CN209918493U

CN209918493U - Pipeline cleaning device

Info

Publication number: CN209918493U
Application number: CN201821963349.5U
Authority: CN
Inventors: 杨胜飞; 陈呈杰; 陈险峰; 蔡吉明
Original assignee: Anhui Three Gas Co Ltd
Current assignee: Anhui Three Gas Co Ltd
Priority date: 2018-11-27
Filing date: 2018-11-27
Publication date: 2020-01-10
Anticipated expiration: 2028-11-27

Abstract

The utility model belongs to the semiconductor manufacturing field especially relates to a pipeline cleaning device, including the washing tank, the circulating pump, wait to wash the pipeline, connect the first connecting pipe of circulating pump and washing tank, connect the circulating pump and wait to wash the second connecting pipe of pipeline entrance point, connect the third connecting pipe of waiting to wash pipeline exit end and washing tank, be provided with first control valve, second control valve, third control valve, its characterized in that on first connecting pipe, second connecting pipe and the third connecting pipe respectively: the cleaning device further comprises a reverse liquid inlet pipe and a reverse liquid outlet pipe which are arranged at two ends of the pipeline to be cleaned, wherein a reverse liquid inlet valve is arranged on the reverse liquid inlet pipe, and a reverse liquid outlet valve is arranged on the reverse liquid outlet pipe.

Description

Pipeline cleaning device

Technical Field

The utility model belongs to the semiconductor manufacturing field especially relates to a tail pipeline belt cleaning device of MOCVD board.

Background

The existing MOCVD machine table has an MO source to react with corresponding gas in a reaction cavity inside the machine table, partial reactant can be brought into a tail exhaust pipeline along with tail exhaust gas after the reaction is finished, and is finally processed by an ammonia recovery system, but the reactant can remain on the pipe wall when the reactant circulates in the pipeline along with the gas, and after the reaction is carried out for a long time, crystals can be formed inside the pipeline, so that the normal exhaust of the reaction cavity is influenced, and the normal production of MOCVD is further influenced.

Therefore, the pipeline is maintained regularly, and the tail gas pipeline needs to be cleaned, so that the pipeline is kept smooth. In the prior art, sodium hydroxide, hydrogen peroxide and water are mixed according to the standard of 1:1:4 to be used for cleaning, the cleaning solution is soaked in a cleaning tank for reaction for about 2H and then is washed by clean water, and then is dried by compressed air and recovered to be used on site. The cleaning time of the pipeline is long, and the pipeline is not easy to clean, so that the recovery time of the MOCVD machine table is prolonged, and the production and the stability of the machine table are further influenced.

Disclosure of Invention

In order to solve the problem, the utility model provides a pipeline cleaning device for wash the residue in the MOCVD tail gas pipeline, it includes the washing tank, the circulating pump, wait to wash the pipeline, connect the circulating pump and the first connecting pipe of washing tank, connect the circulating pump and wait to wash the second connecting pipe of pipeline entrance point, connect and wait to wash the third connecting pipe of pipeline exit end and washing tank, be provided with first control valve, second control valve, third control valve, its characterized in that on first connecting pipe, second connecting pipe and the third connecting pipe respectively: the cleaning device further comprises a reverse liquid inlet pipe and a reverse liquid outlet pipe which are arranged at two ends of the pipeline to be cleaned, wherein a reverse liquid inlet valve is arranged on the reverse liquid inlet pipe, and a reverse liquid outlet valve is arranged on the reverse liquid outlet pipe.

Preferably, one end of the reverse liquid inlet pipe is connected to a second connecting pipe between the second control valve and the circulating pump.

Preferably, the other end of the reverse liquid inlet pipe is connected to a third connecting pipe between the third control valve and the outlet end of the pipeline to be cleaned.

Preferably, one end of the reverse liquid outlet pipe is connected to a second connecting pipe between the second control valve and the inlet end of the pipeline to be cleaned.

Preferably, the other end of the reverse liquid outlet pipe is connected to a third connecting pipe between the third control valve and the cleaning tank.

Preferably, the pipeline cleaning device further comprises a heating vibration device, and the heating vibration device is arranged around the pipeline to be cleaned.

Preferably, the heating and vibrating device comprises a heating kit, a heating assembly arranged inside the heating kit and a vibrating assembly arranged outside the heating kit.

Preferably, the number of the heating assemblies is 2 ~ 8 groups.

Preferably, the pipeline to be cleaned is a single pipeline to be cleaned or a plurality of pipelines to be cleaned which are connected through a joint.

Preferably, the cleaning tank is further provided with a drainage member.

The utility model discloses possess following beneficial effect at least:

1. the utility model discloses use pump body circulation system to wash the pipeline, promote the clean efficiency of pipeline. 2. And a heating vibration device is additionally arranged around the pipeline to be cleaned, so that the molecular reaction rate is greatly promoted, and the pipeline cleaning efficiency is improved. 3. The utility model relates to a just, anti-cleaning system, very big promotion reaction efficiency, improvement reaction area for wash speed.

Drawings

Fig. 1 is a schematic structural view of a pipeline cleaning device according to an embodiment of the present invention.

Fig. 2 is a schematic structural view of a pipeline to be cleaned and a heating and vibrating device according to an embodiment of the present invention.

