of the reduction furnace, one branch is directly connected with the raw material inlet pipeline, and the other branch passes through the heat exchanger and can exchange heat with tail gas and high-temperature water in the heat exchanger and then is merged into the raw material inlet pipeline; the high-temperature water outlet is communicated with the flash tank to be used for generating saturated steam. The utility model discloses can high-efficient recycle polycrystalline silicon production tail gas heat, heat output's stability is high.
Description
Technical Field
The utility model relates to a polycrystalline silicon production facility, in particular to a tail gas heat recovery system of the polycrystalline silicon production facility.
Background
At present, the main process technology for producing polycrystalline silicon is an improved siemens method: after the purified high-purity trichlorosilane and hydrogen are mixed in proportion, the mixture is introduced into a polycrystalline silicon reduction furnace at a certain temperature and pressure, deposition reaction is carried out on an electrified high-temperature silicon core to generate polycrystalline silicon and high-temperature reduction tail gas is generated, and the tail gas such as the tetrachlorosilane, the trichlorosilane, hydrogen chloride and the hydrogen in the reduction tail gas is cooled, separated and recycled and then returned to the raw material for recycling. In the reaction process on the silicon core in the reduction furnace, the reaction temperature needs to be heated to about 1100 ℃ by using electric energy, a large amount of heat energy can be generated, and the temperature of the discharged tail gas can reach 500 ℃. How to simply and effectively recycle the heat in the tail gas and cool the tail gas to 120-200 ℃ so as to meet the process requirement of subsequent tail gas recycling treatment, and the method has great significance for reducing the energy consumption of the whole polycrystalline silicon production.
In the existing process for producing polycrystalline silicon, in consideration of utilization of the heat energy, a unit for performing heat recovery is generally added. For example, tail gas is cooled by jacket water, then a high-temperature water tail gas heat exchanger is used for recovering a part of heat, low-pressure steam is flashed, trichlorosilane is vaporized by steam and high-temperature water for feeding of a reduction furnace, and the trichlorosilane is mixed with hydrogen for feeding; and adding a water return system at the positions of a furnace barrel and a chassis of the reduction furnace, performing heat exchange on cold water and heat to obtain hot water, and applying the hot water to other production processes.
However, the existing heat recovery means still has the defects that:
1. although the furnace feeding temperature of the feeding material is directly vaporized and heated by the heat of the high-temperature tail gas, the power consumption of a reduction furnace system can be reduced, and the energy-saving effect is further achieved, the flow of the tail gas in the reduction production process is dynamic, the stable heat supply is difficult to protect, and particularly the heat of the tail gas cannot meet the heat required by the system when the system is started and shut down, so that an auxiliary heat source is required to be added to the system, and the control of the system is relatively complex;
2. although the existing tail gas heat recovery method can solve the problem of partial low-temperature backwater, the existing heat recovery system still cannot fully utilize the heat energy generated by the reduction furnace, the generated low-pressure steam cannot be directly used for polycrystalline silicon production, the high-temperature water temperature of the backwater cannot be used for flashing high-grade steam, and the low-grade steam cannot be effectively utilized in a large process system of a polycrystalline silicon factory.
Disclosure of Invention
The utility model aims to solve the technical problem that a can high-efficient recycle polycrystalline silicon production high temperature reduction furnace tail gas heat is provided, can improve the stability of retrieving heat output, and the steam quality of production more is suitable for polycrystalline silicon production facility's that polycrystalline silicon production technology utilized tail gas heat recovery system and operation method.
The tail gas heat recovery system of the polysilicon production equipment comprises a reduction furnace for polysilicon production, a tail gas outlet of the reduction furnace is connected with a tail gas conveying pipeline with a jacket pipe, and the inlet and the outlet of the jacket pipe are respectively connected with a cooling water inlet and a high-temperature water outlet; the tail gas conveying pipeline is connected to a tail gas discharge port through a heat exchanger; the heat exchanger is provided with a heat exchange medium inlet and a heat exchange medium outlet which are respectively connected with the cooling water inlet and the high-temperature water outlet, so that the tail gas and the cooling water can exchange heat in the heat exchanger; a raw material inlet pipeline of the reduction furnace is connected with a main feed inlet through a buffer and a vaporizer and is used for introducing silicon trichloride and hydrogen raw materials; two branches are arranged between the buffer and the raw material inlet pipeline of the reduction furnace, one branch is directly connected with the raw material inlet pipeline, and the other branch passes through the heat exchanger and can exchange heat with tail gas and high-temperature water in the heat exchanger and then is merged into the raw material inlet pipeline; the high-temperature water outlet is communicated with the flash tank and can be used for generating saturated steam.
