CN209782661U

CN209782661U - Chemical supply system

Info

Publication number: CN209782661U
Application number: CN201920224618.4U
Authority: CN
Inventors: 田文礼
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-02-22
Filing date: 2019-02-22
Publication date: 2019-12-13
Anticipated expiration: 2029-02-22

Abstract

The utility model provides a chemical supply system, at least including main supply cabinet, main supply cabinet is from up including in proper order down: the device comprises a first catalytic combustion chamber, a liquid storage isolation chamber and a liquid supply and control chamber. The main supply cabinet is arranged in a three-dimensional space arrangement mode, and the catalytic combustion chamber is arranged at the lowest layer of the main supply cabinet, so that the effective isolation of leakage combustion is realized; the waterproof and moistureproof capacity of the system can be improved by adopting a three-chamber separation mode; the liquid outlet is formed in the lower end of the liquid storage container, so that the gas-electricity cost of bottle changing operation can be reduced, the bottle changing purging reliability is improved, the material waste is reduced, the emergency discharge treatment is increased, and the risk of temperature rise and explosion disasters of a chemical liquid leakage breeding system is improved; an air suction opening is formed in each chamber, so that the moisture-proof capacity of the system is further improved, and the safety performance of the system is improved; the working states among the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber are automatically controlled through the electric control chamber, so that automation and electronization of system operation are realized.

Description

Chemical supply system

Technical Field

The utility model relates to a photovoltaic, LED, liquid crystal, semiconductor device field especially relate to a chemical supply system.

Background

With the more serious shortage of energy, the development of the solar energy industry is more and more emphasized by people, and under the background of the current state of vigorously preparing the 2025 manufactured in China, chip semiconductors such as LEDs and the like can be developed better and better. In the semiconductor industry of chips such as solar photovoltaic and LED, with the development of technological innovation, organic metal compounds such as TMA (trimethyl aluminum, molecular formula C3H9Al, molecular weight 72.08) are used in the manufacturing process, and the chemical is easily soluble in organic solvents such as ether and saturated hydrocarbon. Trimethylaluminum can be burnt in air and explode when meeting water to generate aluminum hydroxide and methane. Trimethylaluminum is a lewis acid that can be combined with donors such as amines, phosphines, ethers, and thioethers.

The metal compound chemical risk classes represented by TMA were classified into class a 4 articles. Generally, the liquid is supplied in a liquid state, the requirements on temperature and humidity are high (the crystallization temperature is 15 ℃, the optimal storage temperature is 22-28 ℃, and the humidity is less than 70%), liquid drops are easy to attach to the pipe wall and not easy to purge, and the liquid drops meet the risk of water explosion when burning air. Great difficulty and risk exist in the aspects of planning and designing supply places, fire-fighting design, water and moisture prevention, maintenance operation and the like.

The traditional chemical supply system has defects in the aspects of water and moisture prevention and leakage fire prevention treatment, and is usually designed into a metal cabinet body, placed on the ground and exhausted from the top of the cabinet. The cabinet body, the pipeline and the control system circuit are extremely easy to be damaged by heat conduction after leakage or ignition, the suppression treatment of the fire source is insufficient, the explosion risk is easy to occur, the residual amount of the steel cylinder is large, the cost is wasted, the operation difficulty of replacing the steel cylinder is high, the period is long, and the problems of smoking, open fire and the like still exist for 500 times of purging.

Therefore, it is necessary to provide a chemical supply system to improve the safety of supply and operation and avoid secondary accidents caused by chemical leakage.

SUMMERY OF THE UTILITY MODEL

In view of the above shortcomings in the prior art, an object of the present invention is to provide a chemical supply system for solving the problems of insufficient waterproof and moistureproof performance of chemical process systems and insufficient disposal manner of fire leakage, easy occurrence of explosion risk, etc. in the prior art.

