CN210038328U - Optical scanning device and laser radar - Google Patents
Optical scanning device and laser radar Download PDFInfo
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- CN210038328U CN210038328U CN201920424820.1U CN201920424820U CN210038328U CN 210038328 U CN210038328 U CN 210038328U CN 201920424820 U CN201920424820 U CN 201920424820U CN 210038328 U CN210038328 U CN 210038328U
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Abstract
The present application relates to an optical scanning device and a laser radar, the device including a mirror, a connecting bridge, a mirror base, and an extinction member; the reflector is arranged on the reflector substrate through the connecting bridge, and the extinction part is arranged in front of the reflector substrate; the reflector is used for reflecting incident light; the light eliminating piece is used for reducing scattered light generated by the incident light on the reflector substrate. The device can make the inside scattered light of laser radar significantly reduce, has reduced the detection blind area that stray light caused for laser radar's receiving detectivity improves greatly.
Description
Technical Field
The present application relates to the field of optical technology, and in particular, to an optical scanning device and a laser radar.
Background
With the development of laser radar technology, people have higher and higher requirements on the detection performance of laser radars.
In solid-state lidar, a micro-electromechanical system is generally used as a core device for scanning. However, since the mems itself has a reflection characteristic and a scattering characteristic to the laser beam, disordered stray light is generated inside the laser radar; the receiving detector of the laser radar has extremely high sensitivity, and responds to the stray light, so that the near return light signal is submerged in the signal generated by the internal stray light, and a large detection blind area is generated.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is necessary to provide an optical scanning device and a laser radar capable of reducing a detection blind area in view of the above technical problems.
In a first aspect, an embodiment of the present application provides an optical scanning apparatus, including: the device comprises a reflector, a connecting bridge, a reflector substrate and an extinction member; the reflector is arranged on the reflector substrate through the connecting bridge, and the extinction part is arranged in front of the reflector substrate;
the reflector is used for reflecting incident light;
the light eliminating piece is used for reducing scattered light generated by the incident light on the reflector substrate.
In one embodiment, the light eliminating piece is a diaphragm, the diaphragm is arranged on the front surface of the reflector, and a light through hole of the diaphragm is aligned with the reflector.
In one embodiment, the area of the light-passing hole of the diaphragm is larger than or equal to the area of the reflector.
In one embodiment, the diaphragm is arranged on the front surface of the reflector according to a preset height; the set height is a height determined according to a maximum incident angle of the incident light ray and a difference in radius between the diaphragm and the mirror.
In one embodiment, the surface scattering coefficient of the diaphragm is lower than the scattering coefficient of the mirror substrate front surface.
In one embodiment, a light absorbing film or a light reflecting film is attached to the diaphragm.
In one embodiment, the thickness of the diaphragm is smaller than a preset thickness threshold, and the thickness threshold is determined by not blocking incident light rays reflected by the reflector.
In one embodiment, the front surface of the mirror substrate is attached with an extinction layer for reducing scattering of the incident light by the mirror substrate.
In one embodiment, the extinction layer is a light reflection layer or a light absorption layer.
In a second aspect, embodiments of the present application provide a lidar including the optical scanning apparatus of any of the above embodiments.
The optical scanning device comprises a reflector, a connecting bridge, a reflector substrate and an extinction part, wherein the reflector is arranged on the reflector substrate through the connecting bridge and used for reflecting incident light; in addition, the extinction member is arranged in front of the reflector substrate and can reduce incident light falling on the reflector substrate, so that scattered light generated by the incident light on the reflector substrate is reduced; meanwhile, the scattering coefficient of the surface of the light eliminating piece is lower than that of a scattering system on the front surface of the reflector substrate, so that the scattered light inside the laser radar is greatly reduced, detection blind areas caused by stray light are reduced, and the receiving and detecting capacity of the laser radar is greatly improved.
Drawings
FIG. 1 is a schematic diagram of an optical scanning device according to an embodiment;
FIG. 2 is a schematic diagram of the primary optical signal generation path in a lidar;
FIG. 3 is a schematic diagram of an embodiment of an incident spot beyond the mirror;
FIG. 4 is a schematic illustration of a predetermined set height determination.
