CN209859353U

CN209859353U - Microelectronic process teaching kit

Info

Publication number: CN209859353U
Application number: CN201920603578.4U
Authority: CN
Inventors: 李严峰; 姚健; 封国强
Original assignee: Beijing Boda Microtechnology Co Ltd
Current assignee: Beijing Aixi Zhiku Technology Co., Ltd
Priority date: 2019-04-29
Filing date: 2019-04-29
Publication date: 2019-12-27
Anticipated expiration: 2029-04-29

Abstract

The utility model discloses a microelectronics technology teaching external member, including microelectronics technology experiment control box, be provided with control circuit board in the control box, the last technology experiment control circuit who contains microprocessor that sets up of control circuit board openly is provided with liquid crystal display and the control keyboard who is connected with control circuit at the control box, is provided with the test interface who is connected with control circuit at the control box side, test interface has a plurality ofly, and a plurality of test interfaces are connected with diode device test integrated circuit board, triode device test integrated circuit board, MOSFET device test integrated circuit board, LDMOS device test integrated circuit board and GaN device test integrated circuit board respectively through the interface cable. The utility model discloses can provide the interactive interface of the real semiconductor process equipment operation of simulation for the student with the mode that button and liquid crystal display combine. The operation is simple and visual; students can understand and master the basic principle and key technology of the semiconductor process through the simulation operation of process equipment which is more popular and easy to understand.

Description

Microelectronic process teaching kit

Technical Field

The utility model relates to an education product especially relates to a microelectronics technology teaching external member.

Background

Integrated circuits are developed from process technologies that produce transistors and interconnect lines on a single chip, which are collectively referred to as a process. Since the invention of transistors and integrated circuits, the semiconductor industry has shown continued development in new processes and process improvements. The improvement of the process has resulted in the generation of integrated circuits with higher integration and reliability, thus driving the revolution of the microelectronics industry, most typically moore's law, which doubles the number of transistors per unit area of a chip every two years by virtue of the reduction of the process size.

At present, the microelectronic process technology enters the 7nm mass production stage, but the microelectronic process teaching content and experimental conditions in schools greatly lag behind the development of the times, so that the process technology knowledge mastered by students has obvious gap with the actual semiconductor industry. On one hand, the teaching content is not synchronized with the development of the technology in time, and on the other hand, the practice link of the advanced technology teaching is hindered due to increasingly expensive microelectronic process equipment. Therefore, a teaching product suitable for micro-nano electronic process teaching and capable of developing advanced process practice in a virtualization mode is urgently needed.

Disclosure of Invention

An object of the utility model is to provide a microelectronics technology teaching external member, through the mode with button and liquid crystal display combination, provide the interactive interface of the operation of the real semiconductor process equipment of simulation, go to understand and master semiconductor technology's basic principle and key technology etc. through process equipment's emulation operation, the teaching external member still provides the encapsulation and the test link of rear end technology teaching, guarantees the integrality of technology teaching function.

In order to realize the purpose, the technical scheme of the utility model is that: the utility model provides a microelectronics technology teaching external member, includes microelectronics technology experiment control box, is provided with control circuit board in the control box, the last setting of control circuit board contains microprocessor's technology experiment control circuit, openly is provided with liquid crystal display and the control keyboard who is connected with control circuit at the control box, wherein, openly still is provided with the test interface socket of being connected with control circuit at the control box, test interface socket has a plurality ofly, and a plurality of test interface sockets are connected with diode device test integrated circuit board, triode device test integrated circuit board, MOSFET device test integrated circuit board, LDMOS device test integrated circuit board and GaN device test integrated circuit board respectively through the interface cable, control keyboard is divided into a plurality of key regions, press key region, digital key region and test function selection key region including the direction, wherein: the signal extraction of the keys in the direction key area is connected with the signal input end of the microprocessor in a single key signal extraction mode; the signal lead-out of the number keyboard area and the test function selection key area is connected with the signal input end of the microprocessor through a plurality of signal lines in the row direction and the column direction formed by the key contacts of the matrix formed by the rows and the columns.

The scheme is further as follows: the diode device test board is provided with two diodes of different packaging types, namely a DO-35 type packaged diode device and an SOT-23 type packaged diode device, and the board is provided with an alternative gating switch to complete switching of the devices.

The scheme is further as follows: the triode device test board is provided with three triode devices of different packaging types, namely a TO-92 type packaging triode device, a TO-204AA type packaging triode device and an SOT-23 type packaging triode device, and a three-TO-one gating switch is arranged on the board TO complete switching of the devices.

