CN209794247U - Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid - Google Patents

Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid Download PDF

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Publication number
CN209794247U
CN209794247U CN201920081403.1U CN201920081403U CN209794247U CN 209794247 U CN209794247 U CN 209794247U CN 201920081403 U CN201920081403 U CN 201920081403U CN 209794247 U CN209794247 U CN 209794247U
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China
Prior art keywords
processing device
tank
recovery processing
waste liquid
pipe
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Expired - Fee Related
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CN201920081403.1U
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Chinese (zh)
Inventor
李广森
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Anhui Huashun Semiconductor Development Co Ltd
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Anhui Huashun Semiconductor Development Co Ltd
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Abstract

The utility model relates to a polycrystalline silicon processing equipment technical field, concretely relates to polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid, slicer and hydrojet machine including installation of processing platform, processing bench end, the below of slicer is equipped with the waste liquid collecting vat, the lower extreme of waste liquid collecting vat has recovery processing device through feed liquor pipe through connection, and recovery processing device is located the lower extreme of processing platform, recovery processing device's output passes through the back flow and is connected with the hydrojet machine. The utility model overcomes prior art's is not enough, reasonable in design, and compact structure, the effectual unable direct use of waste liquid after having solved the cutting, the processing need consume a large amount of manpower and materials, must not repay, direct emission then can cause the problem of wasting of resources.