Description of reference numerals:
a reflector: 100, respectively; a mirror substrate: 200 of a carrier;
a light eliminating piece: 300, respectively; an extinction layer: 400.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
Fig. 1 is a schematic structural diagram of an optical scanning apparatus according to an embodiment, as shown in fig. 1, the apparatus including: a mirror 100, a connection bridge (not shown), a mirror substrate 200, and a light extinction member 300; the reflecting mirror 100 is installed on the reflecting mirror substrate 200 through a connecting bridge, and the light extinction member 300 is placed in front of the reflecting mirror substrate 200; a reflector 100 for reflecting incident light; the light-eliminating member 300 serves to reduce scattered light generated on the mirror substrate 200 by the incident light.
It should be noted that, as shown in fig. 2, fig. 2 is a generation path of a main optical signal in a laser radar. The laser collimating system is a laser emitting system with a small emitting divergence angle, and comprises a laser light source and a collimating optical system, optionally, the laser light source may include but is not limited to a solid laser light source, a gas laser light source, a semiconductor laser light source, a liquid laser light source, a chemical laser light source, a fiber laser light source and a free electron laser light source lamp, optionally, the collimating optical system may include but is not limited to a spherical mirror optical system combination, a cylindrical mirror optical system combination, an aspheric optical system combination, a fold-back mixed optical system combination, a graded index composite optical system combination and the like. The optical scanning device may be a Micro Electro Mechanical Systems (MEMS) or other galvanometer Systems, which is not limited in this embodiment. In general, a laser radar emits a light signal through a laser collimation system, the light signal reaches a target object via a light scanning device, and the part of the light signal is reflected by the target object back to a receiving system of the laser radar; in addition, some of the optical signals scatter within the optical scanning device. As shown in fig. 3, when the optical signal enters the optical scanning apparatus, most of the optical signal is concentrated on the mirror 200 and reflected to the target object, but a part of the optical signal whose spot protrudes out of the mirror 100 is scattered by the mirror substrate 200 and exhibits a characteristic similar to high-order cosine scattering, and the scattered light is captured by the receiving system, resulting in the receiving system forming a signal response of internal scattering, so that the receiving system is saturated in advance and cannot respond to the return optical signal at near, so that the return optical signal is submerged in the signal generated by the internal stray light, and a detection blind area is generated.
Specifically, the optical scanning device includes a mirror 100, a connecting bridge, a mirror substrate 200, and an extinction member 300. Wherein the reflecting mirror 100 is mounted on the reflecting mirror substrate 200 through a connecting bridge, and the light extinction member 300 is disposed in front of the reflecting mirror substrate 200. Optionally, the light-eliminating member 300 may be attached to the front of the reflector substrate 200, or may be disposed at a certain distance in front of the reflector substrate 200, which is not limited in this embodiment. When an optical signal enters the optical scanning device, since the extinction member 300 is disposed in front of the reflector 200, most incident light enters the reflector 100 and is reflected, a small portion of the incident light firstly passes through the extinction member 300, and the extinction member 300 can reduce or even approximately eliminate the incident light which does not fall on the reflector 100, so that the incident light which originally falls on the reflector substrate 200 is greatly reduced, and the scattered light generated by the reflector substrate 200 on the incident light is greatly reduced.
In the embodiment, the optical scanning device comprises a reflector, a connecting bridge, a reflector substrate and an extinction member, wherein the reflector is arranged on the reflector substrate through the connecting bridge and is used for reflecting incident light; meanwhile, the scattering coefficient of the surface of the light eliminating piece is lower than that of a scattering system on the front surface of the reflector substrate, so that the scattered light inside the laser radar is greatly reduced, detection blind areas caused by stray light are reduced, and the receiving and detecting capacity of the laser radar is greatly improved.
Alternatively, with continued reference to fig. 1, on the basis of the above embodiment, the light extinction member 300 may be a diaphragm, and the diaphragm is disposed on the front surface of the reflector 100, and the light through hole of the diaphragm is aligned with the reflector 100.
Specifically, since the diaphragm is disposed on the front side of the reflector 100, i.e., the incident side, the incident light is firstly selected by the diaphragm before entering the reflector 100, and since the light-passing hole of the diaphragm is aligned with the reflector 100, the incident light can reach the reflector 100 at the portion falling into the light-passing hole of the diaphragm, and the rest of the incident light falling onto the diaphragm can be prevented from falling onto the reflector substrate 200 by the diaphragm.
