CN209836363U - Thermal field structure of single crystal furnace and single crystal furnace - Google Patents
Thermal field structure of single crystal furnace and single crystal furnace Download PDFInfo
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- CN209836363U CN209836363U CN201822230078.9U CN201822230078U CN209836363U CN 209836363 U CN209836363 U CN 209836363U CN 201822230078 U CN201822230078 U CN 201822230078U CN 209836363 U CN209836363 U CN 209836363U
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- 239000013078 crystal Substances 0.000 title claims abstract description 50
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 210
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 192
- 239000010439 graphite Substances 0.000 claims abstract description 192
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims abstract description 140
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims abstract description 140
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 230000001681 protective effect Effects 0.000 claims abstract description 21
- 238000000576 coating method Methods 0.000 claims description 84
- 239000011248 coating agent Substances 0.000 claims description 83
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 48
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 46
- 229910021389 graphene Inorganic materials 0.000 claims description 5
- 230000002829 reductive effect Effects 0.000 abstract description 31
- 230000002035 prolonged effect Effects 0.000 abstract description 13
- 238000005260 corrosion Methods 0.000 abstract description 9
- 230000007797 corrosion Effects 0.000 abstract description 9
- 239000002131 composite material Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 4
- 230000036961 partial effect Effects 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 description 14
- 238000009825 accumulation Methods 0.000 description 13
- 239000010410 layer Substances 0.000 description 13
- 239000011247 coating layer Substances 0.000 description 9
- 239000007770 graphite material Substances 0.000 description 8
- 238000005299 abrasion Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 230000003628 erosive effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- -1 graphite alkene Chemical class 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model discloses a thermal field structure and single crystal growing furnace of single crystal growing furnace, wherein, the thermal field structure of single crystal growing furnace includes: a graphite basin; the carbon-carbon crucible is arranged on the graphite bearing disc; a protective member disposed on a bottom surface and/or a portion of a side surface of the carbon-carbon crucible and adapted to prevent the carbon-carbon crucible from being attacked by SiOx. Therefore, the protection component 300 is arranged on the bottom surface and/or partial side surface of the carbon-carbon crucible 200, so that the bottom surface of the carbon-carbon crucible 200 can be protected, the corrosion damage of SiOx to the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 is reduced, the service life of the carbon-carbon crucible is prolonged, the replacement frequency is reduced, the effect of filling the gap between the graphite bearing disc 100 and the carbon-carbon crucible 200 can be achieved, and the graphite bearing disc 100 is protected.
Description
Technical Field
The utility model belongs to the monocrystalline silicon field particularly, the utility model belongs to the thermal field structure and the single crystal growing furnace of single crystal growing furnace.
Background
With the use of two or more charging of the crystal growth furnace, the growth time of the single furnace is prolonged, the graphite material reacts with the gasified Si for a long time, one part generates SiOx, the other part forms SiC, but most of the gasified Si is discharged along with a vacuum system to form SiOx part, SiOx + C → SiO + CO2, and the SiOx can erode graphite parts. In addition, another part of the formed SiC will be deposited, which causes abnormal deposition surface of graphite material, and the close combination of normal parts is affected due to the different thermal expansion coefficients of graphite and SiC. Along with the change of the affected gap is increased, the parts can not be assembled, and the peripheral matched components are further affected.
SUMMERY OF THE UTILITY MODEL
The present invention aims at solving at least one of the technical problems in the related art to a certain extent. Therefore, an object of the present invention is to provide a method for effectively reducing SiO on the carbon-carbon cruciblexA thermal field structure of an eroded single crystal furnace and a single crystal furnace.
According to an aspect of the utility model, the utility model provides a thermal field structure of single crystal growing furnace, according to the utility model discloses an embodiment, include:
a graphite basin;
the carbon-carbon crucible is arranged on the graphite bearing disc;
a protective member disposed on a bottom surface and/or a portion of a side surface of the carbon-carbon crucible and adapted to prevent the carbon-carbon crucible from being attacked by SiOx.
Therefore, the bottom surface and/or one side surface of the carbon-carbon crucible 200 is/are provided with the protective component 300, so that the bottom surface of the carbon-carbon crucible 200 can be protected, the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 is prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible is prolonged, and the replacement frequency is reduced. Meanwhile, the protective component 300 is arranged on the bottom surface and/or part of the side surface of the carbon-carbon crucible 200, so that the effect of filling the gap between the graphite tray 100 and the carbon-carbon crucible 200 can be achieved, and the graphite tray 100 is further protected.