Detailed Description

The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

Fig. 1 is a schematic structural view of a pipe cleaning device according to the present invention, and it can be seen from the figure that the cleaning device includes a cleaning tank 100, which is provided with a drainage member 110 and a drainage valve 111; a circulation pump 200 having acid and alkali resistance; a pipeline 300 to be cleaned, wherein the pipeline 300 to be cleaned is a single pipeline 300 to be cleaned or a plurality of pipelines 300 to be cleaned which are connected through joints; a first connection pipe 400 connecting the circulation pump 200 with the cleaning bath 100; a second connection pipe 500 connecting the circulation pump 200 and the inlet end 320 of the pipe 300 to be cleaned; a third connection pipe 600 connecting the outlet end 330 of the pipeline 300 to be cleaned and the cleaning tank 100; first connection pipe 400, second connection pipe 500, and third connection pipe 600 are provided with first control valve 410, second control valve 510, and third control valve 610, respectively. The cleaning device further comprises a reverse liquid inlet pipe 700 and a reverse liquid outlet pipe 800 which are arranged at two ends of the pipeline 300 to be cleaned, the reverse liquid inlet pipe 700 is arranged on a reverse liquid inlet valve 710, and the reverse liquid outlet pipe 800 is provided with a reverse liquid outlet valve 810.

One end of the reverse liquid inlet pipe 700 is connected to the second connection pipe 500 between the second control valve 510 and the circulation pump 200, and the other end of the reverse liquid inlet pipe 700 is connected to the third connection pipe 600 between the third control valve 610 and the outlet end 330 of the to-be-cleaned pipe 300; one end of the reverse liquid outlet pipe 800 is connected to the second connection pipe 500 between the second control valve 510 and the inlet end 320 of the pipe 300 to be cleaned, and the other end of the reverse liquid outlet pipe 800 is connected to the third connection pipe 600 between the third control valve 610 and the cleaning tank 100.

The cleaning solution in the cleaning tank 100 is a mixed solution prepared by sodium hydroxide, hydrogen peroxide and water according to the standard ratio of 1:1: 4. And starting the circulating pump 200, and the first control valve 410, the second control valve 510 and the third control valve 610 to perform forward cleaning on the pipeline 300 to be cleaned. After a certain time, the first control valve 410, the second control valve 510 and the third control valve 610 are closed, the reverse liquid inlet valve 710 and the reverse liquid outlet valve 810 are opened, the pipeline 300 to be cleaned is cleaned reversely, after a certain time of reverse cleaning, forward cleaning is carried out, and the steps are repeated until all residues on the inner wall of the pipeline 300 to be cleaned are cleaned. And then flushing the pipeline with clean water according to a conventional method, blowing the pipeline with compressed air after flushing, and finishing cleaning the pipeline.

Still further low, the utility model provides a pipeline cleaning device still includes heating vibrator 310, and heating vibrator 310 sets up around waiting to wash pipeline 300 wherein, heating vibrator 310 includes the heating external member, sets up in the inside heating element of heating external member and sets up in the outside vibrations subassembly 312 of heating external member heating subassembly 311's number is 2 ~ 8 groups.

The utility model discloses use pump body circulation system to wash the pipeline, promote the clean efficiency of pipeline. Meanwhile, the heating and vibrating device 310 is additionally arranged around the pipeline 300 to be cleaned, so that the molecular reaction rate is greatly promoted, and the pipeline cleaning efficiency is improved. The forward and backward cleaning systems greatly promote the reaction efficiency, improve the reaction area and accelerate the cleaning rate.

It should be understood that the above embodiments are preferred embodiments of the present invention, and that the inlet end and the position described herein are not limited to this embodiment, and that the outlet end and inlet end positions may be selected according to the embodiments, as long as the order of connection with the inner and outer chambers of each assembly described herein is ensured; in addition, the scope of the present invention is not limited to this embodiment, and any changes made according to the present invention all belong to the protection scope of the present invention.

Claims

1. The utility model provides a pipeline cleaning device, includes washing tank, circulating pump, treats to wash the pipeline, connects the first connecting pipe of circulating pump and washing tank, connects the circulating pump and treats to wash the second connecting pipe of pipeline entrance point, connects the third connecting pipe of treating to wash pipeline exit end and washing tank, be provided with first control valve, second control valve, third control valve, its characterized in that on first connecting pipe, second connecting pipe and the third connecting pipe respectively: the cleaning device further comprises a reverse liquid inlet pipe and a reverse liquid outlet pipe which are arranged at two ends of the pipeline to be cleaned, wherein a reverse liquid inlet valve is arranged on the reverse liquid inlet pipe, and a reverse liquid outlet valve is arranged on the reverse liquid outlet pipe.

2. The pipe cleaning device according to claim 1, wherein: and one end of the reverse liquid inlet pipe is connected to a second connecting pipe between the second control valve and the circulating pump.

3. The pipe cleaning device according to claim 1, wherein: the other end of the reverse liquid inlet pipe is connected to a third connecting pipe between the third control valve and the outlet end of the pipeline to be cleaned.

4. The pipe cleaning device according to claim 1, wherein: and one end of the reverse liquid outlet pipe is connected to a second connecting pipe between the second control valve and the inlet end of the pipeline to be cleaned.

5. The pipe cleaning device according to claim 1, wherein: the other end of the reverse liquid outlet pipe is connected to a third connecting pipe between the third control valve and the cleaning tank.

6. The pipe cleaning device according to claim 1, wherein: the pipeline cleaning device further comprises a heating vibration device, and the heating vibration device is arranged around the pipeline to be cleaned.

7. The pipe cleaning device according to claim 6, wherein: the heating vibration device comprises a heating external member, a heating assembly arranged in the heating external member and a vibration assembly arranged outside the heating external member.

8. The pipeline cleaning device according to claim 7, wherein the number of the heating assemblies is 2 ~ 8 groups.

9. The pipe cleaning device according to claim 1, wherein: the pipeline to be cleaned is a single pipeline to be cleaned or a plurality of pipelines to be cleaned which are connected through joints.

10. The pipe cleaning device according to claim 1, wherein: the cleaning tank is also provided with a drainage piece.