CN209764362U - Leakage alarm device for leakage detection of micro-pressure sensor - Google Patents
Leakage alarm device for leakage detection of micro-pressure sensor Download PDFInfo
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Abstract
The utility model discloses a leakage alarm device for leakage detection of micro-pressure sensor in the technical field of semiconductor detection, which comprises a control box, an air source, an inflation valve, a pressure gauge, a balance valve and a box body, wherein the box body is internally provided with a standard channel and a test channel, the box cover is provided with a plurality of standard interfaces and test interfaces communicated with the standard channel and the test channel, the standard interfaces and the test interfaces are connected with a differential pressure sensor through pipelines, one end of the box body is provided with a temperature sensor, the inner walls of the standard channel and the test channel are provided with a heater, the other end of the box body is provided with a pressure relief port and a pressure boost port communicated with the standard channel and the test channel, the pressure relief port and the pressure boost port are respectively provided with a pressure relief valve and a pressure boost valve, the differential pressure caused by non-leakage is avoided, the air inflation time and the stabilization time are short, the leak detection speed is improved by more than 76%, and the connection is safe and reliable by adopting a modular design.
Description
Technical Field
The utility model relates to a semiconductor detects technical field, specifically is micro-pressure sensor leak hunting is with gas leakage alarm device.
Background
The traditional leak detection method for semiconductor products comprises a smearing method, a pressure variation method, a flow method and an ultrasonic method. The smearing method is practical and low in cost, is accepted by most people, but foams can enter products to cause pollution. The accuracy is also poor, so in order to improve the accuracy and operability, a differential pressure method is generally adopted for leak detection.
Although the differential pressure type leak detection method improves the detection efficiency and operability compared with the traditional leak detection method, the requirement of production capacity cannot be met compared with a multi-channel leak detection method, because the air temperature pressure container, the inflation time, the stabilization time and the like restrict the test time, once the time is shortened, the precision can be greatly influenced, in addition, the judgment of gas leakage is not accurate, and the pressure change caused by the influence of the temperature change on the detected object is different, so that the differential pressure caused by non-leakage is generated, and the leak detection is influenced.
Based on this, the utility model designs a micro-pressure sensor leak hunting is with gas leakage alarm device to solve the above-mentioned problem of mentioning.
SUMMERY OF THE UTILITY MODEL
an object of the utility model is to provide a micro-pressure sensor leaks leak hunting and uses gas leakage alarm device avoids the non-differential pressure that arouses of revealing, has improved the degree of accuracy of leak hunting greatly, and inflation time and stabilization time are short to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the air leakage alarm device for detecting the leakage of the micro pressure sensor comprises a control box, an air source, an inflation valve, a pressure gauge, a balance valve and a box body, wherein a standard channel and a test channel are arranged in the box body, the air source is connected to one end of a main pipeline, the pressure gauge and the inflation valve are installed at one end of the main pipeline, a box cover is fixed at the front side of the box body, a plurality of standard interfaces and test interfaces communicated with the standard channel and the test channel are arranged on the box cover, the standard interfaces and the test interfaces are connected with the other end of the main pipeline through a branch pipeline and the balance valve installed on the branch pipeline, a differential pressure sensor is connected between the standard interfaces and the test interfaces through a pipeline, a temperature sensor is installed at one end of the box body, heaters are installed on the inner walls of the standard channel and the test channel, a pressure sensor is installed at the other end of the box, install relief valve and booster valve on pressure release mouth and the pressure boost mouth respectively, the control box is located the box, the control box includes power, AVR microcontroller, alarm and a plurality of pilot lamp, inflation valve, balanced valve, temperature sensor, heater, pressure sensor, relief valve, booster valve, differential pressure sensor and alarm and a plurality of pilot lamp all pass through AVR microcontroller and power electric connection.
Preferably, the standard channel and the test channel are both aluminum cavities, and the inner walls of the standard channel and the test channel are smooth.
Preferably, the number of the indicator lamps is the same as the number of the differential pressure sensors.
Preferably, the box cover is fixed on the box body through screws.
Preferably, a box door is installed on the rear side of the box body, and a sealing gasket is arranged between the box door and the box body.
