CN210014113U - Limiting protection device and etching equipment - Google Patents
Limiting protection device and etching equipment Download PDFInfo
- Publication number
- CN210014113U CN210014113U CN201920519808.9U CN201920519808U CN210014113U CN 210014113 U CN210014113 U CN 210014113U CN 201920519808 U CN201920519808 U CN 201920519808U CN 210014113 U CN210014113 U CN 210014113U
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- Prior art keywords
- protection device
- limiting protection
- adjusting unit
- limiting
- position limiting
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- 230000000670 limiting effect Effects 0.000 title claims abstract description 90
- 238000005530 etching Methods 0.000 title claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 230000008859 change Effects 0.000 claims description 6
- 230000005489 elastic deformation Effects 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims 1
- 230000008093 supporting effect Effects 0.000 abstract description 6
- 238000007906 compression Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012857 repacking Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model provides a limiting protection device and etching equipment, wherein the limiting protection device comprises a base and a bracket positioned on the base; the bracket comprises a first part, a second part and a third part which are sequentially arranged from top to bottom. The limiting protection device is arranged at the bottom of a connecting mechanism which is connected with a main exhaust pipe of the etching equipment and an auxiliary exhaust pipe, and can play a role in supporting and limiting the main exhaust pipe, so that the sinking condition of the main exhaust pipe can be avoided.
Description
Technical Field
The utility model relates to a semiconductor equipment technical field, in particular to spacing protection device and etching equipment.
Background
The existing etching equipment comprises an equipment main body, an auxiliary calandria fixed on the equipment main body and a main calandria connected with the auxiliary calandria, wherein the main calandria and the auxiliary calandria are tightly connected.
For the existing etching equipment, when the equipment normally operates, a bottom layer rough suction pump is continuously started, a main exhaust pipe connected with the main equipment is subjected to the action of the friction force of air flow in a pipeline from top to bottom, and the phenomenon of pipeline sinking occurs in the past due to the gravity of the main exhaust pipe, so that a corrugated pipe at the tail end of an auxiliary exhaust pipe is in a tense state for a long time, the deformation is easy to occur, and the height difference exists between a main pipeline and an auxiliary pipeline when the pipeline is disassembled and maintained, and the equipment is very difficult to install again.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a spacing protection device and etching equipment to solve current etching equipment main calandria and sink and easily lead to the terminal bellows of attached calandria to take place to warp and main calandria and the problem of attached calandria repacking difficulty.
In order to solve the technical problem, the utility model provides a spacing protection device, include: the device comprises a base and a bracket positioned on the base;
the bracket comprises a first part, a second part and a third part which are sequentially arranged from top to bottom, wherein the third part is closer to the base than the first part and the second part;
the first part and the second part are movably connected, and the movement of the first part relative to the second part can change the total length of the first part and the second part;
the second portion and the third portion are resiliently connected.
Optionally, in the limiting protection device, the limiting protection device further includes two horizontal position adjusting mechanisms, one horizontal position adjusting mechanism is fixed to the first portion, the other horizontal position adjusting mechanism is fixed between the third portion and the base, and the support can adjust the position in the horizontal direction through the horizontal position adjusting mechanism.
Optionally, in the limiting protection device, the horizontal position adjusting mechanism includes a first adjusting unit, a second adjusting unit and a third adjusting unit, the first adjusting unit is tubular and has annular sliding rails distributed along the circumferential direction, the second adjusting unit is disposed along the radial direction of the first adjusting unit and can move along the annular sliding rails in the horizontal direction, the second adjusting unit has linear sliding rails along the horizontal direction, the third adjusting unit is disposed on the second adjusting unit and can move along the linear sliding rails in the horizontal direction, the first horizontal adjusting mechanism is fixed above the first portion through the third adjusting unit, and the other horizontal adjusting mechanism is fixed below the third portion through the third adjusting unit.
Optionally, in the limit protection device, the first part and the second part are connected by screw threads.
