CN209765308U

CN209765308U - Electric control system of gallium arsenide single crystal furnace

Info

Publication number: CN209765308U
Application number: CN201920807111.1U
Authority: CN
Inventors: 代晓波
Original assignee: Dushan Zhongke Crystal Element Information Material Co Ltd
Current assignee: Dushan Zhongke Crystal Element Information Material Co Ltd
Priority date: 2019-05-31
Filing date: 2019-05-31
Publication date: 2019-12-10
Anticipated expiration: 2029-05-31

Abstract

The utility model discloses a gallium arsenide single crystal furnace electrical control system, which comprises a central control part, a motion control part, a gas control part, a temperature control part, a water path detection part and an operation panel, wherein the motion control part, the gas control part, the temperature control part, the water path detection part and the operation panel are respectively connected with the central control part; wherein, the multi-channel temperature regulator internally comprises a plurality of water flow channels with different output pressures. Has the advantages that: by adopting the multi-channel temperature regulator, the flow speed of water flow can be controlled by controlling the water flow to pass through different channels, so that the temperature rise speed is different correspondingly, and the control operation is simple; through the multi-runner temperature controller, corresponding runners can be opened when different heating speeds are needed, the supercharging equipment can be prevented from being normally opened, and energy is saved.

Description

Electric control system of gallium arsenide single crystal furnace

Technical Field

The utility model relates to a gallium arsenide single crystal furnace control technology field, concretely relates to gallium arsenide single crystal furnace electrical control system.

Background

Gallium arsenide is an important material in the fields of microelectronics and optoelectronics, and the existing gallium arsenide single crystal furnace is usually controlled by a programmable controller. The application numbers are: CN201110429502.2 discloses an electrical control system for a gallium arsenide single crystal furnace, which uses a programmable controller to adjust the use status of the gallium arsenide single crystal furnace. In the control system, the temperature control part adopts a multi-section temperature regulator, and water flow is conveyed through a water pump with adjustable power in the temperature control part, so that different heating efficiencies are regulated by regulating different flow rates. The control method has the following defects in use: because the power of the water pump needs to be adjusted, the water flow speed can only be adjusted linearly, and the water flow speed cannot be quickly adjusted to the specified water flow speed according to different temperature rise requirements; the water pump is always in the open state, so that more electric energy is consumed, and resource waste is caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an electric control system of gallium arsenide single crystal furnace for solving the above problems, the utility model provides an optimized technical scheme has among a great deal of technical scheme: the energy is saved, the multi-gear type adjustment can be arranged, the adjustment efficiency and accuracy are improved, and the like, and the technical effects are explained in detail below.

In order to achieve the above purpose, the utility model provides a following technical scheme:

The utility model provides a gallium arsenide single crystal furnace electrical control system, which comprises a central control part, a motion control part, a gas control part, a temperature control part, a water path detection part and an operation panel, wherein the motion control part, the gas control part, the temperature control part, the water path detection part and the operation panel are respectively connected with the central control part;

wherein, the multi-channel temperature regulator internally comprises a plurality of water flow channels with different output pressures.

Preferably, three water flow channels with different output pressures are arranged in the multi-channel temperature regulator and are respectively a main channel, a first auxiliary channel and a second auxiliary channel, and the input and output ends of the first auxiliary channel and the second auxiliary channel are communicated with the main channel.

Preferably, the main flow passage, the first sub-flow passage and the second sub-flow passage are provided with valve structures for closing the flow passages.

as preferred, the valve structure is the solenoid valve, corresponds that main runner, first sub-runner and the vice runner of second are main solenoid valve, first solenoid valve and second solenoid valve respectively, wherein main solenoid valve is located between the input and the output of first sub-runner, and this main solenoid valve is located between the input and the output of the vice runner of second, just install first booster pump on the first sub-runner, install the second booster pump on the vice runner of second.

Preferably, the first solenoid valve is located between an input end of the first sub-channel and the first booster pump.

Preferably, the second solenoid valve is located between the input end of the second sub-flow passage and the second booster pump.

