CN210001588U - kinds of ozone generator - Google Patents

Abstract

The utility model relates to an ozone generator, including high-pressure end plate, insulating isolation layer, insulating medium layer, clearance gasket, low pressure conducting layer and low-pressure end plate, the cavity has between high-pressure end plate and the low-pressure end plate, insulating isolation layer is arranged in the cavity and is arranged in high-pressure end plate below, and insulating medium layer sets up in insulating isolation layer below, and the low pressure conducting layer is arranged in insulating medium layer below, has the clearance gasket between low pressure conducting layer and the insulating medium layer, form the discharge chamber between insulating medium layer and the low pressure conducting layer, insulating isolation layer, insulating medium layer and low pressure conducting layer are circular.

Description

kinds of ozone generator

Technical Field

The utility model relates to an ozone device, in particular to ozone generators.

Background

The ozone generator forms a discharge electric field between pairs of high-voltage alternating-current electrodes (the gap is 1-3 mm), only a very small current passes through the electric field due to the obstruction of a dielectric body, namely partial discharge occurs on salient points on the surface of the dielectric body, so that electric arc can not be formed, so that silent discharge is called, when oxygen or air passes through the gap, parts of oxygen molecules are converted into ozone under the bombardment of high-speed electron flow, so that an ozone preparation process is completed.

The existing ozone generator has the defects that 1, a tubular discharge body is difficult to machine, the precision is poor, the efficiency is low, and the volume is large, a square plate discharge body is easy to cause poor uniformity of an electric field, distortion occurs, partial electric quantity is concentrated to cause breakdown, thermal deformation is caused, an insulating medium is easy to crack, channels of an air inlet and an air outlet cannot be guaranteed to flow from a discharge gap, and partial air blowby can be caused to reduce the efficiency, 2, the existing insulating medium layer has good insulating performance, but the heat conduction is relatively long, so that ozone is easy to decompose at high temperature under the condition of high concentration requirement, meanwhile, half electrodes are made of stainless steel, rust is easy to occur under a high-voltage high-frequency electrode for a long time, the ozone gas is polluted 3, the gap of a discharge chamber is large, the ozone generation efficiency is reduced, the ozone concentration is large, the oxygen utilization rate is low, 4, power supplies are provided with a plurality of discharge plate discharge bodies, the capacitive difference of the discharge bodies is easy to cause uneven voltage and influence on the service life and the high-voltage generation efficiency, 5, the ozone generation efficiency is low, the high-voltage insulation end of the ozone generator is difficult, otherwise, the high-voltage insulation end cooling end of the ozone generator is required, the high-voltage discharge end, and the high-voltage heat dissipation area is reduced, or high-voltage end is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a solve prior art's problem, provide kinds of electric field homogeneity good, pollute for a short time, the discharge gap is less, the better ozone generator of cooling radiating effect.

The specific technical scheme is that the ozone generators comprise a high-voltage end plate, an insulating isolation layer, an insulating medium layer, a gap gasket, a low-voltage conducting layer and a low-voltage end plate, wherein a cavity is arranged between the high-voltage end plate and the low-voltage end plate, the insulating isolation layer is positioned in the cavity and below the high-voltage end plate, the insulating medium layer is arranged below the insulating isolation layer, the low-voltage conducting layer is positioned below the insulating medium layer, the gap gasket is arranged between the low-voltage conducting layer and the insulating medium layer, a discharge chamber is formed between the insulating medium layer and the low-voltage conducting layer, and the insulating isolation layer, the insulating.

The following is the attached technical proposal of the utility model.

As the preferred scheme, the side of the insulating isolation layer is an oxygen channel which surrounds the discharge chamber, an ozone outlet channel is arranged in the low-voltage end plate, and the ozone outlet channel is communicated with the discharge chamber.

Preferably, the high-pressure end plate is provided with an oxygen inlet which is communicated with the oxygen channel.

Preferably, the thickness of the gap spacer is 0.1-0.15 mm.

Preferably, the insulating isolation layer and the insulating dielectric layer are made of alumina ceramic, aluminum nitride ceramic or zirconia, and the thickness of the insulating isolation layer and the insulating dielectric layer is less than 1 mm.

As the preferred scheme, the ozone generator comprises a high-voltage threading hole which passes through a high-voltage end plate and an insulating isolation layer.

Preferably, a sealing O-shaped ring is arranged between the high-pressure end plate and the low-pressure end plate.

Preferably, cooling water channels are arranged in the high-pressure end plate and the low-pressure end plate.

Preferably, the low voltage conductive layer and low voltage end plate are bodies.

Preferably, the high pressure end plate and the low pressure end plate are made of stainless steel material.

