CN209722279U - Evaporation source and evaporation coating device - Google Patents
Evaporation source and evaporation coating device Download PDFInfo
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- CN209722279U CN209722279U CN201920182065.0U CN201920182065U CN209722279U CN 209722279 U CN209722279 U CN 209722279U CN 201920182065 U CN201920182065 U CN 201920182065U CN 209722279 U CN209722279 U CN 209722279U
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- cover board
- evaporation source
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- board body
- evaporation
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Abstract
The utility model relates to a kind of evaporation source and evaporation coating devices.Evaporation source includes: evaporation source cover board, is used to support the supporter of evaporation source cover board；Evaporation source cover board is relative to the rotatable setting of supporter；Wherein, evaporation source cover board includes cover board body, and cover board body is equipped at least one through slot through cover board body, and at least one through slot is arranged in the shape of a spiral.Using the evaporation source and evaporation coating device of technical solutions of the utility model, since evaporation material can be sprayed from through slot to substrate to be deposited, during vapor deposition, the rotation of evaporation source cover board, evaporation material can be made to rotate diffusion in injection, guarantee the uniformity of the evaporation material ejected, to be conducive to improve the uniformity of film forming.
Description
Technical field
The utility model relates to evaporation coating technique fields, more particularly to a kind of evaporation source and evaporation coating device.
Background technique
Currently, in production OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) display screen
During organic luminous layer, using the figuratum mask plate exposure mask of tool, and through vacuum evaporation mode on substrate to be deposited
Pattern required for being formed.
However, the uniformity of film forming is bad when being deposited using traditional evaporation coating device, it is unfavorable for applying.
Utility model content
Based on this, it is necessary to which aiming at the problem that how to improve the uniformity of film forming simultaneously, film forming can be improved by providing one kind
Uniformity evaporation source and evaporation coating device.
A kind of evaporation source, comprising: evaporation source cover board is used to support the supporter of the evaporation source cover board；The evaporation source
Cover board is relative to the rotatable setting of the supporter；Wherein, the evaporation source cover board includes cover board body, on the cover board body
Equipped at least one through slot for running through the cover board body, and at least one described through slot is arranged in the shape of a spiral.
The spiral of the rotation center of the evaporation source cover board and at least one through slot in one of the embodiments,
Arrangement center overlaps, it is preferable that the rotation center is overlapped with cover board body center.
A through slot is provided on the cover board body in one of the embodiments, the through slot is in the shape of a spiral
Extend, alternatively, being provided with multiple through slots on the cover board body, and multiple through slots join end to end and arrange in the shape of a spiral
Cloth.
At least one described through slot includes the first close to the helical arrangement center in one of the embodiments,
Initial point, first starting point and the helical arrangement center be not be overlapped.
It further include in one of the embodiments, at least between at least one described through slot and the helical arrangement center
One connecting groove, the connecting groove include the second starting point close to the helical arrangement center；Preferably, the connecting groove is logical
It crosses first starting point to be connected with corresponding through slot, it is preferable that the connecting groove is arc.
The longitudinal section of the evaporation source cover board includes being formed by least one described through slot in one of the embodiments,
Multiple through holes, the through hole close to the cover board body center a side and far from the cover board body center one
Side is parallel, and the maximum value of the angle between the face normal of the axis of the through hole and the cover board body is acute angle, and/or
The a side of the through hole close to the cover board body center is parallel to the face normal, and the through hole is separate
The a side at the cover board body center and the face normal angle maximum value are acute angle.
The angle is gradually increased outward from the cover board body center in one of the embodiments, and/or
The opening area of the through hole is gradually increased outward from the cover board body center.
The evaporation source further includes magnetic part in one of the embodiments, and the magnetic part is fixed on the cover board sheet
The inside of body or the side of the evaporation source cover board, it is preferable that the magnetic part is fixed on the periphery of the evaporation source cover board
Face.
The evaporation source further includes being set to the driving machine of evaporation source cover board side in one of the embodiments,
Structure, the driving mechanism include magnetic wheel for driving magnetic part rotation and for driving the magnetic wheel to rotate
Motor.
In addition, a kind of evaporation coating device is also provided, including above-mentioned evaporation source.
Using the evaporation source and evaporation coating device of technical solutions of the utility model, since evaporation material can be sprayed from through slot
It is incident upon on substrate to be deposited, during vapor deposition, the rotation of evaporation source cover board can make evaporation material rotate expansion in injection
It dissipates, guarantees the uniformity of evaporation material ejected, to be conducive to improve the uniformity of film forming.
Further, since film uniformity can be improved into rotation, therefore can suitably reduce between evaporation source and substrate to be deposited
Distance T, to improve the utilization rate of evaporation material.
Detailed description of the invention
Fig. 1 is the floor map of the evaporation source cover board of one embodiment of the utility model；
Fig. 2 is the cross-sectional view of the A-A' along Fig. 1；
Fig. 3 is the schematic diagram of the evaporation coating device of one embodiment of the utility model；
Fig. 4 is the floor map of the evaporation source cover board of another embodiment of the utility model；
Fig. 5 is the floor map of the evaporation source cover board of another embodiment of the utility model；
Fig. 6 is the floor map of the evaporation source cover board of another embodiment of the utility model；
Fig. 7 is the Longitudinal cross section schematic of the evaporation source cover board of another embodiment of the utility model.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.Many details are explained in the following description in order to abundant
Understand the utility model.But the utility model can be implemented with being much different from other way described herein, this field
Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by following public affairs
The limitation for the specific embodiment opened.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side " and similar statement are for illustrative purposes only.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term " and or " used herein includes
Any and all combinations of one or more related listed items.
