CN209960125U - Three-coordinate movement device with precision bearing mechanism - Google Patents
Three-coordinate movement device with precision bearing mechanism Download PDFInfo
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- CN209960125U CN209960125U CN201920559278.0U CN201920559278U CN209960125U CN 209960125 U CN209960125 U CN 209960125U CN 201920559278 U CN201920559278 U CN 201920559278U CN 209960125 U CN209960125 U CN 209960125U
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Abstract
The utility model belongs to the technical field of the motion technique and specifically relates to a three-dimensional telecontrol equipment with precision bearing mechanism, including the bottom plate, the top of bottom plate is equipped with drive chassis rectilinear movement's Y to motion, is equipped with the X of drive X axle sliding support along the direction motion perpendicular with chassis direction of motion to motion on the chassis, and one side of sliding support is fixed and is equipped with Z axle sliding support, Z axle sliding support's middle part is equipped with the spout, slidable mounting has the Z axle in the spout, the length direction perpendicular to chassis of Z axle and X axle sliding support's direction of motion, Z axle sliding support's tip is equipped with the Z of drive Z axle along its length direction removal to motion, uses the bearing axle sleeve to solve the bearing and play the fast noise of motion speed and little long service life characteristics in motion subassembly the inside, makes up into bearing motion subassembly structure, does not use bulky material (marble) to make whole machine reach smooth and easy motion sensitivity and reach simultaneously and reduce into The object of the present invention is to provide a method for producing a semiconductor device.
Description
Technical Field
The utility model relates to a motion technical field especially relates to a three-dimensional telecontrol equipment with precision bearing mechanism.
Background
The existing series products which achieve high-precision motion by combining an air bearing (air floatation) with an adjusting structure at home and abroad, such as three-dimensional and two-dimensional gantry image measuring instrument non-standard multi-axis light-weight motion structures, the home and abroad multi-axis motion structures need to be structured by natural marble due to material and technical bottleneck when the air bearing is used, the mechanical motion performance is caused by heavy images, the speed is not improved, the stability is not high, and the bearing structure is large in noise and short in service life without special treatment.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects of poor stability and short service life in the prior art, and providing a three-coordinate movement device with a precision bearing mechanism.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a three-coordinate movement device with a precise bearing mechanism is designed, and comprises a bottom plate, wherein a Y-direction movement mechanism for driving an underframe to move linearly is arranged above the bottom plate, an X-direction movement mechanism for driving an X-axis sliding support to move along the direction vertical to the movement direction of the underframe is arranged on the underframe, a Z-axis sliding support is fixedly arranged on one side of the sliding support, a sliding chute is arranged in the middle of the Z-axis sliding support, a Z axis is arranged in the sliding chute in a sliding manner, the length direction of the Z axis is vertical to the movement direction of the underframe and the X-axis sliding support, a Z-direction movement mechanism for driving the Z axis to move along the length direction is arranged at the end part of the Z-axis sliding support, a plurality of bearing sleeve assemblies are arranged on the Z-axis sliding support close to the sliding chute, each bearing sleeve assembly comprises a bearing shaft which is inserted in the Z-axis, the end part of the shaft sleeve is inserted into the bearing inner ring, and the outer ring of the bearing is in surface contact with the Z-axis.
Preferably, Y is to motion including dividing Y axle leading rail and the vice guide rail of Y axle of establishing in the bottom plate both sides, Y axle leading rail and the vice guide rail of Y axle are parallel to each other, the bottom both sides of chassis respectively with Y axle leading rail and the vice guide rail sliding connection of Y axle, the both ends of Y axle leading rail are all rotated and are installed the second drive wheel, two be connected with first drive belt between the second drive wheel, chassis and first drive belt fixed connection, be equipped with the rotatory Y axle motor drive subassembly of one of them second drive wheel of drive on the bottom plate.
Preferably, X is to motion including establishing the X axle guide rail on chassis upper portion, X axle guide rail and Y axle leading rail mutually perpendicular, X axle sliding support slidable mounting is on X axle guide rail, the both sides of X axle guide rail are all rotated and are installed the third drive wheel, two be connected with the third drive belt between the third drive wheel, X axle sliding support and third drive belt fixed connection, be equipped with the rotatory X axle motor drive subassembly of one of them third drive wheel of drive on the X axle guide rail.