In addition, the thermal field structure of the single crystal furnace according to the above embodiments of the present invention may also have the following additional technical features:
in the present invention, the protection member includes: at least one of a graphite tray step, graphite paper and a coating.
The utility model discloses in, graphite holds the setting of dish step and is in on the graphite holds the dish, and upwards extend the parcel the bottom of carbon-carbon crucible.
In the present invention, the outer surface of the step of the graphite tray is formed as an inclined surface.
In the utility model, the height of the graphite step is 1-20mm, and the width is 1-10mm
The utility model discloses in, graphite paper covers carbon crucible's basal surface just extends to carbon crucible's side, graphite paper's outer edge distance carbon crucible's basal surface 100 ~ 400 mm.
In the utility model, the thickness of the graphite paper is 0.1mm-10 mm.
In the utility model, the gray level of the graphite paper is 1-100 ppm.
In the present invention, the coating layer is formed on the bottom surface of the carbon-carbon crucible and extends to the side surface of the carbon-carbon crucible, and the outer edge distance of the coating layer is 1 to 30mm from the bottom surface of the carbon-carbon crucible.
In the utility model, the coating comprises two layers, wherein, the first layer of the coating is formed on the bottom surface of the carbon-carbon crucible and extends to the side surface of the carbon-carbon crucible, and the outer edge of the first layer of the coating is 1-30mm away from the bottom surface of the carbon-carbon crucible; the second layer of the coating is formed on the upper surface of the graphite bearing disc and extends to the side face of the graphite bearing disc, and the outer edge of the second layer of the coating is 1-10mm away from the upper surface of the graphite bearing disc.
In the present invention, the thickness of the coating layer is 1 to 200 um.
In the present invention, the coating is a silicon carbide coating or a graphene coating.
In the present invention, the protection member includes: the graphite paper and the coating, the graphite paper sets up on the surface of coating.
In the present invention, the protection member includes: the graphite basin comprises the graphite basin steps and the coating, wherein the graphite basin steps are wrapped on the outer surface of the coating.
In the present invention, the protection member includes: the graphite tray comprises graphite tray steps and graphite paper, wherein the graphite tray steps are wrapped on the outer surface of the graphite paper.
In the present invention, the protection member includes: the graphite tray comprises graphite tray steps, graphite paper and a coating, wherein the graphite paper is arranged on the outer surface of the coating, and the graphite tray steps are wrapped on the outer surface of the graphite paper.
According to another aspect of the present invention, the present invention further provides a single crystal furnace, according to an embodiment of the present invention, the single crystal furnace has the thermal field structure of the single crystal furnace as described in the previous embodiment.
Drawings
Fig. 1 is a schematic structural view of a thermal field structure of a single crystal furnace according to an embodiment of the present invention.
FIG. 2 is a schematic structural view of a thermal field structure of a single crystal furnace according to another embodiment of the present invention.
Fig. 3 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 4 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 5 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 6 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 7 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 8 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 9 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Fig. 10 is a schematic structural view of a thermal field structure of a single crystal furnace according to still another embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
According to an aspect of the present invention, the present invention provides a thermal field structure of a single crystal furnace, as shown in fig. 1, according to an embodiment of the present invention, include: a graphite basin 100; the carbon-carbon crucible 200, the carbon-carbon crucible 200 is arranged on the graphite basin 100; a protective member 300, the protective member 300 being disposed on the bottom surface and/or a portion of the side surface of the carbon-carbon crucible 200 and adapted to protect the carbon-carbon crucible 200 from SiOxAnd (6) corroding.
Therefore, the bottom surface and/or partial side surfaces of the carbon-carbon crucible 200 are/is provided with the protective component 300, so that the bottom surface of the carbon-carbon crucible 200 can be protected, the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 is prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible is prolonged, and the replacement frequency is reduced. Meanwhile, the protective component 300 is arranged on the bottom surface and/or part of the side surface of the carbon-carbon crucible 200, so that the effect of filling the gap between the graphite tray 100 and the carbon-carbon crucible 200 can be achieved, and the graphite tray 100 is further protected.
According to a specific embodiment of the present invention, the protection member 300 may include: at least one of graphite basin step 310, graphite paper 320, and coating 330.