To achieve the above and other related objects, the present invention provides a chemical supply system, which comprises at least a main supply cabinet, the main supply cabinet comprising from bottom to top in sequence: the device comprises a first catalytic combustion chamber, a liquid storage isolation chamber and a liquid supply and control chamber; wherein

The side wall of the first catalytic combustion chamber is provided with a first catalytic combustion chamber air suction opening, an air inlet and a pipeline interface;

The side wall of the liquid storage isolation chamber is provided with a liquid storage isolation chamber air suction opening and a pipeline interface, a liquid storage container is arranged in the liquid storage isolation chamber, and the lower end of the liquid storage container is provided with a liquid outlet;

The liquid supply and control chamber comprises a liquid supply chamber and an electric control chamber, the side wall of the liquid supply chamber is provided with a liquid supply chamber air suction opening and a pipeline interface, and the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber are all electrically connected with the electric control chamber;

The pipeline is connected with the pipeline among the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber through a pipeline interface of the first catalytic combustion chamber, a pipeline interface of the liquid storage isolation chamber and a pipeline interface of the liquid supply chamber.

Optionally, first catalytic combustion chamber the air intake sets up to one-way back-fire relief air inlet tripe, the bottom of first catalytic combustion chamber is provided with vermiculite or adsorption reaction material, first catalytic combustion chamber lateral wall still is equipped with access hole and window, the bottom of stock solution isolation room be equipped with the slope low point and with be equipped with first built-in sloping pipe runner between the first catalytic combustion chamber, the bottom of confession liquid chamber be equipped with the slope low point and with be equipped with the built-in sloping pipe runner of second between the stock solution isolation room.

Further, the bottom of stock solution isolation room is equipped with electronic gyro wheel platform scale, first catalytic combustion chamber lateral wall the window sets up to high temperature resistant glass window, in the first catalytic combustion chamber the stock solution isolation is indoor reaches still be provided with temperature sensor and infrared/ultraviolet sensor in the confession liquid chamber, on the first built-in slide pipe runner reach all be provided with embedded catheter and weeping check valve on the built-in slide pipe runner of second, the electric control room is provided with inside and outside chain incessant power supply system of UPS and programmable logic control system.

Further, be equipped with evacuation pipeline, pressure release pipeline, air inlet pipeline and sweep the pipeline in the confession liquid chamber, first catalytic combustion chamber lateral wall still is equipped with reserves the pipe connection mouth, stock solution isolation chamber lateral wall still is equipped with the stock solution container and reserves the pipe connection mouth, the confession liquid chamber lateral wall still is equipped with reserves the pipe connection mouth.

Further, the side walls of the liquid storage isolation chamber and the liquid supply chamber are provided with fire interfaces.

Furthermore, the main supply cabinet also comprises an automatic lifting system and an auxiliary roller mechanism.

Further, the material of the main supply cabinet is a laminated layer of a steel plate and a high-temperature resistant heat insulating material.

Optionally, the chemical supply system further comprises an exhaust treatment system, the exhaust treatment system comprising: a fan and a water washing type treatment tower; wherein

the fan and the water washing type treatment tower are connected with the first catalytic combustion chamber air suction opening, the liquid storage isolation chamber air suction opening and the liquid supply chamber air suction opening through pipelines;

The fan is arranged on pipelines behind the first catalytic combustion chamber air suction opening, the liquid storage isolation chamber air suction opening and the liquid supply chamber air suction opening.

Further, the material of the water washing type treatment tower is set to be a hot-dip galvanized plate or a stainless steel plate.

optionally, a bottom water chamber of the water washing treatment tower is set to be a square slope or a circular slope, and the fan is designed in a siphon mode.

