CN209986701U - Large-breadth vacuum chuck flatness processing device - Google Patents
Large-breadth vacuum chuck flatness processing device Download PDFInfo
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- CN209986701U CN209986701U CN201920176057.5U CN201920176057U CN209986701U CN 209986701 U CN209986701 U CN 209986701U CN 201920176057 U CN201920176057 U CN 201920176057U CN 209986701 U CN209986701 U CN 209986701U
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Abstract
The utility model discloses a big breadth vacuum chuck plane degree processingequipment belongs to parts machining technical field, will wait to process big breadth vacuum chuck and install on precision positioning motion platform's base, installs distancer and abrasive machining system on the precision positioning motion platform. The utility model discloses well distancer and abrasive machining system remove along with precision positioning motion platform, utilize the distancer to measure the plane degree of each coordinate point on the big breadth vacuum chuck to the position that the plane degree value is minimum is the benchmark, then utilizes the system of processing to polish to the position that the plane degree value is high, polishes the plane degree value of benchmark with the plane degree value. The utility model discloses use precision positioning motion platform to measure and process, compare with traditional measurement processing technique, easy operation and high efficiency, measurement accuracy is high, and the process range is wide, and is with low costs, can effectively process out the big breadth vacuum chuck plane degree of high accuracy.
Description
Technical Field
The utility model relates to a parts machining technical field, precision positioning control field, technical field such as direct-write photoetching field and FPD flat panel display field, in particular to big breadth vacuum chuck plane degree processingequipment.
Background
The flatness of the large-format vacuum chuck is an important index for measuring the characteristics of the direct-write lithography exposure system, and mainly depends on several factors: a processing technology of the vacuum chuck, a material of the vacuum chuck, a processing method of the vacuum chuck and the like.
The dynamic flatness of the precision positioning motion platform and the flatness of the vacuum chuck can influence the change of a focal plane in the exposure process, and if the flatness is poor, defocusing can be caused in the exposure process, and then the defects of poor image analysis and the like can occur.
The traditional vacuum chuck flatness measurement and processing mainly utilizes a machine tool or a grinding machine to process, a dial indicator is used for measuring, the processing is carried out while measuring, the operation efficiency and the processing efficiency are lower, and the cost is high. In particular, the flatness processing difficulty of the large-breadth vacuum chuck is high, and the processing precision is difficult to ensure by the traditional processing method.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a big breadth vacuum chuck plane degree processingequipment to be applicable to big breadth vacuum chuck's plane degree processing.
For the purpose of realizing, the utility model discloses a big breadth vacuum chuck plane degree processingequipment, include: the precise positioning motion platform is characterized in that a base of the precise positioning motion platform is provided with a large-width vacuum sucker to be processed, and the precise positioning motion platform is provided with a distance meter and a grinding processing system.
The utility model discloses the further improvement lies in: the large-breadth vacuum chuck is arranged on the base of the positioning platform, and the plane of the base isXShaft andYplane formed by axes, said distance measuring device andthe grinding system is arranged on the precise positioning motion platformZOn the shaft.
The utility model discloses the further improvement lies in: the grinding system comprises a dust suction pipe, a grinding fluid input pipe and a grinding wheel, wherein the grinding wheel is arranged in a protective cover, a fluid outlet of the grinding fluid input pipe is arranged inside the grinding wheel, and a dust suction port of the dust suction pipe is arranged below the grinding wheel.
The utility model discloses the further improvement lies in: the dust collection pipe comprises an upper right-angle pipe and a lower right-angle pipe, the pipe diameter of the upper right-angle pipe is larger than that of the lower right-angle pipe, the lower right-angle pipe is inserted into the upper right-angle pipe, and the dust collection pipe of the upper right-angle pipe and the dust collection pipe of the lower right-angle pipe are arranged in a reverse direction.
The utility model discloses the further improvement lies in: the dust suction port of the lower right-angle pipe is arranged at the chip outlet of the grinding wheel, and the cross section of the dust suction port of the lower right-angle pipe is wedge-shaped.
