CN203533217U - Gas supply device - Google Patents
Gas supply device Download PDFInfo
- Publication number
- CN203533217U CN203533217U CN201320672685.5U CN201320672685U CN203533217U CN 203533217 U CN203533217 U CN 203533217U CN 201320672685 U CN201320672685 U CN 201320672685U CN 203533217 U CN203533217 U CN 203533217U
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- Prior art keywords
- supply device
- gas supply
- gas
- solenoid valve
- tracheae
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Abstract
The utility model provides a gas supply device which is used for supplying the gas for a demand device. The gas supply device comprises a supply device, a gas supply pipeline, a pneumatic valve, a solenoid valve group, a first driving gas pipe, a control unit and a sensor; the gas supply pipeline is connected with the supply device and the demand device; the pneumatic valve is arranged on the gas supply pipeline; the solenoid valve group is connected with the pneumatic valve through a second driving gas pipe; the first driving gas pipe is connected with the solenoid valve group; the control unit is in signal connection with the solenoid valve group; the sensor is arranged on the first driving gas pipe and is in signal connection with the control unit. The sensor can monitor whether the flow in the first driving gas pipe changes or not, the pneumatic valve can be driven by the driving gas to switch on within 1 to 2 seconds, and accordingly the gas leakage is produced in the first driving gas pipe, the solenoid valve group or the second driving gas pipe if the flow is produced in the first driving gas pipe for a long time. According to the gas supply device, the gas leakage can be monitored and the normal work of the gas supply device can be ensured conveniently.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of gas supply device.
Background technique
In semicon industry, manufacture the technique of semiconductor chip and need to use a large amount of gas, the gas that different technique is used is also not quite similar, required gas flow also by trace in a large number not etc.All gas is by factory's business unified distribution, and factory's business is realized and provided gas or cut-off gas to demand equipment by the switch of pneumatic valve between control supply equipment and demand equipment.
Please refer to Fig. 1, in the prior art, gas supply device comprises: control unit 10, first drives tracheae 20, solenoid valve group 30, signaling line 40, second to drive tracheae 50 and pneumatic valve 60; Wherein, described control unit 10 is by solenoid valve group 30 described in signaling line 40 SC sigmal control, and described control unit 10 can be controlled the switch of described solenoid valve group 30; Described first drives tracheae 20 to be connected with solenoid valve group 30, for the startup gas of certain air pressure is provided, described solenoid valve group 30 also comprises pneumatic valve relief opening 31, for discharging unnecessary gas, described pneumatic valve 60 is located on the gas piping 61 between described supply equipment and demand equipment, described pneumatic valve 60 is opened, and described supply equipment just carries out air feed by 61 pairs of described demand equipment of described gas piping; Described second drives tracheae 50 to connect described solenoid valve group 30 and pneumatic valve 60, for providing to described pneumatic valve 60 gas of opening described pneumatic valve 60.
Gas supply device of the prior art is in concrete use time, first drives tracheae 20 to be connected with one for supply equipment (scheming not shown), the continual gas of certain pressure intensity that provides is to solenoid valve group 30, if described control unit 10 sends control signal described solenoid valve group 30 is opened, gas can drive in tracheae 50 and flow in described pneumatic valve 60 by described second, and described pneumatic valve 60 is opened, now supply equipment just can carry out air feed to demand equipment.
Yet, drive tracheae 20 to have the gas of certain pressure intensity due to described first always, and continual described solenoid valve group 30 is carried out to air feed, therefore can accelerate the aging of the first driving tracheae 20 and solenoid valve group 30, As time goes on, may there is gas leakage, thus the delay that causes pneumatic valve 60 to be opened, when serious, gas leakage can cause pneumatic valve 60 to open.
Model utility content
The purpose of this utility model is to provide a kind of gas supply device, can monitor and whether have gas leak phenomenon, is convenient to guarantee whether gas supply device normally works.