Optionally, the chemical supply system further comprises a VMB regulated supply cabinet, which comprises, in order from bottom to top: a second catalytic combustion chamber and a daily liquid storage container liquid supply chamber; wherein

The second catalytic combustion chamber is arranged the same as the first catalytic combustion chamber;

The liquid supply chamber of the daily liquid storage container is provided with a liquid suction opening of the daily liquid storage container, a pipeline interface and a pressure stabilizing system, and the daily liquid storage container is arranged in the liquid supply chamber of the daily liquid storage container;

The pipeline realizes the pipeline connection of the second catalytic combustion chamber and the daily liquid storage container liquid supply chamber through a pipeline interface of the second catalytic combustion chamber and a pipeline interface of the daily liquid storage container liquid supply chamber;

the liquid storage device comprises a daily liquid storage container, a liquid outlet, a liquid inlet, a pipeline, a chemical liquid supply end and a process equipment end, wherein the lower end of the daily liquid storage container is provided with the liquid outlet, the upper end of the daily liquid storage container is provided with the liquid inlet, the liquid outlet of the liquid storage container is connected with the liquid inlet of the daily liquid storage container through the pipeline, the liquid outlet of the daily liquid storage container supplies the chemical liquid to the process equipment end through the pipeline interface and the pipeline.

Further, the second catalytic combustion chamber air suction opening and the daily liquid storage container liquid supply chamber air suction opening are connected with a tail gas treatment unit or a plant waste gas end through pipelines.

Optionally, the VMB regulated supply cabinet is made of a laminated steel plate and a high-temperature-resistant heat-insulating material.

Optionally, the main supply cabinet is arranged in a room, and a liquid sensor, a gas detector, a smoke sensor, an infrared/ultraviolet sensor, a temperature sensor, a humidity sensor, an explosion-proof power supply cabinet and an explosion-proof constant-temperature air conditioner are arranged in the room.

as described above, the chemical supply system of the present invention adopts the three-dimensional space arrangement mode to arrange the main supply cabinet and set the catalytic combustion chamber at the lowest layer of the main supply cabinet, when the pipeline is damaged or the valve in the pipeline is damaged in the chemical supply process to cause gas and/or liquid leakage, the leaked gas and/or liquid can be discharged into the catalytic combustion chamber for catalytic combustion, thereby realizing effective isolation of the leakage combustion; the waterproof and moistureproof capacity of the system can be improved by adopting a three-chamber separation mode; the liquid outlet is formed in the lower end of the liquid storage container, and the liquid outlet is connected into the catalytic combustion chamber through the bypass valve and a corresponding pipeline interface, so that the gas-electricity cost of bottle changing operation can be reduced, the bottle changing purging reliability is improved, the material waste is reduced, the emergency discharge treatment is increased, the risk of temperature rise and explosion hazards of a chemical liquid leakage breeding system is improved, the residual amount of liquid in the liquid storage container can be reduced, the material utilization rate is improved, and the cost is reduced; an air suction opening is formed in each chamber, so that the moisture-proof capacity of the system is further improved, and the safety performance of the system is improved; the working states among the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber are automatically controlled through the electric control chamber, so that automation and electronization of system operation are realized.

Drawings

Fig. 1 is a schematic perspective view of a main supply cabinet in a chemical supply system according to the present invention.

Fig. 2 is a schematic diagram showing the PID of the main supply tank in the chemical supply system of the present invention.

Fig. 3 is a schematic view showing a connection structure of the main supply cabinet, the tail gas treatment system and the room in the chemical supply system according to the present invention.

Fig. 4 is a schematic diagram showing the PID of the main supply tank and the VMB regulated supply tank in the chemical supply system of the present invention.

