CN209895068U - Modular objective lens drive device with variable minimum displacement - Google Patents
Modular objective lens drive device with variable minimum displacement Download PDFInfo
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- CN209895068U CN209895068U CN201920619461.5U CN201920619461U CN209895068U CN 209895068 U CN209895068 U CN 209895068U CN 201920619461 U CN201920619461 U CN 201920619461U CN 209895068 U CN209895068 U CN 209895068U
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- objective lens
- connecting rod
- transmission mechanism
- lens mounting
- rod transmission
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- 230000009471 action Effects 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 22
- 238000003384 imaging method Methods 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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Abstract
The utility model discloses a changeable modularization objective drive arrangement of minimum displacement volume. The utility model comprises an actuating module and an objective lens mounting seat; the objective lens mounting seat comprises a contact mechanism, a connecting rod transmission mechanism and an objective lens mounting ring; the connecting rod transmission mechanism is connected with the contact mechanism through a first rotating pair and a second rotating pair which are hinged, the objective lens mounting ring is arranged in the center of the connecting rod transmission mechanism through a mounting hole in the connecting rod transmission mechanism and is screwed in the fastening nail through a threaded hole to realize complete fixation; the actuating module generates unidirectional linear micro deformation; one end of the connecting rod transmission mechanism is connected with the actuating module through the contact mechanism, and the other end of the connecting rod transmission mechanism is connected with the objective lens mounting ring, so that the micro deformation of the actuating module is transmitted to the objective lens mounting ring; the objective lens mounting ring is radially fixed and can change the axial position through the transmission action. The utility model discloses can freely dismantle the combination between objective mount pad and actuating module, through chooseing for use different objective mount pad modules, change of minimum displacement volume when realizing driving objective.
Description
Technical Field
The utility model belongs to the micro-drive application relates to an objective drive arrangement, concretely relates to utilize link mechanism to carry out the objective drive arrangement that the displacement is enlargied. The utility model discloses can be applicable to various microscopic imaging occasions such as scanning type interferometer, surface texture analysis, biology and semiconductor testing arrangement etc..
Background
Microscopic imaging systems have wide application in modern measurement technologies, and for microscopic imaging systems, the most convenient means for automatic focusing or zooming is to drive an objective lens. The traditional objective lens driving device is driven by a motor or manually, and has the advantages of low precision, slow response and large volume.
The piezoelectric objective driver has the advantages of high response speed, high precision and small size, but the common piezoelectric driver is compact in structure, mostly adopts flexible hinge transmission, high integration causes that the displacement magnification ratio cannot be changed quickly, and the self property of the flexible hinge causes that the rigidity is low and the system delay is increased to a certain extent.
Disclosure of Invention
An object of the utility model is to provide a not enough to prior art, provide one kind and can improve the motion magnification, and can change the objective drive arrangement of magnification through changing drive assembly fast.
In order to achieve the above object, the utility model adopts the following technical scheme:
the modular objective lens driving device with variable minimum displacement comprises an actuating module and an objective lens mounting seat; the objective lens mounting seat comprises a contact mechanism, a connecting rod transmission mechanism and an objective lens mounting ring; the connecting rod transmission mechanism is connected with the contact mechanism through a first rotary pair and a second rotary pair which are hinged, the objective lens mounting ring is arranged in the center of the connecting rod transmission mechanism through a mounting hole in the connecting rod transmission mechanism and is screwed in the clinch nail through a threaded hole to realize complete fixation; the actuating module generates unidirectional linear micro deformation; one end of the connecting rod transmission mechanism is connected with the actuating module through the contact mechanism, and the other end of the connecting rod transmission mechanism is connected with the objective lens mounting ring, so that the micro deformation of the actuating module is transmitted to the objective lens mounting ring; the objective lens mounting ring is radially fixed, has a movable gap in the axial direction, and can change the axial position through the transmission action; and the objective lens mounting seat and the actuating module can be freely disassembled and assembled.