Preferably, the Z-direction movement mechanism comprises a Z-axis bracket arranged at the upper part of the Z-axis sliding bracket, first transmission wheels are rotatably mounted at the upper end and the lower end of the Z-axis bracket, a second transmission belt is connected between the two first transmission wheels, the upper end of the Z-axis bracket is fixed with the second transmission belt, and a Z-axis motor driving assembly for driving one of the first transmission wheels to rotate is arranged on the Z-axis bracket.
Preferably, a balancer is installed at one side of the Z-axis sliding bracket.
Preferably, the shaft sleeve is made of polytetrafluoroethylene.
Preferably, the inner wall of the shaft sleeve is uniformly provided with strip-shaped grooves, the strip-shaped grooves are parallel to the axis of the shaft sleeve, the strip-shaped grooves are annularly arrayed around the axis of the shaft sleeve, and the cross sections of the strip-shaped grooves are rectangular, semicircular or trapezoidal.
Preferably, the outer wall of the shaft sleeve is provided with annular grooves at equal intervals, and the annular grooves are arranged at equal intervals.
The utility model provides a pair of have accurate bearing mechanism three-dimensional telecontrol equipment, beneficial effect lies in: the utility model discloses use the bearing axle sleeve to solve the bearing and play the fast little long service life characteristics of noise of moving speed inside the moving assembly, make up into bearing moving assembly structure, do not use bulky material (marble) to make whole machine reach the smooth and easy sensitivity of motion and reach reduce cost's purpose simultaneously.
Drawings
Fig. 1 is a schematic structural diagram of a three-coordinate movement apparatus with a precision bearing mechanism according to the present invention;
fig. 2 is a schematic structural view of a Z-axis sliding support with a precision bearing mechanism three-coordinate moving device according to the present invention;
fig. 3 is a schematic structural diagram of a bearing bush assembly with a precision bearing mechanism three-coordinate moving device according to the present invention;
fig. 4 is a schematic structural diagram of a shaft sleeve with a three-coordinate movement device of a precision bearing mechanism according to the present invention.
In the figure: the device comprises a bottom plate 1, a first transmission belt 2, a Y-axis main guide rail 3, a Y-axis motor driving assembly 4, a Y-axis auxiliary guide rail 5, an X-axis sliding support 6, an X-axis motor driving assembly 7, a balancer 8, a Z-axis support 9, a Z-axis sliding support 10, an X-axis guide rail 11, a first transmission wheel 12, a second transmission wheel 13, a second transmission belt 14, a Z-axis motor driving assembly 15, a chassis 16, a Z-axis 17, a bearing sleeve assembly 18, a sliding chute 19, a bearing 20, a shaft sleeve 21, a bearing shaft 22, an annular groove 23, a strip-shaped groove 24, a third transmission belt 25, a third transmission wheel 26 and a counterweight steel wire guide wheel 27.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-4, a three-coordinate movement device with a precision bearing mechanism comprises a base plate 1, a Y-direction movement mechanism for driving a base frame 16 to move linearly is arranged above the base plate 1, the Y-direction movement mechanism comprises a Y-axis main guide rail 3 and a Y-axis auxiliary guide rail 5 which are respectively arranged on two sides of the base plate 1, the Y-axis main guide rail 3 and the Y-axis auxiliary guide rail 5 are parallel to each other, two sides of the bottom of the base frame 16 are respectively connected with the Y-axis main guide rail 3 and the Y-axis auxiliary guide rail 5 in a sliding manner, second transmission wheels 13 are respectively arranged at two ends of the Y-axis main guide rail 3 in a rotating manner, a first transmission belt 2 is connected between the two second transmission wheels 13, the base frame 16 is fixedly connected with the first transmission belt 2, and a Y-axis motor. The Y-axis motor driving component 4 can adopt a structure that a servo motor and a gear transmission set are added, the servo motor is electrically connected with a controller, the controller is connected with an external power supply through a lead, an output shaft of the servo motor is connected with the second transmission wheel 13 through a gear set, and the gear set plays a role in adjusting the rotating speed. The first transmission belt 2 can drive the underframe 16 to move back and forth in the horizontal longitudinal direction through the forward and reverse rotation of the servo motor.
