CN209903017U - Vacuum adsorption system - Google Patents
Vacuum adsorption system Download PDFInfo
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- CN209903017U CN209903017U CN201920083128.7U CN201920083128U CN209903017U CN 209903017 U CN209903017 U CN 209903017U CN 201920083128 U CN201920083128 U CN 201920083128U CN 209903017 U CN209903017 U CN 209903017U
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Abstract
The utility model discloses a vacuum adsorption system, it includes: the device comprises an adsorption platform, a sealing valve, a first gas joint, a second gas joint and a vacuum generation system; the vacuum adsorption device comprises an adsorption platform, a vacuum generation system and a vacuum connection system, wherein the adsorption platform is provided with an adsorption hole for adsorbing an object to be adsorbed and a suction hole communicated with the adsorption hole; the sealing valve is used for communicating the first gas joint with the gas suction hole when the second gas joint is jointed with the first gas joint, and closing the joint of the first gas joint and the sealing valve when the second gas joint is separated from the first gas joint. The utility model discloses can realize that adsorption platform opens and close adsorption platform's suction hole's purpose, easy operation, convenient to use automatically when taking place the system break-make with the vacuum.
Description
Technical Field
The utility model relates to a vacuum adsorption technology field especially relates to a vacuum adsorption system.
Background
The movable vacuum adsorption platform is a platform which can adsorb an object to be adsorbed on a table top and can move by bearing the object to be adsorbed so as to realize the processing of the object to be adsorbed. The existing mobile vacuum adsorption platform mainly has two types, one type is provided with an independent vacuum generating device, the vacuum generating device is connected with the platform and can move along with the platform to vacuumize the platform, so that the vacuum degree of the platform is maintained, and the object to be adsorbed is prevented from falling off from the table top in the moving process of the platform. In order to ensure that the vacuum generating device can move flexibly, the volume and the power of the vacuum generating device are designed to be small, the adsorption force is weak, so that the object to be adsorbed cannot be completely attached to the table board, and a defective product is easily produced in the subsequent processing process. The other type is that a vacuum generating system is arranged on a production line, an adsorption interface is reserved at each working position, after the platform moves to the working position, a worker manually realizes the connection of the adsorption interface and the air suction port of the platform, and the air suction port of the platform is opened by operating a valve so as to communicate the platform and the vacuum generating system. Before the platform is moved, the air suction port of the platform is closed by operating a valve, and the adsorption interface is detached so as to ensure the vacuum degree of the platform. The air suction port of the platform can not be automatically opened and closed along with the on-off of the air suction port and the vacuum generating system, and the air suction hole needs to be opened and closed by manually operating a valve, so that the operation is complex and the production efficiency is low.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned problem that exists among the prior art, the utility model provides a vacuum adsorption system makes it can realize that adsorption platform opens and close adsorption platform's suction opening automatically when taking place the system break-make with the vacuum.
In order to achieve the above object, the present invention provides a vacuum adsorption system, which includes: the device comprises an adsorption platform, a sealing valve, a first gas joint, a second gas joint and a vacuum generation system;
the adsorption platform is provided with an adsorption hole for adsorbing an object to be adsorbed and a gas suction hole communicated with the adsorption hole, the first gas joint is connected with the gas suction hole of the adsorption platform through the sealing valve, the second gas joint is connected with the vacuum generation system, and the second gas joint is used for being connected with or disconnected from the first gas joint;
the sealing valve is used for communicating the first gas joint with the gas suction hole when the second gas joint is jointed with the first gas joint, and closing the joint of the first gas joint and the sealing valve when the second gas joint is separated from the first gas joint.
In some embodiments, the sealing valve comprises a valve body and a valve core, the valve body having a gas inlet connected to the gas suction port and a gas outlet connected to the first gas connector; the valve core is movably arranged in the valve body and used for opening or closing the air outlet of the valve body.
In some embodiments, the vacuum adsorption system further comprises a push rod, one end of the push rod penetrates through the second gas connector and is fixedly connected with the second gas connector, and the other end of the push rod movably penetrates through the first gas connector and can push the valve core open through a gas outlet of the valve body;
the sealing valve further comprises a resetting piece connected with the valve core, and the resetting piece is used for applying a resetting elastic force towards the gas outlet of the valve body to the valve core so as to drive the valve core to seal the gas outlet of the valve body when the first gas connector and the second gas connector are disconnected.