Description of the element reference numerals

11 first catalytic combustor

110 first catalytic combustion chamber air suction opening

111 air inlet

112 purge and vent line interface

113 Detachable access hole and window

114 reserved pipeline purging pipeline connector

115 vermiculite

12 liquid storage isolation chamber

120 stock solution isolation room suction opening

121 pipeline interface

122 first built-in ramp pipe flow passage

123 Embedded catheter

124 leakage check valve

Reserved pipeline joint of 125 liquid storage container

126 fire interface

127 electronic roller platform scale

13 liquid storage container

131 liquid outlet

14 pipeline

15 temperature sensor

16 infrared/ultraviolet sensor

17 liquid supply chamber

170 liquid supply chamber suction opening

171 pipeline interface

172 reserved pipeline connector

18 electric control room

19 automatic lifting system and auxiliary roller mechanism

21 blower fan

22 water washing type treating tower

31 second catalytic combustor

liquid supply chamber of 32-day liquid storage container

Air suction opening of liquid supply chamber of 320 day liquid storage container

321 voltage stabilizing system

33 day liquid storage container

331 liquid inlet

332 outlet port

40 factory waste gas end

50 room

51 liquid sensor

52 gas detector

53 Smoke sensor

54 infrared/ultraviolet sensor

55 temperature sensor

56 humidity sensor

57 explosion-proof power supply cabinet

58 explosion-proof constant temperature air conditioner

Detailed Description

The following description is provided for illustrative purposes, and other advantages and features of the present invention will become apparent to those skilled in the art from the following detailed description.

please refer to fig. 1 to 4. It should be understood that the structure, ratio, size and the like shown in the drawings attached to the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any structure modification, ratio relationship change or size adjustment should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the function that the present invention can produce and the purpose that the present invention can achieve. Meanwhile, the terms such as "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof may be made without substantial technical changes, and the present invention is also regarded as the scope of the present invention.

As shown in fig. 1 and 2, the utility model provides a chemical supply system, its characterized in that, chemical supply system includes main supply cabinet at least, main supply cabinet includes from down up in proper order: the device comprises a first catalytic combustion chamber 11, a liquid storage isolation chamber 12 and a liquid supply and control chamber; wherein

The side wall of the first catalytic combustion chamber 11 is provided with a first catalytic combustion chamber suction opening 110, an air inlet 111, a purging and emptying pipeline connector 112, and the first catalytic combustion chamber suction opening, the air inlet and the purging and emptying pipeline connector mainly play a role in actively and harmlessly catalyzing and combusting residual gas leaked from a liquid storage isolation chamber and a liquid supply chamber and purged and residual gas;

A liquid storage isolation chamber air suction opening 120 and a pipeline interface 121 are formed in the side wall of the liquid storage isolation chamber 12, a liquid storage container 13 is arranged in the liquid storage isolation chamber 12, and a liquid outlet 131 is formed in the lower end of the liquid storage container 13;

The liquid supply and control chamber comprises a liquid supply chamber 17 and an electric control chamber 18, a liquid supply chamber air suction opening 170 and a pipeline interface 171 are arranged on the side wall of the liquid supply chamber 17, and the first catalytic combustion chamber 11, the liquid storage isolation chamber 12 and the liquid supply chamber 17 are all electrically connected with the electric control chamber 18;

The pipeline 4 realizes the pipeline connection among the first catalytic combustion chamber 11, the liquid storage isolation chamber 12 and the liquid supply chamber 17 through the purging and emptying pipeline interface 112 of the first catalytic combustion chamber 11, the pipeline interface 121 of the liquid storage isolation chamber 12 and the pipeline interface 171 of the liquid supply chamber 17.

The utility model adopts a three-dimensional space arrangement mode to arrange the main supply cabinet and arrange the catalytic combustion chamber 11 at the lowest layer of the main supply cabinet, when the pipeline is damaged or the valve in the pipeline is damaged in the chemical liquid supply process to cause gas and/or liquid leakage, the leaked gas and/or liquid can be discharged into the catalytic combustion chamber for catalytic combustion, thereby realizing the effective isolation of the leakage combustion; the waterproof and moistureproof capacity of the system can be improved by adopting a three-chamber separation mode; the liquid outlet is formed in the lower end of the liquid storage container, and the liquid outlet is connected into the catalytic combustion chamber through the bypass valve and a corresponding pipeline interface, so that the gas-electricity cost of bottle changing operation can be reduced, the bottle changing purging reliability is improved, the material waste is reduced, the emergency discharge treatment is increased, the risk of temperature rise and explosion hazards of a chemical liquid leakage breeding system is improved, the residual amount of liquid in the liquid storage container can be reduced, the material utilization rate is improved, and the cost is reduced; an air suction opening is formed in each chamber, so that the moisture-proof capacity of the system is further improved, and the safety performance of the system is improved; the working states among the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber are automatically controlled through the electric control chamber, so that automation and electronization of system operation are realized.

as shown in fig. 1, the air inlet 111 of the first catalytic combustion chamber 11 is provided with a unidirectional fire-retardant air inlet louver as an example. Catalytic combustion supporting is realized while high-temperature airflow is prevented from flowing out into the room 50.

