CN209803219U - magnetic isolator - Google Patents
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- CN209803219U CN209803219U CN201920330741.4U CN201920330741U CN209803219U CN 209803219 U CN209803219 U CN 209803219U CN 201920330741 U CN201920330741 U CN 201920330741U CN 209803219 U CN209803219 U CN 209803219U
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Abstract
The utility model discloses a magnetic isolator, which comprises a substrate, a magnetic field generating unit, a magnetic field sensing unit, a shielding layer and an isolation medium, wherein the magnetic field generating unit comprises a current conductor, the current conductor is arranged on one side of the substrate along the extension of a first direction, the magnetic field sensing unit and the current conductor are arranged on the same side of the substrate, the magnetic field sensing unit is positioned on the side of the current conductor, and along a second direction, the distance between the current conductor and the magnetic field sensing unit is more than 0, wherein the first direction is vertical to the second direction; an isolation medium is arranged between the current conductor and the magnetic field induction unit; the distance between the current conductor and the magnetic field induction unit in the second direction is internally provided with the isolation medium, so that the effect of electrical isolation can be achieved, the isolation strength can be improved, and the process is simple. The shielding layer can absorb an external interference magnetic field, and the signal-to-noise ratio is further improved.
Description
Technical Field
The utility model relates to a magnetic sensor field, in particular to magnetic isolator.
background
In an electronic circuit, various signals are prone to interfere with each other, and a signal isolator is often used to ensure the stability of the signals. The current commercial signal isolator comprises an optocoupler device, a capacitive coupling isolator and a magnetic isolator, wherein the magnetic isolator has the characteristics of quick response frequency and easiness in integration, and is widely adopted at present.
the successful commercialized iCoupler series products of ADI company adopt the chip level transformer technology, integrate the primary and secondary coil on the semiconductor substrate, between the primary and secondary, have polyimide of high breakdown strength, the isolation voltage is up to 5000VRMS/min, the transmission rate reaches 150 Mbps. Because the transformer only responds to high-frequency signals, if the input signals are low-frequency signals, the original signals need to be processed in modes of chopping and the like, and signal transmission between the primary and secondary signals can be realized.
NVE corporation developed IsoLoop series products using Giant Magnetoresistive (GMR) elements, with isolation voltages as high as 6000V and transfer rates of 150 Mbps. The series of products are internally provided with a primary coil, a GMR element is arranged below the primary coil, the primary coil is positioned at the GMR element and generates a magnetic field in the horizontal direction, and the GMR element detects and outputs the magnetic field in the horizontal direction, so that the isolated transmission of signals is realized. Between the primary coil and the GMR element, there is 10 μm thick benzocyclobutene (BCB), which achieves an isolation voltage of several kilovolts. Since the frequency response of the GMR element is from 0Hz to several MHz, the problem that the transformer can only transmit high frequency signals is solved.
The high isolation voltage of the two methods is realized by the isolation layer between the signal transmitting element and the receiving element, and in order to achieve the high isolation voltage, a material with high isolation voltage and a thicker isolation layer are needed. If silicon oxide or aluminum oxide is used as the isolating layer, longer coating time is needed, and higher cost is needed; if a high polymer material such as polyimide or BCB is used as an isolation layer, the device has the hidden trouble of failure in some extreme environments, such as moisture or high-temperature environments.