Optionally, in the position limiting protection device, the first portion includes a threaded member, and the top of the second portion has a thread groove matching with the threaded member, and the threaded member can move along the thread groove and change the total length of the first portion and the second portion.
Optionally, in the limiting protection device, the second portion includes a first limiting member, the third portion includes a second limiting member, and the first limiting member and the second limiting member are disposed opposite to each other.
Optionally, in the limiting protection device, the second portion and the third portion are elastically connected through an elastic member, the elastic member is sleeved on the first limiting member and the second limiting member, and when the first limiting member and the second limiting member contact each other, an amount of elastic deformation of the elastic member remains unchanged.
Optionally, in the limit protection device, the elastic member is a spring.
Optionally, in the limiting protection device, the second portion further includes a first mounting groove, and the first limiting member is disposed in the first mounting groove; the third part further comprises a second mounting groove, and the second limiting piece is arranged in the second mounting groove.
Optionally, in the limit protection device, the base has a through hole.
Optionally, in the limiting protection device, the number of the brackets is multiple, and all the brackets are annularly distributed around the through hole.
Optionally, in the limiting protection device, the number of the supports is three, and the three supports are distributed around the through hole in an equilateral triangle.
Optionally, in the limiting protection device, the limiting protection device further includes a leveling mechanism, and the base is disposed on the leveling mechanism.
Optionally, in the limiting protection device, the leveling mechanism includes a plurality of leveling units, and the plurality of leveling units are arranged in one or more triangles.
The utility model also provides an etching equipment, include:
an apparatus main body;
an auxiliary discharge pipe fixed to the apparatus main body;
the main calandria and the auxiliary calandria are connected through a connecting mechanism;
the limiting protection device is arranged at the bottom of the connecting mechanism.
Optionally, in the etching apparatus, the connecting mechanism includes a flange and a clamping clamp, a groove is formed in an edge of the flange, the clamping clamp is fixed at the groove, and the limiting protection device is disposed at the bottom of the flange.
As described in the background art, the main exhaust pipe and the auxiliary exhaust pipe of the existing etching equipment are tightly connected, and under the long-term action of the bottom layer rough pumping pump, the main exhaust pipe sinks to cause the deformation of the corrugated pipe at the tail end of the auxiliary exhaust pipe, and the problem that the main pipeline and the auxiliary pipeline are difficult to reassemble exists.
In the limiting protection device and the etching equipment provided by the utility model, the limiting protection device comprises a base and a bracket positioned on the base; the bracket comprises a first part, a second part and a third part which are sequentially arranged from top to bottom, wherein the third part is closer to the base than the first part and the second part; the first part and the second part are movably connected, and the movement of the first part relative to the second part can change the total length of the first part and the second part; the second portion and the third portion are resiliently connected. When the limiting protection device is arranged at the bottom of the connecting mechanism for connecting the main exhaust pipe and the auxiliary exhaust pipe of the etching equipment, the limiting protection device can play a role in supporting and limiting the main exhaust pipe, so that the condition that the main exhaust pipe sinks can be avoided, and the problems that the tail end corrugated pipe of the auxiliary exhaust pipe is deformed and the main exhaust pipe and the auxiliary exhaust pipe are difficult to reassemble due to the fact that the main exhaust pipe of the existing etching equipment sinks are solved.
Furthermore, the total length of the first part and the second part can be changed, so that the length of the whole device can be adjusted according to actual requirements, the limiting protection device has better adaptability, and in addition, the second part and the third part are connected through the elastic piece, so that the whole device is elastically stressed, the main pipe bank is prevented from sinking, and meanwhile, the service life of the limiting protection device is prolonged.