The actuating module consists of laminated piezoelectric ceramic elements, abutting ends and springs, the inner sides of the two abutting ends I are respectively attached to the two braking ends of the two laminated piezoelectric ceramic elements which are distributed left and right, the two ends of each spring are respectively connected with the inner side of the abutting end I, two springs are distributed on the two sides of each laminated piezoelectric ceramic element, and the abutting ends I are tightly pressed on the braking ends of the piezoelectric ceramic elements through the tensile force provided by the springs; the abutting end I is in a strip shape.
In the objective lens mounting seat, the inner side of the abutting end II in the contact mechanism is attached to the outer side of the abutting end I of the actuating module, and a pressing force is provided by a spring between the abutting end II and the outer frame, so that the actuating module and the objective lens mounting seat are combined.
The abutting end II is connected with the outer frame through 2 springs, and two ends of each spring are respectively connected with the outer side of the abutting end II and the inner side of the outer frame; by this combination, the objective mount and the actuator module can be removed and replaced without the use of other tools.
The four rotation pairs of the connecting rod transmission mechanism are as follows: the first revolute pair, the second revolute pair, the third revolute pair and the fourth revolute pair are arranged according to an isosceles trapezoid, and the four revolute pairs are respectively positioned at four vertexes of the equilateral trapezoid and are hinged.
The utility model discloses the working process is as follows:
when voltage is applied to the laminated piezoelectric ceramic element, the laminated piezoelectric ceramic element generates approximately linear deformation due to the inverse piezoelectric effect, the distance between the two braking ends of the laminated piezoelectric ceramic element attached to the abutting end I is increased, and micro displacement is generated and transmitted to the position between the two ends of the abutting end II through the abutting end I and the abutting end II which are attached to each other; because the connecting rod transmission mechanism is connected with the contact mechanism through the first revolute pair and the second revolute pair which are hinged, the displacement generated by the laminated piezoelectric ceramic element is finally transmitted between the first revolute pair and the second revolute pair, so that the distance between the first revolute pair and the second revolute pair is increased.
The utility model discloses beneficial effect for prior art does:
the adjustment of the displacement magnification can be realized by changing the base angle of the link mechanism in the objective lens installation module. Through the separation arrangement of the actuating module and the objective lens mounting module with the transmission mechanism, the objective lens mounting modules with different displacement magnification ratios can be quickly replaced, so that the adjustment requirements of objective lenses with different specifications are met.
Drawings
Fig. 1 is an isometric view of an objective lens driving device according to the present invention.
Fig. 2 is an exploded view of fig. 1.
Fig. 3 is an isometric view of the actuator module 1 of fig. 1.
Fig. 4 is a plan view of the objective lens mount 2 of fig. 1.
Fig. 5 is a side view of the linkage 22 of fig. 2.
Fig. 6 is a motion diagram of fig. 5.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 1 to 5, an objective lens driving apparatus according to a preferred embodiment of the present invention includes a brake module 1 and an objective lens holder 2. As shown in fig. 2, the objective lens mount includes a contact mechanism 21, a link actuator 22, and an objective lens mount ring 23. The link mechanism 22 is connected with the contact mechanism 21 through a first revolute pair 221 and a second revolute pair 222 which are hinged, the objective lens mounting ring 23 is mounted in the center of the link transmission mechanism through a mounting hole 225 on the link transmission mechanism 22, and the objective lens mounting ring is screwed into a rivet through a threaded hole 226 to realize complete fixation. The brake module 1 generates unidirectional linear micro deformation; one end of the connecting rod transmission mechanism 22 is connected with the brake module 1 through the contact mechanism 21, and the other end is connected with the objective lens mounting ring, so that the micro deformation of the brake module 1 is transmitted to the objective lens mounting ring; the objective lens mounting ring is radially fixed, has a movable gap in the axial direction, and can change the axial position through the transmission action. And the objective lens mounting seat and the brake module 1 can be freely disassembled and assembled.
