CN209812320U - Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending - Google Patents

Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending Download PDF

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Publication number
CN209812320U
CN209812320U CN201920278145.6U CN201920278145U CN209812320U CN 209812320 U CN209812320 U CN 209812320U CN 201920278145 U CN201920278145 U CN 201920278145U CN 209812320 U CN209812320 U CN 209812320U
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vacuum
revolute pair
rigid
rigid vacuum
layer
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CN201920278145.6U
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宋志尚
程珂
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Wuxi Speed Semiconductor Technology Co Ltd
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Wuxi Speed Semiconductor Technology Co Ltd
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Abstract

The utility model discloses a vacuum revolute pair and rigid vacuum transmission pipeline that can flexibly extend belongs to the mechanical equipment field of making. The rotary motion of the vacuum revolute pair is adopted to replace the bending motion of the flexible vacuum tube, and the multi-section rigid vacuum tube is used for assisting in stretching the vacuum pipeline, moving along with the sucker and simultaneously transferring vacuum. The interference to the motion precision of the platform is small, and the service life is longer than that of a flexible vacuum tube; the rigid vacuum tube cannot deform due to negative pressure in the rigid vacuum tube in the process of transferring vacuum, so that the force blocking the motion of the platform due to expansion and contraction of the pipeline is avoided, and the risk of damage and leakage is reduced; the multi-degree-of-freedom movement can be realized by adopting the combination of a multi-stage vacuum revolute pair and a rigid vacuum tube. Furthermore, passive dragging can be realized in application, an additional driving body system is not needed, complex means such as electronic control and the like are not needed, the structure is simple, and the cost is low; the vacuum suction type gripper can also be applied to a gripping arm for gripping substances by utilizing vacuum adsorption in mechanical equipment.

