CN209804586U - Scanning electron microscope refrigerating system based on low-temperature solid cooling - Google Patents
Scanning electron microscope refrigerating system based on low-temperature solid cooling Download PDFInfo
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- CN209804586U CN209804586U CN201920719106.5U CN201920719106U CN209804586U CN 209804586 U CN209804586 U CN 209804586U CN 201920719106 U CN201920719106 U CN 201920719106U CN 209804586 U CN209804586 U CN 209804586U
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Abstract
The utility model relates to a scanning electron microscope sample platform cooling technology field provides scanning electron microscope refrigerating system based on low temperature solid cooling, include: the container, the first vacuum cavity and the second vacuum cavity further comprise a sample stage, a low-temperature cold head and a liquid source; the sample stage is arranged above the container, the low-temperature cold head is used for providing cold for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is located inside the first vacuum cavity, and the container and the sample stage are located inside the second vacuum cavity. According to the scanning electron microscope refrigeration system based on low-temperature solid cooling, the temperature of the sample stage is regulated and controlled by the latent heat refrigeration of the low-temperature solid converted from liquid, after the cold energy transmission between the low-temperature cold head and the container is cut off, the system is in a zero-vibration state, the sample stage can be maintained at a set temperature for a long time, and the temperature fluctuation range is very small.
Description
Technical Field
The utility model relates to a scanning electron microscope sample platform cooling technology field especially relates to a scanning electron microscope refrigerating system based on low temperature solid cooling.
Background
Currently, scanning electron microscopes can only measure the sample temperature in a room temperature environment. In recent years, a part of scanning electron microscope cold heads using liquid nitrogen as a cold source have appeared, and the specific cooling mode is to introduce the liquid nitrogen into the scanning electron microscope to directly cool the sample stage. There are several problems with this cooling approach: firstly, the cooling temperature range is narrow, and the temperature can only be around 77K by using liquid nitrogen; secondly, the temperature control precision is not high, the temperature control is difficult to achieve high-precision temperature control by controlling the liquid nitrogen flow, and the temperature fluctuation is usually as high as 1-2K and even higher; and thirdly, liquid nitrogen is introduced into the scanning electron microscope, vibration is inevitably introduced, and observation of the microscopic morphology under high magnification is obviously influenced.
SUMMERY OF THE UTILITY MODEL
the utility model aims at providing a temperature fluctuation range is little based on the refrigerated scanning electron microscope refrigerating system of low temperature solid to solve current cooling sample platform mode and lead to the problem that vibration and temperature fluctuation are big easily.
the embodiment of the utility model provides a scanning electron microscope refrigerating system based on low temperature solid cooling, include: the container, the first vacuum cavity and the second vacuum cavity further comprise a sample stage, a low-temperature cold head and a liquid source; the sample stage is arranged above the container, the low-temperature cold head is used for providing cold for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is located inside the first vacuum cavity, and the container and the sample stage are located inside the second vacuum cavity.
The liquid source comprises a liquid storage tank, the liquid storage tank is communicated with the container through a liquid conveying channel, a valve is arranged on the liquid conveying channel, and the liquid storage tank and the valve are both located outside the second vacuum cavity.
the liquid storage tank and the liquid conveying channel positioned outside the second vacuum cavity are both coated with heat insulation materials.
And a second thermal switch is also arranged on the liquid conveying channel and is positioned in the second vacuum cavity.
The low-temperature cold head is communicated with the container through a cold quantity conveying channel, and a first thermal switch is arranged on the cold quantity conveying channel.
the cold source of the low-temperature cold head is a low-temperature refrigerator, and the low-temperature refrigerator is arranged on the first base; the low-temperature refrigerator is positioned in the first vacuum cavity, and the first base is positioned outside the first vacuum cavity.
The first base and the second vacuum cavity are located on the second base, and the second base is further connected with a vibration reduction unit.
Wherein the first vacuum cavity and the second vacuum cavity are communicated with each other.
The embodiment of the utility model provides a based on refrigerated scanning electron microscope refrigerating system of low temperature solid, when the sample on the sample platform is in not observed state, the cold volume is carried to the container to the low temperature cold head, and the liquid source fills liquid into to the container, solidifies liquid through cold volume, forms the low temperature solid; when the sample on the sample table is in an observed state, the cold energy transmission between the low-temperature cold head and the container is cut off, the liquid source stops filling the liquid into the container, and the sample table is cooled through the cold energy of the low-temperature solid in the container; when the sample on the sample table is in an observed state for a preset time, namely after the low-temperature solid absorbs heat and is liquefied, cold energy transmission between the low-temperature cold head and the container is restarted, the liquid is solidified, and the liquid in the container cannot be discharged from beginning to end. The scanning electron microscope refrigeration system based on low-temperature solid cooling provided by the embodiment is in a zero-vibration state after the refrigeration quantity transmission between the low-temperature cold head and the container is cut off based on the low-temperature solid latent heat refrigeration, the sample stage can be maintained at the set temperature for a long time, and the temperature fluctuation range is small.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a refrigeration system of a scanning electron microscope based on low-temperature solid cooling of the present invention.