According to an embodiment of the present invention, as shown in fig. 2, the protective member 300 may be a graphite basin step 310. Specifically, the graphite tray step 310 is disposed on the graphite tray 100 and extends upward to wrap the bottom end of the carbon-carbon crucible 200. Therefore, the graphite tray step 310 can effectively protect the bottom end of the carbon-carbon crucible 200, and simultaneously seal the gap between the graphite tray 100 and the carbon-carbon crucible 200, thereby effectively achieving the purpose of reducing or avoiding the carbon-carbon crucible 20 from being damaged by the erosion of SiOx. Meanwhile, the gaps are sealed, and SiC generated by corrosion of SiOx on the carbon-carbon crucible 200 is prevented from being accumulated in the gaps to influence the tight combination of normal parts.
According to an embodiment of the present invention, as shown in fig. 2, the outer surface of the graphite basin step 310 is formed as a downward and outward slope 311. Downward and outward are understood herein to be relative to the center of the interior of the carbon-carbon crucible. This makes it possible to reduce the deposition of SiC, and particularly to prevent the deposition of SiC on the inner layer of the graphite susceptor, by forming the inclined surface 311. And further, the graphite bearing disc and other parts in the thermal field structure are effectively protected, and abrasion among parts caused by SiC blockage is avoided.
According to an embodiment of the present invention, the slope of the inclined surface 311 formed on the step 310 of the graphite tray may be 30 to 60 degrees, preferably 45 degrees. Usually the diameter of the graphite basin and the diameter of the carbon crucible are fixed. Therefore, if the gradient of the step 310 of the graphite tray is too small, the height of the graphite tray is too low, and the height of the side wall of the carbon-carbon crucible is too low, so that the bottom end of the carbon-carbon crucible 200 cannot be protected and the SiC accumulation cannot be reduced. However, if the gradient of the graphite tray step 310 is too large, the thickness of the graphite tray step 310 becomes thin, and the adhesion force to the carbon-carbon crucible is reduced, thereby easily collapsing.
According to the embodiment of the present invention, the height of the graphite stepped step 310 may be 1-20mm, and the width may be 1-10 mm. The slope of the inclined surface 311 formed on the graphite basin step 310 may be in the range of 30-60 degrees, preferably 45 degrees. The graphite stepped step 310 with the size can better protect the bottom end of the carbon-carbon crucible 200, reduce SiC accumulation, and simultaneously seal the gap between the graphite basin 100 and the carbon-carbon crucible 200, thereby reducing or avoiding the carbon-carbon crucible 20 from being damaged by SiOx.
According to an embodiment of the present invention, as shown in fig. 3, the protective member 300 may be graphite paper 320. Specifically, the graphite paper 320 covers the bottom surface of the carbon-carbon crucible 200 and extends to the side surface of the carbon-carbon crucible 200.
Therefore, the carbon-carbon crucible 200 is protected by the graphite paper 320, so that the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 can be effectively prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible can be prolonged by one time, and the replacement frequency can be effectively reduced. And the graphite paper 320 can also effectively obstruct the gas flow direction in the carbon-carbon crucible 200, reduce the possibility of SiC deposition, and further can simultaneously prolong the service lives of the graphite tray 100 and the carbon-carbon crucible 200, and particularly can prolong the service life by one time. In addition, because the carbon-carbon crucible and the graphite bearing disc can generate a micro gap, in the production process, SiOx can enter the micro gap to flow and react with the graphite material to generate SiC, so that the graphite material is corroded, the assembly of the carbon-carbon crucible and the graphite material is influenced, and if the gap between the carbon-carbon crucible and the graphite material is too large, the service life can be directly shortened, or the carbon-carbon crucible and the graphite material need to be directly replaced. The graphite paper is used as an intermediate medium, and the soft characteristic of the graphite paper 320 is utilized to fill the gap between the graphite bearing disc 100 and the carbon crucible 200, so that the carbon crucible and the graphite bearing disc can be tightly combined, and the defect of material combination processing precision is reduced.
According to the embodiment of the present invention, the outer edge of the graphite paper 320 is 400mm away from the bottom surface of the carbon crucible 200. In particular 50mm, 150mm, 250mm, 260mm, 270mm, 280mm, 310mm, 320mm, 330mm, 340mm, 350mm, 360mm, 370mm, 380mm, 390 mm. Preferably, the outer edge of the graphite paper 320 is spaced 200mm or 300mm from the bottom surface of the carbon-carbon crucible 200. Thereby not influencing the thermal field in the carbon-carbon crucible 200 while effectively protecting the carbon-carbon crucible 200.