In some embodiments, the second gas joint is provided with a slot, a clamping block positioned in the slot and an adjusting mechanism connected with the clamping block, the outer side of the first gas joint is provided with a clamping groove, and the first gas joint is used for being inserted into the slot to be jointed with the second gas joint;
the adjusting mechanism is used for driving the clamping block to be clamped in the clamping groove so as to lock the first gas connector and the second gas connector, or is used for driving the clamping block to be separated from the clamping groove so that the first gas connector and the second gas connector can be freely separated.
In some embodiments, the adjusting mechanism includes a first telescopic rod and a fastening rod, one end of the fastening rod extends into the slot from the side wall of the second gas joint and is connected to the clamping block, the middle portion of the fastening rod is hinged to the second gas joint, and the other end of the fastening rod is hinged to the extending end of the first telescopic rod, so that the clamping block is driven by the first telescopic rod to be clamped in the clamping groove or separated from the clamping groove.
In some embodiments, the vacuum adsorption system further comprises: and the extending end of the second telescopic rod is connected with the second gas connector and is used for driving the second gas connector to be jointed with or separated from the first gas connector.
In some embodiments, the vacuum adsorption system further comprises: and the controller is respectively connected with the first telescopic rod, the second telescopic rod and the vacuum generating system.
In some embodiments, the vacuum adsorption system further comprises: and the positioning and fixing device is used for adjusting the position of the adsorption platform so that the first gas joint is opposite to the second gas joint.
In some embodiments, the vacuum generating system comprises: the vacuum pump is connected with the second gas joint through the corrugated pipe, and the control valve is connected between the vacuum pump and the corrugated pipe.
In some embodiments, the middle of the adsorption platform is provided with an adsorption cavity, and the adsorption hole and the air suction hole are both communicated with the adsorption cavity.
Compared with the prior art, the utility model discloses vacuum adsorption system through setting up mutually supporting of seal valve and first gas joint and second gas joint, can realize that adsorption platform opens and close adsorption platform's suction hole's purpose when taking place the system break-make with the vacuum, easy operation, convenient to use automatically.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention.
This document provides an overview of various implementations or examples of the technology described in this disclosure, and is not a comprehensive disclosure of the full scope or all features of the disclosed technology.
Drawings
In the drawings, which are not necessarily drawn to scale, like reference numerals may describe similar components in different views. Like reference numerals having letter suffixes or different letter suffixes may represent different instances of similar components. The drawings illustrate various embodiments generally by way of example and not by way of limitation, and together with the description and claims serve to explain the disclosed embodiments. The same reference numbers will be used throughout the drawings to refer to the same or like parts, where appropriate. Such embodiments are illustrative, and are not intended to be exhaustive or exclusive embodiments of the present apparatus or method.
Fig. 1 is a schematic structural diagram of a vacuum adsorption system according to an embodiment of the present invention;
fig. 2 is a schematic partial structural view of a vacuum adsorption system according to an embodiment of the present invention.
Reference numerals:
10-an adsorption platform; 11-adsorption pores; 12-an adsorption chamber; 13-a suction hole; 20-a sealing valve; 21-a valve body; 22-a valve core; 23-a reset member; 30-a first gas connector; 31-a card slot; 40-a second gas connection; 41-slot; 42-a fixture block; 43-a fastening rod; 44-a first telescopic rod; 45-a second telescoping rod; 46-a mandril; 50-vacuum generation system; 51-a bellows; 52-a control valve; 53-vacuum pump; 60-positioning and fixing devices; and 70, a controller.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be obtained by a person skilled in the art without any inventive work based on the described embodiments of the present invention, belong to the protection scope of the present invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the invention belongs. The use of "first," "second," and similar terms in the description herein do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
To maintain the following description of the embodiments of the present invention clear and concise, detailed descriptions of well-known functions and components may be omitted.