Referring to fig. 3, the braking module 1 is composed of stacked piezoelectric ceramic elements 11, abutting ends 12 and springs 13, inner sides of the two abutting ends 12 are respectively attached to two braking ends of the two stacked piezoelectric ceramic elements 11 which are distributed left and right, two ends of each spring 13 are respectively connected with the inner sides of the abutting ends 12, two sides of each stacked piezoelectric ceramic element 11 are respectively provided with one spring 13, and the abutting ends 12 are pressed on the braking ends of the piezoelectric ceramic elements 11 through tensile force provided by the springs 13. The propping end 12 is strip-shaped.
Referring to fig. 4, in the objective lens mount, the inner side of the abutting end 211 in the contact mechanism 21 abuts against the outer side of the abutting end 12 of the brake module 1, and the pressing force is provided by the spring 212 between the abutting end 211 and the outer frame 213, so that the brake module 1 and the objective lens mount 2 are combined. Specifically, the method comprises the following steps: the supporting end 211 is connected with the outer frame 213 through 2 springs 212, and two ends of the springs 212 are respectively connected with the outer side of the supporting end 211 and the inner side of the outer frame 213; by this combination, the objective mount 2 and the brake module 1 can be removed and replaced without using other tools.
Referring to fig. 5, four revolute pairs of the link transmission mechanism 22: the first revolute pair 221, the second revolute pair 222, the third revolute pair 223 and the fourth revolute pair 224 are arranged in an isosceles trapezoid, and the four revolute pairs are respectively located at four vertexes of the isosceles trapezoid and are all hinged.
The utility model discloses the working process is as follows:
when a voltage is applied to the laminated piezoelectric ceramic element 11, due to the inverse piezoelectric effect, the laminated piezoelectric ceramic element 11 generates an approximately linear deformation, the distance between the two braking ends of the laminated piezoelectric ceramic element 11 attached to the abutting end 12 increases, and a small displacement is generated, and the displacement is transmitted between the two ends of the abutting end 211 through the abutting end 12 and the abutting end 211 attached to each other. Since the link transmission mechanism 22 and the contact mechanism 21 are connected by the first revolute pair 221 and the second revolute pair 222 which are hinged, the displacement generated by the laminated piezoelectric ceramic element 11 is finally transmitted between the first revolute pair 221 and the second revolute pair 222, and the distance between the first revolute pair 221 and the second revolute pair 222 is increased.
Referring to the motion diagram of fig. 6, a, B, C, and D are the rotation axes of the first revolute pair 221, the second revolute pair 222, the third revolute pair 223, and the fourth revolute pair 224, respectively, and since the first revolute pair 221, the second revolute pair 222, and the contact mechanism are hinged, the vertical height of AB is fixed. And (3) making a perpendicular line from C to AB, with the amount of the perpendicular line being E and the amount of & CAE being theta, when the AE length changes by delta a, the CE length change delta b satisfies the following conditions: Δ b ≈ Δ a/tan θ. I.e., a displacement magnification of 1/tan θ. In the present embodiment, when the AE length is changed by Δ a, the total AB length change amount is 2 Δ a, and therefore the displacement magnification is 1/2tan θ. When θ is 5 °, the magnification is 5.7, and when θ is 2 °, the magnification is 14.3.
With the objective lens driving device in the present embodiment, when the laminated piezoelectric ceramic element 11 in the brake module 1 is deformed to be elongated, the height of the objective lens mount ring fixed on the CD side, i.e., the turning pairs 223, 224 side rises (falls in the EC direction) in the CE direction because the AB height is fixed in correspondence to the CE length in fig. 6 being shortened; when the laminated piezo-ceramic element 11 in the actuator module 1 is subjected to shrinkage deformation, the height of the objective lens mount ring fixed on the CD side, i.e., the turning pair 223, 224 side is lowered in the CE direction (raised in the EC direction) due to the fixed AB height corresponding to the increase in CE length in fig. 6. For different magnifications, when the displacement output by the actuating module 1 changes discontinuously, the minimum value of the length change of the CE is different, and the minimum value corresponds to different magnifications. By replacing the objective lens mount 2 having a different θ angle in the link mechanism 22, the minimum displacement of the objective lens driving device can be changed quickly.