Compared with the prior art, the beneficial effects of the utility model are that: through carrying out the leak hunting test in constant temperature and constant pressure's box, sensitivity to test is high, avoids the influence of temperature and pressure before the experiment, avoids the non-differential pressure of revealing arousing, has improved the degree of accuracy of leak hunting greatly, adopts the multichannel test in constant temperature and constant pressure's box moreover, and the inflation time is short with the stabilization time, and the leak hunting speed improves more than 76%, adopts the modularized design, connects safe and reliable, and equipment dismantlement is convenient, and sensitivity is higher, and resolution ratio is higher.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
Fig. 2 is a rear view of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. A control box; 2. a gas source; 3. an inflation valve; 4. a balancing valve; 5. a box body; 6. a standard channel; 7. a test channel; 8. a main pipeline; 9. a pressure gauge; 10. a box cover; 11. a standard interface; 12. a test interface; 13. a branch pipeline; 14. a screw; 15. a differential pressure sensor; 16. a temperature sensor; 17. a heater; 18. a box door; 19. a power source; 20. an AVR microcontroller; 21. an alarm; 22. an indicator light; 23. a pressure sensor; 24. a pressure relief port; 25. a pressurizing port; 26. a pressure relief valve; 27. a pressure increasing valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: the leakage alarm device for detecting the leakage of the micro pressure sensor 23 comprises a control box 1, an air source 2, an inflation valve 3, a pressure gauge 9, a balance valve 4 and a box body 5, wherein a standard channel 6 and a test channel 7 are arranged inside the box body 5, the air source 2 is connected to one end of a main pipeline 8, the pressure gauge 9 and the inflation valve 3 are installed at one end of the main pipeline 8, a box cover 10 is fixed at the front side of the box body 5, a plurality of standard interfaces 11 and test interfaces 12 communicated with the standard channel 6 and the test channel 7 are arranged on the box cover 10, the standard interfaces 11 and the test interfaces 12 are connected with the other end of the main pipeline 8 through a branch pipeline 13 and a balance valve 4 installed on the branch pipeline 13, a differential pressure sensor 15 is connected between the standard interfaces 11 and the test interfaces 12 through a pipeline, a temperature sensor 16 is installed at one end of the box body 5, and a heater 17 is installed on the inner, pressure sensor 23 is installed to the other end of box 5, and the box 5 other end is equipped with pressure release mouth 24 and pressure boost mouth 25 that standard passageway 6 and test channel 7 are linked together, installs relief valve 26 and pressure boost valve 27 on pressure release mouth 24 and the pressure boost mouth 25 respectively, control box 1 is located box 5, control box 1 includes power 19, AVR microcontroller 20, alarm 21 and a plurality of pilot lamp 22, inflation valve 3, balanced valve 4, temperature sensor 16, heater 17, pressure sensor 23, relief valve 26, pressure boost valve 27, differential pressure sensor 15 and alarm 21 and a plurality of pilot lamp 22 all through AVR microcontroller 20 and power 19 electric connection.
Wherein, standard passageway 6 and test channel 7 are aluminium system cavity, and the inner wall is smooth, the quantity of pilot lamp 22 is the same with differential pressure sensor 15 quantity, and every pilot lamp 22 instructs to the signal that every differential pressure sensor 15 detected, on case lid 10 is fixed in box 5 through screw 14, the installation is stable, and it is convenient to dismantle, chamber door 18 is installed to box 5 rear side, and is equipped with sealed the pad between chamber door 18 and the box 5, guarantees the leakproofness after chamber door 18 closes to guarantee the accuracy nature of leak hunting.
The utility model discloses a parts such as inflation valve 3, balanced valve 4, temperature sensor 16, heater 17 and differential pressure sensor 15 and alarm 21 and a plurality of pilot lamp 22 are the parts that universal standard spare or field technician know, and its structure and principle all are that this technical staff all can learn through the technical manual or learn through conventional experimental method.
The specific working principle is as follows: during the experiment, the box door 18 is opened, a plurality of standard parts and test parts to be detected are installed in the standard channel 6 and the test channel 7 and are connected with a plurality of standard interfaces 11 and test interfaces 12 on the box cover 10, the box door 18 is closed, before the experiment, the switch of the power supply 19 is opened, the temperature sensor 16 can automatically detect the temperatures in the standard channel 6 and the test channel 7 and can be adjusted through the heater 17, the temperatures in the standard channel 6 and the test channel 7 are ensured to be the same, meanwhile, the pressure sensor 23 can automatically detect the pressures in the standard channel 6 and the test channel 7 and can be adjusted through the pressure relief valve 26 and the pressure increasing valve 27 which are installed on the pressure relief port 24 and the pressure increasing port 25, the pressures in the standard channel 6 and the test channel 7 are ensured to be the same, the experiment is started, the AVR microcontroller 20 controls the temperature sensor 16 and the pressure sensor 23 not to work, the AVR microcontroller 20 controls and starts the charging valve 3 on the main pipeline 8 and the balance valve 4 on the branch pipeline 13, the air supply 2 enters the standard channel 6 and the test channel 7 through the main pipeline branch pipeline 13 respectively, so that the pressure in the standard channel 6 and the test channel 7 is the same, the AVR microcontroller 20 controls the charging valve 3 to be closed, the pressure maintaining is carried out, the balance valve 4 is closed at the moment, the pressure change in the standard channel 6 and the test channel 7 is sensed by the differential pressure sensor 15, and the detection part is detected whether to leak air or not.