Description

Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending
Technical Field
The utility model relates to a vacuum revolute pair and rigid vacuum transmission pipeline that can flexibly extend belongs to the mechanical equipment field of making.
Background
In Printed Circuit Board (PCB) lithography equipment in the field of integrated circuits, when a PCB is clamped, a vacuum chuck is generally used as a clamp, the vacuum chuck is mounted on a movable worktable, and a pipeline for transferring vacuum needs to move along with the worktable, so that the equipment is required to have scalability; in addition, a vacuum pipeline is also needed for a gripping arm of the mechanical equipment which grips the material by vacuum adsorption.
At present, the scalability of a vacuum pipeline is usually realized in several ways, wherein one of the more commonly adopted ways is to adopt a flexible air pipe made of rubber, plastic and the like to prepare the vacuum pipeline, but in a PCB photoetching device, the flexible air pipe made of rubber, plastic and the like is also repeatedly bent along with the movement of a workbench, so that the flexible air pipe is easy to have the problems of fatigue, damage and the like, and the softer flexible air pipe is adopted and is flattened by the external atmospheric pressure when passing through the internal negative pressure, the deformation can cause the hose to have the tendency of being separated from the original position to generate the traction resistance, and the hose is also easy to be damaged in the production process to cause vacuum leakage; although the harder flexible air pipe does not generate larger deformation when negative pressure is generated in the air pipe, the air pipe can be bent in the movement process due to high hardness, so that the extra resistance on the workbench is larger, and the movement precision of the platform is influenced; in another mode, the vacuum air pipe is fixed on a transmission track chain structure, and in order to avoid resistance interference on a motion platform, a track chain is usually provided with a driving device independently, so that the structure is complex and the cost is high; in another mode, a narrow soft iron sheet is bent into a U shape to fix the air pipe and move along with the platform or the mechanical grabbing arm, but the iron sheet can be bent repeatedly by the method for fixing the flexible air pipe by the soft iron sheet, so that the iron sheet bending not only brings extra resistance to the moving platform, but also brings breaking risk due to repeated bending, and the fracture can cut the air pipe to cause problems of vacuum leakage and the like. In the case of a gripper arm in a mechanical device, the above-mentioned problems also arise due to the reciprocating bending of the gripper arm.
There is thus a need for a vacuum transfer line that has multiple degrees of freedom of motion, is resistant to fatigue from reciprocating motion, and is simple in construction and requires no additional drive.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, the utility model provides a rigid vacuum transfer pipeline of vacuum revolute pair and flexible extension, technical scheme is as follows.
The utility model provides a vacuum revolute pair, which comprises a revolute pair outer layer, a revolute pair inner layer and three air vents; the inner layer and the outer layer of the revolute pair both comprise vacuum pipelines; the inner layer of the revolute pair and the outer layer of the revolute pair can rotate relatively, and vacuum pipelines contained in the inner layer of the revolute pair and the outer layer of the revolute pair are communicated.
In one embodiment, two of the three ventilation holes are located on the inner layer of the revolute pair, and the other ventilation hole is located on the outer layer of the revolute pair.
In one embodiment, a polytetrafluoroethylene lining is arranged between the inner layer of the revolute pair and the outer layer of the revolute pair; the inner layer of the revolute pair and the outer layer of the revolute pair realize relative rotation through a bearing.
In one embodiment, the teflon liner has small holes therein through which grease is applied internally to reduce friction generated when the inner and outer layers of the rotor pair rotate relative to each other.
In one embodiment, the polytetrafluoroethylene lining is filled with a reinforcing agent for improving the mechanical strength of polytetrafluoroethylene, and the reinforcing agent comprises carbon fiber, graphite, polyimide, bronze powder and molybdenum disulfide; the mechanical strength includes heat conductivity, wear resistance, and creep resistance.
In one embodiment, the vacuum revolute pair is cylindrical or rectangular in shape as a whole.
The utility model provides a rigid vacuum transfer pipeline capable of being flexibly stretched, which comprises a rigid vacuum tube and the vacuum revolute pair; the rigid vacuum tubes are connected through a vacuum revolute pair.
In one embodiment, different vents connecting the rigid vacuum tube to the two vacuum revolute pairs enable different directions of vacuum transfer to the flexibly extendable rigid vacuum transfer lines.
In one embodiment, the flexibly extendable rigid vacuum transfer conduit further comprises a connecting side plate disposed on one side of the rigid vacuum tube.
In one embodiment, the ventilation hole of the flexible extensible rigid vacuum transfer pipeline is matched with the joint of the rigid vacuum pipe, and the matching surface is provided with an O-shaped ring and a pressing sheet which are hermetically fixed through screw installation.
In one embodiment, any one of the vacuum revolute pairs of the flexibly extendable rigid vacuum transmission lines is movable on a fixed guide rail.
In one embodiment, the flexibly extendable rigid vacuum delivery line has a rubber or plastic connection at the end opening.
The utility model has the advantages that:
the utility model provides a but vacuum transmission pipeline of rigidity of flexible extension through the rotary motion who adopts the vacuum revolute pair, replaces the bending motion of flexible vacuum tube, and supplementary with multistage rigid vacuum tube realizes the flexible of vacuum pipeline, follows the sucking disc motion, transmits the vacuum simultaneously. Because the revolute pair is a kinematic low pair, the resistance caused by the rotational friction is far lower than the resistance caused by the bending of the flexible hard tube, and the interference on the motion precision of the platform is small. The vacuum revolute pair can rotate repeatedly for many times, and compared with the repeated bending of the flexible vacuum tube, the service life of the vacuum revolute pair can be prolonged; furthermore, the rigid vacuum tube can not deform due to negative pressure in the tube in the vacuum transmission process, and compared with the flexible vacuum tube, the force which hinders the motion of the platform and is caused by expansion and contraction of the tube is avoided. Compared with a flexible hose, the rigid pipeline has longer service life and reduced damage and leakage risks; furthermore, the utility model discloses a combination of multistage vacuum revolute pair and rigidity vacuum tube can realize the multi freedom motion when transmitting the vacuum. Therefore, the stages of the rigid vacuum pipeline can be reasonably selected according to different working conditions, the rotation directions of the stages are arranged, and the requirement of the flexible vacuum pipe on multi-degree-of-freedom random movement is also met; furthermore, the utility model can realize passive dragging, does not need additional driving systems, does not need complex means such as electronic control and the like, can realize following the motion platform, and has lower cost; and can be applied to a grabbing arm for grabbing substances by utilizing vacuum adsorption in mechanical equipment.
Drawings
FIG. 1 is a three-dimensional view of a vacuum revolute pair; wherein (a) is a front view, (b) is a right view, and (c) is a bottom view;
FIG. 2 is a cross-sectional view of a vacuum revolute pair;
FIG. 3 is a perspective view of the inner layer of a vacuum revolute pair;
