CN209873082U - Evaporation device for coating film - Google Patents
Evaporation device for coating film Download PDFInfo
- Publication number
- CN209873082U CN209873082U CN201920111058.1U CN201920111058U CN209873082U CN 209873082 U CN209873082 U CN 209873082U CN 201920111058 U CN201920111058 U CN 201920111058U CN 209873082 U CN209873082 U CN 209873082U
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- Prior art keywords
- cross beam
- column
- conductive column
- cooling water
- conductive
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- Withdrawn - After Issue
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Abstract
The evaporation device for coating comprises 2 cross beams I, 2 cross beams II, 2 press blocks I, 4 locking blocks, 4 press blocks II, 2 resistance cards, 2 crucible supporting assemblies, 3 conductive columns, 3 sealing devices and 2 crucibles; and cooling water channels are arranged in the first cross beam, the second cross beam and the conductive column, the water inlet cooling water channel of the conductive column is communicated with the water inlet end of the cooling water channel of the first cross beam or the second cross beam, and the water outlet end of the cooling water channel of the first cross beam or the second cross beam is communicated with the water outlet cooling water channel of the conductive column. Utilize the utility model discloses, the cooling that can effectual realization heat conduction spare part can realize the multiplex even heating.
Description
Technical Field
The utility model relates to an evaporation plant for coating film.
Background
When the common evaporation device is used for high-power evaporation demand equipment, heat conducting parts generate heat seriously, the influence on the service life of an equipment sealing element is serious, and the uneven coating thickness caused by uneven heat when the multi-station crucible is heated simultaneously is avoided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that an evaporation plant for coating film is provided, which can effectively realize the cooling of heat conducting parts and realize multiplex uniform heating.
The utility model provides a technical scheme that its technical problem adopted is: an evaporation device for coating comprises 2 cross beams I, 2 cross beams II, 2 press blocks I, 4 locking blocks, 4 press blocks II, 4 resistance cards, 2 crucible supporting assemblies, 3 conductive columns, 3 sealing devices and 2 crucibles;
cooling water channels are arranged in the cross beam I, the cross beam II and the conductive column, a water inlet cooling water channel of the conductive column is communicated with a water inlet end of the cooling water channel of the cross beam I or the cross beam II, and a water outlet end of the cooling water channel of the cross beam I or the cross beam II is communicated with a water outlet cooling water channel of the conductive column;
the 1 crossbeam I is connected with the 1 conductive column through a pressing block, the connection position is sealed, the 1 crossbeam I and the 1 crossbeam II are connected with the 1 conductive column, the connection position is sealed, the 1 crossbeam II is connected with the 1 conductive column through the pressing block, the connection position is sealed, and the 1 crossbeam I and the 1 crossbeam II are sequentially arranged; the conductive column is connected with the coating machine cavity through a sealing device to realize the sealing of the connecting port;
one end of each group of 1 resistance card is connected with the beam I through the pressing block and the locking block, the other end of each group of the resistance cards is connected with the beam II through the pressing block and the locking block, and when the resistance cards are connected, the compression is required to be ensured, and the two groups are combined; the resistance card is connected with the crucible supporting assembly in an installing mode, the crucible is connected with the crucible supporting assembly in an installing mode, and the crucible supporting assembly is connected with the coating machine cavity.
Further, the crucible supporting assembly comprises a supporting column, a screw, an insulating column and a stud; the support column is provided with two vent holes, so that the influence of a local cavity formed in the working process on the vacuum degree in the coating cavity is avoided; the bottom of the support column is connected with the insulating column through a screw; the bottom of the support column is provided with a strip-shaped hole, so that the crucible at the top of the support column is always positioned in the middle of the resistor disc to ensure uniform heating; the support column is fixedly connected with the coating machine cavity through a stud and an insulating column.
Furthermore, 1 crossbeam I links to each other with 1 electrically conductive post through the briquetting, and the hookup location is sealed with the sealing washer.
Furthermore, 1 crossbeam I, 1 crossbeam II link to each other with 1 electrically conductive post, and the hookup location is sealed with the sealing washer.
