CN209923422U - Electrode applied to doped diamond-like carbon film preparation equipment - Google Patents
Electrode applied to doped diamond-like carbon film preparation equipment Download PDFInfo
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- CN209923422U CN209923422U CN201920259150.2U CN201920259150U CN209923422U CN 209923422 U CN209923422 U CN 209923422U CN 201920259150 U CN201920259150 U CN 201920259150U CN 209923422 U CN209923422 U CN 209923422U
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- Prior art keywords
- electrode
- carbon film
- film preparation
- doped diamond
- sample stage
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 230000001360 synchronised effect Effects 0.000 claims description 12
- 239000004677 Nylon Substances 0.000 claims description 8
- 229920001778 nylon Polymers 0.000 claims description 8
- 239000000077 insect repellent Substances 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000011553 magnetic fluid Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 241000255925 Diptera Species 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 7
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 3
- 238000005253 cladding Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 description 9
- 238000001816 cooling Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003738 black carbon Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The utility model discloses an electrode applied to doped diamond-like carbon film preparation equipment, which comprises an anode arranged at the top end of a vacuum chamber and a cathode arranged at the bottom end of the vacuum chamber; the anode is a spiral electrode and is connected with a radio frequency power supply; the cathode is arranged as a sample stage and is electrically connected with a pulse bias power supply. The utility model discloses utilize spiral electrode as electrode anode, the sample platform can well combine with intermediate frequency magnetron sputtering technique as electrode cathode, has that simple structure, substrate temperature rise are low, the membrane base combines well, the film-forming is even, and technology repeatability is good, easily accurate control cladding material thickness, advantages such as easily control element doping volume.
Description
Technical Field
The utility model belongs to the technical field of the new material preparation, concretely relates to be applied to electrode of doping diamond-like carbon film preparation equipment.
Background
Carbon materials play an important role from national defense economy to daily life as one of the most widely distributed elements in nature. Since the 50 s of the 20 th century, scientific research on carbon materials has made a series of important discoveries and advances. Among them, diamond-like carbon (DLC) films have many advantages similar to diamond, such as high hardness, wear resistance, corrosion resistance, and high transmittance, and thus exhibit a wide application prospect and a great economic value in the fields of aerospace, machinery, electronics, optics, and biomedicine.
However, the diamond sp3 hybridized bond distortion during the deposition process causes high residual stress to the film, so that the film has low toughness and high brittleness, not only seriously weakens the film-substrate bonding strength, but also restricts the development of the thick DLC film. Especially in the fields of aviation, automobiles and the like, the key moving parts have complex and variable use environments and harsh working conditions, the research and development of DLC film materials with excellent comprehensive performances such as high hardness, low stress, strong wear resistance and the like are urgently needed, and the doping is expected to solve the bottleneck problem through the preliminary work of some scientific researchers.
DLC films are prepared by a number of methods, and the processes which have been put into practical use in industry are mainly synthesized by non-equilibrium plasma or ion beam deposition techniques, such as carbon source (CH)4，C2H2Etc.) as a precursor gas, a plasma PVD process, an ionization evaporation process, a sputtering process in which a raw material is directly vaporized from a solid, a cathode arc ion plating process, etc.
The existing DLC film preparation usually adopts parallel plate electrodes to carry out plasma enhanced chemical vapor deposition, and the problem that the doped DLC film can not be prepared by combining magnetron sputtering with the plate electrodes when the plate electrodes are adopted to prepare the DLC film is solved.
SUMMERY OF THE UTILITY MODEL
The utility model aims at: in order to solve the above problems existing in the prior art, the utility model provides an electrode applied to doping diamond-like carbon film preparation equipment.
The technical scheme of the utility model is that: an electrode applied to doped diamond-like carbon film preparation equipment comprises an anode arranged at the top end of a vacuum chamber and a cathode arranged at the bottom end of the vacuum chamber; the anode is a spiral electrode and is electrically connected with a radio frequency power supply; the cathode is arranged as a sample stage and is additionally provided with pulse negative bias.
As a further improvement of the electrode, the spiral electrode is specifically arranged into a mosquito-repellent incense-shaped plane spiral electrode structure.
As a further improvement of the electrode, the height of the mosquito-repellent incense-shaped planar spiral electrode is set to be 30cm, and the diameter is set to be 10 cm.
As a further improvement of the electrode, the spiral electrode is specifically arranged in a double-spiral electrode structure.
As a further improvement of the electrode, the height of the double helix electrode is set to 40cm, and the diameter is set to 6 cm.
As a further improvement of the electrode, the spiral electrode is made of stainless steel or copper material.
As a further improvement of the electrode, the sample stage is specifically configured in a circular structure.