Drawings
Fig. 1 is a schematic structural diagram of a limiting protection device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an etching apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a connection mechanism according to an embodiment of the present invention;
wherein the reference numerals are as follows:
1-a limit protection device; 11-a base; 12-a scaffold; 121-a first portion; 122-a second portion; 123-a third portion; 1211-a screw; 101-thread groove; 124-an elastic member; 1221-a first stop; 1231-a second stop; 102-a first mounting groove; 103-a second mounting groove; 125-horizontal position adjustment mechanism; 1251-a first adjusting unit; 1252-a second adjustment unit; 1253-a third adjustment unit; 2-subsidiary calandria; 3-main calandria; 4-a connection mechanism; 41-a flange; 42-card clamp.
Detailed Description
The following describes the limiting protection device and the etching apparatus in further detail with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
First, referring to fig. 1, the limiting protection device 1 provided in this embodiment includes: a base 11 and a bracket 12 positioned on the base 11. The limit protection device 1 plays a limit protection role through the bracket 12, and simultaneously supports and fixes the bracket 12 through the base 11.
In this embodiment, the base 11 has a through hole (not shown), when the limiting protection device 1 is used to support a tubular object, such as a main exhaust pipe of an etching apparatus, the base 11 is sleeved on the main exhaust pipe, correspondingly, the number of the brackets 12 is multiple, and all the brackets 12 are annularly distributed around the through hole, so that the supporting forces of all the brackets 12 are uniformly distributed. In this embodiment, it is preferable that the number of the brackets 12 is three, and the three brackets 12 are distributed around the through hole in an equilateral triangle.
For each of said supports 12, in particular, it comprises: the base comprises a first part 121, a second part 122 and a third part 123 which are sequentially arranged from top to bottom, wherein the third part 123 is closer to the base 11 than the first part 121 and the second part 122.
More specifically, the first portion 121 and the second portion 122 are movably connected, and the movement of the first portion 121 relative to the second portion 122 can change the total length of the first portion 121 and the second portion 122, so that the length of the whole device can be adjusted according to actual requirements, and the limiting protection device 1 has better adaptability.
Specifically, the movable connection manner of the first portion and the second portion may be a threaded connection or a bayonet connection, and the like, and in this embodiment, it is preferable that the first portion and the second portion are threaded connections, and the specific implementation form of the threaded connection may be:
the first part 121 comprises a screw member 1211, the top of the second part 122 has a screw groove 101 matching with the screw member 1211, and the screw member 1211 can move along the screw groove 101 and change the total length of the first part 121 and the second part 122, thereby achieving the purpose of adjusting the length of the whole device.
Different from the threaded connection of the first part 121 and the second part, the second part 122 and the third part 123 are elastically connected, so that the whole limiting protection device 1 is elastically stressed, and the service life of the limiting protection device is prolonged while the limiting protection device is used for limiting protection. The specific implementation form of the elastic connection can be as follows:
an elastic member 124 is disposed between the second portion 122 and the third portion 123, and the second portion 122 and the third portion 123 are elastically connected by the elastic member 124.
As shown in fig. 1, the elastic member 124 may be a spring.
Referring to fig. 1, in a preferred embodiment of the present invention, the second portion 122 includes a first limiting member 1221, the third portion 123 includes a second limiting member 1231, the first limiting member 1221 and the second limiting member 1231 are disposed oppositely, the elastic member 124 is sleeved on the first limiting member 1221 and the second limiting member 1231, and an amount of elastic deformation of the elastic member 124 is kept unchanged when the first limiting member 1221 and the second limiting member 1231 contact each other.
The first limiting member 1221 and the second limiting member 1231 are configured to limit the amount of compression of the elastic member 124 to protect the elastic member 124, and to limit the position of the elastic member 124 in the horizontal direction, so as to prevent the elastic member 124 from being displaced in the horizontal direction during the compression process to affect the service life of the elastic member 124 and the supporting and limiting effect of the entire bracket 12.