Description

Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid
Technical Field
the utility model relates to a polycrystalline silicon processing equipment technical field, concretely relates to polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid.
background
Polycrystalline silicon is a form of elemental silicon. When molten elemental silicon is solidified under undercooling conditions, silicon atoms are arranged in the form of a diamond lattice into a plurality of crystal nuclei, and if the crystal nuclei grow into crystal grains with different crystal plane orientations, the crystal grains are combined and crystallized into polycrystalline silicon.
The existing polycrystalline silicon for the solar cell is produced by a polycrystalline silicon ingot furnace, the polycrystalline silicon ingot is subjected to head and tail removal and is sliced to form a polycrystalline silicon slice, the polycrystalline silicon slice is reprocessed to obtain the polycrystalline silicon, cutting fluid with lubricating and cooling functions is used in the cutting process of the polycrystalline silicon ingot to reduce the damage of mechanical stress and thermal stress in the cutting process, however, after the polycrystalline silicon ingot is cast and cut, a large amount of cutting waste liquid, silicon powder with cutting loss, saw wire metal and other substances are mixed and discharged, the waste liquid of the part cannot be directly used, however, a large amount of manpower and material resources are consumed when the existing enterprises treat the cutting waste liquid, the waste is not compensated, and the waste of resources is caused by direct discharge.
Therefore, a recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid is provided.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
the utility model provides a not enough to prior art, the utility model provides a polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid has overcome the not enough of prior art, reasonable in design, and compact structure, the effectual unable direct use of waste liquid after having solved the cutting, the processing need consume a large amount of manpower and materials, must not pay attention to, directly discharge then can cause the problem of wasting of resources.
(II) technical scheme
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes:
A recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid comprises a processing table, a slicing machine and a liquid spraying machine, wherein the slicing machine and the liquid spraying machine are mounted at the upper end of the processing table;
The recycling treatment device comprises a waste liquid tank, the waste liquid tank is connected with the lower end of a waste liquid collecting tank through a liquid inlet pipe in a penetrating manner, an output pipe is inserted in the waste liquid tank and is located on one section of an inner cavity of the waste liquid tank, a liquid pump is installed on the other end of the output pipe, a filtering assembly is connected to the other side of the filtering assembly, a sedimentation assembly is connected to the other side of the filtering assembly through a first connecting pipe in a penetrating manner, the sedimentation assembly is connected with an aeration assembly through a second connecting pipe, a backflow tank is connected to the upper portion of the side wall of the aeration assembly through a liquid outlet pipe in a penetrating manner, and.
Furthermore, the filter assembly comprises a filter box, the filter screen plate is obliquely installed on the upper portion of the inner cavity of the filter box, a scraper is installed at the upper end of the filter screen plate in a sliding mode, the scraper is installed on the side wall of the filter box through an electric push rod, the powder collecting box is installed at the rear end of the filter box, an ash discharging hole penetrating through the rear wall of the filter box is formed in the front wall of the powder collecting box, and the lower port of the ash discharging hole is flush with the upper port of the filter screen plate.
Further, the sediment subassembly includes the setting tank, the lower extreme of setting tank link up and installs a plurality of mud branch pipes that go out, and goes out the other end of mud branch pipe and install on same mud house steward, it installs on the input of sludge pump to go out the mud house steward, and installs defeated mud pipe on the output of sludge pump, the other end of defeated mud pipe link up and installs the lateral wall upper portion at the powder collecting box.
Further, the aeration subassembly includes the aeration tank, the inner chamber lower extreme parallel of aeration tank is equipped with a plurality of aeration branch pipes, and installs a plurality of air cocks on the aeration branch pipe, and is a plurality of the one end of aeration branch pipe all arrives the exocoel of aeration tank and installs on same aeration main, the last air pump of installing of aeration main.
Furthermore, the lower part of the inner cavity of the settling tank is of an inverted-platform structure which inclines inwards.
Furthermore, the inclined included angle between the filter screen plate and the inner wall of the filter box is 45-60 degrees.
furthermore, a powder discharge port is formed in the lower portion of the side wall of the powder collecting box, and a pinch valve is mounted on the powder discharge port.
(III) advantageous effects
The embodiment of the utility model provides a polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid. The method has the following beneficial effects:
1. Through the integrated configuration of waste liquid collecting vat, feed liquor pipe and waste liquid case, effectual waste liquid after the slicer section is collected and flows into the waste liquid case through the feed liquor pipe in, the waste of waste liquid is avoided in the effectual collection of accomplishing the waste liquid, is convenient for carry on the recycle of waste liquid on next step.
2. Through the integrated configuration of waste liquid case, the output tube, filter assembly, first connecting pipe, sediment subassembly, aeration subassembly, the second connecting pipe, drain pipe and backward flow case, filter in pumping the cutting waste liquid in the waste liquid case to filter assembly earlier, wherein impurity such as silica flour that mixes in the cutting waste liquid is discharged in the powder collecting box, the cutting waste liquid after the filtration becomes cutting fluid that can reuse through the sediment aeration treatment of sediment subassembly and aeration subassembly, effectual completion recovery processing, and the production cost is saved.
3. Through the integrated configuration of rose box, filter plate, powder collecting box, electric putter, scraper blade, electric putter starts, drives the scraper blade motion, pushes the tiny solid particle such as silica flour that filters off on the filter plate in the powder collecting box, accomplishes lasting filtration, simultaneously, combines sludge pump and mud pipe to deposit silica flour from the bottom suction of the setting tank, and the effectual whole recovery of accomplishing silica flour has reduced the waste of resource, has improved the recovery of cutting fluid greatly and has recycled.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a top view of the recycling device of the present invention;
FIG. 3 is a schematic structural view of a filter assembly of the present invention;
FIG. 4 is a rear view of the interior of the settling assembly of the present invention;
Fig. 5 is a schematic view of the combined structure of the middle aeration assembly and the return tank of the present invention.