SUMMERY OF THE UTILITY MODEL
In view of the above technical problem, the utility model provides a magnetic isolator, this magnetic isolator includes base plate, magnetic field generating unit, magnetic field induction unit, shielding layer, isolation medium, and magnetic field generating unit contains the current conductor, and the current conductor extends along the first direction and sets up in one side of base plate, and magnetic field induction unit is located the side of current conductor; the distance between the current conductor and the magnetic field induction unit is greater than 0 along a second direction, wherein the first direction is perpendicular to the second direction. Between the current conductor and the magnetic field sensing unit there is an isolating medium, which may be a high dielectric strength isolating material, the isolating distance being related only to the horizontal distance between the current conductor and the magnetic field sensing unit. The upper side and the lower side of the magnetic field induction unit are provided with the magnetic gathering sheets, so that the output signal of the magnetic field induction unit can be improved. The shielding layer is arranged on the upper side and/or the lower side of the magnetic field induction unit and the current conductor, so that the external interference magnetic field is absorbed, and the leakage of the magnetic field generated by the current conductor is prevented. The magnetic isolator is simple in structure, relatively simplified in preparation process and cost-saving.
the utility model discloses a realize according to following technical scheme:
A magnetic isolator comprises a substrate, a magnetic field generating unit, a magnetic field sensing unit, a shielding layer and an isolating medium,
The magnetic field generating unit comprises a current conductor, the current conductor extends along a first direction on one side of the substrate, the magnetic field sensing unit and the current conductor are arranged on the same side of the substrate, the magnetic field sensing unit is positioned on the side of the current conductor, and the distance between the current conductor and the magnetic field sensing unit is greater than 0 along a second direction, wherein the first direction is vertical to the second direction;
An isolation medium is arranged between the current conductor and the magnetic field induction unit; the current signal comprises an input end, the current signal input by the input end flows through the current conductor to generate a magnetic field around the current conductor, the magnetic field has a component in the sensitive direction of the magnetic field induction unit, and the output signal induced by the magnetic field induction unit is proportional to the magnetic field generated around the current conductor;
the shielding layer and the magnetic field generating unit are positioned on the same side of the substrate, and are positioned on one side of the magnetic field generating unit close to the substrate and/or one side of the magnetic field generating unit far away from the substrate, and the shielding layer and the magnetic field generating unit are used for absorbing an external interference magnetic field and preventing the magnetic field generated around a current conductor of the magnetic field generating unit from leaking.
Preferably, the magnetic field generating unit further comprises a voltage converting unit electrically connected to the input end of the current conductor for converting an input voltage signal into a current signal.
Preferably, the magnetic field induction device further comprises a signal processing unit, wherein the signal processing unit is electrically connected with the magnetic field induction unit and is used for receiving and processing the output signal of the magnetic field induction unit and outputting the processed signal.
Preferably, the signal processing unit comprises a filtering module, an amplifying module, a comparing module and a level converting module which are sequentially connected in series, wherein the filtering module is electrically connected with the magnetic field induction unit.
Preferably, the magnetic field sensing unit is constituted by a giant magnetoresistive element, wherein a magnetization direction of a pinned layer of the giant magnetoresistive element is perpendicular to a surface of the giant magnetoresistive element, and a sensitive direction of the giant magnetoresistive element is perpendicular to the surface of the giant magnetoresistive element; or
the pinned layer of the giant magnetoresistive element is parallel to the surface of the giant magnetoresistive element, and the sensitive direction of the giant magnetoresistive element is parallel to the surface of the giant magnetoresistive element.
Preferably, the magnetic field sensing unit is constituted by a tunnel magnetoresistive element, wherein a magnetization direction of a pinned layer of the tunnel magnetoresistive element is perpendicular to a surface of the tunnel magnetoresistive element, and a sensitive direction of the tunnel magnetoresistive element is perpendicular to the surface of the tunnel magnetoresistive element; or
The pinned layer of the tunnel magnetoresistive element is parallel to a surface of the tunnel magnetoresistive element, and the sensitive direction of the tunnel magnetoresistive element is parallel to the surface of the tunnel magnetoresistive element.
Preferably, the magnetic field sensing unit is composed of a hall element or an anisotropic magnetoresistive element.
Preferably, still contain the magnetism gathering piece, the magnetism gathering piece sets up the first side and the second side of magnetic field induction unit, wherein, the first side with the second side is the both sides that magnetic field induction unit carried on the back mutually, just the line direction of first side to second side with the sensitivity direction of magnetic field induction unit is the same or opposite, the magnetism gathering piece is used for strengthening the magnetic field signal that current conductor produced and the SNR of magnetic isolator.