The X-axis motor driving device is characterized in that an X-axis movement mechanism for driving the X-axis sliding support 6 to move in a direction perpendicular to the movement direction of the underframe 16 is arranged on the underframe 16, the X-axis movement mechanism comprises an X-axis guide rail 11 arranged on the upper portion of the underframe 16, the X-axis guide rail 11 is perpendicular to a Y-axis main guide rail 3, the X-axis sliding support 6 is slidably mounted on the X-axis guide rail 11, third driving wheels 26 are rotatably mounted on two sides of the X-axis guide rail 11, a third driving belt 25 is connected between the two third driving wheels 26, the X-axis sliding support 6 is fixedly connected with the third driving belt 25, and an X-axis motor driving assembly 7 for driving one of the third driving wheels. The X-axis motor driving component 7 can be prepared by the same method as the Y-axis motor driving component 4 to realize the function, and the third driving belt 25 is driven by the servo motor to move back and forth so that the X-axis sliding support 6 moves back and forth in the horizontal transverse direction.
A Z-axis sliding support 10 is fixedly arranged on one side of the sliding support 6, a sliding groove 19 is formed in the middle of the Z-axis sliding support 10, a Z-axis 17 is installed in the sliding groove 19 in a sliding mode, the length direction of the Z-axis 17 is perpendicular to the movement direction of the base frame 16 and the X-axis sliding support 6, a Z-direction movement mechanism for driving the Z-axis 17 to move along the length direction of the Z-axis 17 is arranged at the end portion of the Z-axis sliding support 10 and comprises a Z-axis support 9 arranged on the upper portion of the Z-axis sliding support 10, first transmission wheels 12 are rotatably installed at the upper end and the lower end of the Z-axis support 9, a second transmission belt 14 is connected between the two first transmission wheels 12, the upper end of the Z-axis support 9 is fixed with the second transmission belt 14, and a Z-. The Z-axis motor drive assembly 15 may be configured the same as the Y-axis motor drive assembly 4 to perform its function by driving the second belt 14 to move back and forth by the servo motor, so that the Z-axis moves back and forth in the vertical direction along the guide of the chute 19. The X-direction movement mechanism, the Y-direction movement mechanism and the Z-direction movement mechanism are matched, and the movement of any left point in space can be completed.
A plurality of bearing sleeve assemblies 18 are arranged on the Z-axis sliding support 10 close to the sliding chute 19, each bearing sleeve assembly 18 comprises a bearing shaft 22, each bearing shaft 22 is inserted into the Z-axis sliding support 10, a shaft sleeve 21 is sleeved outside each bearing shaft 22, the end portion of each shaft sleeve 21 is inserted into the inner ring of each bearing 20, and the outer ring of each bearing 20 is in surface contact with the Z-axis 17. A balancer 8 is installed at one side of the Z-axis sliding bracket 10. The middle part of the Z-axis sliding support 10 is provided with a counterweight steel wire guide wheel 27, and the shaft sleeve 21 is made of polytetrafluoroethylene. The inner wall of the shaft sleeve 21 is uniformly provided with strip-shaped grooves 24, the strip-shaped grooves 24 are parallel to the axis of the shaft sleeve 21, the strip-shaped grooves 24 are annularly arrayed around the axis of the shaft sleeve 21, and the cross section of each strip-shaped groove 24 is rectangular, semicircular or trapezoidal. The outer wall of the shaft sleeve 21 is provided with annular grooves 23 at equal intervals, and the annular grooves 23 are arranged at equal intervals. Can adjust the rigid contact between bearing axle 22 and the bearing 20 through the design of axle sleeve 21, and axle sleeve 21 adopts the polytetrafluoroethylene material, compares in traditional marble material, and is more sensitive, and reduce cost, has all set up the cell type structure in axle sleeve 21's inside and outside, can be used for sealing up more lubricating oil like this, reaches the purpose that reduces wearing and tearing.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (8)
1. A three-coordinate movement device with a precise bearing mechanism comprises a base plate (1), a Y-direction movement mechanism for driving an underframe (16) to move linearly is arranged above the base plate (1), an X-direction movement mechanism for driving an X-axis sliding support (6) to move along the direction vertical to the movement direction of the underframe (16) is arranged on the underframe (16), the three-coordinate movement device is characterized in that a Z-axis sliding support (10) is fixedly arranged on one side of the sliding support (6), a sliding chute (19) is arranged in the middle of the Z-axis sliding support (10), a Z axis (17) is arranged in the sliding chute (19), the length direction of the Z axis (17) is vertical to the movement directions of the underframe (16) and the X-axis sliding support (6), a Z-direction movement mechanism for driving the Z axis (17) to move along the length direction is arranged at the end part of the Z-axis sliding support (10), a plurality of bearing sleeve assemblies (18) are arranged on the Z-axis sliding support (10) close to the, bearing housing subassembly (18) are including bearing axle (22), bearing axle (22) cartridge is in Z axle sliding bracket (10), the outside cover of bearing axle (22) is equipped with axle sleeve (21), the tip cartridge of axle sleeve (21) is in bearing (20) inner circle, the outer lane and the Z axle (17) surface contact of bearing (20).