To achieve these goals, the utility model proposes a kind of gas supply device, for providing gas to demand equipment, comprising:
Supply equipment, pneumatic valve, solenoid valve group, supply air line, first drive tracheae, second to drive tracheae, control unit and inductor; Wherein, described supply equipment is connected by supply air line with demand equipment, described pneumatic valve is arranged on described supply air line, described second drives tracheae to connect described solenoid valve group and pneumatic valve, described control unit is connected with described solenoid valve group signal, described first drives tracheae to be connected with described solenoid valve group, and described inductor is arranged at described first and drives on tracheae, and described inductor is connected with described control unit signal.
Further, described gas supply device also comprises a pressure regulator valve, and described pressure regulator valve is arranged at described first and drives on tracheae.
Further, described gas supply device also comprises driving source of the gas, and described driving source of the gas connects described first and drives tracheae.
Further, described solenoid valve group is provided with an exhaust port.
Further, described gas supply device also comprises a first signal line, and described control unit carries out signal with described solenoid valve group by described first signal line and is connected.
Further, described gas supply device also comprises a secondary signal line, and described inductor carries out signal with described control unit by described secondary signal line and is connected.
Further, described solenoid valve group comprises a plurality of solenoid valves.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: on the first driving tracheae, a sensor is set, and be connected with control unit, sensor can monitor in the first driving tracheae and have or not changes in flow rate, because propellant drives, open pneumatic valve and only need 1～2 second, if have for a long time flow in the first driving tracheae, the first driving tracheae is described, solenoid valve group or second drives tracheae to occur gas leakage, therefore the gas supply device the utility model proposes can be monitored the phenomenon that whether has gas leakage, be convenient to guarantee whether gas supply device normally works.
Accompanying drawing explanation
Fig. 1 is the structural representation of gas supply device in prior art;
Fig. 2 is the structural representation of gas supply device in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, gas supply device of the present utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with reference to accompanying drawing, with way of example, the utility model is more specifically described.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, aid illustration the utility model embodiment's object lucidly.
Please refer to Fig. 2, in the present embodiment, proposed a kind of gas supply device, for providing gas to demand equipment, comprising:
Supply equipment, pneumatic valve 600, solenoid valve group 300, supply air line 610, first drive tracheae 200, second to drive tracheae 500, control unit 100 and inductor 220; Wherein, described solenoid valve group 300, first drives tracheae 200, second to drive tracheae 500, control unit 100 and inductor 220 to form drive system, and as shown in figure dotted line frame, drive system is for driving opening and closing of described pneumatic valve; Described supply equipment is connected by supply air line 610 with demand equipment, described pneumatic valve 600 is arranged on described supply air line 610, described second drives tracheae 500 to connect described solenoid valve group 300 and pneumatic valve 600, described control unit 100 is connected with described solenoid valve group 300 signals, described first drives tracheae 200 to be connected with described solenoid valve group 300, described inductor 220 is arranged at described first and drives on tracheae 200, and described inductor 220 is connected with described control unit 100 signals.
Wherein, described solenoid valve group 300 is comprised of a plurality of solenoid valves, each solenoid valve all can be controlled different pneumatic valve 600, described control unit 100 carries out signal with described solenoid valve group 300 by described first signal 400 lines and is connected, and described control unit 100 can be controlled the switch of the solenoid valve in described solenoid valve group 300; Described inductor 220 carries out signal with described control unit 100 by described secondary signal line 410 and is connected, described sensor 220 can monitor in described the first driving tracheae 200 and have or not changes in flow rate, and variable quantity is fed back in control unit 100 by secondary signal line 410, wherein, described control unit 100 can be PLC.