Description of reference numerals:
1-a damping unit; 2-a second base; 3-a second vacuum chamber; 3 a-the interior of the second vacuum chamber; 4-scanning electron microscope electron gun; 5-a sample stage; 6-container; 6 a-low temperature solids; 7-a second thermal switch; 7 a-a cryogenic side liquid transport channel; 7 b-a room temperature side liquid transport channel; 7 c-a valve; 7 d-thermal insulation material; 7 e-a liquid reservoir; 8-a first thermal switch; 8 a-vessel side thermal bridge; 8 b-side thermal bridge of low temperature refrigerator; 12-a first vacuum chamber; 12 a-the interior of the first vacuum chamber; 13-a cryogenic refrigerator; 13 a-a first base; 13 b-cryogenic cold head.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Fig. 1 is the utility model discloses scanning electron microscope refrigerating system's structural schematic based on low temperature solid cooling, as shown in fig. 1, the embodiment of the utility model provides a scanning electron microscope refrigerating system based on low temperature solid cooling, include: the container 6, the first vacuum cavity 12, the second vacuum cavity 3, the sample stage 5, the low-temperature cold head 13b and the liquid source; the sample stage 5 is arranged on the container 6, the low-temperature cold head 13b is used for providing cold for the container 6, the liquid source is used for providing liquid for the container 6, the low-temperature cold head 13b is located inside the first vacuum cavity 12, and the container 6 and the sample stage 5 are located inside the second vacuum cavity 3.
It should be noted that the scanning electron microscope electron gun 4 extends into the second vacuum chamber 3 for observing the sample on the sample stage 5, and the sample stage 5 is provided with a station for placing the sample. The sample stage 5 is a new element, is independent of the sample stage of the microscope, and can be made of copper blocks or other block materials. The material of the container 6 is selected according to the type of the stored low-temperature solid 6a, and is not particularly limited. The size and shape of the container 6 can be selected according to the actual situation.
In the embodiment of the utility model, when the sample on the sample stage 5 is in the unobserved state, the low temperature cold head 13b transmits the cold energy to the container 6, the liquid source fills the liquid into the container 6, and the liquid is solidified through the cold energy to form the low temperature solid 6 a;
When the sample on the sample table 5 is in an observed state, the cold energy transmission between the low-temperature cold head 13b and the container 6 is cut off, the liquid source stops filling the liquid into the container 6, and the sample table 5 is cooled by the cold energy of the low-temperature solid 6a in the container 6;
When the sample on the sample table 5 is in an observed state for a preset time, namely after the low-temperature solid 6a absorbs heat and liquefies, the cold energy transmission between the low-temperature cold head 13b and the container 6 is restarted to solidify the liquid, and the liquid in the container 6 cannot be discharged from beginning to end.
The refrigeration system of the scanning electron microscope based on the low-temperature solid cooling provided by the embodiment is in a zero-vibration state after the refrigeration transmission between the low-temperature cold head 13b and the container 6 is cut off based on the latent heat refrigeration of the low-temperature solid 6a, and the sample stage can be maintained at the set temperature for a long time and has a small temperature fluctuation range.
It will be appreciated that the liquid source may provide liquid such as liquid helium, liquid neon, liquid nitrogen or other cryogenic liquid. In this embodiment, the liquid is exemplified by liquid nitrogen.
On the basis of the above embodiment, the liquid source includes the liquid storage tank 7e, the liquid storage tank 7e is communicated with the container 6 through the liquid conveying passage, the liquid conveying passage is provided with the valve 7c, and the liquid storage tank 7e and the valve 7c are both positioned outside the second vacuum chamber 3.
The embodiment of the utility model provides an in, liquid transport passageway includes that low temperature side liquid transports passageway 7a and room temperature side liquid transport passageway 7b, and low temperature side liquid transport passageway 7a transports passageway 7b intercommunication through second thermal switch 7 and room temperature side liquid, and second thermal switch 7 is located the inside 3a of the vacuum cavity of second, and room temperature side liquid transport passageway 7b is provided with valve 7c, and liquid storage tank 7e and valve 7c all are located the outside of the vacuum cavity 3 of second. The loss of cold can be prevented by arranging the second thermal switch 7.