As shown in fig. 3, as an example, vermiculite or an adsorption reaction material is disposed at the bottom of the first catalytic combustor 11 for adsorption or catalytic reaction, and in this embodiment, vermiculite 115 is used.

As shown in fig. 1, as an example, the sidewall of the first catalytic combustor 11 is further provided with a detachable access opening and a window 113, so that the catalytic combustor can be inspected in real time, and the state inside the catalytic combustor can be observed in real time. Preferably, the window of the side wall of the first catalytic combustor 11 is a high temperature resistant glass window.

As shown in fig. 1 and 3, for example, a gradient low point is provided at the bottom of the storage compartment 12 and a first built-in gradient pipe passage 122 is provided between the storage compartment and the first catalytic combustion chamber 11, and a gradient low point is provided at the bottom of the liquid supply compartment 17 and a second built-in gradient pipe passage is provided between the storage compartment 12. Through setting up first built-in pipe chute runner reaches the built-in pipe chute runner of second can effectively make the leakage liquid flow catalytic reaction in the catalytic combustion chamber, prevents to leak unable timely processing in the back, and the reaction that lasts heaies up causes the explosion disaster. Preferably, as shown in fig. 3, embedded liquid guiding pipes 123 and liquid leakage check valves 124 are disposed on the first built-in slide pipe flow passage 122 and the second built-in slide pipe flow passage, so as to effectively block high temperature air flow from rising to the liquid storage and isolation chamber, thereby achieving the effects of isolation and temperature reduction.

As shown in fig. 1, for example, the side walls of the liquid storage isolation chamber 12 and the liquid supply chamber 17 are provided with fire-fighting interfaces 126, through which external cooling substances can be introduced when leakage occurs, so as to prevent fire and explosion.

As shown in fig. 1, as an example, an electronic roller platform scale 127 is disposed at the bottom of the liquid storage isolation chamber 12, and the liquid storage container 13 is placed on the electronic roller platform scale, so that the weight of the remaining liquid can be known in real time, and the roller facilitates the movement of the liquid storage container.

as shown in fig. 1 and 3, as an example, a temperature sensor 15 and an infrared/ultraviolet sensor 16 are further disposed in the first catalytic combustion chamber 11, the liquid storage isolation chamber 12, and the liquid supply chamber 17, so that an alarm system can be activated to perform rescue operation according to the temperature measured by the sensors.

As shown in fig. 1, the electrical control room 18 is provided with, as an example, a UPS internal and external interlock uninterruptible power supply system and a programmable logic control system. The UPS internal and external interlocking uninterrupted power supply system ensures stable power supply of the system. The programmable logic control system can monitor the temperature in a room, the humidity/state of each area of a heating zone of a transmission pipeline, the smoke concentration, the infrared/ultraviolet, the read value of a chemical detector of each chamber, the temperature of each chamber, the static pressure of waste gas, the state of a fan, the manual and automatic control setting, the state of a water pump, the manual and automatic control setting, the residual quantity of a liquid storage container, the supply pressure, the temperature and the set value of each section of the heating zone through a PID (proportion integration differentiation) flow chart, the action and the pressure state of each valve in a blowing and ring evaluation mode, the functions of parameter setting, bottle replacement and blowing, maintenance, sensor calibration and the like can be realized through the touch display of an operation.

as shown in fig. 1, as an example, an evacuation line, a pressure relief line, an air inlet line, and a purge line are disposed in the liquid supply chamber 17, a reserved line purge line connector 114 is further disposed on a side wall of the first catalytic combustion chamber 11, a reserved line connector 125 is further disposed on a side wall of the liquid storage isolation chamber 12, and a reserved line connector 172 is further disposed on a side wall of the liquid supply chamber 17. The pipeline can realize that the tail gas and/or liquid extracted by the vacuum pipeline during vacuumizing, the tail gas and/or liquid extracted by the pressure relief pipeline during pressure relief and the tail gas and/or liquid blown out by the purging pipeline during purging are discharged into the catalytic combustion chamber for catalytic combustion through the reserved pipeline purging pipeline connectors 114, 125 and 172.