Furthermore, a cooling water interlayer is arranged in the furnace body of the reduction furnace, an inlet of the cooling water interlayer is connected with a furnace body cooling water source, and an outlet of the cooling water interlayer of the reduction furnace is connected with the high-temperature water outlet.
Furthermore, an outlet of a cooling water interlayer of the reduction furnace is also connected with a high-temperature water return branch, and the high-temperature water return branch is connected to a heating medium inlet of the vaporizer.
Further, a first high-temperature pump is arranged between an outlet of the cooling water interlayer of the reduction furnace and a high-temperature water outlet; and a second high-temperature pump is arranged between the outlet of the jacketed pipe and the heat exchange medium outlet and high-temperature water outlet of the heat exchanger.
Furthermore, the jacketed pipe adopts a snake-shaped jacketed pipe heat exchange device; the jacket sleeve is preferably provided with two sections.
The utility model discloses positive effect embodies:
1. the outlet of the buffer tank is provided with two branches passing through and not passing through the heat exchanger, so that the temperature of the raw materials entering the reduction furnace can be controlled to reach 150-250 ℃ in the start-stop process by adjusting the flow ratio of the two branches, and the problem that the system heat is low and the requirement on the inlet air temperature cannot be met due to intermittent reaction in the start-stop process is solved.
2. The tail gas outlet pipeline is adopted to adopt two sections of cooling jacket pipes, so that on one hand, the tail gas can be ensured to be cooled, and on the other hand, the material and the structure of the jacket pipes can be designed in different temperature sections, thereby being beneficial to reducing the material cost.
3. The heat exchanger is simultaneously connected with a cooling medium, tail gas and mixed gas raw materials, and the preheating, mixing and feeding of hydrogen and trichlorosilane can be met through efficient heat exchange; and producing high temperature water for flash evaporation to obtain saturated steam; simultaneously, the cooling of the high-temperature reduction tail gas is met, and the heat recycling efficiency is effectively improved.
Drawings
Fig. 1 is a schematic diagram of a system according to an embodiment of the present invention.
Detailed Description
As shown in fig. 1, the tail gas heat recovery system of the polysilicon production equipment comprises a reduction furnace 1 for polysilicon production, a tail gas outlet of the reduction furnace is connected with a tail gas conveying pipeline 3, the tail gas conveying pipeline 3 is provided with two sections of jacketed pipes 2 adopting a snake-shaped jacketed pipe heat exchange device, and an inlet and an outlet of each jacketed pipe 2 are respectively connected with a cooling water inlet 4 and a high-temperature water outlet 5 through a second high-temperature pump; the tail gas conveying pipeline 3 is connected to a tail gas discharge port 7 through a heat exchanger 6; the heat exchanger 6 is provided with a heat exchange medium inlet and a heat exchange medium outlet which are respectively connected with the cooling water inlet 4 and the high-temperature water outlet 5, so that the tail gas and the cooling water can exchange heat in the heat exchanger; a raw material inlet pipeline 8 of the reducing furnace 1 is connected with a total feed inlet 11 through a buffer 9 and a vaporizer 10 and is used for introducing silicon trichloride and hydrogen raw materials; two branches are arranged between the buffer 9 and the raw material inlet pipeline 8 of the reduction furnace, one branch is directly connected with the raw material inlet pipeline 8, and the other branch passes through the heat exchanger 6 and can exchange heat with tail gas and high-temperature water in the heat exchanger and then is merged into the raw material inlet pipeline 8; the high temperature water outlet 5 into the flash drum 12 can be used to generate saturated steam.
The furnace body of the reduction furnace 1 is provided with a cooling water interlayer, the inlet of the cooling water interlayer is connected with a furnace body cooling water source 13, and the outlet of the cooling water interlayer is connected with a high-temperature water outlet 5 through a first high-temperature pump 15. The outlet of the cooling water interlayer of the reduction furnace is also connected with a high-temperature water return branch 14 which is connected to the heating medium inlet of the vaporizer 10.
The operation method of the heat recovery system based on the implementation comprises the following steps:
a. the reaction raw material hydrogen gas enters a vaporizer and is preheated and mixed with the gas phase trichlorosilane after preheating and gasification; the mixed gas enters a buffer to be fully mixed and buffered again;
b. the mixed gas output by the buffer is conveyed through two branches, wherein one branch enters a heat exchanger, takes high-temperature tail gas and high-temperature water as heat sources, is subjected to heat exchange and temperature rise and then is combined with the raw material mixed gas of the other branch, and the mixed gas enters a reduction furnace after the feeding temperature of the mixed gas reaches 120-200 ℃; the mixed gas feeding temperature is adjusted by adjusting the flow ratio of the two outgoing paths.
c. Tail gas discharged after the heating reaction in the reduction furnace enters a heat exchanger through a tail gas conveying pipeline with a jacketed pipe, exchanges heat with cooling water entering the jacketed pipe and the heat exchanger, and is discharged from a tail gas discharge port after being cooled; the cooling water after absorbing heat is conveyed to a flash tank through a high-temperature water outlet and is used for generating high-temperature steam; the temperature of the cooling water entering the jacketed pipe and the heat exchanger is 140-152 ℃, and the temperature of the high-temperature outlet water of the jacketed pipe and the heat exchanger is 165-175 ℃.