The utility model discloses the further improvement lies in: the precise positioning motion platform is characterized in that a first fastening assembly is installed on the Z shaft of the precise positioning motion platform and comprises a Z shaft connecting plate and a screw, a screw countersunk hole is formed in the distance meter body, a threaded hole is formed in the Z shaft connecting plate, and the distance meter is installed on the Z shaft connecting plate through the cooperation of the screw hole in the screw and the Z shaft connecting plate and the screw countersunk hole in the distance meter body.
The utility model discloses the further improvement lies in: the precise positioning motion platform is characterized in that a second fastening assembly is mounted on a Z shaft of the precise positioning motion platform and comprises a Z shaft connecting plate, a supporting base, a fixing piece supporting plate and a screw, a threaded hole is formed in the Z shaft connecting plate, a screw countersunk hole is formed in the supporting base, a screw countersunk hole is formed in the fixing piece supporting plate, the machining system is arranged on the supporting base, and the machining system is mounted on the Z shaft connecting plate through the matching of the threaded hole in the supporting base screw countersunk hole, the screw and the Z shaft connecting plate and the screw countersunk hole in the fixing piece supporting plate.
The utility model discloses the further improvement lies in: the precise positioning motion platform is characterized in that a third fastening assembly is mounted on a Z shaft of the precise positioning motion platform and comprises a Z shaft connecting plate, a servo motor mounting seat used for mounting a servo motor, a coupler, a grinding wheel shaft and a screw, a threaded hole is formed in the Z shaft connecting plate, a screw hole and a threaded hole are formed in the servo motor mounting seat, the servo motor is mounted on the servo motor mounting seat through the threaded screw hole, the servo motor is connected with the grinding wheel shaft of the grinding wheel through the coupler, and the servo motor mounting seat is mounted on the Z shaft connecting plate through the screw and the screw hole in a matched mode.
The utility model discloses the further improvement lies in: the precise positioning motion platform is a double-drive structure precise positioning motion platform.
The utility model discloses the further improvement lies in: the distance measuring instrument is a laser displacement sensor.
The utility model discloses the further improvement lies in: the distance measuring instrument and the grinding system are both connected with an electric control switch control system.
Compared with the prior art, the utility model discloses there are following technological effect: the utility model discloses an install big breadth vacuum chuck on precision positioning motion platform base, integrated distancer and abrasive machining system on precision positioning motion platform, along with precision positioning motion platform's removal, utilize the distancer to measure the plane degree of each coordinate point on big breadth vacuum chuck to the position that the plane degree value is minimum is the benchmark, then utilizes the system of processing to polish the position that the plane degree value is high, polishes the plane degree value of benchmark with the plane degree value. The utility model discloses use precision positioning motion platform to measure and process, compare with traditional measurement processing technique, easy operation and high efficiency, measurement accuracy is high, and the process range is wide, and is with low costs, can effectively process out the big breadth vacuum chuck plane degree of high accuracy.
Drawings
The following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings:
FIG. 1 is a schematic structural diagram of a large format vacuum chuck flatness processing apparatus;
FIG. 2 is a schematic diagram of a grinding system;
FIG. 3 is a schematic view of the installation of a rangefinder on the Z-axis of a precision positioning motion platform;
FIG. 4 is a schematic view of the mounting of the grinding system on the Z-axis of the precision positioning motion platform.
In the figure: 10-a precision positioning motion platform; 20-large-format vacuum chuck; 30-a range finder; 40-a grinding system; 11-XA shaft; 12-YA shaft; 13-ZA shaft; 31-Z axis connecting plate; 32-screw counter sunk holes; 41-a dust suction pipe; 42-grinding fluid input pipe; 43-grinding the grinding wheel; 44-a protective cover; 45-a support base; 46-a fixture support plate; 47-felt loop; 48-grinding wheel chuck flange; 49-locking nut; 50-a grinding wheel base body with holes; 51-a grinding wheel chuck base; 52-grinding wheel spindle; 53-a coupling; 54-servomotor mount; 55-screws; 56-servo motor.
Detailed Description
To further illustrate the features of the present invention, please refer to the following detailed description and accompanying drawings. The drawings are for reference and illustration purposes only and are not intended to limit the scope of the present disclosure.