As shown in fig. 1, the main supply cabinet further includes an automatic lifting system and an auxiliary roller mechanism 19, as an example. The general design comprises bearing girder steel guide rail, step motor, steel wire cable rope and damping pulley block etc. realizes the safe lift displacement function of stock solution container, accomplishes lift translation and location monitoring function by control system, reduces the personnel error risk in the operation of traditional fork truck bottle changing.

As an example, the material of the main supply cabinet is a laminated layer of steel plates and high-temperature-resistant heat-insulating materials, and is mainly used for high-temperature resistance, partition isolation and explosion prevention. For example, the inner wall steel plate and the outer high-temperature resistant rechecking heat-insulating material can be wrapped, or the outer steel plate and the inner high-temperature resistant rechecking heat-insulating material can be designed in a pasting mode.

As shown in fig. 3, the chemical supply system further includes, as an example, an exhaust gas treatment system including: a blower 21 and a water washing type treatment tower 22; wherein

The fan 21 and the water washing type treatment tower 22 are connected with the first catalytic combustion chamber suction opening 110, the liquid storage isolation chamber suction opening 120 and the liquid supply chamber suction opening 170 through a pipeline 14;

The blower 21 is disposed on the pipeline behind the first catalytic combustion chamber suction opening 110, the liquid storage isolation chamber suction opening 120, and the liquid supply chamber suction opening 170.

Through setting up tail gas processing system, can cool down the dust removal with exhaust raffinate residual gas in catalytic combustion room, stock solution isolation room and the confession liquid chamber.

By way of example, the material of the rinse-off tower 22 is provided as a hot-dip galvanized or stainless steel plate, which provides substantial resistance to corrosive attack and high temperatures.

As an example, the bottom water chamber of the water washing treatment tower 22 is configured as a square slope or a circular slope, and the fan 21 is designed in a siphon manner. The water chamber at the bottom of the tower adopts a square slope design or a circular slope design, so that the deposition of solid low points can be effectively promoted, the deposition of crystallized dust is facilitated, the cleaning is convenient, and the service life of a water pump is prolonged. The fan adopts the siphon mode design, effectively avoids the fan problem of being heated, reduces occupation of land space, reduces the loss of high temperature waste gas to fan 21.

As shown in fig. 4, the chemical supply system further includes, as an example, a VMB regulated supply cabinet, which includes, from bottom to top: a second catalytic combustion chamber 31 and a daily liquid storage container liquid supply chamber 32; wherein

The second catalytic combustion chamber 31 is arranged the same as the first catalytic combustion chamber 11, and mainly plays a role in actively and harmlessly catalyzing and combusting residual gas leaked and blown from a day-tank liquid storage container and a daily liquid storage container liquid supply chamber;

The liquid feeding chamber 32 of the liquid storage container is provided with a liquid suction opening 320 of the liquid feeding chamber of the liquid storage container, a pipeline interface and pressure stabilizing system 321, and the liquid storage container 33 of the liquid storage container is arranged in the liquid feeding chamber 32 of the liquid storage container;

The pipeline 14 realizes the pipeline connection of the second catalytic combustion chamber 31 and the daily liquid storage container liquid supply chamber 32 through the pipeline interface of the second catalytic combustion chamber 31 and the pipeline interface of the daily liquid storage container liquid supply chamber 32;

The lower end of the daily liquid storage container 33 is provided with a liquid outlet 332, the upper end of the daily liquid storage container 33 is provided with a liquid inlet 331, the liquid outlet 332 of the liquid storage container 33 is connected with the liquid inlet 331 of the daily liquid storage container 33 through a pipeline 14, wherein the pipeline can be provided with a double-sleeve additionally provided with a 24V heat preservation belt according to the environmental temperature requirement and the safety requirement, the liquid outlet 332 of the daily liquid storage container 33 is connected with the pipeline through a pipeline interface to supply chemical liquid to the process equipment end 34, and the process equipment end 34 supplies gas to the daily liquid storage container 33 through the pressure stabilizing system 321.

The VMB voltage-stabilizing supply cabinet mainly aims at storing the chemical usage for 2-5 days, and aims at the aims of normal supply and terminal supply voltage stabilization during the liquid filling period of a liquid storage container in the main supply cabinet. The pressure stabilizing system is mainly designed to be a high-purity nitrogen purification pressure stabilizing system, the constant temperature and pressure are corrected through the combined action of the pressure stabilizing gas tank, the pressure regulating valve and the proportional regulating valve, the problems that the supply pressure fluctuation is large and the process is influenced due to the influence of the external environment temperature when the tail end consumption is small are mainly solved, the proportional regulating valve can be used for regulating and shutting off under the condition that the pressure regulating valve is invalid, and the danger of overhigh pressure is avoided.

As an example, the second catalytic combustion chamber air suction opening and the liquid reservoir air suction opening are connected to the tail gas treatment unit or the plant waste gas end 40 through pipelines. According to the balance of distance cost, when the distance is far away from the plant waste gas end 40, the second catalytic combustion chamber air suction opening and the daily liquid storage container air supply chamber air suction opening are connected with the tail gas treatment unit; when the air inlet is close to the plant waste gas end 40, the second catalytic combustion chamber air suction opening and the daily stock solution container liquid supply chamber air suction opening are connected with the plant waste gas end 40.

the VMB voltage-stabilizing supply cabinet is mainly used for high-temperature resistance, partition isolation and explosion prevention. For example, the inner wall steel plate and the outer high-temperature resistant rechecking heat-insulating material can be wrapped, or the outer steel plate and the inner high-temperature resistant rechecking heat-insulating material can be designed in a pasting mode.

As shown in fig. 3, the main supply cabinet is disposed in a room 50, and a liquid sensor 51, a gas detector 52, a smoke sensor 53, an infrared/ultraviolet sensor 54, a temperature sensor 55, a humidity sensor 56, an explosion-proof power supply cabinet 57 and an explosion-proof constant temperature air conditioner 58 are disposed in the room 50. The data detected by the sensors can be read in real time through the programmable logic control system, so that the conditions of the room can be mastered in real time to take measures in time.

It should be noted that, the main supply cabinet supply pipeline and control flow mode, the VMB regulated supply cabinet supply pipeline and control flow mode, the tail gas processing unit, the room environment control monitoring unit, etc. may select the main supply cabinet to be directly supplied to the machine end or to be supplied to the machine end through the VMB regulated supply cabinet according to the distance from the liquid supply end to the used machine, the construction cost, etc., if the distance of the user machines exceeds 50 meters or the number of the user machines exceeds 2 recommended set configurations.

To sum up, the chemical supply system of the utility model adopts a three-dimensional space arrangement mode to arrange the main supply cabinet and arrange the catalytic combustion chamber at the lowest layer of the main supply cabinet, when the pipeline is damaged or the valve in the pipeline is damaged in the chemical supply process to cause gas and/or liquid leakage, the leaked gas and/or liquid can be discharged into the catalytic combustion chamber for catalytic combustion, thereby realizing effective isolation of leakage combustion; the waterproof and moistureproof capacity of the system can be improved by adopting a three-chamber separation mode; the liquid outlet is formed in the lower end of the liquid storage container, and the liquid outlet is connected into the catalytic combustion chamber through the bypass valve and a corresponding pipeline interface, so that the gas-electricity cost of bottle changing operation can be reduced, the bottle changing purging reliability is improved, the material waste is reduced, the emergency discharge treatment is increased, the risk of temperature rise and explosion hazards of a chemical liquid leakage breeding system is improved, the residual amount of liquid in the liquid storage container can be reduced, the material utilization rate is improved, and the cost is reduced; an air suction opening is formed in each chamber, so that the moisture-proof capacity of the system is further improved, and the safety performance of the system is improved; the working states among the first catalytic combustion chamber, the liquid storage isolation chamber and the liquid supply chamber are automatically controlled through the electric control chamber, so that automation and electronization of system operation are realized. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. a chemical supply system, comprising at least a main supply tank, the main supply tank comprising, in order from bottom to top: the device comprises a first catalytic combustion chamber, a liquid storage isolation chamber and a liquid supply and control chamber; wherein

2. The chemical supply system according to claim 1, characterized in that: first catalytic combustion chamber the air intake sets up to one-way back-fire relief air inlet tripe, the bottom of first catalytic combustion chamber is provided with vermiculite or adsorption reaction material, first catalytic combustion chamber lateral wall still is equipped with access hole and window, the bottom of stock solution isolation room be equipped with the slope low point and with be equipped with first built-in pipe chute between the first catalytic combustion chamber, the bottom that supplies the liquid chamber be equipped with the slope low point and with be equipped with the built-in pipe chute of second between the stock solution isolation room.

3. the chemical supply system according to claim 2, characterized in that: the bottom of stock solution isolation room is equipped with electronic gyro wheel platform scale, first catalytic combustion chamber lateral wall the window sets up to high temperature resistant glass window, in the first catalytic combustion chamber the stock solution isolation is indoor reaches still be provided with temperature sensor and infrared ultraviolet sensor in the confession liquid room, on the first built-in slide pipe runner reach all be provided with embedded catheter and weeping check valve on the built-in slide pipe runner of second, the electric control room is provided with the inside and outside chain uninterrupted power supply system of UPS and programmable logic control system.

4. The chemical supply system according to claim 3, characterized in that: be equipped with evacuation pipeline, pressure release pipeline, air inlet pipeline and sweep the pipeline in the confession liquid chamber, first catalytic combustion chamber lateral wall still is equipped with reserves the pipe connection, stock solution isolation chamber lateral wall still is equipped with the stock solution container and reserves the pipe connection, the confession liquid chamber lateral wall still is equipped with and reserves the pipe connection.

5. The chemical supply system according to claim 4, characterized in that: the side walls of the liquid storage isolation chamber and the liquid supply chamber are provided with fire interfaces.

6. The chemical supply system according to claim 5, characterized in that: the main supply cabinet further comprises an automatic lifting system and an auxiliary roller mechanism.

7. The chemical supply system according to claim 6, wherein: the main supply cabinet and the VMB voltage-stabilizing supply cabinet are made of laminated steel plates and high-temperature-resistant heat-insulating materials.

8. The chemical supply system of claim 1, further comprising an exhaust treatment system, the exhaust treatment system comprising: a fan and a water washing type treatment tower; wherein

9. The chemical supply system according to claim 8, wherein: the material of the water washing type treatment tower is a hot-dip galvanized plate or a stainless steel plate.

10. The chemical supply system according to claim 8, wherein: the water chamber at the bottom of the water washing type treatment tower is set to be a square slope or a circular slope, and the fan is designed in a siphon mode.

11. the chemical supply system of claim 1, further comprising a VMB regulated supply, the VMB regulated supply comprising, in order from bottom to top: a second catalytic combustion chamber and a daily liquid storage container liquid supply chamber; wherein

12. The chemical supply system according to claim 11, wherein: and the second catalytic combustion chamber air suction opening and the daily liquid storage container liquid supply chamber air suction opening are connected with a tail gas treatment unit or a plant waste gas end through pipelines.

13. The chemical supply system according to claim 11, wherein: the VMB voltage-stabilizing supply cabinet is made of a laminated steel plate and a high-temperature-resistant heat-insulating material.

14. The chemical supply system according to claim 1, characterized in that: the main supply cabinet is arranged in a room, and a liquid sensor, a gas detector, a smoke sensor, an infrared/ultraviolet sensor, a temperature sensor, a humidity sensor, an explosion-proof power supply cabinet and an explosion-proof constant-temperature air conditioner are arranged in the room.