According to an embodiment of the present invention, the outer edge of the graphite paper 320 is the outermost edge of the graphite paper 320 relative to the center. As used herein, "outer edge" refers to the outermost edge of a component relative to the center.
According to a specific embodiment of the present invention, the thickness of the graphite paper is 0.1mm-10 mm. The inventors found that if the graphite paper is too thick, the graphite paper 320 is not firmly bonded to the carbon-carbon crucible 200, and a slip phenomenon occurs, whereas if the graphite paper is too thin, the protective effect is poor, and if the graphite paper is too thin, the graphite paper is easily volatilized and embrittled, and the protective effect is hardly achieved.
According to a specific embodiment of the present invention, the graphite paper preferably has a thickness of 0.4mm to 0.5 mm. Therefore, the graphite paper with the thickness can be firmly combined with the carbon-carbon crucible 200, volatilization and embrittlement are avoided, the direction of airflow in the carbon-carbon crucible 200 can be effectively blocked, the possibility of SiC deposition is reduced, the carbon-carbon crucible 200 is protected for a long time, and the service life of the carbon-carbon crucible 200 is effectively prolonged.
According to a specific embodiment of the present invention, the gray level of the graphite paper is 1-100 ppm. Preferably, the graphite paper has a grey scale of 1-30ppm, 30-50ppm, 50-100ppm, in particular 10ppm, 20ppm, 40ppm, 60ppm, 70ppm, 80ppm, 90 ppm.
According to an embodiment of the present invention, as shown in fig. 4, the protective member 300 may be a coating 330. Specifically, the coating 330 is formed on the bottom surface of the carbon-carbon crucible 200 and extends to the side of the carbon-carbon crucible 200.
Therefore, the carbon-carbon crucible 200 is protected by the coating 330, so that the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 can be effectively prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible can be prolonged by one time, and the replacement frequency can be effectively reduced. In addition, the coating 330 is added to protect the carbon-carbon crucible 200, so that SiC generated by corrosion of the carbon-carbon crucible 200 is reduced, disordered accumulation of SiC at the bottom of the graphite basin 100 is further reduced, and influence on other parts is avoided. More importantly, the inventor finds that the dense coating 330 is coated on the bottom and the side of the carbon-carbon crucible, so that rough holes on the surface of the carbon-carbon crucible can be filled, gaps between the carbon-carbon crucible and the graphite bearing disc can be reduced, and the erosion of SiOx to the carbon-carbon crucible in production can be reduced.
According to the embodiment of the present invention, the outer edge of the coating is 1-30mm from the bottom surface of the carbon crucible, for example, 5mm, 10mm, 15mm, 20mm, 25mm, 30 mm. Thereby not influencing the thermal field in the carbon-carbon crucible 200 while effectively protecting the carbon-carbon crucible 200. The inventor finds that if the area of the coating 330 wrapping the bottom end of the carbon-carbon crucible 200 is too large, unnecessary material waste is caused, and the thermal field in the crucible is easily influenced; however, if the area of the coating is too small, the coating cannot be prevented from being damaged by the SiOx. .
According to an embodiment of the present invention, the outer edge of the coating is preferably 10-20mm from the bottom surface of the carbon crucible, for example 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19 mm. Therefore, the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 can be effectively prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible is prolonged, and the replacement frequency is reduced. In addition, SiC generated by corrosion of the carbon-carbon crucible 200 can be effectively reduced, so that disordered accumulation of SiC at the bottom of the graphite basin 100 is reduced, and influence on other parts is avoided.
According to an embodiment of the present invention, as shown in fig. 5, the coating 330 may include two layers, wherein a first layer coating 331 is formed on the bottom surface of the carbon-carbon crucible 200 and extends to the side of the carbon-carbon crucible 200, and the outer edge of the coating is 1-30mm from the bottom surface of the carbon-carbon crucible; the second coating 332 is formed on the upper surface of the graphite tray 100 and extends to the side surface of the graphite tray 100, and the outer edge of the coating is 1-10mm away from the upper surface of the graphite tray. Therefore, the carbon-carbon crucible 200 and the graphite tray 100 are protected by the coatings respectively, so that the erosion damage of SiOx can be effectively avoided, and the service lives of the carbon-carbon crucible 200 and the graphite tray 100 are effectively prolonged. Meanwhile, the corrosion of SiOx is avoided, SiC is also avoided, the accumulation of SiC to the inner layer of the graphite bearing disc is reduced, the graphite bearing disc and other parts in the thermal field structure are effectively protected, and the abrasion between parts caused by SiC blockage is avoided.