in the figures 1-3, a vent hole 1, a revolute pair outer layer 2, a revolute pair inner layer 3, a mounting thread 4, a PTFE bush 5, an O-shaped ring 6, a bearing 7, a pressing sheet 8, a conduit joint 9, a small hole 10-1 and a small hole 10-2;
FIG. 4 is a schematic view of a multi-degree of freedom rigid transfer vacuum structure of a flexibly extendable rigid vacuum transfer line;
FIG. 5 is a schematic view of a single degree of freedom rotational transfer vacuum configuration of a flexibly extendable rigid vacuum transfer line;
FIG. 6 is a schematic view of a single degree of freedom linear motion transfer vacuum structure of a flexibly extendable rigid vacuum transfer line;
FIG. 7 is a schematic diagram of a two-dimensional planar three-stage vacuum transfer structure of a flexibly extendable rigid vacuum transfer line;
FIG. 8 is a schematic diagram of a three-dimensional three-stage vacuum delivery structure of a flexibly extendable rigid vacuum delivery conduit;
in fig. 4-8, a rigid vacuum tube 11, a connecting side plate 12, a vacuum revolute pair 13, a fixed support 14, a rubber connecting tube 15 and a guide rail 16.
Detailed description of the preferred embodiments
The following is a detailed description of the present invention.
Example 1
As shown in fig. 1, the present invention is a three-dimensional view of a vacuum revolute pair, wherein (a) is a front view, (b) is a right side view, and (c) is a bottom view;
as can be seen from figure 1, the vacuum revolute pair has an inner-layer structure and an outer-layer structure, namely, the inner layer (3) and the outer layer (2) of the revolute pair are provided with three vent holes (1), one vent hole (1) is in contact sealing with a fixed support (14) when in use, and the other two vent holes (1) are used for being in and out of the air, so that two different vacuum transmission directions can be realized by sealing different vent holes (1). The inner layer (3) of the revolute pair and the outer layer (2) of the revolute pair can rotate relatively, and the rotating contact part inside the inner layer and the outer layer adopts a vacuum sealing technology, so that the rotation can be realized without vacuum leakage.
Fig. 2 is a cross-sectional view of a vacuum revolute pair according to the present invention, and fig. 3 is a perspective view of a revolute pair inner layer 3 of the vacuum revolute pair.
The inner layer (3) of the revolute pair and the outer layer (2) of the revolute pair realize relative rotation through two bearings (7), and small holes (10-2) capable of injecting glue are formed in the matching surfaces of the bearings (7) and the outer layer (2) of the revolute pair, so that the bearings (7) are fixed; an O-shaped ring is arranged in a communicating cavity between the inner layer (3) of the revolute pair and the outer layer (2) of the revolute pair to form a closed space, a Polytetrafluoroethylene (PTFE) bush (5) is used for auxiliary supporting and sealing, and lubricating grease is coated in a small hole (10-1) on the PTFE bush (5) to reduce friction; the three vent holes (1) can be matched with the joints of the rigid vacuum tube (11), the matching surface is provided with an O-shaped ring (6), the joints of the rigid vacuum tube (11) are compressed by a compression sheet (8) and are installed and fixed by screws, so that the vent holes (1) are sealed; a sealing groove is arranged in the joint of the rigid vacuum tube (11) and is provided with an O-shaped ring (6) which plays a role of sealing when being connected with the rigid vacuum tube (11).
It should be noted that, the polytetrafluoroethylene may be filled with a reinforcing agent to improve the mechanical strength of the polytetrafluoroethylene, and the commonly used fillers include carbon fiber, graphite, polyimide, bronze powder, molybdenum disulfide, etc., which can improve the thermal conductivity, wear resistance, creep resistance, etc. of the polytetrafluoroethylene; the O-ring (6) is a rubber seal ring having a circular cross-section, and is generally made of various materials according to fluids, such as Nitrile Butadiene Rubber (NBR), fluoro-rubber (FKM), silicone rubber (VMQ), ethylene propylene rubber (EPDM), Chloroprene Rubber (CR), butyl rubber (BU), Polytetrafluoroethylene (PTFE), and Natural Rubber (NR). The utility model discloses in used the O type circle of multiple size.
As shown in figure 4, the vacuum revolute pair (13) and the rigid vacuum tube (11) are connected to obtain a rigid vacuum transmission pipeline which can be flexibly stretched: the vacuum revolute pairs (13) can be connected with each other by rigid vacuum pipes (11) and can also be connected by rigid vacuum pipes (11) with other shapes, thereby being suitable for the requirements of various transmission paths.
The rigid vacuum tube (11) and the vacuum revolute pair (13) are in standardized fit, can be sequentially and repeatedly connected, realize multiple-degree-of-freedom motion in space, and meet different transmission structure requirements. It is also possible to assist in achieving movement on a given trajectory at a desired location with a guide rail (16), as shown in fig. 6.
In the attached figure 4, 3 vacuum revolute pairs (13) are adopted, and 2 sections of rigid vacuum pipes (11) are connected to obtain a section of rigid vacuum transfer pipeline capable of flexibly extending. The fixed support (14) is used as a starting point, the vacuum revolute pair (13), the rigid vacuum tube (11), the connecting side plate (12) and the vacuum revolute pair (13) are sequentially arranged at the joint of the rigid vacuum tubes (11), and the rubber connecting tube (15) is arranged at the end point, so that the rotary motion in a two-dimensional plane is realized.
The connecting side plate (12) can be arranged on any side of the rigid vacuum tube (11).
In the attached figure 5, 2 vacuum revolute pairs (13) are adopted, and 1 section of rigid vacuum pipe (11) is connected to obtain a section of rigid vacuum transmission pipeline capable of flexibly extending, and the vacuum structure can be transmitted in a single-degree-of-freedom rotation mode.
Fig. 6 shows a structure capable of transmitting vacuum in a linear motion process, and 3 vacuum revolute pairs (13) and 2 sections of rigid vacuum pipes (11) are adopted. The vacuum revolute pair (13) at the tail end is provided with a linear guide rail (16) which plays a role of limiting a movement track and moves in a reciprocating linear manner in a linear two-dimensional plane. The shape of the guide rail (16) can also be adjusted to be arc-shaped or other irregular shapes.
As shown in figure 7, 4 vacuum revolute pairs (13) and 3 sections of rigid vacuum pipes (11) are adopted, and the two-degree-of-freedom and more-degree-of-freedom motion can be realized on a two-dimensional plane under the working condition of narrow lateral space.
In this embodiment, the number and length of the rigid vacuum tubes can be increased, the vacuum revolute pair can be repeatedly used, and by analogy, multi-stage transmission of four stages, five stages and the like can be realized. It is also possible to add additional guides in a similar way to fig. 6, to achieve a movement of the vacuum-transmitting end outlets on a specific trajectory.
As shown in figure 8, the vacuum transmission structure can realize vacuum transmission at any position in a three-dimensional space, and 4 vacuum revolute pairs (13) and 3 sections of rigid vacuum tubes (11) are adopted. In this example, the number and length of the rigid vacuum tubes can be increased, the vacuum revolute pair can be repeatedly used, and by analogy, the multistage transmission of four stages, five stages and the like can be realized. In a similar manner to fig. 6, the addition of the guide rails is also assisted, and the movement of the vacuum-transmitting end outlet on a specific trajectory is realized.
The utility model provides a but vacuum revolute pair and flexible rigid vacuum transmission pipeline that extends still can be used to other sports equipment's vacuum transmission pipeline on, if utilize vacuum chuck to snatch the high-accuracy motion robotic arm etc. of article.
Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims (10)