2. The three-coordinate movement device with the precision bearing mechanism is characterized in that the Y-direction movement mechanism comprises a Y-axis main guide rail (3) and a Y-axis auxiliary guide rail (5) which are respectively arranged on two sides of a bottom plate (1), the Y-axis main guide rail (3) and the Y-axis auxiliary guide rail (5) are parallel to each other, two sides of the bottom of an underframe (16) are respectively in sliding connection with the Y-axis main guide rail (3) and the Y-axis auxiliary guide rail (5), second transmission wheels (13) are rotatably arranged at two ends of the Y-axis main guide rail (3), a first transmission belt (2) is connected between the second transmission wheels (13), the underframe (16) is fixedly connected with the first transmission belt (2), and a Y-axis motor driving component (4) for driving one of the second transmission wheels (13) to rotate is arranged on the bottom plate (1).
3. The three-coordinate moving device with the precision bearing mechanism is characterized in that the X-direction moving mechanism comprises an X-axis guide rail (11) arranged on the upper portion of the base frame (16), the X-axis guide rail (11) is perpendicular to the Y-axis main guide rail (3), the X-axis sliding support (6) is slidably mounted on the X-axis guide rail (11), third driving wheels (26) are rotatably mounted on two sides of the X-axis guide rail (11), a third driving belt (25) is connected between the two third driving wheels (26), the X-axis sliding support (6) is fixedly connected with the third driving belt (25), and an X-axis motor driving assembly (7) for driving one of the third driving wheels (26) to rotate is arranged on the X-axis guide rail (11).
4. The three-coordinate moving device with the precision bearing mechanism is characterized in that the Z-direction moving mechanism comprises a Z-axis support (9) arranged at the upper part of a Z-axis sliding support (10), the upper end and the lower end of the Z-axis support (9) are respectively provided with a first transmission wheel (12) in a rotating mode, a second transmission belt (14) is connected between the two first transmission wheels (12), the upper end of the Z-axis support (9) is fixed with the second transmission belt (14), and a Z-axis motor driving assembly (15) for driving one first transmission wheel (12) to rotate is arranged on the Z-axis support (9).
5. The three-coordinate moving apparatus with a precision bearing mechanism of claim 1, wherein a balancer (8) is installed at one side of the Z-axis sliding support (10).
6. The three-coordinate movement apparatus with a precision bearing mechanism of claim 1, wherein the bushing (21) is made of teflon.
7. The three-coordinate movement device with the precision bearing mechanism is characterized in that strip-shaped grooves (24) are uniformly distributed on the inner wall of the shaft sleeve (21), the strip-shaped grooves (24) are parallel to the axis of the shaft sleeve (21), the strip-shaped grooves (24) are annularly arrayed around the axis of the shaft sleeve (21), and the cross section of each strip-shaped groove (24) is rectangular, semicircular or trapezoidal.
8. The three-coordinate moving apparatus with the precision bearing mechanism as claimed in claim 1, wherein the outer wall of the sleeve (21) is provided with annular grooves (23) at equal intervals, and the annular grooves (23) are arranged at equal intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920559278.0U CN209960125U (en) | 2019-04-23 | 2019-04-23 | Three-coordinate movement device with precision bearing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920559278.0U CN209960125U (en) | 2019-04-23 | 2019-04-23 | Three-coordinate movement device with precision bearing mechanism |
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| Publication Number | Publication Date |
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| CN209960125U true CN209960125U (en) | 2020-01-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920559278.0U Active CN209960125U (en) | 2019-04-23 | 2019-04-23 | Three-coordinate movement device with precision bearing mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109945037A (en) * | 2019-04-23 | 2019-06-28 | 深圳市思瑞精达精密仪器有限公司 | One kind having precision bearing mechanism three-coordinate motion device |
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2019
- 2019-04-23 CN CN201920559278.0U patent/CN209960125U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109945037A (en) * | 2019-04-23 | 2019-06-28 | 深圳市思瑞精达精密仪器有限公司 | One kind having precision bearing mechanism three-coordinate motion device |
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