CN210052730U

CN210052730U - Vacuum cavity for end face machining

Info

Publication number: CN210052730U
Application number: CN201921476166.5U
Authority: CN
Inventors: 张孝锋; 梅强; 韩胜博
Original assignee: Hangzhou Chuanzhou Precision Machinery Co Ltd
Current assignee: Hangzhou Chuanzhou Precision Machinery Co Ltd
Priority date: 2019-09-06
Filing date: 2019-09-06
Publication date: 2020-02-11
Anticipated expiration: 2029-09-06

Abstract

The utility model provides a vacuum cavity for terminal surface machining. The vacuum cavity for end face machining comprises a base, the top fixedly connected with claw disk body of base, the spout has been seted up to the claw disk body, sliding connection has the slider between the both sides of spout, the top fixedly connected with slide of slider, the top of slide is provided with the jack catch, the outer wall laminating of slide is provided with the tight ring that supports, the laminating of one side of tight ring is provided with the stopper, the bottom of stopper and the laminating setting of the top of slide, the jack has been seted up at the top of stopper, the inner wall fixedly connected with snap ring of jack, the connecting hole has been seted up to one side of stopper, the connecting hole is linked together with the jack. The utility model provides a vacuum cavity for terminal surface machining need not the manual upset cylinder body of workman, the operation of being convenient for to promoted machining efficiency, the device simple structure simultaneously, reasonable in design wholly passes through bolted connection, convenient to detach, thereby the convenience is maintained it.

Description

Vacuum cavity for end face machining

Technical Field

The utility model relates to an end face machining field especially relates to a vacuum cavity for end face machining.

Background

Such vacuum chambers have been developed to reduce the number of vacuum chambers in semiconductor applications, while the wafer capacity is nearly constant. This configuration uses a moving vacuum with pre-air bearings equipped with differential pressure vacuum grooves. The product features improved static and dynamic response of machine positioning, shortened pumping time and stabilization time, etc.

The vacuum cavity for end face machining in the prior art needs to be manually changed in the direction of a workpiece when different end faces are machined, the end faces to be machined are exposed, the number of operation steps is large, and machining efficiency is reduced.

Therefore, it is necessary to provide a vacuum chamber for end face machining to solve the above technical problems.

Disclosure of Invention

The utility model provides a vacuum cavity for end face machining has solved the more problem of the vacuum cavity operating procedure that is used for end face machining of prior art.

For solving the technical problem, the utility model provides a pair of a vacuum cavity for terminal surface processing, the on-line screen storage device comprises a base, the top fixedly connected with claw disk body of base, the spout has been seted up to the claw disk body, sliding connection has the slider between the both sides of spout, the top fixedly connected with slide of slider, the top of slide is provided with the jack catch, the outer wall laminating of slide is provided with the tight ring of supporting, the laminating of one side of the tight ring of supporting is provided with the stopper, the bottom of stopper sets up with the laminating of the top of slide.

Preferably, the top of the limiting block is provided with a jack, and the inner wall of the jack is fixedly connected with a clamping ring.

Preferably, one side of the limiting block is provided with a connecting hole, and the connecting hole is communicated with the jack.

Preferably, the top of the base is provided with a fixing screw hole, and the inner thread of the fixing screw hole is connected with a fixing bolt.

Preferably, the top of the clamping jaw is provided with a connecting screw hole, and the inner thread of the connecting screw hole is connected with a connecting bolt.

Preferably, through holes are formed in the axle centers of the base and the claw disc body.

Compared with the prior art, the utility model provides a vacuum cavity for terminal surface processing has following beneficial effect:

the utility model provides a vacuum cavity for end face processing, which makes a sliding block slide outwards in the inner part of a sliding chute and tightly claws the inner diameter of a disk body, thereby driving the sliding plate to slide outwards, driving the clamping jaws to slide outwards, inserting the plug-in unit into the device, then the sliding block is enabled to tightly hold the inner diameter of the disc body to slide inwards in the sliding groove, thereby driving the sliding plate to slide inwards, thereby driving the clamping jaws to slide inwards until the clamping jaws are jointed with the plug-in unit, jointing the abutting rings with the outer diameter of the clamping jaws, thereby achieving the primary fixation, then the limiting block is sleeved on the clamping jaw through the jack, thereby fixing the clamping jaw, thereby fixing the plug-in unit and processing the plug-in unit, the vacuum cavity body for end face processing provided by the utility model does not need workers to turn over the cylinder body manually, is convenient for operation, improves the processing efficiency, meanwhile, the whole device is connected through the bolt, so that the device is convenient to disassemble and maintain.

Drawings

Fig. 1 is a schematic perspective view of a preferred embodiment of a vacuum chamber for end face machining according to the present invention;

fig. 2 is an exploded view of a three-dimensional structure of a vacuum chamber for end face machining according to the present invention;

FIG. 3 is a schematic perspective view of the base shown in FIG. 1;

fig. 4 is a schematic perspective view of the jaw shown in fig. 1.

Reference numbers in the figures: 1. the base, 2, the claw disk body, 3, the spout, 4, the slider, 5, the slide, 6, the jack catch, 7, the tight ring of support, 8, stopper, 9, the jack, 10, the snap ring, 11, the connecting hole, 12, fixed screw hole, 13, fixing bolt, 14, the connecting screw hole, 15, connecting bolt, 16, the through-hole.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and embodiments.