As a further improvement of the electrode, the sample stage comprises a sample support, a sample stage body and a driving assembly, the sample support is installed at the top end of the sample stage body, and the driving assembly drives the sample stage body to rotate through a synchronous gear belt and a synchronous belt.
As a further improvement of the electrode, the bottom of the sample table body is also provided with a water-cooling magnetic fluid.
As a further improvement of the electrode, a ceramic pad, a nylon insulating ring and a nylon pad pressing ring are sequentially stacked between the sample stage body and the water-cooling magnetofluid.
The utility model has the advantages that: the utility model discloses utilize spiral electrode as electrode anode, the sample platform can well combine with intermediate frequency magnetron sputtering technique as electrode cathode, has that simple structure, substrate temperature rise are low, the membrane base combines well, the film-forming is even, and technology repeatability is good, easily accurate control cladding material thickness, advantages such as easily control element doping volume.
Drawings
FIG. 1 is a schematic diagram of an electrode structure applied to a doped diamond-like carbon film manufacturing apparatus according to the present invention;
fig. 2 is a schematic view of another spiral electrode structure according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a sample stage structure in an embodiment of the present invention.
Wherein the reference numerals are: 1. the device comprises a vacuum chamber, 2, a spiral electrode, 3, a sample table, 4, a water-cooling magnetofluid, 5, a sample holder, 6, a sample table body, 7, a ceramic pad, 8, a nylon insulating ring, 9, a nylon pad pressing ring, 10, a synchronous belt wheel, 11, a synchronous gear belt, 12 and a driving assembly.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
As shown in FIG. 1, the electrode applied to the doped diamond-like carbon film preparation equipment of the present invention comprises an anode installed at the top end of a vacuum chamber 1, and a cathode installed at the bottom end of the vacuum chamber 1; the anode is set as a spiral electrode 2 and is electrically connected with a radio frequency power supply; the cathode is set as a sample stage 3 and is added with a pulsed negative bias.
The vacuum chamber 1 of the utility model adopts an ultrahigh vacuum generating device to vacuumize the vacuum chamber, and provides a vacuum environment required by the preparation of the doped diamond-like carbon film; the vacuum chamber can be evacuated to 6X 10-4Pa。
The utility model discloses an electrode specifically includes spiral electrode 2 and sample platform 3, spiral electrode 2 combines radio frequency power supply excitation negative and positive pole with sample platform 3, spiral electrode 2 is the positive pole, sample platform 3 is the negative pole, through configuration radio frequency power supply and pulse bias power supply, let in carbon source gas and argon gas in vacuum chamber 1, utilize this radio frequency excitation negative and positive pole can deposit pure diamond-like carbon film, be applicable to simultaneously and utilize magnetron sputtering technique to produce metal or partial solid non-metallic element plasma and dope in the diamond-like carbon film that chemical vapor deposition method afterglow was prepared, perhaps directly let in gaseous non-metallic element between spiral electrode and sample platform, realize the doping of gaseous non-metallic element in diamond-like carbon film.
However, large carbon particle substances are easily formed on the surface of the film prepared by the double-helix electrode, which affects the quality of the film, and partial black carbon particles are easily deposited at the middle and lower ends of the double-helix electrode, so that the equipment cavity is greatly polluted and is not easy to clean; therefore, the utility model preferably sets the spiral electrode 2 as a mosquito-repellent incense-shaped plane spiral electrode structure, as shown in fig. 2, thereby making up the defects of the double-spiral electrode.
The spiral electrode 2 is connected with the top end of the vacuum chamber 1 in an up-down distance adjustable mode, and the distance between the spiral electrode 2 and the top of the vacuum chamber 1 can be adjusted by 50mm, 100mm and 150 mm; the sample stage 3 adopts a connection mode that the vertical distance is adjustable at the bottom end of the vacuum chamber 1, and the vertical symmetry can be realized by taking the position in the figure 1 as a starting point, the distance is adjustable within 40mm, so that the proper space position in the vacuum chamber can be obtained, elements are doped into the diamond-like carbon film, and the element doping amount is effectively controlled to a certain degree.
As shown in fig. 3, the sample stage 3 includes a sample holder 5, a sample stage body 6 and a driving assembly 12, the sample holder 5 is installed on the top end of the sample stage body 6, the driving assembly 12 drives the sample stage body 6 to rotate through a synchronous gear belt 11 and a synchronous belt wheel 10, specifically, an output shaft of the driving assembly 12 is connected with the synchronous gear belt 11, the synchronous belt wheel 10 is connected with a transmission shaft of the sample stage body 6, the synchronous gear belt 11 drives the synchronous belt wheel 10 to rotate, the driving assembly 12 drives the sample stage body 6 to rotate, so that the sample constantly rotates in the deposition process of the diamond-like carbon film, and the uniformity of the deposited film is ensured.