Further, the second portion 122 further includes a first mounting groove 102, and the first limiting member 1221 is disposed in the first mounting groove 102; the third portion 123 further includes a second mounting groove 102, and the second limiting member 1231 is disposed in the second mounting groove 102. The arrangement of the first and second mounting grooves 102 and 102 defines the mounting positions of the first and second retaining members 1221 and 1231, so that the second and third portions 122 and 123 are easily aligned, and also helps to limit the amount of compression of the elastic member 124 to protect the elastic member 124.
The limiting protection device 1 of this embodiment further includes two horizontal position adjusting mechanisms 125, one horizontal position adjusting mechanism 125 is fixed on the first portion 121, the other horizontal position adjusting mechanism 125 is fixed between the third portion 123 and the base 11, and the bracket 12 is horizontally adjusted by the horizontal position adjusting mechanism 125. The horizontal position adjusting mechanism 125 can ensure that three of the supports 12 are distributed in an equilateral triangle all the time.
Specifically, the horizontal position adjusting mechanism 125 includes a first adjusting unit 1251, a second adjusting unit 1252, and a third adjusting unit 1253, the first adjusting unit 1251 is tubular and has an annular slide rail distributed along a circumferential direction, the second adjusting unit 1252 is disposed along a radial direction of the first adjusting unit 1251 and can move along the annular slide rail in a horizontal direction, the second adjusting unit 1252 has a linear slide rail along the horizontal direction, the third adjusting unit 1253 is disposed on the second adjusting unit 1252 and can move along the linear slide rail in the horizontal direction, one of the horizontal position adjusting mechanisms is fixed above the first part 121 by the third adjusting unit 1253, and the other of the horizontal position adjusting mechanisms is fixed below the third part 123 by the third adjusting unit 1253.
In addition, the limiting protection device 1 of the embodiment may further include a leveling mechanism, the leveling mechanism includes a plurality of leveling units, and the leveling units are arranged in one or more triangles. When the leveling mechanism is adopted, the base 11 can be arranged on the leveling mechanism, and the levelness of the base 11 is adjusted by the leveling mechanism so as to ensure that a supported object can be stably supported.
In view of the above-mentioned limiting protection device 1, this embodiment further provides an etching apparatus, as shown in fig. 2, the etching apparatus includes:
an apparatus main body (not shown in the drawings);
an auxiliary discharge pipe 2, wherein the auxiliary discharge pipe 2 is fixed on the device main body;
the main calandria 3, the said main calandria 3 and the said subsidiary calandria 2 are connected through a connecting gear 4;
the limiting protection device 1 is as described above, and the limiting protection device 1 is arranged at the bottom of the connecting mechanism 4.
As shown in fig. 3, said connection means 4 comprise a flange 41 and a clamping jaw 42, said flange 41 being used for connecting said main discharge pipe 3 and said auxiliary discharge pipe 2, said clamping jaw 42 being used for fixing said flange 41; specifically, the flange 41 has a groove at its edge, and the clamp 42 is fixed in the groove by a bolt.
The limit protection device 1 supports and limits the main pipe 3 by supporting the flange 41 or the clamp 42. When the limiting protection device 1 is disposed at the bottom of the flange 41 or the clamping jaw 42 for supporting the main rack pipe 3, the horizontal position adjusting mechanism 125 disposed on the first portion 121 is fixedly connected to the flange 41 or the clamping jaw 42, the base 11 of the limiting protection device 1 is sleeved on the main rack pipe 3, and the three brackets 12 are distributed in a triangular shape around the main rack pipe 3.
It is here supplementary to need the utility model provides a spacing protection device 1 can use with the cooperation of raised floor pillar, so that the utility model provides a spacing protection device 1 is applicable to the operating mode that needs high-order support with spacing protection.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.
Claims (16)
1. A limit protection device is characterized by comprising: the device comprises a base and a bracket positioned on the base;
the bracket comprises a first part, a second part and a third part which are sequentially arranged from top to bottom, wherein the third part is closer to the base than the first part and the second part;
the first part and the second part are movably connected, and the movement of the first part relative to the second part can change the total length of the first part and the second part;
the second portion and the third portion are resiliently connected.
