CN209896034U - Be provided with graphite boat piece of inside casing inclined plane structure of keeping away - Google Patents
Be provided with graphite boat piece of inside casing inclined plane structure of keeping away Download PDFInfo
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- CN209896034U CN209896034U CN201920799837.5U CN201920799837U CN209896034U CN 209896034 U CN209896034 U CN 209896034U CN 201920799837 U CN201920799837 U CN 201920799837U CN 209896034 U CN209896034 U CN 209896034U
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- inclined plane
- frame
- graphite boat
- boat piece
- inside casing
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Abstract
The utility model discloses a graphite boat piece with an inner frame inclined plane clearance structure, which comprises a graphite boat piece body and a silicon wafer mounting inner frame, wherein the silicon wafer mounting inner frames are arranged side by side and are uniformly provided with a plurality of grooves; the silicon chip mounting inner frame is of a square structure and is provided with a frame edge and a frame bottom, and an inclined plane is formed on the frame edge; the utility model discloses a set up the inclined plane on the frame limit of silicon chip installation inside casing, keep away the sky through the inclined plane, effectively reduced area of contact to reduce the production of fish tail and inside casing seal of a government organization in old china, protected the silicon chip, prolong its life.
Description
Technical Field
The utility model relates to a graphite boat piece technical field specifically is a graphite boat piece that is provided with inside casing inclined plane and keeps away empty structure.
Background
The silicon chip is arranged in the inner frame of the graphite boat, the contact area of the edge of the conventional inner frame and the boat sheet is large, and when the silicon chip is in contact with the boat sheet, the silicon chip can generate large friction scratch and inner frame imprints in contact.
Disclosure of Invention
An object of the utility model is to provide a be provided with inside casing inclined plane and keep away empty structure's graphite boat piece to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a graphite boat piece with an inner frame inclined plane clearance structure comprises a graphite boat piece body and a silicon wafer mounting inner frame, wherein a plurality of silicon wafer mounting inner frames are arranged on the graphite boat body side by side and are of square structures; the silicon chip mounting inner frame comprises a frame edge and a frame bottom, and an inclined plane is arranged on the frame edge.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a set up the inclined plane on the frame limit of silicon chip installation inside casing, keep away the sky through the inclined plane, effectively reduced the area of contact of silicon chip with silicon chip installation inside casing to reduce the production of silicon chip by fish tail and inside casing seal of a government organization in old china, protected the silicon chip, prolonged the life of silicon chip.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the structure of the silicon wafer mounting inner frame of the present invention;
reference numbers in the figures: 1. a graphite boat body; 2. installing an inner frame on the silicon chip; 21. a frame edge; 22. a frame bottom; 23. a bevel.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Referring to fig. 1-2, the present invention provides a technical solution: a graphite boat piece with an inner frame inclined plane clearance structure comprises a graphite boat piece body 1 and a silicon wafer mounting inner frame 2, wherein a plurality of silicon wafer mounting inner frames 2 are arranged on the graphite boat body 1 side by side, and the silicon wafer mounting inner frames 2 are of square structures; the silicon chip mounting inner frame 2 comprises a frame edge 21 and a frame bottom 22, and the frame edge 21 is provided with an inclined surface 23.
The working principle is as follows: in the actual use process, the silicon chip is clamped in the silicon chip mounting inner frame 2 and is lapped on the frame edge 21; by arranging the inclined plane 23 structure, an inclined plane clearance is formed, the contact area of the silicon wafer and the frame edge 21 is effectively reduced, and therefore the silicon wafer is scratched and marks of the inner frame are reduced.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (1)
1. The utility model provides a be provided with graphite boat piece of inside casing inclined plane structure of keeping away, its characterized in that: the silicon wafer mounting device comprises a graphite boat piece body (1) and a silicon wafer mounting inner frame (2), wherein a plurality of silicon wafer mounting inner frames (2) are arranged on the graphite boat piece body (1) side by side, and the silicon wafer mounting inner frames (2) are of square structures; the silicon chip mounting inner frame (2) comprises a frame edge (21) and a frame bottom (22), and an inclined plane (23) is formed on the frame edge (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920799837.5U CN209896034U (en) | 2019-05-30 | 2019-05-30 | Be provided with graphite boat piece of inside casing inclined plane structure of keeping away |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920799837.5U CN209896034U (en) | 2019-05-30 | 2019-05-30 | Be provided with graphite boat piece of inside casing inclined plane structure of keeping away |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209896034U true CN209896034U (en) | 2020-01-03 |
Family
ID=69021102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920799837.5U Active CN209896034U (en) | 2019-05-30 | 2019-05-30 | Be provided with graphite boat piece of inside casing inclined plane structure of keeping away |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209896034U (en) |
-
2019
- 2019-05-30 CN CN201920799837.5U patent/CN209896034U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230621 Address after: Room 460, Building B, Zhongchuang Second Road, the north side of Binhai Fourth Road, Hangzhou Bay New Zone, Ningbo, Zhejiang 315000 (self declared) Patentee after: Ningbo Hongxin New Material Technology Co.,Ltd. Address before: 201708 room 438, area I, 4th floor, building 1, 1288 Huateng Road, Huaxin Town, Qingpu District, Shanghai Patentee before: Shanghai Hongjun new energy materials Co.,Ltd. |
|
| TR01 | Transfer of patent right |