Preferably, the material of the poly-magnetic sheet and the shielding layer comprises at least one of permalloy, industrial pure iron and ferrite.
Preferably, the substrate adopts a silicon substrate, a quartz substrate or a glass substrate,
the isolation medium comprises at least one of aluminum oxide, silicon nitride, polyimide and benzocyclobutene.
Compared with the prior art, the utility model discloses following beneficial technological effect has:
The utility model provides a magnetic isolator utilizes second direction (to the magnetic isolator that the level was placed, for the horizontal direction) between current conductor and the magnetic field induction unit to go up and sets up the isolation medium in the distance, can play the effect of electrical isolation, is favorable to improving isolation strength, simple process. The shielding layer can absorb an external interference magnetic field, and the signal-to-noise ratio is further improved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic cross-sectional view of a conventional magnetic isolator of the prior art;
Fig. 2 is a schematic perspective view of a magnetic isolator according to an embodiment of the present invention;
Fig. 3 is a cross-sectional view of a magnetic isolator in accordance with the present invention;
Fig. 4 is a schematic cross-sectional view of another magnetic isolator according to the present invention;
Fig. 5 is a schematic perspective view of another magnetic isolator provided in an embodiment of the present invention;
Fig. 6 is a schematic perspective view of another magnetic isolator provided in the embodiment of the present invention;
Fig. 7 is a schematic diagram of an output curve of a magnetic field sensing unit according to an embodiment of the present invention;
Fig. 8 is a schematic circuit diagram of a magnetic field sensing unit of a bridge structure according to an embodiment of the present invention;
Fig. 9 is a schematic circuit diagram of a magnetic field sensing unit with another bridge structure according to an embodiment of the present invention;
fig. 10 is a schematic diagram of a position relationship between a current conductor and a magnetic field sensing unit according to an embodiment of the present invention;
Fig. 11 is a schematic diagram of another position relationship between the current conductor and the magnetic field sensing unit according to the embodiment of the present invention;
Fig. 12 is a schematic diagram illustrating another position relationship between the current conductor and the magnetic field sensing unit according to the embodiment of the present invention;
Fig. 13 is an electrical schematic diagram of a magnetic isolator with resistance output according to an embodiment of the present invention;
Fig. 14 is an electrical schematic diagram of a magnetic isolator with bridge voltage output according to an embodiment of the present invention;
Fig. 15 is an electrical schematic diagram of a magnetic isolator with signal processing according to an embodiment of the present invention.
Detailed Description
the present invention will be described in detail with reference to the following embodiments. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that various changes and modifications can be made by one skilled in the art without departing from the spirit of the invention. These all belong to the protection scope of the present invention.
Fig. 1 is a schematic cross-sectional view of a conventional magnetic isolator in the prior art, all components are deposited on a substrate 101 by a semiconductor process or a MEMS process, a current signal is passed through a current conductor 102, the direction of the current signal is described as a direction perpendicular to the paper surface, the magnitude of the current signal is related to the magnitude of a measured current, a magnetic field induction unit 104 is provided right below the current conductor 102, and the direction of a magnetic field generated by the current conductor 102 at the position of the magnetic field induction unit 104 is shown as an arrow 103 in the figure. The magnetic field sensing unit 104 senses the magnetic field and outputs it as a voltage. Between the current conductor 102 and the magnetic field sensing unit 104 there is an isolation medium 105, the material and thickness of which determines the isolation voltage. In order to enhance the suppression of the external field and reduce the leakage of the magnetic field, shielding layers 106 are provided on the upper and lower sides of the current conductor 102 and the magnetic field sensing unit 104. To achieve higher isolation voltages, thicker isolation media are typically required. If silicon oxide or aluminum oxide is used as the isolating layer, longer coating time is needed, and higher cost is needed; if a high polymer material such as polyimide or BCB is used as an isolation layer, the device has the hidden trouble of failure in some extreme environments, such as moisture or high-temperature environments.