2. A position limiting protection device according to claim 1 further comprising two horizontal position adjustment mechanisms, one of said horizontal position adjustment mechanisms being fixed to said first portion and the other of said horizontal position adjustment mechanisms being fixed between said third portion and said base, said bracket being capable of horizontal position adjustment by said horizontal position adjustment mechanisms.
3. The position limiting protection device according to claim 2, wherein the horizontal position adjusting mechanism comprises a first adjusting unit, a second adjusting unit and a third adjusting unit, the first adjusting unit is tubular and has annular slide rails distributed along the circumferential direction, the second adjusting unit is arranged along the radial direction of the first adjusting unit and can move along the annular slide rails in the horizontal direction, the second adjusting unit has linear slide rails along the horizontal direction, the third adjusting unit is arranged on the second adjusting unit and can move along the linear slide rails in the horizontal direction, one horizontal position adjusting mechanism is fixed above the first part through the third adjusting unit, and the other horizontal position adjusting mechanism is fixed below the third part through the third adjusting unit.
4. The position limiting protection device of claim 1, wherein said first portion and said second portion are threadably connected.
5. The position limiting protection device according to claim 4, wherein the first portion comprises a threaded member, the second portion has a threaded groove at a top thereof for mating with the threaded member, and the threaded member is capable of moving along the threaded groove and changing a total length of the first portion and the second portion.
6. The position limiting protection device of claim 1 wherein said second portion comprises a first limiting member and said third portion comprises a second limiting member, said first limiting member and said second limiting member being disposed opposite one another.
7. The position limiting protection device according to claim 6, wherein the second portion and the third portion are elastically connected by an elastic member, the elastic member is sleeved on the first limiting member and the second limiting member, and an amount of elastic deformation of the elastic member is kept unchanged when the first limiting member and the second limiting member contact each other.
8. The position limiting protection device of claim 7, wherein said resilient member is a spring.
9. The position limiting protection device according to claim 6, wherein said second portion further comprises a first mounting groove, said first limiting member being disposed in said first mounting groove; the third part further comprises a second mounting groove, and the second limiting piece is arranged in the second mounting groove.
10. The position limiting protection device of claim 1, wherein said base has a through hole.
11. The position limiting protection device according to claim 10, wherein the number of the brackets is plural, and all the brackets are annularly distributed around the through hole.
12. The position limiting protection device according to claim 11, wherein the number of said brackets is three, and three of said brackets are distributed around said through hole in an equilateral triangle.
13. The limit guard of claim 1, further comprising a leveling mechanism, the base being disposed on the leveling mechanism.
14. The position limiting protection device according to claim 13, wherein the leveling mechanism comprises a plurality of leveling units, and the plurality of leveling units are arranged in one or more triangles.
15. An etching apparatus, comprising:
an apparatus main body;
an auxiliary discharge pipe fixed to the apparatus main body;
the main calandria and the auxiliary calandria are connected through a connecting mechanism;
a position limiting protection device according to any of claims 1 to 14, said position limiting protection device being located at the bottom of said attachment means.
16. The etching apparatus according to claim 15, wherein the connecting mechanism comprises a flange and a clamping jaw, the flange has a groove at an edge thereof, the clamping jaw is fixed at the groove, and the limit protection device is provided at a bottom of the flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920519808.9U CN210014113U (en) | 2019-04-16 | 2019-04-16 | Limiting protection device and etching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920519808.9U CN210014113U (en) | 2019-04-16 | 2019-04-16 | Limiting protection device and etching equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210014113U true CN210014113U (en) | 2020-02-04 |
Family
ID=69315164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920519808.9U Expired - Fee Related CN210014113U (en) | 2019-04-16 | 2019-04-16 | Limiting protection device and etching equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210014113U (en) |
-
2019
- 2019-04-16 CN CN201920519808.9U patent/CN210014113U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200204 |