On the basis of the above embodiment, both the liquid reservoir 7e and the liquid transport passage located outside the second vacuum chamber 3 are coated with the thermal insulating material 7 d.
The embodiment of the utility model provides an in, room temperature side liquid transports on the passageway 7b, and the part that is located the outside of second vacuum cavity 3 all has the cladding to have insulation material 7d, and liquid storage tank 7e all has the cladding all around to have insulation material 7d, and insulation material 7 d's material or thickness can be selected according to actual demand, do not specifically prescribe a limit to here. The temperature of the liquid can be prevented from being influenced by the outside by arranging the heat insulation material 7d, so that the efficiency of converting the liquid into the low-temperature solid is improved.
on the basis of the above embodiment, the low-temperature cold head 13b is communicated with the container 6 through a cold quantity transportation channel, and the cold quantity transportation channel is provided with a first thermal switch 8.
The embodiment of the utility model provides an in, cold volume transport passageway includes container side heat bridge 8a and low temperature refrigerator side heat bridge 8b to container side heat bridge 8a and low temperature refrigerator side heat bridge 8b are connected through first heat switch 8, and low temperature cold head 13b is connected with low temperature refrigerator side heat bridge 8 b's one end, and first heat switch 8 sets up in the inside 3a of second vacuum chamber.
On the basis of the above embodiment, the cold source of the low-temperature cold head 13b is the low-temperature refrigerator 13, and the low-temperature refrigerator 13 is installed on the first base 13 a; the cryocooler 13 is located inside the first vacuum chamber 12a, and the first pedestal 13a is located outside the first vacuum chamber.
The embodiment of the utility model provides an in, cryocooler 13 is in operating condition, and first thermal switch 8 is in the closed condition, and the cold volume of low temperature cold head 13b loops through cryocooler side heat bridge 8b, first thermal switch 8 and container side heat bridge 8a, with the liquid solidification in the container 6.
On the basis of the above embodiment, the first pedestal 13a and the second vacuum chamber 3 are located on the second pedestal 2, and the second pedestal 2 is further connected with a damping unit.
In the embodiment of the present invention, the first base 13a is located on one side above the second base 2, the second vacuum chamber 3 is located on the other side above the second base 2, and the damping unit 1 is further connected below the second base 2. The first base 13a is disposed on one side above the second base 2, and the high complexity of the system caused by the additional introduction of a vibration damping device is avoided by damping the vibration of the low-temperature cooling device by means of the vibration damping unit 1 existing in the scanning electron microscope.
On the basis of the above-mentioned embodiments, the first vacuum chamber 12 and the second vacuum chamber 3 are communicated with each other for the sake of example avoiding introducing an additional vacuum pumping device.
In the embodiment of the present invention, the vacuum degree of the first vacuum chamber 12 and the second vacuum chamber 3 is 0 Pa-105Pa。
The utility model discloses the implementation provides a scanning electron microscope refrigerating system's application method based on low temperature solid cooling, include: when the sample stage 5 is in an unobserved state, the low-temperature cold head 13b transmits cold energy to the container 6, and the liquid source fills liquid into the container 6;
When the sample stage 5 is in the observed state, the cold transport between the cold head 13b and the container 6 is cut off, and the liquid source stops filling the liquid into the container 6.