In this embodiment, through setting up the diaphragm in the front of speculum, and the logical unthreaded hole of diaphragm aims at the speculum to the light signal that the significantly reduced fell on the speculum basement, and then reduce the scattered light that incident light produced on the speculum basement, make the scattered light of optical scanning device's inside significantly reduce, its detection blind area that has greatly reduced stray light and caused, make laser radar's receipt detectivity improve greatly.
Alternatively, the surface scattering coefficient of the above-described diaphragm is lower than that of the front surface of the mirror substrate 200. The surface scattering coefficient set by the diaphragm is lower than the scattering coefficient of the front surface of the reflector substrate 200, the scattering degree of the reflector substrate 200 to incident light is compared, the scattering of the incident light on the diaphragm can be greatly reduced, and then the scattering light is greatly reduced, so that the scattered light inside the laser radar is greatly reduced, the detection blind area caused by stray light is reduced, and the receiving detection capability of the laser radar is greatly improved.
Alternatively, a light absorbing film or a light reflecting film may be attached to the diaphragm to reduce the scattering coefficient of the surface of the diaphragm. Generally, an object has three responses of incidence, reflection and scattering to an optical signal, and the scattering property can be reduced by increasing absorption and reflection due to energy conservation. Therefore, the light absorption film is attached to the surface of the diaphragm, so that more incident light can be absorbed, and scattered light is greatly reduced; or a reflecting film is attached to the surface of the diaphragm, so that more optical signals can be reflected, and the reflection can have directivity, so that the optical signals can be reflected to the direction without influencing a receiving system, and the scattered light rays are greatly reduced. In this embodiment, strengthen the absorption to incident ray with the reduction scattering through attaching the membrane of inhaling on the diaphragm, perhaps strengthen the reflection to incident ray with the reduction scattering through attaching the reflective membrane on the diaphragm to reduced the scattering coefficient on the surface of diaphragm, reduced the detection blind area that stray light caused, make laser radar's receiving detectivity improve greatly.
Optionally, the thickness of the diaphragm is smaller than a preset thickness threshold, and the thickness threshold is determined by not blocking incident light reflected by the reflector.
Specifically, the thickness of the diaphragm needs to be smaller than a preset thickness threshold. Because the thickness of the diaphragm is too thick, the interference can be generated on incident light, and the receiving performance of a receiving system is influenced, so that the thickness of the diaphragm can be smaller than the thickness threshold value by setting the thickness threshold value, and the incident light reflected by the reflector cannot be shielded by the diaphragm due to the excessive thickness. In particular, the thickness of the diaphragm should be as small as possible to minimize the effect on the incident light.
Alternatively, on the basis of the above-described embodiment, the area of the light-passing hole of the diaphragm is larger than or equal to the area of the mirror 100.
Specifically, the area of the light-passing hole of the diaphragm may be greater than or equal to the area of the reflector 100, which may be slightly greater than the area of the reflector 100, or equal to the area of the reflector 100. The area through the light through hole with the diaphragm sets up to the area that is greater than or equal to the speculum, ensures that incident light can be as much as possible on the speculum, reduces the scattering of speculum basement to incident light simultaneously again as far as possible, and then when making sure that optical scanning device is to the response of light signal, has reduced the detection blind area that stray light caused for laser radar's receiving detectivity improves greatly.
Alternatively, on the basis of the above embodiment, the diaphragm is disposed on the front surface of the mirror 100 at a preset height; the set height is a height determined according to the maximum incident angle of the incident ray and the difference in radius between the diaphragm and the mirror.
Specifically, since the incident light is directed to the mirror 100, there is an angle with the plane of the mirror, and when the angle is too large, the incident light may not enter the mirror 100 but fall on the mirror substrate 200. to ensure that as little as possible of the incident light directed to the mirror is blocked by the stop, the height of the stop setting may be determined based on the maximum incident angle of the incident light, the difference in radius between the stop and the mirror 100. referring to fig. 4, d is the difference between the radius of the stop and the radius of the mirror 100, α is the maximum incident angle of the incident light, h is the height of the stop setting, which is the difference between the front of the stop and the distance from the mirror 100. alternatively, the height of the stop setting may be determined by calculation using the formula h dtan α or a variation thereof.