According to a specific embodiment of the present invention, the thickness of the coating is 1-200 um. For example, it can be 20um, 40um, 60um, 80um, 100um, 120um, 140um, 160um, 180um, 200 um. If the thickness of the coating is too high, the cost is too high, if it is too thin, the coating is easily broken, and if it is too thin, the coating is easily uneven. The carbon-carbon crucible 200 and the graphite boat 100 are used in a high-temperature environment. Therefore, a coating with a thickness of 1-200um is formed on the surface of the carbon crucible 200 and the graphite tray 100, so that the purpose of protecting the carbon crucible 200 and the graphite tray 100 from being corroded by SiOx can be effectively achieved, and the service lives of the carbon crucible 200 and the graphite tray 100 are further effectively prolonged.
According to a specific embodiment of the present invention, the thickness of the coating is preferably 80um, for example, may be 20um, 30um, 40um, 50um, 60um, 70um, 80 um. The cost can thus be reduced as far as possible while ensuring effective protection against the attack of SiOx. In addition, the coating layer is too thin, and is prone to uneven thickness, and too thin is prone to cracking.
According to the utility model discloses a specific embodiment, above-mentioned coating can be for carborundum coating or graphite alkene coating. The silicon carbide coating or the graphene coating can be prepared by the existing preparation method.
From this, adopt carborundum coating or graphite alkene coating to protect carbon-carbon crucible 200, can further effectively avoid exposing on carbon-carbon crucible 200 and receive SiOx's erosion damage outside the carbon-carbon composite, prolong carbon-carbon crucible's life, reduce the change number of times. In addition, the carbon-carbon crucible 200 is protected by the silicon carbide coating or the graphene coating, so that SiC generated by corrosion of the carbon-carbon crucible 200 can be further reduced, disordered accumulation of SiC at the bottom of the graphite tray 100 is further reduced, and influence on other parts is avoided. More importantly, the inventor finds that a compact silicon carbide coating or a graphene coating is coated on the bottom and the side of the carbon-carbon crucible, so that rough holes on the surface of the carbon-carbon crucible can be filled more effectively, gaps between the carbon-carbon crucible and a graphite bearing disc can be reduced, and the erosion of SiOx to the carbon-carbon crucible in production can be reduced.
According to an embodiment of the present invention, as shown in fig. 6, the protection member 300 includes: graphite paper 320 and coating 330, graphite paper 320 is disposed on the outer surface of coating 330.
According to the embodiment of the present invention, the performance parameters of the graphite paper 320 and the coating 330 are the same as those described in the previous embodiment, and are not described herein again.
According to an embodiment of the present invention, as shown in fig. 7, the protection part 300 includes: graphite basin step 310 and coating 330, graphite basin step 310 wraps up on the surface of coating 330. If the height of the graphite tray step 310 is higher than the outer edge of the coating 330, the excess portion is attached to the side of the carbon-carbon crucible 200.
According to a specific example of the present invention, when the protection part 300 includes both the graphite boat step 310 and the coating layer 330, the protection of the carbon-carbon crucible 200 and the graphite boat 100 can be significantly improved. Firstly, the coating 330 is formed on the bottom surface and the side surface of the bottom end of the carbon-carbon crucible 200, so that the graphite material and the carbon-carbon material can be prevented from being corroded by SiOx to generate SiC on the exposed surfaces of the graphite bearing disc 100 and the carbon-carbon crucible 200 in production, the disordered accumulation of the generated SiC on the bottom of the graphite bearing disc 100 is reduced, and the influence on other parts is avoided. And further, the graphite bearing plate step 310 is added, so that the accumulation of SiC can be reduced, and particularly, the accumulation of SiC to the inner layer of the graphite bearing plate is avoided. And further, the graphite bearing disc and other parts in the thermal field structure are effectively protected, and abrasion among parts caused by SiC blockage is avoided.