Fig. 1 is a schematic structural diagram of a vacuum adsorption system according to an embodiment of the present invention, and as shown in fig. 1, the vacuum adsorption system includes: an adsorption platform 10, a sealing valve 20, a first gas connector 30, a second gas connector 40 and a vacuum generating system 50; wherein, the adsorption platform 10 is provided with an adsorption hole 11 for adsorbing an object to be adsorbed and a suction hole 13 communicated with the adsorption hole 11, the first gas joint 30 is connected with the suction hole 13 of the adsorption platform 10 through a sealing valve 20, the second gas joint 40 is connected with a vacuum generating system 50, and the second gas structure 40 is used for being combined with or separated from the first gas joint 30; the sealing valve 20 is used to connect the first gas connector 30 with the suction hole 13 when the second gas connector 40 is engaged with the first gas connector 30, and to close the connection between the first gas connector 30 and the sealing valve 20 when the second gas connector 40 is disengaged from the first gas connector 30.
By adopting the vacuum adsorption system with the structure, the second gas joint 40 can be arranged on the working position of the production line, when the adsorption platform 10 moves to the working position, the first gas joint 30 and the second gas joint 40 can be jointed, at this time, the adsorption platform 10 is communicated with the vacuum generation system 50 through the sealing valve 20, the first gas joint 30 and the second gas joint 40, and then the adsorption platform 10 can be vacuumized to adsorb the object to be adsorbed on the surface; when the adsorption platform 10 needs to be removed from the working position, the first gas joint 30 and the second gas joint 40 can be detached, and the sealing valve 20 seals the air suction hole 13, so that the adsorption platform 10 can maintain the vacuum degree inside, and the object to be adsorbed is kept in an adsorbed state. Through the mutual matching of the sealing valve 20 and the sealing valve 20 with the first gas joint 30 and the second gas joint 40, the purpose of automatically opening and closing the suction hole 13 of the adsorption platform 10 when the adsorption platform 10 is switched on and off with the vacuum generation system 50 can be realized, and the operation is simple and the use is convenient.
In some embodiments, the adsorption platform 10 has a first side and a second side opposite to the first side, the first side is provided with a plurality of adsorption holes 11 for adsorbing an object to be adsorbed, and the second side is provided with a suction hole 13. The air suction holes 13 may have a single-hole structure or a porous structure. The inside of this adsorption platform 10 still has absorption chamber 12, and adsorption hole 11 and suction hole 13 all are linked together with this absorption chamber 12, can guarantee like this that the absorption dynamics of adsorption hole 11 is the same basically to the even adsorption force that applies to waiting to adsorb the thing.
In some embodiments, the sealing valve 20 includes a valve body 21, a valve core 22 and a reset piece 23, the valve body 21 has an air inlet connected to the air suction hole 13 and an air outlet connected to the first gas connector 30, the valve core 22 is located in the valve body 21 and corresponds to the air outlet of the valve body 21, one end of the reset piece 23 is connected to the adsorption platform 10, and the other end of the reset piece is connected to the valve core 22, and is configured to apply a reset elastic force to the valve core 22 toward the air outlet of the valve body 21, so that the valve core 22 has a tendency to move toward the air outlet of the valve body 21 when not being subjected to other external forces, so as to seal the air. Specifically, the restoring member 23 may be a restoring spring.
The air inlet of the first air connector 30 is connected with the air outlet of the valve body 21, and a sealing ring is arranged around the air outlet at one end of the first air connector 30, which is provided with the air outlet. The second gas connector 40 has a slot 41, the middle of the slot 41 has a push rod 46, that is, one end of the push rod 46 penetrates through the second gas connector 40 and is fixedly connected with the second gas connector 40, and the bottom of the slot 41 has a pumping hole communicated with the vacuum generating system 50. When the first gas joint 30 is inserted into the slot 41, the sealing ring at the end of the first gas joint 30 can abut against the bottom of the slot 41, so that the gas outlet of the first gas joint 30 is hermetically connected with the gas suction port of the second gas joint 40. In addition, the other end of the push rod 46 can penetrate through the first gas connector 30 and push the valve core 22, so that the valve core 22 is separated from the air outlet of the valve body 21 by overcoming the reset elastic force of the reset piece 23, the adsorption platform 10 is communicated with the vacuum generation system 50 through the sealing valve 20, the first gas connector 30 and the second gas connector 40, and the vacuum generation system 50 can suck the air in the adsorption platform 10, so that the adsorption platform 10 forms a specific adsorption force and adsorbs the object to be adsorbed on the first surface of the adsorption platform 10. When the first gas connector 30 is separated from the second gas connector 40, the rod 46 is separated from the first gas connector 30 and no longer pushes the valve core 22, and the valve core 22 reseals the gas outlet of the valve body 20 under the restoring elastic force of the restoring member 23, so that the gas inlet of the adsorption platform 10 is sealed, and the adsorption platform 10 can maintain the current vacuum degree.
