CN209886922U

CN209886922U - Water spraying module

Info

Publication number: CN209886922U
Application number: CN201920019949.4U
Authority: CN
Inventors: 吕鸿图; 林亚力; 林均达
Original assignee: Topapex Optronics Technology Co ltd
Current assignee: Hongchao Environmental Protection Energy Co ltd
Priority date: 2018-12-07
Filing date: 2019-01-07
Publication date: 2020-01-03
Anticipated expiration: 2029-01-07
Also published as: TWM577351U; KR20210001471U; KR20200001276U

Abstract

The present creation is a water spray module, which is applied to substrate processing and comprises a base, a first pipeline and a second pipeline. The base forms an accommodating space. The base has an input portion and an output portion. The input part is communicated with the output part through the accommodating space. Wherein the output portion forms a trench. The first pipeline is provided with an input part. The first conduit provides a flow path for the gas. The second pipeline is provided with an input part. The second conduit provides a flow path for the liquid. In the ditch of the output part, the tail end of the first pipeline covers the tail end of the second pipeline, and when the first pipeline outputs gas and the second pipeline outputs liquid, the output part outputs water mist.

Description

Water spraying module

[ technical field ] A method for producing a semiconductor device

The present creation relates to the field of substrate processing technologies, and more particularly to a water spray module for a substrate processing system.

[ background of the invention ]

Conventional plate bodies can be processed, for example, by heating, cutting or drilling the plate body with a laser beam, for example. The processing method of laser and water spraying head is to cut first and then spray water to dissipate heat, i.e. the water spraying head is installed after the laser.

Accordingly, the present invention provides a novel water spraying module for providing a heat dissipation device for laser processing.

[ Utility model ] content

The first objective of this creation is to provide a water spray module, which is applied in the substrate processing process to dissipate the heat energy generated in the processing process.

The second objective of the present invention is to provide the above water spraying module, which utilizes a plurality of water pipes with concentric structures to form water mist, so as to perform effective heat dissipation.

The third objective of the present invention is to provide the above water spraying module, which is used to adjust and/or clamp the water pipe through one or more screws.

The fourth objective of the present invention is to provide the above water spraying module, which changes or sets the direction of the end of the water pipe by the deflection structure.

The fifth objective of the present invention is to provide the above water spraying module, which provides a connector part assembled on a laser processing machine, for example, to achieve the effect of dissipating heat by using water mist.

To achieve the above and other objects, the present invention provides a water spraying module for processing a substrate, which comprises a base, a first pipeline and a second pipeline. The base forms an accommodating space. The base has an input portion and an output portion. The input part is communicated with the output part through the accommodating space. Wherein the output portion forms a trench. The first pipeline is provided with an input part. The first conduit provides a flow path for the gas. The second pipeline is provided with an input part. The second conduit provides a flow path for the liquid. In the ditch of the output part, the tail end of the first pipeline covers the tail end of the second pipeline, and when the first pipeline outputs gas and the second pipeline outputs liquid, the output part outputs water mist.

Compared with the prior art, the water spraying module can generate water mist and is applied to the laser processing process, so that the yield of the manufactured product can be effectively improved, and the processing quality is good.

The specific techniques employed in the present invention will be further described with reference to the following examples and accompanying drawings.

[ description of the drawings ]

Fig. 1 is a schematic perspective view of a water spraying module according to an embodiment of the present disclosure.

FIG. 2 is an exploded view illustrating the water spray module of FIG. 1 according to the present invention.

FIG. 3 is a schematic cross-sectional view illustrating the water spray module of FIG. 1 according to the present invention.

Description of the main component symbols:

10 water spray module

12 base

122 input unit

1242 ditch

124 output part

14 first pipeline

142 first pipe joint

144 end of the tube

16 second pipeline

162 second pipe joint

164 end

18 mist

20 holding rack

22 locking screw

24 stop screw

26 deflection structure

28 first cover plate

30 second cover plate

32 connecting part

SP accommodation space

A gas

L liquid

[ detailed description ] embodiments

For a fuller understanding of the objects, features and advantages of the present disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings.

In this disclosure, the use of "a" or "an" is used to describe elements, components and assemblies described herein. This is for convenience of illustration only and provides a general sense of the scope of the present disclosure. Thus, unless expressly stated otherwise, such description should be read to include one, at least one and the singular also includes the plural.

In this disclosure, the terms "comprising," "including," "having," "containing," or any other similar term are intended to cover non-exclusive inclusions. For example, an element, structure, article, or apparatus that comprises a plurality of elements is not limited to only those elements but may include other elements not expressly listed or inherent to such element, structure, article, or apparatus. In addition, unless expressly stated to the contrary, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or".

Please refer to fig. 1, which is a schematic perspective view of a water spraying module according to an embodiment of the present invention. In fig. 1, the water spraying module 10 is applied to plate (not shown) processing. The processing may be, for example, heating, cutting, drilling, etc. of the plate body, and the plate body may be glass, sapphire, silicon, gallium arsenide, ceramic, etc.

The water spraying module 10 includes a base 12, a first pipeline 14 and a second pipeline 16. The material of the water spray module 10 may be stainless steel, metal, nonmetal or other materials.

Referring to fig. 2, which is an exploded view illustrating the water spraying module of fig. 1, the base 12 forms a receiving space SP. In the present embodiment, the base 12 is shaped like a T, and in other embodiments, it may be any shape.

The base 12 includes an input portion 122 and an output portion 124. The input portion 122 is for gas a or liquid L to enter, and the output portion 124 is for gas a or liquid L to output.

The input portion 122 and the output portion 124 communicate through the accommodating space SP. In which the output portion 124 forms a trench 1242.