As shown in fig. 1, the embodiment discloses a large-format vacuum chuck flatness processing apparatus, which includes a precision positioning motion platform 10, a large-format vacuum chuck 20 to be processed is installed on a base of the precision positioning motion platform 10, a Z-axis 13 is installed on the precision positioning motion platform 10, and a distance meter 30 and a grinding system 40 are installed on a Z-axis connecting plate 31 on the Z-axis 13 of the precision positioning motion platform. Wherein: installing a large-format vacuum chuck to be processed on a high-precision marble granite base of a precision positioning motion platform, driving the precision positioning motion platform to move by using a drive control system of the precision positioning motion platform, measuring the distance from each coordinate point on the surface of the large-format vacuum chuck to a distance meter 30 by using the distance meter 30 in the moving process, and fitting the planeness of each coordinate point on the surface of the large-format vacuum chuck by using tools such as Matlab and the like; and then, the grinding system 40 is utilized to polish the position with larger planeness, so that the machining of the planeness of the large-breadth vacuum chuck is realized.
It should be noted that the precision positioning motion platform adopted in this embodiment is a precision positioning motion platform with a dual-drive structure, and can measure the flatness value of a large-format vacuum chuck with high precision and large size; and the flatness measured by the measuring system comprises the dynamic flatness of the precision positioning motion platform and the self flatness of the large-format vacuum chuck, and when the measuring system is applied to the field of precision positioning control, the flatness of the actual exposure system of the vacuum chuck can be truly and effectively evaluated.
Furthermore, the large-breadth vacuum chuck is arranged on a base of the positioning platform, and the plane of the base isXA shaft 11 andYthe plane formed by the shaft 12, the distance meter 30 and the grinding system 40 are all mounted on a precision positioning motion platformZOn the shaft 13. Wherein: the resolution of the Z axis 13 of the precise positioning motion platform is submicron, and the positioning precision is high; the precise positioning motion platform uses a gantry structure, can move in a large stroke, can precisely position the whole position of a large-breadth vacuum chuck, has a wide processing range, and is suitable for vacuum chucks of different sizes.
Further, as shown in fig. 2, the grinding processing system 40 includes a dust suction pipe 41, a grinding fluid input pipe 42, and a grinding wheel 43, the grinding wheel 43 is disposed in a protective cover 44, a fluid outlet of the grinding fluid input pipe 42 is disposed inside the grinding wheel 43, and a dust suction opening of the dust suction pipe 41 is disposed below the grinding wheel 42. Wherein: the grinding fluid feed tube 42 is located intermediate the grinding wheel 43, is supported by the mounting member, flows through the wheel chuck flange 48 and finally into the apertured wheel base 50. The processed chips are sucked away by the dust suction pipe 41, the cleanness of a processing environment is kept, the chips are prevented from scratching a processing surface, meanwhile, the grinding fluid is conveyed to the grinding wheel by the grinding fluid conveying pipe 42, the grinding wheel is cooled and lubricated, errors caused by thermal deformation are reduced, and the processing precision is improved.
Further, the dust suction pipe 41 comprises an upper right-angle pipe 411 and a lower right-angle pipe 412, the pipe diameter of the upper right-angle pipe 411 is larger than that of the lower right-angle pipe 412, the lower right-angle pipe 412 is inserted into the upper right-angle pipe 411, and the dust removal pipe of the upper right-angle pipe 411 and the dust suction pipe of the lower right-angle pipe 412 are arranged in a reverse direction. Wherein: a right-angle side of the lower right-angle pipe 412 is inserted into a right-angle side of the upper right-angle pipe 411, the other right-angle side of the upper right-angle pipe 411 and the other right-angle side of the lower right-angle pipe 412 are arranged in parallel, and the arrangement directions of the dust removing pipes of the upper right-angle pipe 411 and the pipe openings of the dust collecting pipes of the lower right-angle pipe 412 are opposite.