In this embodiment, through setting up the diaphragm in the front of speculum according to predetermined set for the height, because set for the height and be according to the maximum incident angle of incident ray and the height that the radius difference of diaphragm and speculum confirms, consequently, it can guarantee that incident ray furthest passes through the light-passing hole of diaphragm and shoots to the speculum for incident ray can be by the reflection of furthest, and then has improved the light utilization ratio, has also improved the detectivity of radar.
Optionally, on the basis of the above embodiments, a light extinction layer 400 may be further attached to the front surface of the mirror substrate 200, and the light extinction layer 400 is used to reduce scattering of incident light by the mirror substrate 200.
Specifically, since the diaphragm cannot completely eliminate the incident light irradiated onto the mirror substrate 200, the extinction layer 400 may also be attached to the front surface of the mirror substrate 200. The extinction layer can further reduce scattering of incident light by the mirror substrate 200. Alternatively, the matting layer 400 may be a light reflecting layer or a light absorbing layer. When the extinction layer 400 is a reflective layer, it may reduce scattering characteristics by increasing reflection characteristics to incident light; when extinction layer 400 is the light-absorbing layer, thereby it can reduce the scattering characteristic through increasing the absorption characteristic to incident ray, consequently can further reduce the scattering of reflector substrate to incident ray, has reduced the detection blind area that stray light caused for laser radar's receiving detectivity improves greatly.
In an embodiment, there is also provided a lidar comprising a light scanning arrangement as in any of the above embodiments.
The technical principle and technical effects involved in the laser radar are the same as those of the optical scanning device described above, and are not described herein again.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An optical scanning apparatus, characterized in that the apparatus comprises: the device comprises a reflector, a connecting bridge, a reflector substrate and an extinction member; the reflector is arranged on the reflector substrate through the connecting bridge, and the extinction part is arranged in front of the reflector substrate;
the reflector is used for reflecting incident light;
the light eliminating piece is used for reducing scattered light generated by the incident light on the reflector substrate.
2. The optical scanning device as claimed in claim 1, wherein the extinction member is a diaphragm disposed on a front surface of the mirror, and a light-passing hole of the diaphragm is aligned with the mirror.
3. The optical scanning device according to claim 2, characterized in that an area of a light passing hole of the diaphragm is larger than or equal to an area of the mirror.
4. The optical scanning device according to claim 3, wherein the diaphragm is provided at a predetermined height on the front surface of the mirror; the set height is a height determined according to a maximum incident angle of the incident light ray and a difference in radius between the diaphragm and the mirror.
5. An optical scanning device as claimed in claim 2, characterized in that the surface scattering coefficient of the diaphragm is lower than the scattering coefficient of the mirror substrate front face.
6. The optical scanning device as claimed in claim 5, wherein a light absorbing film or a light reflecting film is attached to the aperture.
7. An optical scanning device as claimed in any one of claims 2 to 6, characterized in that the thickness of the diaphragm is smaller than a preset thickness threshold, which is determined by not blocking incident light rays reflected by the mirror.
8. The optical scanning device as claimed in claim 1, wherein an extinction layer is attached to a front surface of the mirror substrate, the extinction layer being configured to reduce scattering of the incident light by the mirror substrate.
9. An optical scanning device as claimed in claim 8, characterized in that the extinction layer is a light-reflecting layer or a light-absorbing layer.
10. Lidar characterized in that it comprises a light scanning device according to any of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920424820.1U CN210038328U (en) | 2019-04-01 | 2019-04-01 | Optical scanning device and laser radar |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920424820.1U CN210038328U (en) | 2019-04-01 | 2019-04-01 | Optical scanning device and laser radar |
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| CN210038328U true CN210038328U (en) | 2020-02-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020200206A1 (en) * | 2019-04-01 | 2020-10-08 | 深圳市速腾聚创科技有限公司 | Optical scanning device and laser radar |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020200206A1 (en) * | 2019-04-01 | 2020-10-08 | 深圳市速腾聚创科技有限公司 | Optical scanning device and laser radar |
| US11662438B2 (en) | 2019-04-01 | 2023-05-30 | Suteng Innovation Technology Co., Ltd. | Optical scanning apparatus and lidar with extinction component |
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