The scheme is further as follows: the MOSFET device test board card is provided with two MOSFET devices of different packaging types, namely a PQFN8 type packaging device and a WLCSP10 type packaging device, and the board card is provided with an alternative gating switch to complete the switching of the devices.

The scheme is further as follows: the LDMOS device test board card is provided with two LDMOS devices of different packaging types, namely a PowerSO-10RF type packaging device and a PowerFLAT type packaging device, and the board card is provided with an alternative gating switch to complete switching of the devices.

The scheme is further as follows: the GaN device test board card is provided with a device with a packaging type of PG-DSO-20-85.

The beneficial effects of the utility model reside in that can provide the interactive interface of the true semiconductor process equipment operation of simulation for the student with the mode that button and liquid crystal display combine. The operation is simple and visual; students can understand and master the basic principle and key technology of the semiconductor process through the simulation operation of process equipment which is more popular and easy to understand.

The present invention will be described in detail with reference to the accompanying drawings and examples.

Drawings

FIG. 1 is a schematic structural view of a microelectronic process experiment control box of the present invention;

FIG. 2 is a schematic diagram of the circuit structure of the present invention;

FIG. 3 is a schematic view of the layout structure of the control panel of the present invention;

fig. 4 is a schematic diagram of the direction key and the digital keyboard lead structure.

Detailed Description

A microelectronic process teaching kit is disclosed, as shown in fig. 1, fig. 2, fig. 3 and fig. 4, the microelectronic process teaching kit comprises a microelectronic process experiment control box 1, a control circuit board is arranged in the control box, a process experiment control circuit 2 containing a microprocessor is arranged on the control circuit board, a liquid crystal display 101 and a control keyboard which are connected with the control circuit are arranged on the front surface of the control box, a test interface socket which is connected with the control circuit is further arranged on the front surface of the control box, wherein a plurality of test interface sockets are provided, as shown in fig. 2, the plurality of test interface sockets are respectively connected with a diode device test board 3, a triode device test board 4, a MOSFET device test board 5, an LDMOS device test board 6 and a GaN device test board 7 through interface cables, the control keyboard is divided into a plurality of key areas, including a direction key area 102, a direction key area 102, A numeric keypad area 103 and a test function selection button area 104, wherein: as shown in fig. 4, the signal lead-out of the keys of the direction key area is connected with the signal input end of the microprocessor in a single key signal lead-out manner; the signal extraction of the number keyboard area and the test function selection key area is connected with the signal input end of the microprocessor by a plurality of signal lines in the row direction and the column direction formed by the key contacts of the matrix formed by the row and the column (only the signal extraction circuit of the number keyboard area is shown in figure 4); wherein: the plurality of interfaces further include a USB interface connected with the upper computer 8.

The case shell is used as an appearance entity of the kit, supports the operation panel and is internally provided with the information processing system; the operation interface is shown in fig. 3, and comprises an operation status indicator light area 105 and a test interface area 106 in addition to the liquid crystal display 101 and the control keyboard, and the test function selection key area 104 comprises function selection keys 1-4 and device selection keys 5-24; the information processing system, namely the process experiment control circuit 2, comprises a microprocessor, a decoding circuit, a control circuit, a liquid crystal display driving circuit, a keyboard decoding circuit and an interface circuit.

The working state indicating lamp area represents the working state of the experimental box, and the first indicating lamp A (power) represents whether to be connected with the computer or not; the second indicator light B (communication) represents whether the corresponding function software is started in the computer; a third indicator light C (Process) represents whether a Process or Test or Custom function key is pressed in the function selection area; the fourth indicator light d (Device) represents whether a Device or a Test or Custom function selection key is pressed in the Test function selection key area 104. After the USB wire is connected with the experiment box and the computer, all the indicator lamps flicker for three times, and the first indicator lamp is on to show that the experiment box is normally connected; after the software is started in the computer, the second indicator light is on.

The function selection key is used for selecting four functions of the Process teaching kit, namely starting a Process function by a green key, starting a Device function by a blue key, starting a Test function by a red key and starting a Custom function by a yellow key.

The device selection keys include 20 keys of 5-24, 16 of which are devices selectable by the customer, 4 of which are custom-made devices of 21-24, and the corresponding button is pressed to select the corresponding device. Learning and practice of single-step processes, device manufacturing, device testing, and device customization of the respective devices may be subsequently accomplished.