Further, a dust suction port of the lower right-angle pipe 411 is arranged at a debris outlet of the grinding wheel 42, and the cross section of the dust suction port of the lower right-angle pipe 411 is wedge-shaped. Wherein: the section of the dust suction opening of the lower right-angle pipe 411 is wedge-shaped, so that the area of the dust suction opening is increased, and chips generated by the grinding of the grinding wheel and the grinding of the vacuum chuck are sucked away more easily.
Further, as shown in fig. 3, the distance measuring instrument 30 is a laser displacement sensor, a first fastening component is installed on the Z shaft 13 of the precision positioning motion platform, the first fastening component includes a Z shaft connecting plate 31 and a screw, a screw countersunk hole 32 is formed in the body of the distance measuring instrument 30, a threaded hole is formed in the Z shaft connecting plate, and the distance measuring instrument 30 is installed on the Z shaft connecting plate 31 through the screw, the threaded hole in the Z shaft connecting plate 31 and the screw countersunk hole 32 in the distance measuring instrument body in a matching manner.
Further, as shown in fig. 4, a second fastening assembly is installed on the Z shaft 13 of the precision positioning motion platform, the second fastening assembly includes a Z shaft connecting plate 31, a supporting base 45, a fixing member supporting plate 46 and a screw, a threaded hole is formed in the Z shaft connecting plate 31, a screw countersunk hole is formed in the supporting base 45, a screw countersunk hole is formed in the fixing member supporting plate 46, and the processing system 40 is installed on the Z shaft connecting plate 31 through the screw countersunk hole of the supporting base 45, the screw, a threaded hole in the Z shaft connecting plate 31, and the screw countersunk hole of the fixing member supporting plate 46 in a matching manner.
Further, as shown in fig. 4, a third fastening component is mounted on the Z shaft 13 of the precision positioning motion platform, and the third fastening component includes a Z shaft connecting plate 31, a servo motor mounting seat 54 for mounting a servo motor, a coupler 53, a grinding wheel shaft 52 and a screw 55, a threaded hole is formed in the Z shaft connecting plate 31, a screw hole and a threaded hole are formed in the servo motor mounting seat 54, the servo motor 56 is mounted on the servo motor mounting seat 54 through the threaded screw hole, the servo motor 56 is connected with the grinding wheel shaft 52 of the grinding wheel 43 through the coupler 53, and the servo motor mounting seat 54 is mounted on the Z shaft connecting plate 31 through the screw and the screw hole in a matching manner.
It should be noted that, in the embodiment, the Z-axis connecting plates in the first fastening assembly, the second fastening assembly and the third fastening assembly are all the same structural member, and only threaded holes need to be formed in the plate body for the precise positioning motion platform Z-axis 13 to be carried by itself.
Further, the grinding system 40 further comprises a fixing member support plate 46, a felt ring 47, a grinding wheel chuck flange 48, a lock nut 49, an open-hole grinding wheel base 50 and a grinding wheel chuck base 51. Wherein: the fixing part supporting disk 46 is fixed on the processing system supporting base, the fixing part supporting disk 45 and the felt ring 47 are fixed, the grinding wheel chuck flange 48 and the grinding wheel chuck base body 51 rotate along with the grinding wheel shaft 52, and the grinding wheel shaft 42 and the servo motor are connected through the coupler 53 and fixed with the servo motor mounting seat 54 to drive the grinding wheel 43 to rotate.
The machining system of the embodiment adopts a grinding wheel internal cooling mode, can reduce the temperature of a grinding area, improves the machining quality, improves the machining efficiency and effectively achieves a good cooling effect. Meanwhile, the dust removal device can continuously suck away grinding scraps, and the machining surface of the large-format vacuum chuck is prevented from being scratched, so that the machining quality is not influenced. This embodiment combines measurement system, processing system and dust collector, and easy operation, safe and reliable, efficiency are higher, and the cost is lower.