based on the above problems, the embodiment of the present invention provides a magnetic isolator, fig. 2 is a schematic perspective view of a magnetic isolator provided by the embodiment of the present invention, fig. 3 is a cross-sectional view of a magnetic isolator provided by the present invention, the section line corresponding to the cross section is a-a', referring to fig. 2 and 3, the magnetic isolator includes a substrate 201, a magnetic field generating unit, a magnetic field inducing unit 203, a shielding layer 209, and an isolation medium, the magnetic field generating unit includes a current conductor 202, the current conductor 202 extends along a first direction x on one side of the substrate 201, the magnetic field inducing unit 203 and the current conductor 202 are disposed on the same side of the substrate 201, the magnetic field inducing unit 203 is disposed on the side of the current conductor 202, in a second direction y, a distance between the current conductor 202 and the magnetic field induction unit 203 is greater than 0, wherein the first direction x is perpendicular to the second direction y; an isolation medium is arranged between the current conductor 202 and the magnetic field induction unit 203; the current conductor comprises an input end, a current signal input by the input end flows through the current conductor 202 to generate a magnetic field around the current conductor 202, the magnetic field has a component in the sensitive direction of the magnetic field induction unit 203, and an output signal induced by the magnetic field induction unit 203 is proportional to the magnetic field generated around the current conductor 202;
the shielding layer 209 is located on the same side of the substrate 201 as the magnetic field generating unit 203, on a side of the magnetic field generating unit close to the substrate 201 and/or a side far from the substrate 201, and is used for absorbing an external interference magnetic field and preventing a magnetic field generated around the current conductor 202 from leaking.
the isolation voltage between the current conductor 202 and the magnetic field sensing unit 203 is proportional to the separation distance between the current conductor 202 and the magnetic field sensing unit 203, which is the length of the connection between the current conductor 202 and the magnetic field sensing unit 203.
Referring to fig. 2 and 3, in particular, on one side of the substrate 201, there is a current conductor 202, and an isolation medium may be provided between the current conductor 202 and the shielding layer 209. On the sides of the current conductor 202, there are magnetic field sensing units 203 and 205, where the magnetic field directions generated by the current signal are arrows 204 and 206 in the figure, respectively, and the directions of the two arrows are also the sensitive directions of the magnetic field sensing units 203 and 205. For a certain current value, the output signals of the magnetic field induction units 203 and 205 are different, i.e. isolated output of the signals can be realized.
The current conductor 202 and the magnetic field sensing unit 203 are spaced apart by a distance a1 in the second direction, and the current conductor 202 and the magnetic field sensing unit 205 are spaced apart by a distance a2, wherein a1 and a2 are greater than 0, and the magnitude of the isolation voltage is related to the length of the spacing distance. In addition, in order to enhance suppression of an external field and reduce leakage of a magnetic field, shielding layers 209 are provided on the current conductor 202, the sides of the magnetic field induction units 203 and 205 close to the substrate 201, and/or the sides far from the substrate 201, i.e., the upper and lower sides in fig. 3.
with continuing reference to fig. 2 and fig. 3, based on the above scheme, the magnetic isolator further includes a magnetic gathering sheet 207, the magnetic gathering sheet 207 is disposed on the first side and the second side of the magnetic field sensing unit, wherein the first side and the second side are opposite sides of the magnetic field sensing unit, a connection line direction from the first side to the second side is the same as or opposite to a sensitive direction of the magnetic field sensing unit, and the magnetic gathering sheet 207 is configured to enhance a magnetic field signal of the magnetic field sensing unit and a signal-to-noise ratio of the magnetic isolator.