In the figure: the processing table 1, the slicing machine 2, the liquid sprayer 3, the waste liquid collecting tank 4, the recovery processing device 5, the waste liquid tank 51, the output pipe 52, the filtering component 53, the filtering box 531, the filtering screen 532, the powder collecting tank 533, the electric push rod 534, the scraper 535, the first connecting pipe 54, the settling component 55, the settling tank 551, the mud outlet branch pipe 552, the mud outlet main pipe 553, the mud pump 554, the mud conveying pipe 555, the pinch valve 536, the aeration component 56, the aeration tank 561, the aeration branch pipe 562, the air nozzle 563, the aeration main pipe 564, the air pump 565, the second connecting pipe 57, the liquid outlet pipe 58, the return tank 59 and the return pipe 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Referring to the attached drawing 1, an embodiment of the utility model provides a pair of polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid, slicer 2 and hydrojet 3 including installation of processing platform 1, 1 upper end of processing platform, the below of slicer 2 is equipped with waste liquid collecting vat 4, there is recovery processing device 5 waste liquid collecting vat 4's lower extreme through feed liquor pipe through connection, and recovery processing device 5 is located the lower extreme of processing platform 1, through waste liquid collecting vat 4 and feed liquor pipe, in effectual collecting the waste liquid after 2 sections of slicer and flowing into waste liquid case 51 through the feed liquor pipe, the collection of effectual completion waste liquid avoids the waste liquid, is convenient for carry out the recycle of waste liquid on next step, recovery processing device 5's output is connected with hydrojet 3 through back flow 6, directly carries out the recycle of cutting fluid.
In this embodiment, as shown in fig. 2, the recycling device 5 includes a waste liquid tank 51, the waste liquid tank 51 is connected to the lower end of the waste liquid collecting tank 4 through a liquid inlet pipe, an output pipe 52 is inserted into the waste liquid tank 51, a liquid pump is installed on a section of the output pipe 52 located in the inner cavity of the waste liquid tank 51, the other end of the output pipe 52 is connected to a filter assembly 53, the other side of the filter assembly 53 is connected to a precipitation assembly 55 through a first connecting pipe 54, the precipitation assembly 55 is connected to an aeration assembly 56 through a second connecting pipe 57, the upper portion of the sidewall of the aeration assembly 56 is connected to a return tank 59 through a liquid outlet pipe 58, the return tank 59 is connected to the input end of the liquid spraying machine 3 through a return pipe 6, the cutting waste liquid in the waste liquid tank 51 is firstly pumped into the filter assembly 53 for filtering, wherein impurities such as silicon powder mixed in the cutting waste liquid, the filtered cutting waste liquid is changed into cutting liquid which can be reused through the precipitation aeration treatment of the precipitation component 55 and the aeration component 56, the recovery treatment is effectively finished, and the production cost is saved.
In this embodiment, as shown in fig. 3, the filtering assembly 53 includes a filtering box 531, a filtering screen 532 is obliquely installed on an upper portion of an inner cavity of the filtering box 531, a scraper 535 is slidably installed on an upper end of the filtering screen 532, the scraper 535 is installed on a side wall of the filtering box 531 through an electric push rod 534, a powder collecting box 533 is installed at a rear end of the filtering box 531, an ash discharging hole penetrating through a rear wall of the filtering box 531 is formed in a front wall of the powder collecting box 533, a lower port of the ash discharging hole is flush with an upper port of the filtering screen 532, a liquid pump installed on an output pipe 52 lifts waste liquid in the waste liquid box 51 into the filtering box 531, then the waste liquid is filtered through the obliquely installed filtering screen 532, the electric push rod 534 is started to drive the scraper 535 to move, and micro solid particles such as silicon powder filtered from the filtering screen 532 are pushed into the powder collecting box 533 to complete continuous filtering, meanwhile, the precipitated silicon powder sucked out from the bottom of the precipitation tank 551 by combining the sludge pump 554 and the sludge conveying pipe 555 is effectively recycled, so that the waste of resources is reduced, and the recycling of the cutting liquid is greatly improved.
In this embodiment, as shown in fig. 4, the settling assembly 55 includes a settling tank 551, a plurality of sludge outlet branch pipes 552 are installed at the lower end of the settling tank 551 in a penetrating manner, the other ends of the sludge outlet branch pipes 552 are installed on the same sludge outlet main pipe 553, the sludge outlet main pipe 553 is installed at the input end of a sludge pump 554, a sludge conveying pipe 555 is installed at the output end of the sludge pump 554, the other end of the sludge conveying pipe 555 is installed at the upper portion of the side wall of the powder collecting box 533 in a penetrating manner, the filtered cutting waste liquid enters the settling tank 551 for settling, impurities such as silicon powder in the waste liquid fall to the bottom of the settling tank 551 during settling, and then the sludge pump 554 is started to discharge the impurities such as silicon powder into the powder collecting box 533, thereby effectively completing the collection of the silicon powder.
in this embodiment, as shown in fig. 2 and 5, the aeration assembly 56 includes an aeration tank 561, a plurality of aeration branch pipes 562 are arranged in parallel at the lower end of an inner cavity of the aeration tank 561, and a plurality of air nozzles 563 are installed on the aeration branch pipes 562, one end of each of the plurality of aeration branch pipes 562 reaches the outer cavity of the aeration tank 561 and is installed on the same main aeration pipe 564, an air pump 565 is installed on the main aeration pipe 564, the air pump 565 is started, external oxygen is filled into the precipitated waste liquid through the main aeration pipe 564, the aeration branch pipes 562, and the plurality of air nozzles 563, so that suspended impurities in the waste liquid are effectively reduced, and the waste liquid is convenient to recycle.
In this embodiment, as shown in fig. 4, the lower part of the inner cavity of the settling tank 551 is an inverted-platform structure inclined inward, so that impurities such as silicon powder in the waste liquid fall to the bottom of the settling tank 551 during settling, and are then sucked and collected by a sludge pump 554.
In this embodiment, as shown in fig. 3, the inclined angle between the filter screen plate 532 and the inner wall of the filter box 531 is 45 ° to 60 °.
in this embodiment, as shown in fig. 3, a powder discharge port is formed in a lower portion of a side wall of the powder collection box 533, a pinch valve 536 is installed on the powder discharge port, and the collected silicon powder in the powder collection box 533 is effectively discharged through the pinch valve 536 installed on the powder discharge port, so that the silicon powder is recycled.
According to the utility model discloses above-mentioned embodiment, through recovery processing device 5 to the recovery processing of waste liquid, equally also cool down the cutting fluid of high temperature after handling the circulation, the recycling of the hydrojet machine 3 of being convenient for has improved the utilization efficiency of resource greatly.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims (7)