Further, the device is also provided with an electric control switch control system which is respectively connected with the distance measuring instrument 30 and the grinding system 40 and is used for controlling the distance measuring instrument 30 and the grinding system 40 to be switched on and off. The electric control switch control system can be set to a PLC controller and the like.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (8)
1. The utility model provides a big breadth vacuum chuck plane degree processingequipment which characterized in that includes: the device comprises a precision positioning motion platform, wherein a base of the precision positioning motion platform is provided with a large-breadth vacuum sucker to be processed, and the precision positioning motion platform is provided with a distance meter and a grinding processing system; the plane of the base is a plane formed by an X axis and a Y axis, and the distance meter and the grinding system are both arranged on a Z axis of the precision positioning motion platform; the grinding system comprises a dust collection device, a grinding fluid input pipe and a grinding wheel, the grinding wheel is arranged in the protective cover, a fluid outlet of the grinding fluid input pipe is arranged inside the grinding wheel, and a dust collection opening of the dust collection pipe is arranged below the grinding wheel.
2. The large format vacuum chuck flatness processing apparatus of claim 1, wherein the dust extraction device includes an upper right angle tube and a lower right angle tube, the upper right angle tube has a tube diameter larger than that of the lower right angle tube, the lower right angle tube is inserted into the upper right angle tube, and the dust removal tube of the upper right angle tube and the dust extraction tube of the lower right angle tube are arranged in opposite directions.
3. The large format vacuum chuck flatness processing apparatus of claim 2, wherein the suction opening of the lower right-angle tube is disposed at the grinding wheel debris outlet, and the section of the suction opening of the lower right-angle tube is wedge-shaped.
4. The large format vacuum chuck flatness processing apparatus according to claim 1, wherein the precision positioning motion platform Z-axis is installed with a first fastening component, the first fastening component includes a Z-axis connecting plate and a screw, the rangefinder body is provided with a screw countersunk hole, the Z-axis connecting plate is provided with a screw hole, and the rangefinder is installed on the Z-axis connecting plate through the screw and the screw hole on the Z-axis connecting plate in cooperation with the screw countersunk hole on the rangefinder body.
5. The large format vacuum chuck flatness processing apparatus according to claim 1, wherein a second fastening component is installed on the Z-axis of the precision positioning motion platform, the second fastening component includes a Z-axis connecting plate, a supporting base, a fixing member supporting plate and a screw, the Z-axis connecting plate is provided with a threaded hole, the supporting base is provided with a screw countersunk hole, the fixing member supporting plate is provided with a screw countersunk hole, the processing system is disposed on the supporting base, and the processing system is installed on the Z-axis connecting plate through the screw countersunk hole of the supporting base, the screw, the threaded hole on the Z-axis connecting plate, and the screw countersunk hole of the fixing member supporting plate.
6. The large format vacuum chuck flatness processing apparatus according to claim 1, wherein a third fastening component is installed on the Z-axis of the fine positioning motion platform, the third fastening component includes a Z-axis connecting plate, a servo motor mounting seat for installing a servo motor, a coupler, a grinding wheel shaft and a screw, a threaded hole is formed in the Z-axis connecting plate, a screw hole and a threaded hole are formed in the servo motor mounting seat, the servo motor is installed on the servo motor mounting seat through the threaded screw hole, the servo motor is connected with the grinding wheel shaft of the grinding wheel through the coupler, and the servo motor mounting seat is installed on the Z-axis connecting plate through the screw and the screw hole in a matching manner.
7. The large format vacuum chuck flatness processing apparatus of claim 1, wherein the precision positioning motion stage is a dual drive precision positioning motion stage.
8. The large format vacuum chuck flatness processing apparatus of claim 1, wherein the rangefinder is a laser displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920176057.5U CN209986701U (en) | 2019-01-31 | 2019-01-31 | Large-breadth vacuum chuck flatness processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920176057.5U CN209986701U (en) | 2019-01-31 | 2019-01-31 | Large-breadth vacuum chuck flatness processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209986701U true CN209986701U (en) | 2020-01-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920176057.5U Active CN209986701U (en) | 2019-01-31 | 2019-01-31 | Large-breadth vacuum chuck flatness processing device |
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|---|---|
| CN (1) | CN209986701U (en) |
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- 2019-01-31 CN CN201920176057.5U patent/CN209986701U/en active Active
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Address after: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee after: Hefei Xinqi microelectronics equipment Co., Ltd Address before: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee before: HEFEI XINQI MICROELECTRONIC EQUIPMENT CO., LTD. |
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