It should be noted that, the position switching of the valve core 22 is not limited to the above configuration, and the valve core 22 may be disengaged from the air outlet of the valve body 21 in the first state, so that the air intake hole 13 communicates with the first gas joint 30 through the sealing valve 20, and the valve core 22 seals the air outlet of the valve body 20 in the second state, so as to cut off the connection path between the adsorption platform 10 and the first gas joint 30.
In some embodiments, a locking mechanism is further disposed between the first gas connector 30 and the second gas connector 40 to lock the first gas connector 30 and the second gas connector 40 when they are engaged, so as to prevent them from being accidentally disengaged. The locking mechanism comprises a clamping groove 31 positioned outside the first gas connector 30, a clamping block 42 positioned in a slot 41 of the second gas connector 40 and an adjusting mechanism connected with the clamping block 42. When this first gas connects 30 and pegs graft in slot 41 of second gas connects 40, this adjustment mechanism can drive fixture block 42 joint in draw-in groove 31 in order to lock first gas connects 30 and second gas connects 40, when needs take apart first gas connects 30 and second gas connects 40, accessible this adjustment mechanism drives fixture block 42 and breaks away from draw-in groove 31, and first gas connects 30 and second gas connects 40 just can freely break away from like this. As a preferred embodiment, the locking groove 31 may be an annular locking groove 31 disposed along the circumferential direction of the first gas connector 30, and two semicircular locking blocks 42 with opposite openings may be disposed in the locking groove 41 of the second gas connector 40, so that the first gas connector 30 can be firmly locked by the two semicircular locking blocks 42, thereby preventing the first gas connector from being disengaged from the locking groove 41.
Specifically, the adjusting mechanism may include a first telescopic rod 44 and a fastening rod 43, one end of the fastening rod 43 extends into the slot 41 from the side wall of the second gas joint 40 and is connected to the latch 42, the middle portion of the fastening rod 43 is hinged to the second gas joint 40, and the other end of the fastening rod 43 is hinged to the extending end of the first telescopic rod 44. When first telescopic link 44 stretches out, can drive fastening rod 43 around its pin joint rotation with second gas connection 40, fixture block 42 is arc removal and joint in draw-in groove 31 under the drive of the one end of fastening rod 43. When the first telescopic rod 44 is retracted, the latch 42 is moved in a direction opposite to the above process by the fastening rod 43 and is released from the latch groove 31. If a plurality of cartridges 42 are provided, a corresponding plurality of adjustment mechanisms are also provided. The first extension rod 44 can be a cylinder, an oil cylinder or an electric push rod.
In some embodiments, the vacuum adsorption system may further comprise: the positioning and fixing device 60 and the second telescopic rod 45 are arranged, the positioning and fixing device 60 is used for adjusting the position of the adsorption platform 10 so that the first gas connector 30 faces the second gas connector 40, and the extending end of the second telescopic rod 45 is connected with the second gas connector 40 and used for driving the second gas connector 40 to be connected with the first gas connector 30 or be disconnected from the first gas connector 30. The second telescopic rod 45 may be a cylinder, an oil cylinder or an electric push rod. The automatic connection of the first gas connector 30 and the second gas connector 40 can be realized by the matching of the positioning device and the second telescopic rod 45, so that the automation level of the vacuum adsorption system is improved. Specifically, the positioning and fixing device 60 may include a plurality of positioning arms for clamping and fixing the adsorption platform 10, as shown in fig. 2, the plurality of positioning arms can drive the adsorption platform 10 to move, and the alignment between the first gas connector 30 and the second gas connector 40 can be performed by a mechanical calibration device, or by an alignment using, for example, a photoelectric sensor.