1. A vacuum revolute pair, characterized in that it comprises: the outer layer of the revolute pair, the inner layer of the revolute pair and three vent holes; the inner layer and the outer layer of the revolute pair both comprise vacuum pipelines; the inner layer of the revolute pair and the outer layer of the revolute pair can rotate relatively, and vacuum pipelines contained in the inner layer of the revolute pair and the outer layer of the revolute pair are communicated.
2. The vacuum revolute pair of claim 1, wherein two of said three ventilation apertures are located on an inner revolute pair layer and the other is located on an outer revolute pair layer.
3. The vacuum revolute pair of claim 2, wherein a polytetrafluoroethylene bushing is arranged between the inner revolute pair layer and the outer revolute pair layer; the inner layer of the revolute pair and the outer layer of the revolute pair realize relative rotation through a bearing.
4. The vacuum revolute pair of claim 3, wherein said polytetrafluoroethylene sleeve has apertures therein.
5. A flexibly extendable rigid vacuum transfer conduit, said flexibly extendable rigid vacuum transfer conduit comprising a rigid vacuum tube and a vacuum revolute pair according to any one of claims 1 to 4; the rigid vacuum tubes are connected through a vacuum revolute pair.
6. A flexibly extendable rigid vacuum transfer line as claimed in claim 5 wherein the different vents of the rigid vacuum line connecting the two vacuum revolute pairs enable different directions of vacuum transfer of the flexibly extendable rigid vacuum transfer line.
7. The flexibly extendable rigid vacuum transfer line of claim 6 further comprising a connecting side plate disposed to one side of said rigid vacuum tube.
8. The flexibly extendable rigid vacuum transfer line of claim 7 wherein said vent hole of said flexibly extendable rigid vacuum transfer line mates with a connector of a rigid vacuum line, said mating surface having an O-ring and a compression tab.
9. The flexibly extendable rigid vacuum transfer line of claim 8 wherein any one of the vacuum revolute pairs of the flexibly extendable rigid vacuum transfer line is movable on a fixed rail.
10. The flexibly extendable rigid vacuum transfer line of claim 9, wherein said flexibly extendable rigid vacuum transfer line has a rubber or plastic connection at its distal opening.
CN201920278145.6U 2019-03-05 2019-03-05 Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending Active CN209812320U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920278145.6U CN209812320U (en) 2019-03-05 2019-03-05 Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920278145.6U CN209812320U (en) 2019-03-05 2019-03-05 Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending

Publications (1)

Publication Number Publication Date
CN209812320U true CN209812320U (en) 2019-12-20

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CN201920278145.6U Active CN209812320U (en) 2019-03-05 2019-03-05 Vacuum revolute pair and rigid vacuum transfer pipeline capable of flexibly extending

Country Status (1)

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