The above-mentioned embodiments are merely a preferred embodiment of the present invention, but it is not intended to limit the present invention. Those skilled in the pertinent art can make various changes and modifications without departing from the technical principles of the present invention, and such changes and modifications all fall within the scope of the present invention.
Claims (5)
1. A modular objective lens drive device with variable minimum displacement, characterized by comprising an actuator module (1) and an objective lens mount (2); the objective lens mounting seat comprises a contact mechanism (21), a connecting rod transmission mechanism (22) and an objective lens mounting ring (23); the connecting rod transmission mechanism (22) is connected with the contact mechanism (21) through a first revolute pair (221) and a second revolute pair (222) which are hinged, the objective lens mounting ring (23) is mounted in the center of the connecting rod transmission mechanism through a mounting hole (225) in the connecting rod transmission mechanism (22), and is screwed into a clinch nail through a threaded hole (226) to realize complete fixation; the actuating module (1) generates unidirectional linear micro deformation; one end of the connecting rod transmission mechanism (22) is connected with the actuating module (1) through the contact mechanism (21), and the other end of the connecting rod transmission mechanism is connected with the objective lens mounting ring, so that the micro deformation of the actuating module (1) is transmitted to the objective lens mounting ring; the objective lens mounting ring is radially fixed, has a movable gap in the axial direction, and can change the axial position through the transmission action; and the objective lens mounting seat and the actuating module (1) can be freely disassembled and assembled.
2. The objective lens actuator of minimum displacement variable module as claimed in claim 1, wherein the actuating module (1) is composed of a laminated piezoelectric ceramic element (11), two abutting ends (12) and a first spring (13), the inner sides of the two abutting ends i (12) are respectively attached to the two braking ends of the two laminated piezoelectric ceramic elements (11) disposed in a left-right distribution, the two ends of the first spring (13) are respectively connected to the inner sides of the abutting ends i (12), and a first spring (13) is respectively disposed on both sides of each laminated piezoelectric ceramic element (11), and the abutting ends i (12) are pressed against the braking ends of the piezoelectric ceramic elements (11) by the tensile force provided by the first springs (13); the abutting end I (12) is in a strip shape.
3. The modular objective lens actuator with variable minimum displacement according to claim 2, wherein in the objective lens mount, the inner side of the abutting end ii (211) of the contact mechanism (21) abuts against the outer side of the abutting end i (12) of the actuator module (1), and the second spring (212) between the abutting end ii (211) and the outer frame (213) provides a pressing force to combine the actuator module (1) and the objective lens mount (2).
4. The objective lens actuator of claim 3, wherein the holding end II (211) and the outer frame (213) are connected by 2 second springs (212), and two ends of the second springs (212) are respectively connected to the outer side of the holding end II 2(11) and the inner side of the outer frame (213); by this combination, the objective mount (2) and the actuator module (1) can be removed and replaced without further tools.
5. The modular objective lens actuator with variable minimum displacement according to claim 4, wherein the four revolute pairs of the link actuator (22): the first revolute pair (221), the second revolute pair (222), the third revolute pair (223) and the fourth revolute pair (224) are arranged according to an isosceles trapezoid, and the four revolute pairs are respectively located at four vertexes of the isosceles trapezoid and are hinged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920619461.5U CN209895068U (en) | 2019-04-30 | 2019-04-30 | Modular objective lens drive device with variable minimum displacement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920619461.5U CN209895068U (en) | 2019-04-30 | 2019-04-30 | Modular objective lens drive device with variable minimum displacement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209895068U true CN209895068U (en) | 2020-01-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920619461.5U Withdrawn - After Issue CN209895068U (en) | 2019-04-30 | 2019-04-30 | Modular objective lens drive device with variable minimum displacement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209895068U (en) |
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2019
- 2019-04-30 CN CN201920619461.5U patent/CN209895068U/en not_active Withdrawn - After Issue
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