To sum up, the utility model has the advantages that: 1. by adopting the multi-channel temperature regulator, the flow speed of water flow can be controlled by controlling the water flow to pass through different channels, so that the temperature rise speed is different correspondingly, and the control operation is simple;

2. Through the multi-runner temperature controller, corresponding runners can be opened when different heating speeds are needed, the supercharging equipment can be prevented from being normally opened, and energy is saved.

drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a block diagram of a control system of the present invention;

Fig. 2 is a schematic structural diagram of the multi-flow channel regulator of the present invention.

The reference numerals are explained below:

1. a water flow sensor; 2. a water pressure gauge; 3. a vacuum gauge; 4. a pneumatic controller; 5. a mass flow meter; 6. a programmable controller; 7. a connector; 8. a multi-channel temperature regulator; 801. a main flow channel; 802. a first solenoid valve; 803. a first booster pump; 804. a first secondary flow path; 805. a second secondary flow path; 806. a second booster pump; 807. a main electromagnetic valve; 808. a second solenoid valve; 9. a heater; 10. a water temperature sensor; 11. an operation panel; 12. an auxiliary relay; 13. a fast DC driver; 14. a slow DC driver; 15. a spiral DC driver.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

referring to fig. 1-2, the utility model provides an electrical control system of gallium arsenide single crystal furnace, which comprises a central control part, a motion control part, a gas control part, a temperature control part, a water path detection part and an operation panel 11, wherein the motion control part, the gas control part, the temperature control part, the water path detection part and the operation panel 11 are respectively connected with the central control part, and the temperature control part comprises a multi-channel temperature regulator 8 and a heater 9; wherein, the multi-channel temperature regulator 8 contains a plurality of water flow channels with different output pressures. Three water flow channels with different output pressures are arranged in the multi-channel temperature regulator 8, namely a main channel 801, a first auxiliary channel 804 and a second auxiliary channel 805, and the input and output ends of the first auxiliary channel 804 and the second auxiliary channel 805 are communicated with the main channel 801; valve structures for closing the flow channels are arranged on the main flow channel 801, the first auxiliary flow channel 804 and the second auxiliary flow channel 805; the valve structure is an electromagnetic valve, corresponding to the main flow passage 801, the first sub-flow passage 804 and the second sub-flow passage 805 are a main electromagnetic valve 807, a first electromagnetic valve 802 and a second electromagnetic valve 808 respectively, wherein the main electromagnetic valve 807 is positioned between the input end and the output end of the first sub-flow passage 804, the main electromagnetic valve 807 is positioned between the input end and the output end of the second sub-flow passage 805, the first booster pump 803 is installed on the first sub-flow passage 804, and the second booster pump 806 is installed on the second sub-flow passage 805; the first solenoid valve 802 is located between the input end of the first sub-channel 804 and the first booster pump 803; the second solenoid valve 808 is located between the input end of the second sub-flow passage 805 and the second booster pump 806, and the output power of the first booster pump 803 is smaller than that of the second booster pump 806;

By adding one electromagnetic valve at each of the output ends of the first secondary flow passage 804 and the second secondary flow passage 805, the electromagnetic valves at the two ends of the first secondary flow passage 804 or the second secondary flow passage 805 can be closed, and the first secondary flow passage 804 and the second secondary flow passage 805 are closed, so that the first booster pump 803 or the second booster pump 806 can be overhauled in a non-shutdown state;

the central control part comprises a communication module and a programmable logic controller 6, the programmable logic controller 6 is communicated with the operation panel 11 through the communication module and is communicated with the motion control part, the gas control part, the temperature control part and the water path detection part through an input and output module of the programmable logic controller 6; the motion control part comprises an auxiliary relay 12, a direct current driver and a motor, wherein the direct current driver comprises a fast direct current driver 13, a slow direct current driver 14 and a spiral direct current driver 15, the auxiliary relay 12 is connected with the input/output module and the direct current driver, and the motor is connected with the direct current driver; the gas control section includes: the mass flow meter 5 and the air pressure controller 4, and can also comprise a vacuum gauge 3, wherein the mass flow meter 5 and the air pressure controller 4 are connected with the input and output module; the temperature control section includes: the connector 7 and the multi-channel temperature regulator 8, the multi-channel temperature regulator 8 is connected with the input and output module through the connector 7; the water path detection part comprises a water temperature sensor 10, a water pressure meter 2 and a water flow sensor, the water temperature sensor 10 is connected with the input and output module, and the water pressure meter 2 and the water flow sensor 1 are connected with the input and output module.