The technical effects of the utility model: 1. the uniformity of the electric field is ensured, and the breakdown caused by distortion and partial electric quantity concentration can not occur. Meanwhile, the discharge body has uniform heating and thermal expansion ratio, reduces local stress and prolongs the service life. Meanwhile, the ozone generation efficiency is greatly increased; 2. metal pollution is avoided, and the service life of the electrode is prolonged; 3. the efficiency of the ozone generator is improved, the concentration of ozone is improved, and meanwhile, the utilization rate of oxygen can be improved; 4. the phenomenon that the whole machine cannot work due to the fault of a single discharge body is avoided; 5. the cooling and heat dissipation effect is improved, and the power failure caused by the fan failure in the traditional mode is avoided.

Drawings

Fig. 1 is a cross-sectional view of kinds of ozone generators according to an embodiment of the present invention.

Fig. 2 is a schematic diagram of kinds of ozone generators according to an embodiment of the present invention.

Fig. 3 is a schematic diagram of a high-frequency high-voltage circuit according to an embodiment of the present invention.

Fig. 4 is another schematic diagram of the high frequency high voltage circuit according to the embodiment of the present invention.

Detailed Description

The essential features and advantages of the invention will be explained in with reference to an example, but the invention is not limited to the embodiments shown.

As shown in fig. 1 to 4, the kinds of ozone generators of this embodiment include a high-voltage end plate 1, an insulating isolation layer 2, an insulating medium layer 3, a gap spacer 4, a low-voltage conductive layer 5 and a low-voltage end plate 6, wherein a chamber 7 is provided between the high-voltage end plate 1 and the low-voltage end plate 6, the insulating isolation layer 2 is provided in the chamber 7 and below the high-voltage end plate 1, the insulating medium layer 3 is provided below the insulating isolation layer 2, the low-voltage conductive layer 5 is provided below the insulating medium layer 3, and the gap spacer 4 is provided between the low-voltage conductive layer and the insulating medium layer, a discharge chamber 8 is formed between the insulating medium layer 3 and the low-voltage conductive layer 5, and the insulating isolation layer 2, the insulating medium layer 3 and the low-voltage conductive layer 5 are circular.

In this embodiment, the side of the insulating isolation layer 2 is an oxygen channel 9, the oxygen channel 9 surrounds the discharge chamber 8, an ozone outlet channel 10 is arranged in the low-voltage end plate 6, and the ozone outlet channel 10 is communicated with the discharge chamber 8.

In this embodiment, the high-pressure end plate 1 has an oxygen inlet 11, and the oxygen inlet 11 is communicated with the oxygen channel 9.

In the technical scheme, oxygen enters an oxygen channel 9 on the outer ring of the wafer through an oxygen inlet 11, then the oxygen is distributed in the annular oxygen channel 9, and then enters a discharge chamber between the insulating medium layer and the low-voltage conducting layer through a gap generated by a gap gasket; under the action of the high-frequency and high-voltage electric field, oxygen is converted into ozone, the flow velocity is gradually accelerated along with the increase of the concentration of the ozone to enter the center of the circle, and then the ozone is discharged through the ozone outlet channel 10. The concentration of ozone is decreased from the center of the wafer to the periphery, the flow area is increased from the center of the wafer to the periphery, and all the flow rates are increased from the center of the wafer to the periphery; the higher the ozone concentration, the faster the flow rate, so that the ozone decomposition can be reduced.

In the embodiment, the thickness of the gap gasket 4 is 0.1-0.15mm, the integral gap flatness is better by adopting the plate type discharge principle, the gap of the polar plate is smaller, and the gap is adjusted to 0.1-0.15mm from the original 0.25-0.5mm, so that the efficiency of the ozone generator can be improved, the concentration of ozone is improved, and the utilization rate of oxygen can be improved.

In the embodiment, the insulating isolation layer 2 and the insulating medium layer 3 are made of alumina ceramic, aluminum nitride ceramic or zirconia, the thickness of the insulating isolation layer 2 and the insulating medium layer 3 is smaller than 1mm, the insulating isolation layer 2 and the insulating medium layer 3 are replaced by high-purity alumina ceramic and aluminum nitride ceramic with the thickness of less than 1mm and zirconia, the materials have higher dielectric constant and temperature resistance and are resistant to ozone corrosion, the back of the insulating isolation layer is provided with a magnetron sputtering silver mode, so that the uniformity of the electrode is better, in addition, the electrode at end is provided with an aluminum alloy surface ceramic mode to prevent the electrode from being corroded by ozone, or high-purity tungsten is used, and a protective film is formed after tungsten is oxidized to prolong the service life of the electrode.

In this embodiment, the ozone generator includes a high voltage threading hole 12, and the high voltage threading hole 12 passes through the high voltage end plate 1 and the insulating isolation layer 2.

In this embodiment, a sealing O-ring 13 is disposed between the high-pressure end plate 1 and the low-pressure end plate 6, the O-ring is used for sealing, so as to ensure that oxygen entering from the oxygen inlet can completely exit from the ozone outlet channel, and meanwhile, in order to ensure the service life, the O-ring cannot use fluororubber.