According to the embodiment of the present invention, when the protection part 300 includes both the graphite tray step 310 and the coating layer 330, the coating layer 330 may include two layers, wherein the first silicon carbide coating layer 331 is formed on the bottom surface of the carbon-carbon crucible 200 and extends to the side of the carbon-carbon crucible 200, and the outer edge of the first silicon carbide coating layer is 1-30mm from the bottom surface of the carbon-carbon crucible; the second silicon carbide coating 332 is formed on the upper surface of the graphite basin 100 and extends to the side surface of the graphite basin 100, and the outer edge of the second silicon carbide coating is 1-10mm away from the upper surface of the graphite basin. The graphite basin step 310 is also wrapped on the outer surface of the coating 330, and if the height of the graphite basin step 310 is higher than the outer edge of the first silicon carbide coating 331, the excess part is attached to the side surface of the carbon-carbon crucible 200.
Therefore, the carbon-carbon crucible 200 and the graphite tray 100 are protected by respectively adopting the silicon carbide coating, and when the graphite tray steps 310 are added, the corrosion damage of SiOx can be effectively avoided, and the service lives of the carbon-carbon crucible 200 and the graphite tray 100 are effectively prolonged. Meanwhile, the corrosion of SiOx is avoided, SiC is also avoided, the accumulation of SiC to the inner layer of the graphite bearing disc is reduced, the graphite bearing disc and other parts in the thermal field structure are effectively protected, and the abrasion between parts caused by SiC blockage is avoided.
According to the embodiment of the present invention, when the protection member 300 includes the graphite tray step 310 and the coating 330, the performance parameters of the two are the same as those described in the previous embodiment, and are not described herein again. In addition, when the protective member 300 includes both the graphite tray step 310 and the coating 330, the total thickness of the two is not too thick, otherwise, the heat conduction phenomenon is likely to occur, which affects the lifespan of the graphite tray.
According to an embodiment of the present invention, as shown in fig. 8, the protection member 300 includes: graphite basin step 310 and graphite paper 320, graphite basin step 310 wraps up on the surface of graphite paper 320. If the height of the graphite tray step 310 is higher than the outer edge of the graphite paper 320, the excess part is attached to the side surface of the carbon-carbon crucible 200.
According to a specific example of the present invention, when the protection part 300 includes both the graphite tray step 310 and the graphite paper 320, the protection of the carbon-carbon crucible 200 and the graphite tray 100 can be significantly improved. Firstly, the graphite paper 320 is formed on the bottom surface and the side surface of the bottom end of the carbon-carbon crucible 200, so that the carbon-carbon composite material exposed outside the carbon-carbon crucible 200 can be effectively prevented from being corroded and damaged by SiOx, the service life of the carbon-carbon crucible is prolonged, and the replacement frequency is reduced. Meanwhile, the gas flow direction in the carbon-carbon crucible 200 can be effectively blocked, the possibility of SiC deposition is reduced, and the service lives of the graphite tray 100 and the carbon-carbon crucible 200 can be prolonged. In addition, since the graphite paper 320 has soft compactness and is filled in the gap between the graphite bearing disc 100 and the carbon crucible 200, the carbon crucible and the graphite bearing disc can be tightly combined, and the defect of material combination processing precision is reduced. And further, the graphite bearing plate step 310 is added, so that the accumulation of SiC can be reduced, and particularly, the accumulation of SiC to the inner layer of the graphite bearing plate is avoided. And further, the graphite bearing disc and other parts in the thermal field structure are effectively protected, and abrasion among parts caused by SiC blockage is avoided.
According to the embodiment of the present invention, when the protection member 300 includes the graphite tray step 310 and the graphite paper 320, the performance parameters of the two are the same as those described in the previous embodiment, and are not described herein again.
According to an embodiment of the present invention, as shown in fig. 9 to 10, the protection member 300 includes: graphite basin step 310, graphite paper 320 and coating 330, graphite paper 320 sets up on the surface of coating 330, and graphite basin step 310 wraps up on the surface of graphite paper 320.
According to the embodiment of the present invention, when the protection component 300 includes the graphite tray step 310, the graphite paper 320 and the coating 330, the performance parameters of the three are the same as those described in the previous embodiment, and are not described herein again.
According to another aspect of the present invention, the present invention further provides a single crystal furnace, according to an embodiment of the present invention, the single crystal furnace has the thermal field structure of the single crystal furnace of the previous embodiment.