By adopting the above structure, the multi-channel temperature regulator 8 has three output states, which are respectively: firstly, a main electromagnetic valve 807 is opened, a first electromagnetic valve 802 and a second electromagnetic valve 808 are closed, at the moment, a main flow channel 801 is conducted, the main flow channel 801 is in an initial pressure output state, the flow velocity in the flow channel is low, and the main flow channel can be used in a shutdown state;

secondly, closing a main electromagnetic valve 807 and a second electromagnetic valve 808, and opening a first electromagnetic valve 802 and a first booster pump 803, wherein the first auxiliary flow passage 804 is communicated, the main flow passage 801 and the second auxiliary flow passage 805 are closed, and are in a low-pressure operation state, the flow velocity in the flow passages is higher than that in the first state, and the flow passages can be used in low-load operation;

and thirdly, closing the main electromagnetic valve 807 and the first electromagnetic valve 802, opening the second electromagnetic valve 808 and the second booster pump 806, conducting the second auxiliary flow passage 805 at the moment, closing the main flow passage 801 and the first auxiliary flow passage 804, and at the moment, in a high-pressure operation state, wherein the interior of the flow passage is higher than that of the first state and the second state, so that the device can be used when the device is in full-load operation.

By adopting the multi-channel temperature regulator 8, the flow speed of water flow can be controlled by controlling the water flow to pass through different channels, so that the temperature rise speed is different correspondingly, and the control operation is simple;

Through the multi-runner temperature controller, corresponding runners can be opened when different heating speeds are needed, the supercharging equipment can be prevented from being normally opened, and energy is saved.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. The utility model provides a gallium arsenide single crystal growing furnace electrical control system, includes central control portion, motion control portion, gas control portion, temperature control portion, water route detection portion and operating panel (11) respectively with central control portion links to each other, characterized in that: the temperature control part comprises a multi-channel temperature regulator (8) and a heater (9);

wherein, the multi-channel temperature regulator (8) internally comprises a plurality of water flow channels with different output pressures.

2. The electrical control system of the gallium arsenide single crystal furnace of claim 1, wherein: the multi-channel temperature regulator (8) is internally provided with three water flow channels with different output pressures, namely a main channel (801), a first auxiliary channel (804) and a second auxiliary channel (805), wherein the input end and the output end of the first auxiliary channel (804) and the input end and the output end of the second auxiliary channel (805) are communicated with the main channel (801).

3. The electrical control system of the gallium arsenide single crystal furnace of claim 2, wherein: and valve structures for closing the flow channels are arranged on the main flow channel (801), the first auxiliary flow channel (804) and the second auxiliary flow channel (805).

4. The electrical control system of the gallium arsenide single crystal furnace of claim 3, wherein: the valve structure is an electromagnetic valve, and a main electromagnetic valve (807), a first electromagnetic valve (802) and a second electromagnetic valve (808) are respectively corresponding to a main flow channel (801), a first auxiliary flow channel (804) and a second auxiliary flow channel (805), wherein the main electromagnetic valve (807) is positioned between the input end and the output end of the first auxiliary flow channel (804), the main electromagnetic valve (807) is positioned between the input end and the output end of the second auxiliary flow channel (805), a first booster pump (803) is installed on the first auxiliary flow channel (804), and a second booster pump (806) is installed on the second auxiliary flow channel (805).

5. The electrical control system of the gallium arsenide single crystal furnace of claim 4, wherein: the first solenoid valve (802) is located between an input end of the first sub-flow passage (804) and the first booster pump (803).

6. The electrical control system of the gallium arsenide single crystal furnace of claim 4, wherein: the second solenoid valve (808) is located between an input end of the second subsidiary flow passage (805) and the second booster pump (806).