The control box 1 comprises a power supply 19, an AVR microcontroller 20, an alarm 21 and a plurality of indicating lamps 22, wherein the power supply 19 is used for supplying power, the AVR microcontroller 20 is used for receiving and processing signals detected by the sensors and sending out instructions, when a test piece, which is positioned at a certain test interface 12 in the test channel 7 and is detected by the differential pressure sensor 15, leaks air, the alarm 21 gives an alarm, meanwhile, the indicating lamps 22 are used for indicating the working states of the differential pressure sensor 15 and the balance valve 4 on each channel, when a green lamp is on, the control box works normally, and when a red lamp is on, the differential pressure sensor 15 and the balance valve 4 do not work.
Through carrying out the leak hunting test in constant temperature and constant pressure's box 5, sensitivity to testing is high, avoids the influence of temperature and pressure before the experiment, avoids the non-differential pressure of revealing arousing, has improved the degree of accuracy of leak hunting greatly, adopts the multichannel test in constant temperature and constant pressure's box 5 moreover, and the inflation time is short with the stabilization time, and the leak hunting speed improves more than 76%, adopts the modularized design, connects safe and reliable, and equipment dismantlement is convenient, and sensitivity is higher, and resolution ratio is higher.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (5)
1. Little pressure sensor leak hunting is with gas leakage alarm device, its characterized in that: the device comprises a control box, an air source, an inflation valve, a pressure gauge, a balance valve and a box body, wherein a standard channel and a test channel are arranged in the box body, the air source is connected with one end of a main pipeline, the pressure gauge and the inflation valve are installed at one end of the main pipeline, a box cover is fixed at the front side of the box body, a plurality of standard interfaces and test interfaces communicated with the standard channel and the test channel are arranged on the box cover, the standard interfaces and the test interfaces are connected with the other end of the main pipeline through a branch pipeline and the balance valve installed on the branch pipeline, a differential pressure sensor is connected between the standard interfaces and the test interfaces through a pipeline, a temperature sensor is installed at one end of the box body, heaters are installed on the inner walls of the standard channel and the test channel, a pressure sensor is installed at the other end of the box body, and, install relief valve and booster valve on pressure release mouth and the pressure boost mouth respectively, the control box is located the box, the control box includes power, AVR microcontroller, alarm and a plurality of pilot lamp, inflation valve, balanced valve, temperature sensor, heater, pressure sensor, relief valve, booster valve, differential pressure sensor and alarm and a plurality of pilot lamp all pass through AVR microcontroller and power electric connection.
2. the air leakage alarm device for detecting leakage of micro-pressure sensor as claimed in claim 1, wherein: the standard channel and the test channel are both aluminum cavities, and the inner walls of the standard channel and the test channel are smooth.
3. The air leakage alarm device for detecting leakage of micro-pressure sensor as claimed in claim 1, wherein: the number of the indicator lamps is the same as that of the differential pressure sensors.
4. The air leakage alarm device for detecting leakage of micro-pressure sensor as claimed in claim 1, wherein: the box cover is fixed on the box body through screws.
5. The air leakage alarm device for detecting leakage of micro-pressure sensor as claimed in claim 1, wherein: the box door is installed to the box rear side, and is equipped with sealed the pad between box door and the box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920796051.8U CN209764362U (en) | 2019-05-30 | 2019-05-30 | Leakage alarm device for leakage detection of micro-pressure sensor |
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| CN201920796051.8U CN209764362U (en) | 2019-05-30 | 2019-05-30 | Leakage alarm device for leakage detection of micro-pressure sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112018289A (en) * | 2020-09-02 | 2020-12-01 | 黄河交通学院 | New energy automobile power battery protective structure |
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2019
- 2019-05-30 CN CN201920796051.8U patent/CN209764362U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112018289A (en) * | 2020-09-02 | 2020-12-01 | 黄河交通学院 | New energy automobile power battery protective structure |
| CN112018289B (en) * | 2020-09-02 | 2022-08-02 | 黄河交通学院 | New energy automobile power battery protective structure |
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