Since the protective member 300 can effectively protect the graphite boat 100 and the carbon-carbon crucible 200 from SiOxThe erosion effect can further effectively prolong the service life of the graphite basin 100 and the carbon-carbon crucible 200, reduce the replacement times and reduce the cost. While reducing SiOxAnd when the corrosion is carried out, the generation of SiC is reduced, so that the abrasion among the graphite bearing disc 100, the carbon-carbon crucible 200 and other parts caused by the accumulation of a large amount of SiC at the thermal field structure is avoided, and the stability of the thermal field structure can be effectively improved. Therefore, the thermal field structure obviously can obviously improve the performance of the single crystal furnace and reduce the cost.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (17)
1. A thermal field structure of a single crystal furnace is characterized by comprising:
a graphite basin;
the carbon-carbon crucible is arranged on the graphite bearing disc;
a protective member disposed on a bottom surface and/or a portion of a side surface of the carbon-carbon crucible and adapted to prevent the carbon-carbon crucible from being attacked by SiOx.
2. The thermal field structure of the single crystal furnace of claim 1, wherein the protective member comprises: at least one of a graphite tray step, graphite paper and a coating.
3. The thermal field structure of the single crystal furnace of claim 2, wherein the graphite tray step is arranged on the graphite tray and extends upwards to wrap the bottom end of the carbon-carbon crucible.
4. The thermal field structure of the single crystal furnace of claim 3, wherein the outer surface of the step of the graphite susceptor is formed as a downward and outward slope.
5. The thermal field structure of the single crystal furnace of claim 4, wherein the height of the graphite basin step is 1-20mm, and the width of the graphite basin step is 1-10 mm.
6. The thermal field structure of the single crystal furnace of claim 2, wherein the graphite paper covers the bottom surface of the carbon-carbon crucible and extends to the side surface of the carbon-carbon crucible, and the outer edge of the graphite paper is 100-400mm away from the bottom surface of the carbon-carbon crucible.
7. The thermal field structure of the single crystal furnace of claim 6, wherein the graphite paper has a thickness of 0.1mm to 10 mm.
8. The thermal field structure of the single crystal furnace of claim 7, wherein the graphite paper has a gray scale of 1-100 ppm.
9. The thermal field structure of the single crystal furnace according to claim 2, wherein the coating is formed on the bottom surface of the carbon-carbon crucible and extends to the side surface of the carbon-carbon crucible, and the outer edge of the coating is 1-30mm from the bottom surface of the carbon-carbon crucible.
10. The thermal field structure of the single crystal furnace of claim 9, wherein the coating comprises two layers, wherein a first layer of the coating is formed on the bottom surface of the carbon-carbon crucible and extends to the side surface of the carbon-carbon crucible, and the outer edge of the first layer of the coating is 1-30mm away from the bottom surface of the carbon-carbon crucible; the second layer of the coating is formed on the upper surface of the graphite bearing disc and extends to the side face of the graphite bearing disc, and the outer edge of the second layer of the coating is 1-10mm away from the upper surface of the graphite bearing disc.
11. The thermal field structure of the single crystal furnace of claim 9 or 10, wherein the coating has a thickness of 1-200 um.
12. The thermal field structure of the single crystal furnace of claim 11, wherein the coating is a silicon carbide coating or a graphene coating.
13. The thermal field structure of the single crystal furnace of claim 2, wherein the protective member comprises: the graphite paper and the coating, the graphite paper is disposed on the outer surface of the coating.
14. The thermal field structure of the single crystal furnace of claim 2, wherein the protective member comprises: the graphite basin comprises the graphite basin steps and the coating, wherein the graphite basin steps are wrapped on the outer surface of the coating.
15. The thermal field structure of the single crystal furnace of claim 2, wherein the protective member comprises: the graphite tray comprises graphite tray steps and graphite paper, wherein the graphite tray steps are wrapped on the outer surface of the graphite paper.
16. The thermal field structure of the single crystal furnace of claim 2, wherein the protective member comprises: the graphite tray comprises graphite tray steps, graphite paper and a coating, wherein the graphite paper is arranged on the outer surface of the coating, and the graphite tray steps are wrapped on the outer surface of the graphite paper.
17. A single crystal growing furnace characterized in that it has a thermal field structure of the single crystal growing furnace according to any one of claims 1 to 16.
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