In the reaction process of the reducing furnace, the furnace body is cooled by introducing cooling water into the cooling water interlayer, so that the temperature of outlet high-temperature water of the cooling water interlayer is 165-175 ℃, the outlet high-temperature water is divided into two paths, one path is sent to a flash evaporation tank through a high-temperature water outlet, and the other path is sent to a vaporizer to be used as a heat source for preheating raw material gas.
Claims (6)
1. The utility model provides a tail gas heat recovery system of polycrystalline silicon production facility, includes reducing furnace (1) that is used for polycrystalline silicon production, characterized by: a tail gas outlet of the reduction furnace (1) is connected with a tail gas conveying pipeline (3) with a jacketed pipe (2), and an inlet and an outlet of the jacketed pipe are respectively connected with a cooling water inlet (4) and a high-temperature water outlet (5); the tail gas conveying pipeline (3) is connected to a tail gas discharge port (7) through a heat exchanger (6); the heat exchanger (6) is provided with a heat exchange medium inlet and a heat exchange medium outlet which are respectively connected with the cooling water inlet (4) and the high-temperature water outlet (5); a raw material inlet pipeline (8) of the reducing furnace (1) is connected with a total feed inlet (11) through a buffer (9) and a vaporizer (10); two branches are arranged between the buffer (9) and the raw material inlet pipeline (8) of the reduction furnace, one branch is directly connected with the raw material inlet pipeline (8), and the other branch passes through the heat exchanger (6) and can be merged into the raw material inlet pipeline (8) after exchanging heat with tail gas and high-temperature water in the heat exchanger; the high-temperature water outlet (5) is communicated with a flash tank (12).
2. The system for recovering heat of tail gas of polysilicon production equipment as set forth in claim 1, wherein: the furnace body of the reduction furnace (1) is provided with a cooling water interlayer, the inlet of the cooling water interlayer is connected with a furnace body cooling water source (13), and the outlet of the cooling water interlayer is connected with a high-temperature water outlet (5).
3. The system for recovering heat of tail gas of polysilicon production equipment as set forth in claim 2, wherein: the outlet of the cooling water interlayer of the reduction furnace is also connected with a high-temperature water return branch (14) which is connected to the heating medium inlet of the vaporizer (10).
4. The system for recovering heat of tail gas of polysilicon production equipment as set forth in claim 2, wherein: a first high-temperature pump (15) is arranged between the outlet of the cooling water interlayer of the reduction furnace (1) and the high-temperature water outlet (5); a second high-temperature pump (16) is arranged between the outlet of the jacketed pipe (2) and the heat exchange medium outlet and the high-temperature water outlet (5) of the heat exchanger (6).
5. The system for recovering heat of tail gas of polysilicon production equipment as set forth in claim 1, wherein: the jacketed pipe (2) is a snake-shaped jacketed pipe heat exchange device.
6. The system for recovering heat of tail gas of polysilicon production equipment as set forth in claim 1, wherein: the jacket sleeve (2) is provided with two sections.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920028251.9U CN210065193U (en) | 2019-01-08 | 2019-01-08 | Tail gas heat recovery system of polycrystalline silicon production equipment |
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| CN201920028251.9U CN210065193U (en) | 2019-01-08 | 2019-01-08 | Tail gas heat recovery system of polycrystalline silicon production equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109665527A (en) * | 2019-01-08 | 2019-04-23 | 江苏瑞吉格泰油气工程有限公司 | The tail gas heat quantity recovery system and operation method of production of polysilicon equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109665527A (en) * | 2019-01-08 | 2019-04-23 | 江苏瑞吉格泰油气工程有限公司 | The tail gas heat quantity recovery system and operation method of production of polysilicon equipment |
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Effective date of registration: 20230209 Address after: No. 60, Linjiang West Road, Zhenjiang New District, Jiangsu Province Patentee after: Jiangsu Oriental Ruiji Energy Equipment Co.,Ltd. Patentee after: ZHENJIANG DONGFANG ELECTRIC HEATING TECHNOLOGY CO.,LTD. Address before: No. 60, Linjiang West Road, Zhenjiang New District, Jiangsu Province Patentee before: Jiangsu Oriental Ruiji Energy Equipment Co.,Ltd. |