In the present embodiment, described gas supply device also comprises a pressure regulator valve 210, and described pressure regulator valve 210 is arranged at described first and drives on tracheae 200, for regulating the pressure of the propellant in described the first driving tracheae 200; Described gas supply device also comprises driving source of the gas 700, and described driving source of the gas 700 connects described first and drives tracheae 200, and for propellant is provided, described propellant can be nitrogen or other inert gas; Generally, driving source of the gas 700 that the propellant of 8 kilograms can be provided, must carry out pressure adjusting by modulating valve 210, the pressure of propellant is regulated and meets the pressure of opening pneumatic valve 600, for example, is 4 kilograms to 5.5 kilograms; Described solenoid valve group 300 is provided with an exhaust port 310, when needs are closed pneumatic valve 600, can discharge at the interior unnecessary propellant of described solenoid valve group 300 by described exhaust port 310, thereby close described pneumatic valve 600.
In concrete using process, when described control unit 100 sends signal and opens the solenoid valve in solenoid valve group 300, drive the propellant in source of the gas 700 to drive tracheae 500 to transfer in described pneumatic valve 600 by the first driving tracheae 200, solenoid valve and second, and described pneumatic valve 600 is opened, now, the gas in supply equipment just can transfer to demand equipment for it by described supply air line 600.
To sum up, in the gas supply device providing in the utility model embodiment, sensor can monitor in the first driving tracheae and have or not changes in flow rate, because propellant drives, open pneumatic valve and only need 1～2 second, if have for a long time flow in the first driving tracheae, for example surpass 10 seconds and still also have changes in flow rate, illustrate that the first driving tracheae, solenoid valve group or second drive tracheae to occur gas leakage, therefore the gas supply device the utility model proposes can be monitored the phenomenon that whether has gas leakage, is convenient to guarantee whether gas supply device normally works.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of the technical solution of the utility model; the technological scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (7)
1. a gas supply device, for providing gas to demand equipment, is characterized in that, comprising:
Supply equipment, pneumatic valve, solenoid valve group, supply air line, first drive tracheae, second to drive tracheae, control unit and inductor; Wherein, described supply equipment is connected by supply air line with demand equipment, described pneumatic valve is arranged on described supply air line, described second drives tracheae to connect described solenoid valve group and pneumatic valve, described control unit is connected with described solenoid valve group signal, described first drives tracheae to be connected with described solenoid valve group, and described inductor is arranged at described first and drives on tracheae, and described inductor is connected with described control unit signal.
2. gas supply device as claimed in claim 1, is characterized in that, described gas supply device also comprises a pressure regulator valve, and described pressure regulator valve is arranged at described first and drives on tracheae.
3. gas supply device as claimed in claim 1, is characterized in that, described gas supply device also comprises a driving source of the gas, and described driving source of the gas connects described first and drives tracheae.
4. gas supply device as claimed in claim 1, is characterized in that, described solenoid valve group is provided with an exhaust port.
5. gas supply device as claimed in claim 1, is characterized in that, described gas supply device also comprises a first signal line, and described control unit carries out signal with described solenoid valve group by described first signal line and is connected.
6. gas supply device as claimed in claim 1, is characterized in that, described gas supply device also comprises a secondary signal line, and described inductor carries out signal with described control unit by described secondary signal line and is connected.
7. gas supply device as claimed in claim 1, is characterized in that, described solenoid valve group comprises a plurality of solenoid valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672685.5U CN203533217U (en) | 2013-10-29 | 2013-10-29 | Gas supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672685.5U CN203533217U (en) | 2013-10-29 | 2013-10-29 | Gas supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203533217U true CN203533217U (en) | 2014-04-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320672685.5U Expired - Fee Related CN203533217U (en) | 2013-10-29 | 2013-10-29 | Gas supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203533217U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212209A (en) * | 2019-07-09 | 2021-01-12 | 合肥晶合集成电路股份有限公司 | Gas supply device |
-
2013
- 2013-10-29 CN CN201320672685.5U patent/CN203533217U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212209A (en) * | 2019-07-09 | 2021-01-12 | 合肥晶合集成电路股份有限公司 | Gas supply device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20191029 |