The liquid crystal display screen 101 is used for displaying semiconductor process parameters needing to be selected and set; the direction key area 102 is used for highlighting characters in different lines in the liquid crystal display screen area to realize the switching of process steps; the digital keyboard area is used for inputting process parameters and confirming correct parameter input and starting a simulation test. The technical scheme of the process teaching kit related to the embodiment is characterized in that the parameter selection and setting operation of the process simulation test is completed by designing the special direction keys and the digital keyboard and matching with the liquid crystal display, so that the practicability and the user experience of the 'virtualization' process teaching are enhanced. The keyboard designed by the embodiment can complete all simulation parameter setting operations with the minimum number of keyboards.

The liquid crystal display adopts a graphic dot matrix liquid crystal display module which mainly comprises a row driver/column driver and a 192 × 64 full dot matrix liquid crystal display and can complete graphic display and can also display 12 (columns) × 4 (rows) Chinese characters.A microprocessor interface adopts an 8-bit data bus for parallel input and output, 6 control lines, 1 liquid crystal screen backlight control line, 2 ground lines and 2 power lines.

The direction keys adopt 4 direction keys, the left direction key and the right direction key realize the switching of different process steps, and the upper direction key and the lower direction key realize the selection of different lines of the liquid crystal screen and realize the parameter selection. As shown in fig. 4, the direction keys are designed by a common bus method, i.e. one end of a certain contact of 4 direction film keys is directly communicated by a bus; and a plurality of independent signal wires are respectively led out from the other end of the film key. Its advantage is that each key directly controls a special function, in which case the resulting signal does not require increased decoding in the post-circuit, simplifying the design of the driver circuit. For a direction keyboard area with only 4 keys, the design complexity can be reduced, and the design reliability can be enhanced.

The numeric keypad area 103 sets 17 keys including: 10 number keys 0-9, 1 decimal point, 1 e index, 1 cancel key, 1 enter key, 1 backspace key and 2 page turning keys. The system is used for completing the input of numbers and supporting decimal and scientific counting methods, and realizes the cancellation of single step parameters or the backspace deletion of parameter values under the condition of wrong input, and the enter key completes the setting confirmation operation under the condition of no mistake setting. Considering that the liquid crystal display screen only supports 4 lines of Chinese character display, in order to realize the selection and the setting of multiple parameters at lower cost, the page turning function of the liquid crystal display screen is designed and completed by 2 page turning keys. The design of the digital function key is a characteristic that the doping number in the process parameters is large and is generally expressed by a scientific counting method. The process simulation operation can be completed with the minimum key. The key is realized by adopting an X-Y matrix arrangement method, wherein a matrix is formed by rows and columns, and one end of each switch is led out by a common line in the same row direction (namely the X direction) no matter how many switches are arranged; similarly, in the same column direction (i.e., Y direction), regardless of the number of switches, the other terminals of the switches are connected by a common line and led out, so that the matrix arrangement can constitute an X-Y combination of any one switch. This approach has the advantage of enabling more keys to be implemented with a limited interface, but requires decoding settings in subsequent circuitry. The external interface of the number keyboard area 103 related to the embodiment is 9 outgoing lines in total of 3 rows and 6 columns, and the signal outgoing line of the test function selection key area is also connected with the signal input end of the microprocessor by a plurality of 'row' direction and 'column' direction signal lines formed by forming matrix key contacts by 'rows' and 'columns'.

One common bus in the 5 connecting wires of the direction key is grounded, and the other 4 connecting wires are respectively connected with pins 36, 35, 34 and 33 of the microprocessor.

The test interface area 106 is provided with 5 BNC interface receptacles of 51-55 for connecting with a test board card.

The test integrated circuit board of teaching external member comprises 5 independent integrated circuit boards, includes: the test board card for the 5-class devices of the power transistor comprises a diode device test board card, a triode device test board card, a MOSFET device test board card, an LDMOS device test board card and a GaN device test board card and is used for carrying out I-V characteristic test of the devices. The test board card is provided with a BNC interface for connecting with 5 BNC interface sockets arranged in the test interface area 106, each board card comprises more than one device for testing and providing description of related device packaging types, so that a user can conveniently learn and master basic packaging knowledge.

Wherein:

the diode device test board comprises two diode devices of different packaging types, wherein one diode device is a DO-35 type packaged diode device and corresponds to an AnMeson semiconductor 1N3070 diode device, and the other diode device is an SOT-23 type packaged diode device and corresponds to an AnMeson semiconductor BASH19 diode device. The board card is provided with two BNC interfaces for device measurement, and is simultaneously provided with an alternative gating switch to complete the switching of two packaged devices.