For example, for the magnetic isolator horizontally placed in fig. 3, the first side of the magnetic field sensing unit may be the upper side of the magnetic induction unit, and the second side may be the lower side of the magnetic induction unit; or the first side of the magnetic field sensing unit may be a lower side of the magnetic sensing unit and the second side may be an upper side of the magnetic sensing unit. The magnetic gathering sheet 207 is disposed on the first side and the second side of the magnetic field induction unit, so that the magnetic field intensity at the magnetic field induction unit can be increased and the magnetic field direction is along the sensitive direction of the magnetic field induction unit.
The embodiment of the utility model provides a magnetic isolator, including base plate, magnetic field generating unit, magnetic field induction unit, shielding layer, isolation medium, magnetic field generating unit contains the current conductor, the current conductor extends the setting along the first direction in one side of base plate, magnetic field induction unit and current conductor set up in the homonymy of base plate, magnetic field induction unit is located the side of current conductor, and along the second direction, the distance between current conductor and the magnetic field induction unit is greater than 0, wherein, the first direction is perpendicular with the second direction; the isolation medium is arranged between the current conductor and the magnetic field induction unit, and the isolation medium is arranged in the distance between the current conductor and the magnetic field induction unit in the second direction, so that the effect of electrical isolation can be achieved, the isolation strength can be improved, and the process is simple. The shielding layer can absorb an external interference magnetic field, and the signal-to-noise ratio is further improved.
On the basis of the scheme, the material of the poly-magnetic sheet and the shielding layer comprises at least one of permalloy, industrial pure iron and ferrite. The substrate is a silicon substrate, a quartz substrate or a glass substrate. The isolation medium comprises at least one of aluminum oxide, silicon nitride, polyimide and benzocyclobutene.
Fig. 4 is a schematic cross-sectional view of another magnetic isolator according to the present invention, under certain process conditions, the current conductor 302 may deviate from the center lines of the magnetic field sensing units 303 and 305 in the height direction, and the current direction in the current conductor 302 is still illustrated as being perpendicular to the inside of the paper, and at this time, there are horizontal components on the magnetic field sensing units 303 and 305, as shown by arrows 304 and 306. In this design, the sensitive directions of the magnetic field sensing units 303 and 305 are horizontal directions (taking the magnetic isolator as an example of horizontal placement), and the poly-magnetic pieces 307 can be added on the upper and lower sides of the magnetic field sensing units 303 and 305, so as to increase the magnetic field intensity at the magnetic field sensing units and improve the signal output.
fig. 5 is a schematic perspective view of another magnetic isolator provided in an embodiment of the present invention; fig. 6 is a schematic perspective view of another magnetic isolator according to an embodiment of the present invention.
In fig. 5, 401 is a substrate, a magnetic field sensing unit is located at a side of a current conductor 402, and the magnetic field sensing unit is an M × N array formed by a plurality of magnetic induction elements 403, where M and N are integers greater than or equal to 1, and an isolation medium is provided in a separation distance between the current conductor 402 and the magnetic induction elements 403, so that a magnetic isolator is formed. In addition, above the magnetic field induction unit and the current conductor 402, there is a shielding layer 405 with high permeability in order to reduce interference of external magnetic fields and to reduce leakage of magnetic fields.
The magnetic isolator of fig. 6 has upper and lower shielding layers 505 with high magnetic permeability to better shield than that of fig. 5.