In some embodiments, vacuum generating system 50 may include: a vacuum pump 53, a bellows 51, and a control valve 52, wherein the vacuum pump 53 is connected to the second gas connector 40 through the bellows 51, and the control valve 52 is connected between the vacuum pump 53 and the bellows 51. Specifically, one end of the bellows 51 is connected to the air suction port of the second air connector 40, the other end of the bellows 51 is connected to the vacuum pump 53 through an air duct, and the control valve 52 is disposed on the air duct and used for controlling the on/off of the air path between the vacuum pump 53 and the second air connector 40.
In some embodiments, the vacuum adsorption system may further comprise: the controller 70 and the controller 70 are respectively electrically connected to the first telescopic rod 44, the second telescopic rod 45, the positioning and fixing device 60, the vacuum pump 53 and the control valve 52, so as to realize the automatic control of the first telescopic rod 44, the second telescopic rod 45, the positioning and fixing device 60, the vacuum pump 53 and the control valve 52, thereby further improving the automation level of the vacuum adsorption system, and enabling the control to be more convenient and efficient.
As shown in fig. 1, the vacuum adsorption system of the present invention has the following control principle:
after the adsorption platform 10 moves to the working position, the controller 70 sends a positioning signal to the positioning and fixing device 60, and the first gas connector 30 is driven by the positioning and fixing device 60 to face the second gas connector 40, and then the adsorption platform 10 is fixed by the positioning and fixing device 60. The controller 70 controls the second telescopic rod 45 to drive the second gas connector 40 to move towards the first gas connector 30, and the corrugated pipe 51 stretches until the first gas connector 30 is inserted into the slot 41 of the second gas connector 40 and abuts against the second gas connector 40. In the process, the push rod 46 in the middle of the slot 41 of the second gas joint 40 penetrates through the first gas joint 30, and pushes the valve core 22 of the sealing valve 20 to overcome the restoring elastic force of the restoring member 23 and separate from the air outlet of the valve body 21, so that the adsorption platform 10 is communicated with the vacuum generation system 50 through the sealing valve 20, the first gas joint 30 and the second gas joint 40. Then the controller 70 controls the first telescopic rod 44 to drive the fastening rod 43 to rotate around the hinge point of the fastening rod 43 and the second gas connector 40, and drives the latch 42 to be latched in the latch slot 31 through the fastening rod 43, so as to lock the first gas connector 30, and prevent the first gas connector 30 and the second gas connector 40 from being disengaged. After that, the vacuum pump 53 and the control valve 52 are opened through the controller 70, the adsorption platform 10 starts to be vacuumized, and the adsorption holes 11 on the adsorption platform 10 can generate strong adsorption force on the surface thereof, so that the object to be adsorbed is completely attached to the surface thereof, and defective products are prevented from being caused in the processing process of the object to be adsorbed.
When the vacuum degree in the adsorption cavity 12 of the adsorption platform 10 reaches a preset vacuum degree value, the control valve 52 and the vacuum pump 53 are closed under the control of the controller 70, and the first telescopic rod 44 is controlled to retract to drive the fixture block 42 to be separated from the clamping groove 31, so that the locking between the first gas joint 30 and the second gas joint 40 is released, and the second telescopic rod 45 is controlled to retract to drive the second gas joint 40 to be separated from the first gas joint 30, which means that the ejector rod 46 is not pushing the valve core 22, and the valve core 22 reseals the gas outlet of the valve 20 under the action of the restoring elastic force of the restoring spring, so that the adsorption cavity 12 of the adsorption platform 10 can maintain the vacuum degree. The adsorption platform 10 can still maintain its adsorption force during the moving process, and the object to be adsorbed is prevented from falling off from the surface. Automatic control is realized in the whole process, the first gas connector 30 and the second gas connector 40 can be quickly and automatically connected and disconnected, and a powerful vacuum pump 53 can be arranged, so that the surface of the adsorption platform 10 has stronger adsorption capacity.
The above description is intended to be illustrative and not restrictive. For example, the above-described examples (or one or more versions thereof) may be used in combination with each other. For example, other embodiments may be used by those of ordinary skill in the art upon reading the above description. Additionally, in the foregoing detailed description, various features may be grouped together to streamline the disclosure. This should not be interpreted as an intention that a disclosed feature not claimed is essential to any claim. Rather, inventive subject matter may lie in less than all features of a particular disclosed embodiment. Thus, the following claims are hereby incorporated into the detailed description as examples or embodiments, with each claim standing on its own as a separate embodiment, and it is contemplated that these embodiments may be combined with each other in various combinations or permutations. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.