Furthermore, 1 crossbeam II links to each other with 1 electrically conductive post through the briquetting, and the hookup location is sealed with the sealing washer.
Furthermore, the cross beam I, the cross beam II and the conductive column are made of copper materials with good conductivity.
Utilize the utility model discloses, the cooling that can effectual realization heat conduction spare part can realize the multiplex even heating.
Drawings
FIG. 1 is a schematic structural view of an embodiment of an evaporation apparatus for coating according to the present invention;
FIG. 2 is a schematic flow diagram of cooling water for the vaporization apparatus of FIG. 1;
FIG. 3 is a schematic view of the crucible support assembly shown in FIG. 1;
in the figure: 1. the device comprises a beam I, a beam II, a beam 3, a press block I, a locking block 4, a press block II, a resistor disc 6, a crucible supporting assembly 7, a conductive column 8, a sealing device 9, a crucible 10, a support column 11, a screw 12, an insulating column 13, a stud 14, an air vent 15, a plug 16, a cooling water inlet 17 and a cooling water outlet 18.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
Examples
Referring to fig. 1-3, an evaporation device for coating comprises 2 beams i 1, 2 beams ii 2, 2 press blocks i 3, 4 locking blocks 4, 4 press blocks ii 5, 4 resistance sheets 6, 2 crucible supporting assemblies 7, 3 conductive posts 8, 3 sealing devices 9 and 2 crucibles 10;
cooling water channels are arranged in the cross beam I1, the cross beam II 2 and the conductive column 8, a water inlet cooling water channel of the conductive column 8 is communicated with a water inlet end of the cooling water channel of the cross beam I1 or the cross beam II 2, and a water outlet end of the cooling water channel of the cross beam I1 or the cross beam II 2 is communicated with a water outlet cooling water channel of the conductive column 8;
the 1 cross beam I1 is connected with the 1 conductive column 8 through a pressing block 3, the connecting positions are sealed by sealing rings (the function of the sealing rings is to prevent the cooling water for work from seeping out), the 1 cross beam I1 and the 1 cross beam II 2 are connected with the 1 conductive column 8, the connecting positions are sealed by sealing rings (the function of the sealing rings is to prevent the cooling water for work from seeping out), the 1 cross beam II 2 is connected with the 1 conductive column 8 through the pressing block 3, and the connecting positions are sealed by sealing rings (the function of the sealing rings is to prevent the cooling water for work from seeping out) and are arranged in sequence; the conductive column 8 is connected with the coating machine cavity through a sealing device 9 to realize the sealing of the connecting port;
one end of each group 1 of resistance cards 6 is connected with the beam I1 through a pressing block 5 and a locking block 4 (the locking block is provided with a threaded hole, the pressing block and the beam I are provided with through holes, the resistance cards are tightly pressed between the beam and the pressing block by screws), and the other end of each group 1 of resistance cards is connected with the beam II 2 through the pressing block 5 and the locking block 4 (the locking block is provided with a threaded hole, the pressing block and the beam I are provided with through holes, the resistance cards are tightly pressed between the beam and the pressing block by screws), and when the resistance cards are connected, the pressing is guaranteed, and the two; the resistance card 6 is connected with the crucible supporting assembly 7 in an installing mode, the crucible 10 is connected with the crucible supporting assembly 7 in an installing mode, and the crucible supporting assembly 7 is connected with the cavity of the film coating machine.
In the embodiment, the crucible supporting assembly 7 comprises a supporting column 11, a screw 12, an insulating column 13 and a stud 14; the support column 11 is provided with two vent holes 15, so that the influence of a local cavity formed in the working process on the vacuum degree in the coating cavity is avoided; the bottom of the support column 11 is connected with an insulating column 13 through a screw 12; the bottom of the support column 11 is provided with a strip-shaped hole, so that the crucible 10 at the top of the support column 11 is always positioned in the middle of the resistance card 6 to ensure uniform heating; the support column 11 is fixedly connected with the coating machine cavity by adopting a stud 14 and an insulating column 13.