Fig. 7 is a schematic diagram of an input/output curve of the magnetic field sensing unit according to an embodiment of the present invention, in which the abscissa is a magnetic field signal generated by a current around a current conductor, and the ordinate is an output voltage of the magnetic field sensing unit in a full-bridge structure. The magnetic field induction unit has a saturation magnetic field B1, and as long as the absolute value of the magnetic field is smaller than the saturation magnetic field B1, the output voltage of the magnetic field induction unit is proportional to the magnetic field signal, and the magnetic field signal is proportional to the current signal, so the output voltage of the magnetic induction unit is proportional to the current signal.
fig. 8 is a schematic circuit diagram of a magnetic field induction unit of a bridge structure provided by the embodiment of the present invention, wherein 801 to 804 represent four magnetic induction resistors, each magnetic induction resistor is composed of a plurality of magnetic induction elements, the solid arrow is the sensitive direction of these four magnetic induction resistors, and the dotted arrow is the magnetic field direction of four magnetic induction resistor positions. Since the sensitive directions of the four magnetic induction resistors are opposite to each other, when a magnetic field is applied to the four magnetic induction resistors, a differential output signal is formed, and an output curve as shown in fig. 7 can be obtained.
Fig. 9 is a schematic structural diagram of a magnetic field sensing unit of another bridge structure provided by the embodiment of the present invention, four magnetic induction resistors 901 to 904 have the same sensitive direction, and through layout design, the magnetic fields at the four magnetic induction resistor positions can be opposite to each other, and an output curve as shown in fig. 7 can also be obtained. Due to the fact that the sensitivity directions are the same, the bridge structure can reduce interference of an external common-mode magnetic field.
it should be noted that the shape of the current conductor may be a long strip, a spiral coil, or other shapes, and the present invention is not limited in this respect. Fig. 10 to 12 are diagrams showing the positional relationship of three typical current conductors and magnetic field sensing elements.
fig. 10 is a schematic diagram of a position relationship between a current conductor and a magnetic field sensing unit provided by an embodiment of the present invention, referring to fig. 10, a dotted frame 1004 in fig. 10 represents a position where the magnetic field sensing unit is located, the current conductor 1001 has two ports 1002 and 1003, when a current flows through the current conductor 1001, a magnetic field with a same direction is provided in the dotted frame 1004, the magnetic field size is equal, the magnetic field direction is the same, if four magnetic induction resistors are placed in the dotted frame, and the sensitive direction of each magnetic induction resistor is opposite to that of the adjacent magnetic induction resistor, so that a bridge structure as shown in fig. 8 can be formed. When the current conductor is in a coil shape, the two ports 1002 and 1003 of the coil are respectively used as the input end and the output end of the current conductor, the magnetic induction unit is arranged on the side of the current conductor, and the distance between the magnetic induction unit and the input end or the output end of the current conductor in the second direction is larger than 0.
Fig. 11 is a schematic diagram of another position relationship between a current conductor and a magnetic field sensing unit according to an embodiment of the present invention, referring to fig. 11, the current conductor 1101 also has two ports 1102 and 1103, and when a current flows through the current conductor 1101, the magnetic fields in the dashed boxes 1103 and 1104 are equal in magnitude and opposite in direction. If the magnetic induction resistors with the same sensitivity are placed in the dashed boxes 1103 and 1104, the number of the magnetic induction resistors can be determined according to actual needs, and a bridge structure as shown in fig. 9 can be formed.
Fig. 12 is a schematic diagram of another position relationship between a current conductor and a magnetic field sensing unit according to an embodiment of the present invention, referring to fig. 12, there are several dashed boxes in fig. 12, the current conductor 1201 also has two ports 1202 and 1203, when a current flows on the current conductor 1201, the directions of the magnetic fields in the dashed boxes 1204 and 1205 are equal and opposite. If the magnetic induction resistors with the same sensitivity are placed in the dashed boxes 1204 and 1205, a bridge structure as shown in fig. 9 can be formed.
Fig. 13 to 15 show three types of magnetic isolators of output form.
Fig. 13 is an electrical schematic diagram of a magnetic isolator with resistance output according to an embodiment of the present invention;
fig. 13 shows a magnetic isolator in the form of a resistance value output, wherein 1301 and 1302 are signal input terminals of the isolator, and the magnetic field generating unit 1303 has a current conductor therein, and when there is an input signal, the current conductor generates a magnetic field, which is sensed by the magnetic field sensing unit 1304 (a resistor array formed of Hall, AMR, GMR, or TMR resistors) and changes the resistance value, which is output through output ports 1305 and 1306.