In the embodiment, the high-pressure end plate 1 and the low-pressure end plate 6 are provided with cooling water channels 14, ozone gas is cooled in the ozone outlet channel through cooling water, high-temperature decomposition of ozone is reduced, meanwhile, if a plurality of generators are operated in a superposition mode, the ozone outlet of the ozone outlet channel can be converged into total ozone outlet pipes, the upper portion of the high-pressure end plate is a concave surface, the upper portion of the low-pressure end plate can be installed in a mutually matched mode, meanwhile, the high-pressure end plate can be matched with a modularized power supply to use, the low-pressure conducting layer is in a grounding state in the process, long-term operation is guaranteed to be free of rusting or metal ions are separated out in a high-frequency high-voltage line, meanwhile, good heat conduction is guaranteed, heat generated by the low-pressure conducting layer.

In this embodiment, the low-voltage conductive layer 5 and the low-voltage end plate 6 are bodies, which can effectively prevent oxygen from passing through the gap and directly reaching the ozone gas outlet without passing through the discharge chamber.

In this embodiment, the high-pressure end plate 1 and the low-pressure end plate 6 are made of stainless steel. Thereby ensuring that the high-pressure end plate 1 and the low-pressure end plate 6 cannot be corroded by ozone, and also can use aviation aluminum to carry out micro-arc oxidation on the surfaces at the same time.

As shown in figures 3 and 4, each high-frequency high-voltage circuit 15 is independent and is arranged on an aluminum alloy aluminum plate 16, the aluminum alloy aluminum plate 16 is arranged on an aluminum alloy water channel 17, and the discharge body and the power supply can work even if the single discharge body is damaged, so that the flow and the temperature of cooling water can be monitored by using a temperature monitoring instrument with the same flow as groups, thereby avoiding the power supply failure caused by the fan failure in the traditional mode.

The ozone generators of the embodiment can meet the requirements of ozone cleaning of photovoltaic and semiconductors, operate under high ozone concentration, and simultaneously ensure that metal ions cannot be separated out from contacted accessories to pollute gas, solve the technical problems that 1, the electric field uniformity of a square discharge body, 2, insulating media with better heat dissipation effect and better insulating effect are selected on the original basis, 3, the discharge gap is reduced, 4, the modular design is adopted, power modules correspond to generators, the power modules can be freely superposed, the generators can also be freely superposed, and 5, cooling water is simultaneously configured on a high-voltage end plate and a low-voltage end plate of the generators.

It should be noted that the above-mentioned preferred embodiments are only for illustrating the technical concepts and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention accordingly, and the protection scope of the present invention cannot be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (10)

1. The utility model provides an ozone generator of kinds, its characterized in that includes high-pressure end plate, insulating isolation layer, insulating medium layer, clearance gasket, low pressure conducting layer and low pressure end plate, the cavity has between high-pressure end plate and the low pressure end plate, insulating isolation layer is located the cavity and is located high-pressure end plate below, and insulating medium layer sets up in insulating isolation layer below, and the low pressure conducting layer is located insulating medium layer below, has the clearance gasket between low pressure conducting layer and the insulating medium layer, form the discharge chamber between insulating medium layer and the low pressure conducting layer, insulating isolation layer, insulating medium layer and low pressure conducting layer are circular.
2. 2. The ozone generator as claimed in claim 1, wherein the insulating layer is provided with an oxygen passage on a side thereof, the oxygen passage surrounds the discharge chamber, and an ozone outlet passage is provided in the low-voltage end plate and communicates with the discharge chamber.
3. 3. The ozone generator as claimed in claim 2, wherein the high pressure end plate has an oxygen inlet port thereon, the oxygen inlet port communicating with the oxygen passage.
4. 4. The ozone generator of claim 1, wherein the gap spacer has a thickness of 0.1-0.15 mm.
5. 5. The ozone generator of claim 1, wherein the insulating isolation layer and the insulating dielectric layer are made of alumina ceramic, aluminum nitride ceramic or zirconia, and the thickness of the insulating isolation layer and the insulating dielectric layer is less than 1 mm.
6. 6. The ozone generator of claim 1, wherein the ozone generator includes high voltage wiring holes that pass through the high voltage end plate and the insulating spacer.
7. 7. The ozone generator of claim 1, wherein a sealing O-ring is disposed between the high pressure end plate and the low pressure end plate.
8. 8. The ozone generator of claim 1, wherein cooling water passages are provided in the high and low pressure end plates.
9. 9. The ozone generator of claim 1, wherein the low voltage conductive layer and low voltage end plate are -volume.
10. 10. The ozone generator of claim 1, wherein the high and low pressure end plates are made of a stainless steel material.

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