Please refer to fig. 1, fig. 2, fig. 3 and fig. 4, wherein fig. 1 is a schematic structural diagram of a vacuum chamber for end face processing according to a preferred embodiment of the present invention; FIG. 2 is a schematic perspective view of the limiting block shown in FIG. 1; FIG. 3 is a schematic perspective view of the base shown in FIG. 1; fig. 4 is a schematic perspective view of the jaw shown in fig. 1. A vacuum chamber body for terminal surface processing includes base 1, base 1's top fixedly connected with claw disk body 2, spout 3 has been seted up to claw disk body 2, sliding connection has slider 4 between the both sides of spout 3, the top fixedly connected with slide 5 of slider 4, the top of slide 5 is provided with jack catch 6, the outer wall laminating of slide 5 is provided with the tight ring 7 that supports, the laminating of one side of tight ring 7 is provided with stopper 8, stopper 8's bottom and slide 5's top laminating setting, spout 3 and slider 4 all are fan-shaped range along the external diameter of chuck body 2, and jack catch 6 and slide 5's quantity is unanimous with spout 3 and slider 4 quantity, jack catch 6 and slide 5 one-to-one.

Preferably, jack 9 has been seted up at the top of stopper 8, the inner wall fixedly connected with snap ring 10 of jack 9 overlaps stopper 8 on jack catch 6 through jack 9 to make jack catch 6 fixed, snap ring 10 supports tight jack catch 6.

Preferably, one side of the limiting block 8 is provided with a connecting hole 11, the connecting hole 11 is communicated with the jack 9, the connecting hole 11 can be connected with other equipment, and a workpiece can be operated through the connecting hole 11.

Preferably, the top of the base 1 is provided with a fixing screw hole 12, the internal thread of the fixing screw hole 12 is connected with a fixing bolt 13, and the fixing bolt 13 can fix the device through the fixing screw hole 12, so that the device is convenient to detach and convenient to maintain.

Preferably, the top of the clamping jaw 6 is provided with a connecting screw hole 14, the inner thread of the connecting screw hole 14 is connected with a connecting bolt 15, and the connecting bolt 15 fixes the clamping jaw and the sliding plate 5 together through the connecting screw hole 14, so that the clamping jaw is convenient to detach and convenient to maintain.

Preferably, through holes 16 are formed in the axle centers of the base 1 and the jaw plate body 2, and the through holes 16 can enable the device to be connected with other equipment and can also enable the device to perform other work through the through holes 16.

The utility model provides a theory of operation for vacuum cavity of terminal surface processing as follows:

with slider 4 at the inside radial outward slip of the claw disk body 2 of being tight of spout 3, thereby drive slide 5 and outwards slide, thereby drive jack catch 6 and outwards slide, insert plug-in components into the device again, then make slider 4 at the inside radial inward slip of the claw disk body 2 of being tight of spout 3, thereby drive slide 5 and inwards slide, thereby drive jack catch 6 and inwards slide, until jack catch 6 and the laminating of plug-in components, will support the external diameter laminating of tight ring 7 and jack catch 6, thereby reach tentatively fixed, again with stopper 8 through jack 9 cover on jack catch 6, thereby make jack catch 6 fixed, thereby make plug-in components fixed, thereby process plug-in components.

the sliding block 4 slides outwards in the sliding groove 3 along the inner diameter of the claw disc body 2, so as to drive the sliding plate 5 to slide outwards, and drive the claw 6 to slide outwards, and then the plug-in unit is inserted into the device, then the sliding block 4 is enabled to tightly hold the inner diameter of the disc body 2 to slide inwards in the sliding groove 3, thereby driving the sliding plate 5 to slide inwards, thereby driving the clamping jaws 6 to slide inwards until the clamping jaws 6 are jointed with the plug-in unit, jointing the abutting rings 7 with the outer diameter of the clamping jaws 6, so as to achieve the primary fixation, the limiting block 8 is sleeved on the clamping jaw 6 through the jack 9, so that the clamping jaw 6 is fixed, thereby fixing the plug-in unit and processing the plug-in unit, the vacuum cavity body for end face processing provided by the utility model does not need workers to turn over the cylinder body manually, is convenient for operation, improves the processing efficiency, meanwhile, the whole device is connected through the bolt, so that the device is convenient to disassemble and maintain.

The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes of the present invention are used in the specification and the attached drawings, or directly or indirectly applied to other related technical fields, and the same principle is included in the protection scope of the present invention.

Claims

1. A vacuum chamber for end face machining, includes base (1), its characterized in that: the top fixedly connected with claw disk body (2) of base (1), spout (3) have been seted up to claw disk body (2), sliding connection has slider (4) between the both sides of spout (3), top fixedly connected with slide (5) of slider (4), the top of slide (5) is provided with jack catch (6), the outer wall laminating of slide (5) is provided with to tight ring (7), the one side laminating of tight ring (7) is provided with stopper (8), the bottom of stopper (8) sets up with the top laminating of slide (5).

2. The vacuum chamber for end face machining according to claim 1, wherein a jack (9) is formed in the top of the limiting block (8), and a snap ring (10) is fixedly connected to the inner wall of the jack (9).

3. The vacuum chamber for end face machining according to claim 2, wherein a connecting hole (11) is formed in one side of the limiting block (8), and the connecting hole (11) is communicated with the insertion hole (9).

4. The vacuum chamber for end face machining according to claim 1, wherein a fixing screw hole (12) is formed in the top of the base (1), and a fixing bolt (13) is connected to the inner thread of the fixing screw hole (12) in a threaded manner.

5. The vacuum chamber for end face machining according to claim 1, wherein the top of the clamping jaw (6) is provided with a connecting screw hole (14), and a connecting bolt (15) is connected to the inner thread of the connecting screw hole (14).

6. The vacuum chamber for end face machining according to claim 1, wherein the base (1) and the chuck body (2) are provided with through holes (16) at the axial centers.