According to an embodiment of the present invention, when the magnetic field sensing unit is formed of a Giant Magnetoresistance (GMR) element in which a magnetization direction of a pinned layer of the GMR element is perpendicular to a surface of the GMR element and a sensitive direction of the GMR element is perpendicular to the surface of the GMR element; or
The pinned layer of the GMR element is parallel to the surface of the GMR element, and the sensitive direction of the GMR element is parallel to the surface of the TMR or GMR element.
According to another embodiment of the present invention, when the magnetic field sensing unit is constituted by a tunneling magneto-resistance (TMR) element, wherein a magnetization direction of a pinned layer of the TMR element is perpendicular to a surface of the TMR element, a sensitivity direction of the TMR element is perpendicular to the surface of the TMR element; or
A pinned layer of the TMR element is parallel to a surface of the TMR element, and a sensitivity direction of the TMR element is parallel to the surface of the TMR element.
According to another embodiment of the present invention, the magnetic field sensing unit is constituted by a hall element or an anisotropic magnetoresistive element.
Fig. 14 is an electrical schematic diagram of a magnetic isolator with bridge voltage output according to an embodiment of the present invention, in which 1401 and 1402 are signal input ends of the isolator, a current conductor is provided in a magnetic field generating unit 1403, and when there is an input signal, the current conductor generates a magnetic field. The magnetic field sensing unit 1404 has a half-bridge circuit configuration or a full-bridge circuit configuration and outputs a voltage signal, wherein the ports 1405 and 1406 are power supply terminals of the magnetic field sensing unit and the ports 1407 and 1408 are voltage output terminals of the magnetic field sensing unit.
Optionally, the magnetic isolator further includes a signal processing unit, and the signal processing unit is electrically connected to the magnetic field sensing unit, and is configured to receive and process an output signal of the magnetic field sensing unit, and output the processed signal. The signal processing unit comprises a filtering module, an amplifying module, a comparing module and a level conversion module which are sequentially connected in series, wherein the filtering module is electrically connected with the magnetic field induction unit. Fig. 15 is an electrical schematic diagram of a magnetic isolator with signal processing according to an embodiment of the present invention, where 1501 and 1502 are signal input ends of the isolator, a voltage or a current signal is input at the signal input end, a current conductor is provided in the magnetic field generating unit 1503, and when there is an input signal, the current conductor generates a magnetic field. The magnetic field sensing unit 1504 has a half-bridge circuit structure or a full-bridge circuit structure and outputs a voltage signal. The signal processing unit 1507 receives the output signal of the magnetic field sensing unit 1504, processes the output signal of the magnetic field sensing unit 1504, and outputs the processed output signal from the ports 1508 and 1509. The ports 1505 and 1506 are power supply terminals of the magnetic field generating unit and the signal processing unit.
based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention. Although the invention has been shown and described with respect to the preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the invention as defined in the following claims.
Claims (10)
1. A magnetic isolator, characterized by: comprises a substrate, a magnetic field generating unit, a magnetic field induction unit, a shielding layer and an isolation medium,
the magnetic field generating unit comprises a current conductor, the current conductor extends along a first direction on one side of the substrate, the magnetic field sensing unit and the current conductor are arranged on the same side of the substrate, the magnetic field sensing unit is positioned on the side of the current conductor, and the distance between the current conductor and the magnetic field sensing unit is greater than 0 along a second direction, wherein the first direction is vertical to the second direction;
An isolation medium is arranged between the current conductor and the magnetic field induction unit; the current conductor comprises an input end, a current signal input by the input end flows through the current conductor to generate a magnetic field around the current conductor, the magnetic field has a component in the sensitive direction of the magnetic field induction unit, and an output signal induced by the magnetic field induction unit is proportional to the magnetic field generated around the current conductor;
The shielding layer and the magnetic field generating unit are positioned on the same side of the substrate, and are positioned on one side of the magnetic field generating unit close to the substrate and/or one side of the magnetic field generating unit far away from the substrate, and the shielding layer and the magnetic field generating unit are used for absorbing an external interference magnetic field and preventing the magnetic field generated around a current conductor of the magnetic field generating unit from leaking.