1. The utility model provides a polycrystalline silicon piece buddha's warrior attendant line cutting recovery processing device for liquid, includes slicer and hydrojet machine of processing platform, the installation of processing bench end, its characterized in that: a waste liquid collecting tank is arranged below the slicing machine, the lower end of the waste liquid collecting tank is in through connection with a recovery processing device through a liquid inlet pipe, the recovery processing device is positioned at the lower end of the processing table, and the output end of the recovery processing device is connected with a liquid spraying machine through a return pipe;
The recycling treatment device comprises a waste liquid tank, the waste liquid tank is connected with the lower end of a waste liquid collecting tank through a liquid inlet pipe in a penetrating manner, an output pipe is inserted in the waste liquid tank and is located on one section of an inner cavity of the waste liquid tank, a liquid pump is installed on the other end of the output pipe, a filtering assembly is connected to the other side of the filtering assembly, a sedimentation assembly is connected to the other side of the filtering assembly through a first connecting pipe in a penetrating manner, the sedimentation assembly is connected with an aeration assembly through a second connecting pipe, a backflow tank is connected to the upper portion of the side wall of the aeration assembly through a liquid outlet pipe in a penetrating manner, and.
2. The recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid according to claim 1, characterized in that: the filter assembly comprises a filter box, a filter screen plate is obliquely installed on the upper portion of an inner cavity of the filter box, a scraper is installed at the upper end of the filter screen plate in a sliding mode, the scraper is installed on the side wall of the filter box through an electric push rod, a powder collecting box is installed at the rear end of the filter box, an ash discharging hole penetrating through the rear wall of the filter box is formed in the front wall of the powder collecting box, and the lower port of the ash discharging hole is flush with the upper port of the filter screen plate.
3. The recovery processing device for polycrystalline silicon wafer diamond wire cutting fluid according to any one of claims 1 to 2, characterized in that: the sedimentation component comprises a sedimentation tank, a plurality of mud outlet branch pipes are arranged at the lower end of the sedimentation tank in a penetrating mode, the other ends of the mud outlet branch pipes are arranged on the same mud outlet main pipe, the mud outlet main pipe is arranged at the input end of a sludge pump, a mud conveying pipe is arranged at the output end of the sludge pump, and the other end of the mud conveying pipe is arranged at the upper portion of the side wall of the powder collecting box in a penetrating mode.
4. The recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid according to claim 1, characterized in that: aeration subassembly includes the aeration tank, the inner chamber lower extreme parallel of aeration tank is equipped with a plurality of aeration branch pipes, and installs a plurality of air cocks on the aeration branch pipe, and is a plurality of the one end of aeration branch pipe all arrives the exocoel of aeration tank and installs on same aeration main, the last air pump of installing of aeration main.
5. the recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid according to claim 3, characterized in that: the lower part of the inner cavity of the settling tank is of an inverted-platform structure which inclines inwards.
6. The recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid according to claim 2, characterized in that: the inclined included angle between the filter screen plate and the inner wall of the filter box is 45-60 degrees.
7. The recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid according to claim 2, characterized in that: the powder discharging port is formed in the lower portion of the side wall of the powder collecting box, and a pinch valve is mounted on the powder discharging port.
CN201920081403.1U 2019-01-17 2019-01-17 Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid Expired - Fee Related CN209794247U (en)

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CN201920081403.1U CN209794247U (en) 2019-01-17 2019-01-17 Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid

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CN201920081403.1U CN209794247U (en) 2019-01-17 2019-01-17 Recovery processing device for polycrystalline silicon wafer diamond wire cutting liquid

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112263868A (en) * 2020-11-04 2021-01-26 苏州晋昌胶粘制品有限公司 Crystal back grinding water, diamond wire slicing water and sludge recycling system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112263868A (en) * 2020-11-04 2021-01-26 苏州晋昌胶粘制品有限公司 Crystal back grinding water, diamond wire slicing water and sludge recycling system

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Granted publication date: 20191217

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CF01 Termination of patent right due to non-payment of annual fee