The above embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and the protection scope of the present invention is defined by the claims. Various modifications and equivalents of the invention can be made by those skilled in the art within the spirit and scope of the invention, and such modifications and equivalents should also be considered as falling within the scope of the invention.
Claims (10)
1. A vacuum adsorption system, comprising: the device comprises an adsorption platform, a sealing valve, a first gas joint, a second gas joint and a vacuum generation system;
the adsorption platform is provided with an adsorption hole for adsorbing an object to be adsorbed and a gas suction hole communicated with the adsorption hole, the first gas joint is connected with the gas suction hole of the adsorption platform through the sealing valve, the second gas joint is connected with the vacuum generation system, and the second gas joint is used for being connected with or disconnected from the first gas joint;
the sealing valve is used for communicating the first gas joint with the gas suction hole when the second gas joint is jointed with the first gas joint, and closing the joint of the first gas joint and the sealing valve when the second gas joint is separated from the first gas joint.
2. The vacuum adsorption system of claim 1, wherein the sealing valve comprises a valve body and a valve spool, the valve body having a gas inlet connected to the gas suction port and a gas outlet connected to the first gas connector; the valve core is movably arranged in the valve body and used for opening or closing the air outlet of the valve body.
3. The vacuum adsorption system of claim 2, further comprising a push rod, wherein one end of the push rod is inserted into the second gas connector and is fixedly connected to the second gas connector, and the other end of the push rod is movably inserted into the first gas connector and can push the valve core open through the gas outlet of the valve body;
the sealing valve further comprises a resetting piece connected with the valve core, and the resetting piece is used for applying a resetting elastic force towards the gas outlet of the valve body to the valve core so as to drive the valve core to seal the gas outlet of the valve body when the first gas connector and the second gas connector are disconnected.
4. The vacuum adsorption system of claim 1, wherein the second gas connector has a slot, a latch located in the slot, and an adjustment mechanism connected to the latch, and the first gas connector has a latch located on an outer side thereof, and is adapted to be inserted into the slot to engage with the second gas connector;
the adjusting mechanism is used for driving the clamping block to be clamped in the clamping groove so as to lock the first gas connector and the second gas connector, or is used for driving the clamping block to be separated from the clamping groove so that the first gas connector and the second gas connector can be freely separated.
5. The vacuum adsorption system of claim 4, wherein the adjustment mechanism comprises a first telescopic rod and a fastening rod, one end of the fastening rod extends into the slot from the side wall of the second gas connector and is connected with the clamping block, the middle of the fastening rod is hinged to the second gas connector, and the other end of the fastening rod is hinged to the extending end of the first telescopic rod, so that the clamping block is driven by the first telescopic rod to be clamped in the clamping groove or separated from the clamping groove.
6. The vacuum adsorption system of claim 5, further comprising: and the extending end of the second telescopic rod is connected with the second gas connector and is used for driving the second gas connector to be jointed with or separated from the first gas connector.
7. The vacuum adsorption system of claim 6, further comprising: and the controller is respectively connected with the first telescopic rod, the second telescopic rod and the vacuum generating system.
8. The vacuum adsorption system of claim 1, further comprising: and the positioning and fixing device is used for adjusting the position of the adsorption platform so that the first gas joint is opposite to the second gas joint.
9. The vacuum adsorption system of claim 1, wherein the vacuum generating system comprises: the vacuum pump is connected with the second gas joint through the corrugated pipe, and the control valve is connected between the vacuum pump and the corrugated pipe.
10. The vacuum adsorption system of claim 1, wherein the adsorption platform has an adsorption cavity in the middle, and the adsorption hole and the suction hole are both communicated with the adsorption cavity.
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CN113109356A (en) * | 2021-04-09 | 2021-07-13 | 徐州盛科半导体科技有限公司 | Mobile platform for detecting semiconductor packaging defects |
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CN113109356A (en) * | 2021-04-09 | 2021-07-13 | 徐州盛科半导体科技有限公司 | Mobile platform for detecting semiconductor packaging defects |
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