In the embodiment of the utility model, when the sample on the sample platform 5 is in the unobserved state, the control device sends a first start instruction to the cryocooler 13, the cryocooler 13 is opened, the control device sends a second start instruction to the first thermal switch 8 and the second thermal switch 7, the first thermal switch 8 and the second thermal switch 7 are in the closed state, the cold quantity of the low-temperature cold head 13b sequentially passes through the lateral thermal bridge 8b of the cryocooler, the first thermal switch 8 and the lateral thermal bridge 8a of the container, and the cold quantity is conveyed into the container 6; the control device sends a third starting instruction to the valve 7c to open the valve 7c, liquid nitrogen in the liquid storage tank 7e sequentially passes through the room-temperature side liquid transport channel 7b, the second thermal switch 7 and the low-temperature side liquid transport channel 7a, then is filled into the container 6, and is solidified through cold energy to form a low-temperature solid 6 a;
When the sample on the sample table 5 is in an observed state, the control device sends a first closing instruction to the cryogenic refrigerator 13, the cryogenic refrigerator 13 is closed, the control device sends a second closing instruction to the first thermal switch 8 and the second thermal switch 7, the first thermal switch 8 and the second thermal switch 7 are disconnected, the control device sends a third closing instruction to the valve 7c, the valve 7c is closed, the liquid source stops filling liquid nitrogen into the container 6, and at the moment, the sample table 5 is cooled through the cold energy of the low-temperature solid 6a in the container 6;
When the sample on the sample stage 5 is in an observed state for a preset time, namely, after the low-temperature solid 6a continuously absorbs heat and liquefies, all or part of the nitrogen fixation in the container 6 is converted into liquid nitrogen, the liquid level value detected by the liquid level detection device is greater than a preset threshold value, the liquid level detection device sends an early warning instruction to the control device, the control device sends a fourth starting instruction to the low-temperature refrigerator 13, the low-temperature refrigerator 13 is started, the control device sends a fifth starting instruction to the first thermal switch 8, the first thermal switch 8 is closed, the cold energy of the low-temperature cold head 13b sequentially passes through the low-temperature refrigerator side thermal bridge 8b, the first thermal switch 8 and the container side thermal bridge 8a, the cold energy is conveyed into the container 6, the liquid nitrogen is solidified, and the liquid nitrogen in the container 6 cannot be discharged from beginning to end. According to the refrigeration method of the scanning electron microscope based on the low-temperature solid cooling, based on the latent heat refrigeration of the low-temperature solid 6a, when the low-temperature refrigerator 13 is in a stop working state, the vibration problem in the running process of the low-temperature refrigerator 13 can be avoided, the sample stage 5 can be maintained at the set temperature for a long time, and the temperature fluctuation range is small.
before the cryocooler 13 is turned on for the first time, it is necessary to ensure that the vacuum degrees of the first vacuum chamber 12 and the second vacuum chamber 3 are both 0Pa to 10 Pa5Pa。
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (8)
1. A scanning electron microscope refrigeration system based on cryogenic solid cooling comprising: the device comprises a container, a first vacuum cavity and a second vacuum cavity, and is characterized by further comprising a sample stage, a low-temperature cold head and a liquid source; the sample stage is arranged above the container, the low-temperature cold head is used for providing cold for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is located inside the first vacuum cavity, and the container and the sample stage are located inside the second vacuum cavity.
2. The cryogenic solids cooling-based scanning electron microscope refrigeration system of claim 1 wherein the liquid source comprises a liquid reservoir in communication with the vessel through a liquid transport passage having a valve disposed thereon, the liquid reservoir and the valve both being located outside of the second vacuum chamber.
3. The cryogenic solids cooling-based scanning electron microscope refrigeration system of claim 2, wherein the liquid reservoir and the liquid transport channel outside the second vacuum chamber are both coated with an insulating material.
4. The cryogenic solids cooling-based scanning electron microscope refrigeration system of claim 2 wherein the liquid transport channel is further provided with a second thermal switch located inside the second vacuum chamber.
5. The system according to claim 1, wherein the cryo-cooling cold head is in communication with the container via a cold transport channel, the cold transport channel having a first thermal switch disposed thereon.
6. The system according to claim 1, wherein the cold source of the cryo-cooling head is a cryo-refrigerator, and the cryo-refrigerator is mounted on the first base; the low-temperature refrigerator is positioned in the first vacuum cavity, and the first base is positioned outside the first vacuum cavity.
7. The system according to claim 6, wherein the first base and the second vacuum chamber are located on a second base, and a vibration reduction unit is further connected to the second base.
8. The cryogenic solids cooling based scanning electron microscope refrigeration system of claim 1 wherein the first vacuum chamber and the second vacuum chamber are in communication with each other.
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| CN201920719106.5U CN209804586U (en) | 2019-05-17 | 2019-05-17 | Scanning electron microscope refrigerating system based on low-temperature solid cooling |
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| CN201920719106.5U CN209804586U (en) | 2019-05-17 | 2019-05-17 | Scanning electron microscope refrigerating system based on low-temperature solid cooling |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110164744A (en) * | 2019-05-17 | 2019-08-23 | 中国科学院理化技术研究所 | Based on low-temperature solid cooling scanning electron microscope refrigeration system and method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110164744A (en) * | 2019-05-17 | 2019-08-23 | 中国科学院理化技术研究所 | Based on low-temperature solid cooling scanning electron microscope refrigeration system and method |
| CN110164744B (en) * | 2019-05-17 | 2024-04-16 | 中国科学院理化技术研究所 | Scanning electron microscope refrigerating system and method based on low-temperature solid cooling |
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