The triode device test board card comprises triode devices of three different packaging types, the first type is a TO-92 type packaging triode device and corresponds TO an AnMeson semiconductor 2N4401 NPN triode device, the second type is a TO-204AA type packaging triode device and corresponds TO an AnMeson semiconductor 2N3055 NPN triode device, and the third type is an SOT-23 type packaging device and corresponds TO an AnMeson semiconductor NSVT1418L PNP triode device. The board card is provided with three BNC interfaces for device measurement, and is provided with a three-to-one gating switch to complete the switching of three packaged devices.

The MOSFET device test board comprises two MOSFET devices of different packaging types, wherein one is a PQFN8 type packaging device corresponding to an AnMeson semiconductor FDWS 9520L-F085P channel power MOSFET, and the other is a WLCSP10 type packaging device corresponding to an AnMeson semiconductor EFC2K102NUZN channel power MOSFET. The board card is provided with two BNC interfaces for device measurement, and is simultaneously provided with an alternative gating switch to complete the switching of two packaged devices.

The LDMOS device test board card comprises two LDMOS devices of different packaging types, one is a PowerSO-10RF type packaging device corresponding to an Italian semiconductor PD54003-EN channel power transistor, and the other is a PowerFLAT type packaging device corresponding to an AnMeson semiconductor PD84008L-E N channel power transistor. The board card is provided with two BNC interfaces for device measurement, and is simultaneously provided with an alternative gating switch to complete the switching of two packaged devices.

The GaN device test board comprises a GaN power transistor of a packaging type, a PG-DSO-20-85 packaging type and a BNC interface for device measurement, and corresponds to an IGO60R070D1GaN power transistor of the English flying company.

The above-mentioned embodiment can provide the interactive interface simulating the operation of the real semiconductor process equipment for the student in a mode of combining the keys and the liquid crystal display screen. The operation is simple and visual; students can understand and master the basic principle and key technology of the semiconductor process through the simulation operation of process equipment which is more popular and easy to understand.

Claims

1. The utility model provides a microelectronics technology teaching external member, includes microelectronics technology experiment control box, is provided with control circuit board in the control box, the last setting of control circuit board contains microprocessor's technology experiment control circuit, openly is provided with liquid crystal display and the control keyboard of being connected with control circuit at the control box, a serial communication port, openly still be provided with the test interface socket of being connected with control circuit at the control box, the test interface socket has a plurality ofly, and a plurality of test interface sockets are connected with diode device test integrated circuit board, triode device test integrated circuit board, MOSFET device test integrated circuit board, LDMOS device test integrated circuit board and GaN device test integrated circuit board respectively through the interface cable, control keyboard is divided into a plurality of key regions, select key region including direction key region, digital key region and test function, wherein: the signal extraction of the keys in the direction key area is connected with the signal input end of the microprocessor in a single key signal extraction mode; the signal lead-out of the number keyboard area and the test function selection key area is connected with the signal input end of the microprocessor through a plurality of signal lines in the row direction and the column direction formed by the key contacts of the matrix formed by the rows and the columns.

2. The microelectronics process teaching kit of claim 1 wherein: the diode device test board is provided with two diode devices of different packaging types, namely a DO-35 type packaged diode device and an SOT-23 type packaged diode device, and the board is provided with an alternative gating switch to complete switching of the devices.

3. The microelectronics process teaching kit of claim 1 wherein: the triode device test board is provided with three triode devices of different packaging types, namely a TO-92 type packaging triode device, a TO-204AA type packaging triode device and an SOT-23 type packaging triode device, and a three-TO-one gating switch is arranged on the board TO complete switching of the devices.

4. The microelectronics process teaching kit of claim 1 wherein: the MOSFET device test board card is provided with two MOSFET devices of different packaging types, namely a PQFN8 type packaging device and a WLCSP10 type packaging device, and the board card is provided with an alternative gating switch to complete the switching of the devices.

5. The microelectronics process teaching kit of claim 1 wherein: the LDMOS device test board card is provided with two LDMOS devices of different packaging types, namely a PowerSO-10RF type packaging device and a PowerFLAT type packaging device, and the board card is provided with an alternative gating switch to complete switching of the devices.

6. The microelectronics process teaching kit of claim 1 wherein: the GaN device test board card is provided with a device with a packaging type of PG-DSO-20-85.