The first pipe 14 is provided with a trench 1242 of the input portion 122 and provides a flow path for the gas A, and in this embodiment, the first pipe 14 is cylindrical. In order to receive the external gas a, in the present embodiment, a first pipe joint 142 may also be provided to connect the first pipeline 14 to receive the gas a. Wherein, the surface of the first pipe joint 142 forms a plurality of scores for the hose to be jointed without falling off.

The second conduit 16 is provided with a conduit 1242 of the inlet 124. The second conduit 16 provides a flow path for the liquid L, and in this embodiment, the second conduit 16 is also cylindrical. In order to be able to receive external liquid L, in the present embodiment, a second pipe joint 162 may also be provided to connect the second pipeline 16 to receive liquid L. Wherein, the surface of the second pipe joint 162 is formed with a plurality of scores for the hose to be engaged without falling off. Furthermore, the caliber of the first pipeline 14 is larger than the caliber of the second pipeline 16, so that the second pipeline 16 is coated on the first pipeline 14. In one embodiment, the second conduit 16 has an inner diameter in a range between 0.1 and 1 cm, such as 0.2 cm.

Referring also to FIG. 3, a cross-sectional view of the water spray module of FIG. 1 is shown. In fig. 3, it can be understood that the second pipeline 16 protrudes from the first pipeline 14, so that the liquid in the second pipeline 16 is drawn by its own weight and sucked by the air pressure (e.g. negative pressure) in the first pipeline 14, and the liquid L is acted by the gas a to form the mist 18.

Referring back to fig. 2, the water spray module 10 further includes a holder 20, a locking screw 22 and a fastening screw 24.

The holder 20 is disposed in the trench 1242 of the output portion 124, in this embodiment, the holder 20 can be a stopper to limit the first pipe 14 and the second pipe 16 located at the output portion 124, so that the first pipe 14 and the second pipe 16 do not shake in the trench 1242, and the generation of the mist 18 is affected. The locking screw 22 is disposed at two sides of the output portion 124 and adjacent to the first pipeline 16 to clamp the first pipeline 16 at the output portion 124. By adjusting the position of the first pipe 16 in the trench 1242, it is able to correspond to the first pipes 124 with different pipe diameters, so that the first pipe 124 can be stable without shaking.

Set screw 24 is disposed at output 124 and adjacent second conduit 16. The setscrew 24 adjusts the relative position of the central axis of the end 164 of the second conduit 16 with respect to the central axis of the end 144 of the first conduit 14 to make a coaxial alignment. The alignment of the stop screws 24 allows the first and

second pipes

14, 16 to be held in place (e.g., concentric circles) to produce a uniform mist 18.

In addition, the water spraying module 10 also includes a deviation structure 26. In this embodiment, the biasing structure 26 may be a snap ring. The deflection structure 26 is connected to the output 124 and changes the orientation of the ends of the first and

second conduits

14, 16.

In order to protect the components of the first pipe 14, the second pipe 16, etc., the water spray module 10 also includes a first cover plate 28 and a second cover plate 30. The first cover 28 incorporates the base 12 and the second cover 30 incorporates the output 124. The first cover 28 encloses the receiving space SP and the second cover 30 limits the first pipe 14 and the second pipe 16 to the trench 1242.

In addition, in order to be able to bridge or be assembled to the machine, the water spraying module 10 also provides a connection portion 32 to connect an external rotation mechanism (not shown), by which the height, angle, etc. of the water spraying module can be changed.

It should be noted that the water spray module can also be connected to the first pipeline 14 and the second pipeline 16 through a control unit (not shown), which controls the flow rate of the gas a or the liquid L through, for example, a solenoid valve, so as to determine the flow rate, the ratio, etc. of the mist 18.

Although the embodiments of the present disclosure have been described above, it should be understood that various changes in the form, construction, features, methods and quantities described in the claims may be made by those skilled in the art without departing from the spirit and scope of the present disclosure, and therefore the scope of the present disclosure should not be limited by the claims appended hereto.

Claims

1. The utility model provides a water spray module, uses in substrate processing which characterized in that, water spray module contains:

the base is provided with an input part and an output part, the input part and the output part are communicated through the accommodating space, and the output part forms a ditch;

a first conduit providing the input, the first conduit providing a flow path for gas;

a second conduit providing the input, the second conduit providing a flow path for the liquid; and

in the ditch of the output part, the tail end of the first pipeline covers the tail end of the second pipeline, and when the first pipeline outputs the gas and the second pipeline outputs the liquid, the output part outputs water mist.

2. The spray module of claim 1, further comprising a first adapter and a second adapter, wherein the first adapter connects to the first conduit for receiving the gas and the second adapter connects to the second conduit for receiving the liquid.

3. The spray module of claim 1, wherein the first conduit has a larger bore than the second conduit.

4. The spray module of claim 3, wherein the second conduit has an inner diameter in the range of 0.1 to 1 cm.

5. The spray module of claim 1, further comprising a retainer disposed at the output portion to restrain the first and second conduits at the output portion.

6. The spray module of claim 1, further comprising a locking screw disposed at the output portion and adjacent to the first conduit for clamping the first conduit at the output portion.

7. The spray module of claim 1, further comprising a set screw disposed at the output portion and adjacent to the second conduit, the set screw adjusting a relative position of a central axis of an end of the second conduit with respect to a central axis of an end of the first conduit.

8. The spray module of claim 1, further comprising a deflection structure coupled to the output portion, the deflection structure changing the direction of the end of the first conduit and the end of the second conduit.

9. The spray module of claim 1, further comprising a first cover plate and a second cover plate, wherein the first cover plate is coupled to the base and the second cover plate is coupled to the output portion, and the first cover plate encloses the receiving space and the second cover plate confines the first and second pipes to the trench.

10. The water spray module of claim 1, further comprising a connection part for connecting an external rotation mechanism.