2. the magnetic isolator according to claim 1, wherein the magnetic field generating unit further comprises a voltage converting unit electrically connected to the input end of the current conductor for converting an input voltage signal into a current signal.
3. The magnetic isolator according to claim 1 or 2, further comprising a signal processing unit electrically connected to the magnetic field sensing unit for receiving and processing the output signal of the magnetic field sensing unit and outputting the processed signal.
4. The magnetic isolator according to claim 3, wherein the signal processing unit comprises a filtering module, an amplifying module, a comparing module and a level shifting module which are sequentially connected in series, wherein the filtering module is electrically connected with the magnetic field induction unit.
5. the magnetic isolator according to claim 1, wherein the magnetic field sensing unit is constituted by a giant magnetoresistive element, wherein a magnetization direction of a pinned layer of the giant magnetoresistive element is perpendicular to a surface of the giant magnetoresistive element, and a sensitive direction of the giant magnetoresistive element is perpendicular to the surface of the giant magnetoresistive element; or
the pinned layer of the giant magnetoresistive element is parallel to the surface of the giant magnetoresistive element, and the sensitive direction of the giant magnetoresistive element is parallel to the surface of the giant magnetoresistive element.
6. The magnetic isolator according to claim 1, wherein the magnetic field sensing unit is constituted by a tunnel magnetoresistive element, wherein a magnetization direction of a pinned layer of the tunnel magnetoresistive element is perpendicular to a surface of the tunnel magnetoresistive element, and a sensitive direction of the tunnel magnetoresistive element is perpendicular to the surface of the tunnel magnetoresistive element; or
The pinned layer of the tunnel magnetoresistive element is parallel to a surface of the tunnel magnetoresistive element, and the sensitive direction of the tunnel magnetoresistive element is parallel to the surface of the tunnel magnetoresistive element.
7. the magnetic isolator according to claim 1, wherein the magnetic field sensing unit is constituted by a hall element or an anisotropic magnetoresistive element.
8. The magnetic isolator according to claim 1, further comprising a poly-magnetic sheet disposed on a first side and a second side of the magnetic field induction unit, wherein the first side and the second side are opposite sides of the magnetic field induction unit, a connection line from the first side to the second side is the same as or opposite to a sensitive direction of the magnetic field induction unit, and the poly-magnetic sheet is used for enhancing a magnetic field signal generated by the current conductor and a signal-to-noise ratio of the magnetic isolator.
9. A magnetic isolator according to claim 8, wherein the material of said poly-magnetic sheet and said shield layer comprises at least one of permalloy, industrial pure iron, and ferrite.
10. a magnetic isolator according to claim 1,
The substrate adopts a silicon substrate, a quartz substrate or a glass substrate,
The isolation medium comprises at least one of aluminum oxide, silicon nitride, polyimide and benzocyclobutene.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752578A (en) * | 2019-03-15 | 2019-05-14 | 江苏多维科技有限公司 | A kind of Magnetic isolation device |
| CN111653410A (en) * | 2020-07-03 | 2020-09-11 | 西安智源导通电子有限公司 | Magnetic isolator based on full-symmetry coil structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752578A (en) * | 2019-03-15 | 2019-05-14 | 江苏多维科技有限公司 | A kind of Magnetic isolation device |
| CN111653410A (en) * | 2020-07-03 | 2020-09-11 | 西安智源导通电子有限公司 | Magnetic isolator based on full-symmetry coil structure |
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