In this embodiment, the beam i 1, the beam ii 2, and the conductive column 8 are made of copper materials with good conductivity, and cooling water is introduced to the three parts in the using process.
When the device works, the power supply is connected with the three conductive columns 8, and evaporation pills are placed in the crucible 10 on the crucible supporting assembly 7;
during operation, cooling water flows in from a cooling water inlet on the conductive column 8 and carries heat of parts in the operation process out through the cross beam I1 (or the cross beam II 2) so as to prevent deformation and expansion.
Claims (6)
1. Evaporation plant for coating film, its characterized in that: the device comprises 2 cross beams I, 2 cross beams II, 2 press blocks I, 4 locking blocks, 4 press blocks II, 4 resistance cards, 2 crucible supporting assemblies, 3 conductive posts, 3 sealing devices and 2 crucibles;
cooling water channels are arranged in the cross beam I, the cross beam II and the conductive column, a water inlet cooling water channel of the conductive column is communicated with a water inlet end of the cooling water channel of the cross beam I or the cross beam II, and a water outlet end of the cooling water channel of the cross beam I or the cross beam II is communicated with a water outlet cooling water channel of the conductive column;
the 1 crossbeam I is connected with the 1 conductive column through a pressing block I, the connection position is sealed, the 1 crossbeam I and the 1 crossbeam II are connected with the 1 conductive column, the connection position is sealed, the 1 crossbeam II is connected with the 1 conductive column through the pressing block I, the connection position is sealed, and the connection positions are arranged in sequence; the conductive column is connected with the coating machine cavity through a sealing device to realize the sealing of the connecting port;
one end of each group of 1 resistance card is connected with the beam I through the pressing block II and the locking block, the other end of each group of the resistance cards is connected with the beam II through the pressing block II and the locking block, and when the resistance cards are connected, the compression is guaranteed, and the two groups are combined; the resistance card is connected with the crucible supporting assembly in an installing mode, the crucible is connected with the crucible supporting assembly in an installing mode, and the crucible supporting assembly is connected with the coating machine cavity.
2. The evaporation apparatus for coating according to claim 1, wherein: the crucible supporting assembly comprises a supporting column, a screw, an insulating column and a stud; two vent holes are formed in the supporting column; the bottom of the support column is connected with the insulating column through a screw; the bottom of the support column is provided with a strip-shaped hole; the support column is fixedly connected with the coating machine cavity through a stud and an insulating column.
3. The evaporation apparatus for plating according to claim 1 or 2, characterized in that: the connecting positions of the cross beam I, the pressing block I and the conductive column are sealed by sealing rings.
4. The evaporation apparatus for plating according to claim 1 or 2, characterized in that: the connection positions of the beam I and the beam II and the conductive column are sealed by sealing rings.
5. The evaporation apparatus for plating according to claim 1 or 2, characterized in that: the connecting positions of the cross beam II, the pressing block I and the conductive column are sealed by sealing rings.
6. The evaporation apparatus for plating according to claim 1 or 2, characterized in that: the cross beam I, the cross beam II and the conductive column are made of copper materials with good conductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920111058.1U CN209873082U (en) | 2019-01-23 | 2019-01-23 | Evaporation device for coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920111058.1U CN209873082U (en) | 2019-01-23 | 2019-01-23 | Evaporation device for coating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209873082U true CN209873082U (en) | 2019-12-31 |
Family
ID=68951147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920111058.1U Withdrawn - After Issue CN209873082U (en) | 2019-01-23 | 2019-01-23 | Evaporation device for coating film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209873082U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109594046A (en) * | 2019-01-23 | 2019-04-09 | 湖南宇诚精密科技有限公司 | A kind of plated film vaporising device |
-
2019
- 2019-01-23 CN CN201920111058.1U patent/CN209873082U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109594046A (en) * | 2019-01-23 | 2019-04-09 | 湖南宇诚精密科技有限公司 | A kind of plated film vaporising device |
| CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20191231 Effective date of abandoning: 20230707 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20191231 Effective date of abandoning: 20230707 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |