CN209766387U

CN209766387U - Accurate type manipulator is used in wafer transportation

Info

Publication number: CN209766387U
Application number: CN201920963786.5U
Authority: CN
Inventors: 唐正隆
Original assignee: Kaiyue Microelectronics Technology Yongqing Co Ltd
Current assignee: Kaiyue Microelectronics Technology Yongqing Co Ltd
Priority date: 2019-06-25
Filing date: 2019-06-25
Publication date: 2019-12-10
Anticipated expiration: 2029-06-25

Abstract

The utility model discloses a wafer transportation is with accurate type manipulator, which comprises a body, the body includes integrative fixed part and clamping part, the fixed part with the clamping part is bilateral symmetry structure, the middle part of fixed part is equipped with the through-hole, the middle part of clamping part be equipped with the thing hole of putting of through-hole intercommunication, the both sides of clamping part are equipped with be located put the first centre gripping arm and the second centre gripping arm of thing hole both sides; the tail end of the first clamping arm is connected with the tail end of the second clamping arm through an adjuster, a supporting piece located above the adjuster is arranged on a groove at the tail end of the first clamping arm and a groove at the tail end of the second clamping arm, and the supporting piece is also arranged in the groove at the head end of the first clamping arm and the groove at the head end of the second clamping arm; the fixed end of the regulator is sleeved with a movable end. The utility model adopts the above structure an accurate type manipulator is used in wafer transportation can calibrate the manipulator fast, and the precision is high, and is efficient fast.

Description

Accurate type manipulator is used in wafer transportation

Technical Field

The utility model relates to a manipulator technical field is used in the wafer transportation, especially relates to a wafer transportation is with accurate type manipulator.

Background

At present, in a semiconductor manufacturing process workshop, a robot is generally used to transfer a wafer, and after the wafer is placed in the robot, the robot transfers the wafer to a corresponding slot.

During the manufacturing process of manufacturing wafers, equipment engineers need to periodically perform maintenance and calibration on the robot transfer position. The existing detection method is that a maintainer judges whether a manipulator shifts by naked eyes. If the position of the manipulator shifts, it is adjusted. Since the position is judged by naked eyes, the position is greatly dependent on personal experience of maintenance personnel, and false detection is easy to occur. If false detection occurs, under the condition of displacement, mutual rubbing of the wafer, the mechanical arm or the slot position is easy to occur in the wafer conveying process, so that a large amount of particle substances generated by rubbing occur, the particle substances can pollute the wafer, even the wafer is scratched, and the wafer yield is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a wafer transportation is with accurate type manipulator can calibrate the manipulator fast, and the precision is high, and is efficient.

In order to achieve the purpose, the utility model provides a wafer transportation uses accurate type manipulator, including the body, the body includes integrative fixed part and clamping part, the fixed part with the clamping part is bilateral symmetry structure, the middle part of fixed part is equipped with the through-hole, the middle part of clamping part is equipped with the thing hole of putting with the through-hole intercommunication, the both sides of clamping part are equipped with first centre gripping arm and the second centre gripping arm that is located the both sides of thing hole;

the tail end of the first clamping arm is connected with the tail end of the second clamping arm through an adjuster, a supporting piece located above the adjuster is arranged on a groove at the tail end of the first clamping arm and a groove at the tail end of the second clamping arm, and the supporting piece is also arranged in the groove at the head end of the first clamping arm and the groove at the head end of the second clamping arm;

The stiff end overcoat of regulator is equipped with the expansion end, be equipped with horizontal scale on the stiff end, be equipped with circular scale on the outer edge of expansion end, the end of stiff end is passed through the dead lever and is connected on the first centre gripping arm, the end-to-end connection of expansion end is in on the second centre gripping arm.

Preferably, the longitudinal section of the supporting piece is of a bent structure, the supporting piece is matched with the outer edge of the object placing hole, a supporting plate of a horizontal structure is arranged below the inner edge of the supporting piece, and the horizontal height of the supporting plate is lower than that of the clamping part.

Preferably, the supporting members at the head ends of the first clamping arm and the second clamping arm are fixed by bolts, and the supporting member at the tail end of the first clamping arm is fixed at the fixed end of the adjuster by bolts.

Preferably, the fixing part is further provided with a lightening hole positioned outside the through hole.

Preferably, the regulator is a precision regulator.

Therefore, the utility model adopts the above structure a wafer transportation is with accurate type manipulator can calibrate the manipulator fast, and the precision is high, and is efficient.

The technical solution of the present invention is further described in detail by the accompanying drawings and examples.

Drawings

fig. 1 is a schematic view of an embodiment of a precision robot for wafer transportation according to the present invention;

Fig. 2 is a schematic diagram of an embodiment of an adjuster in an accurate manipulator for wafer transportation according to the present invention.

Reference numerals

1. A fixed part; 2. a clamping portion; 3. a through hole; 4. a placing hole; 5. a first clamp arm; 6. a second clamp arm; 7. a regulator; 8. a support member; 9. a movable end; 10. a fixed end; 11. a support plate; 12. lightening holes; 13. and (5) fixing the rod.

Detailed Description

The following describes embodiments of the present invention with reference to the accompanying drawings.

fig. 1 is the utility model relates to a wafer transportation is with accurate type manipulator embodiment's schematic diagram, fig. 2 is the utility model relates to a wafer transportation is with accurate type manipulator in regulator embodiment's schematic diagram, as shown in the figure, a wafer transportation is with accurate type manipulator, including the body, the body includes integrative fixed part 1 and clamping part 2, fixed part 1 and clamping part 2 are bilateral symmetry structure. The middle of the fixing part 1 is provided with a through hole 3, the fixing part 1 is also provided with a lightening hole 12 positioned outside the through hole 3, the lightening hole 12 and the through hole 3 lighten the overall mass, the rapid operation is convenient, and the support is provided for adjusting the middle distance of the clamping part 2.

The middle part of the clamping part 2 is provided with an object placing hole 4 communicated with the through hole 3, and the object placing hole 4 is used for placing a wafer. The two sides of the clamping part 2 are provided with a first clamping arm 5 and a second clamping arm 6 which are positioned at the two sides of the object placing hole 4, and the first clamping arm 5 and the second clamping arm 6 provide protection for the wafer.

The end of the first holding arm 5 and the end of the second holding arm 6 are connected by an adjuster 7, and the adjuster 7 is a precision adjuster. The outer cover of stiff end 10 of regulator 7 is equipped with expansion end 9, and the end of stiff end 10 passes through dead lever 13 to be connected on first centre gripping arm 5, and the end-to-end connection of expansion end 9 is on second centre gripping arm 6. The length adjustment of the actuator 7, i.e. the correction of the position of the manipulator, can be achieved by rotating the movable end 9. Be equipped with horizontal scale on the stiff end 10, be equipped with circular scale on the outer edge of expansion end 9, the scale through stiff end 10 and expansion end 9 can read concrete numerical value.

The supporting piece 8 positioned above the adjuster 7 is arranged on the grooves at the tail ends of the first clamping arm 5 and the second clamping arm 6, and the supporting piece 8 at the tail end of the first clamping arm 5 is fixed at the fixed end 10 of the adjuster 7 through a bolt, namely the movable end 9 of the adjuster 7 can rotate freely. Support members 8 are also arranged in the grooves at the head ends of the first clamping arm 5 and the second clamping arm 6, and the support members 8 at the head ends of the first clamping arm 5 and the second clamping arm 6 are fixed through bolts.

The longitudinal section of the supporting piece 8 is of a bending structure, the supporting piece 8 is matched with the outer edge of the object placing hole 4, the inner side of the clamping part 2 is protected, and wafers are prevented from being in direct contact with the inner side of the clamping part 2. A support plate 11 with a horizontal structure is arranged below the inner edge of the support member 8, and the support plate 11 is used for supporting the wafer. The horizontal height of the supporting plate 11 is lower than that of the clamping part 2, so that the supporting and protecting of the supporting plate 11 to the wafer are ensured.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the preferred embodiments, those skilled in the art should understand that: the technical solution of the present invention can still be modified or replaced by other equivalent means, and the modified technical solution can not be separated from the spirit and scope of the technical solution of the present invention.

Claims

1. The utility model provides a wafer transportation is with accurate type manipulator which characterized in that: the clamping device comprises a body, wherein the body comprises a fixing part and a clamping part which are integrated, the fixing part and the clamping part are of a bilateral symmetry structure, a through hole is formed in the middle of the fixing part, a storage hole communicated with the through hole is formed in the middle of the clamping part, and a first clamping arm and a second clamping arm which are located on two sides of the storage hole are arranged on two sides of the clamping part;

2. The precision type manipulator for wafer transportation according to claim 1, characterized in that: the longitudinal section of the supporting piece is of a bent structure, the supporting piece is matched with the outer edge of the storage hole, a supporting plate of a horizontal structure is arranged below the inner edge of the supporting piece, and the horizontal height of the supporting plate is lower than that of the clamping part.

3. The precision type manipulator for wafer transportation according to claim 1, characterized in that: the first clamping arm and the supporting piece at the head end of the second clamping arm are fixed through bolts, and the supporting piece at the tail end of the first clamping arm is fixed at the fixed end of the regulator through bolts.

4. The precision type manipulator for wafer transportation according to claim 1, characterized in that: the fixing part is also provided with a lightening hole positioned outside the through hole.

5. The precision type manipulator for wafer transportation according to claim 1, characterized in that: the regulator is a precision regulator.