The bottom of the sample stage body 6 is also provided with a water-cooling magnetic fluid 4 which can reduce the stress caused by the temperature difference before and after deposition.
A porcelain pad 7, a nylon insulating ring 8 and a nylon cushion pressing ring 9 are sequentially stacked between the sample stage body 6 and the water-cooling magnetofluid 4.
The sample platform 3 sets up circular or other geometric shapes, can rotate along clockwise or anticlockwise, and the rotational speed sets up to 0 ~ 30r/min, and the diameter that the sample on the sample platform 3 held in the palm 5 sets up to 100mm, and the sample holds in the palm 5 and can choose for use the different grade type as required to place the sample of different shapes.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention, and it is to be understood that the scope of the invention is not limited to such specific statements and embodiments. Those skilled in the art can make various other specific modifications and combinations based on the teachings of the present invention without departing from the spirit of the invention, and such modifications and combinations are still within the scope of the invention.
Claims (10)
1. An electrode applied to a doped diamond-like carbon film preparation device is characterized by comprising an anode and a cathode, wherein the anode is used for being arranged at the top end of a vacuum chamber (1), and the cathode is used for being arranged at the bottom end of the vacuum chamber (1); the anode is arranged as a spiral electrode (2) and is electrically connected with a radio frequency power supply; the cathode is arranged as a sample stage (3) and is additionally provided with a pulse negative bias.
2. The electrode applied to the doped diamond-like carbon film preparation equipment as claimed in claim 1, wherein the spiral electrode (2) is specifically configured as a mosquito-repellent incense-shaped planar spiral electrode structure.
3. The electrode applied to a doped diamond-like carbon film preparation apparatus as set forth in claim 2, wherein the mosquito coil-like planar spiral electrode is set to have a height of 30cm and a diameter of 10 cm.
4. Electrode for doped diamond-like film preparation equipment according to claim 1, characterized in that the spiral electrode (2) is specifically arranged as a double spiral electrode structure.
5. The electrode applied to the doped diamond-like carbon film preparation equipment as set forth in claim 4, wherein the double spiral electrode is set to have a height of 40cm and a diameter of 6 cm.
6. The electrode applied to the doped diamond-like carbon film preparation equipment as claimed in claim 3 or 5, wherein the spiral electrode (2) is made of stainless steel or copper.
7. The electrode applied to the doped diamond-like carbon film preparation equipment as claimed in claim 1, wherein the sample stage (3) is configured in a circular structure.
8. The electrode applied to the doped diamond-like carbon film preparation equipment as recited in claim 7, wherein the sample stage (3) comprises a sample holder (5), a sample stage body (6) and a driving assembly (12), the sample holder (5) is mounted at the top end of the sample stage body (6), and the driving assembly (12) drives the sample stage body (6) to rotate through a synchronous gear belt (11) and a synchronous pulley (10).
9. The electrode applied to the doped diamond-like carbon film preparation equipment as claimed in claim 8, wherein the bottom of the sample stage body (6) is also provided with a water-cooled magnetic fluid (4).
10. The electrode applied to the doped diamond-like carbon film preparation equipment as claimed in claim 9, wherein a porcelain pad (7), a nylon insulating ring (8) and a nylon pad pressing ring (9) are further sequentially laminated between the sample stage body (6) and the water-cooled magnetofluid (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920259150.2U CN209923422U (en) | 2019-03-01 | 2019-03-01 | Electrode applied to doped diamond-like carbon film preparation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920259150.2U CN209923422U (en) | 2019-03-01 | 2019-03-01 | Electrode applied to doped diamond-like carbon film preparation equipment |
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| Publication Number | Publication Date |
|---|---|
| CN209923422U true CN209923422U (en) | 2020-01-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920259150.2U Expired - Fee Related CN209923422U (en) | 2019-03-01 | 2019-03-01 | Electrode applied to doped diamond-like carbon film preparation equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825808A (en) * | 2019-03-01 | 2019-05-31 | 许世鹏 | A kind of doped diamond film preparation device and method |
-
2019
- 2019-03-01 CN CN201920259150.2U patent/CN209923422U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825808A (en) * | 2019-03-01 | 2019-05-31 | 许世鹏 | A kind of doped diamond film preparation device and method |
| CN109825808B (en) * | 2019-03-01 | 2024-05-24 | 酒泉职业技术学院(甘肃广播电视大学酒泉市分校) | Doped diamond-like film preparation device and method |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200110 |
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| CF01 | Termination of patent right due to non-payment of annual fee |