The utility model provides a kind of for improving the evaporation source and evaporation coating device of the uniformity of film forming.
Referring to Figure 1~Fig. 3, the evaporation source 200 of one embodiment of the utility model include evaporation source cover board 100 and are used for
Support the supporter 210 of evaporation source cover board 100.Wherein, evaporation source cover board 100 is relative to the rotatable setting of supporter 210.Its
In, evaporation source cover board 100 includes cover board body 110, and cover board body 110 is equipped with to be passed through through at least one of cover board body 110
Through slot 120, and at least one through slot 120 is arranged in the shape of a spiral.
On the basis of aforementioned embodiments, the rotation center of evaporation source cover board and the helical arrangement of at least one through slot
Center overlaps.Preferably, rotation center is overlapped with cover board body center.During vapor deposition, the rotation of evaporation source cover board,
Present embodiment can guarantee the uniformity of the evaporation material ejected, to be conducive to improve the uniformity of film forming.
On the basis of aforementioned embodiments, a through slot 120 is provided on cover board body 110, through slot 120 is in spiral shell
It revolves shape to extend, as shown in Figure 1.Certainly, the number of through slot is without being limited thereto, can also be configured according to the actual situation.
Fig. 4 is referred to, the evaporation source cover board 500 of another embodiment of the utility model includes cover board body 510, cover board sheet
Multiple through slots 520 are provided on body 510, and multiple through slots 520 join end to end and arrange in the shape of a spiral.
Fig. 5 is referred to, the evaporation source cover board 600 of another embodiment of the utility model includes cover board body 610, cover board sheet
A through slot 620 is provided on body 610, through slot 620 extends in the shape of a spiral.Through slot 620 includes in helical arrangement
First starting point 621 of the heart, the first starting point 621 and helical arrangement center be not be overlapped.
Under rotation status, the first starting point 621 is set and helical arrangement center is not be overlapped.With the center of threaded hole 120
For, in rotary course, the path that the first starting point 621 of through slot 620 is passed by is the rotation around evaporation source cover board 100
The circle at center.If the first starting point 621 of through slot 620 is overlapped with helical arrangement center, in rotary course, through slot
The path that 620 the first starting point 621 is passed by is the point being overlapped with helical arrangement center, relative to this kind of mode, through slot 620
The first starting point 621 and helical arrangement center it is not be overlapped, can be avoided the evaporation material ejected and concentrate on substrate to be deposited
A certain position so that it is more uniform finally to form a film.
Certainly, the number of through slot 620 can also be two or more, it is preferable that be two, three or four
It is a.
Fig. 6 is referred to, the evaporation source cover board 700 of another embodiment of the utility model includes cover board body 710, cover board sheet
A through slot 720 is provided on body 710, through slot 720 extends in the shape of a spiral.Through slot 720 includes in helical arrangement
First starting point 721 of the heart, the first starting point 721 and helical arrangement center be not be overlapped.
Further include at least one connecting groove 730 between through slot 720 and helical arrangement center, 730 one end of connecting groove be by
Second starting point 731 at nearly helical arrangement center, the other end is close to through slot 720, it is preferable that connecting groove 730 passes through the first
Initial point 721 is connected with through slot 720.Certainly, the number of through slot 720 can also be two or more.Preferably,
Connecting groove 731 is arc.Wherein, arc refers to that any one, from deviation or bending on straight line or level, is appeared as
The shape of one circular arc or elliptic arc.When evaporation source cover board 700 is at the uniform velocity rotated with certain revolving speed, connecting groove 731 is arc
Be conducive to improve into film uniformity.
On the basis of aforementioned embodiments, Fig. 2 is referred to, the longitudinal section of evaporation source cover board 100 includes by least one
Multiple through holes 124 that through slot 120 is formed, the longitudinal section in this programme refer to across rotation center and perpendicular to evaporation source lid
The face of plate 100, a side of through hole 124 close to 110 center of cover board body and a side far from 110 center of cover board body are flat
Row, the maximum value of angle α or angle β between the axis 122 of through hole 124 and the face normal 112 of cover board body 110 are sharp
Angle.
Wherein, the axis 122 of through hole 124 refers to the virtual lines positioned at 124 center of through hole, as shown in figure 1
It is shown.
Wherein, the maximum value of the angle between the axis 122 of through hole 124 and the face normal 112 of cover board body 110 is sharp
Angle refers to that the angle between the axis 122 of through hole 124 and the face normal 112 of cover board body 110 can be for 0 ° or sharp
Angle.
In another embodiment, Fig. 7 is referred to, a side of through hole 824 close to 810 center of cover board body is parallel to
Face normal, a side of through hole 824 far from 810 center of cover board body and face normal angle maximum value are acute angle.
Certainly, in other embodiments, in multiple through holes, can also part through hole close to cover board body center
A side is parallel with far from a side at cover board body center, the angle between the axis of through hole and the face normal of cover board body
Maximum value be acute angle.And a side of rest part through hole close to cover board body center is parallel to face normal, through hole is remote
A side and face normal angle maximum value from cover board body center are acute angle.
On the basis of aforementioned embodiments, angle is gradually increased outward from 110 center of cover board body.Specifically, angle α
Close to the center of through hole 124, center of the angle β far from through hole 124, as shown in Figure 2, angle α are less than folder
Angle beta.Advantageously allowing any position so has material injection, improves the uniformity of the evaporation material ejected.
Preferably, angle is 0 °~20 °.When angle is 0 °~20 °, the angle for avoiding material from spraying is excessive, and influences
The uniformity of the evaporation material ejected.
On the basis of aforementioned embodiments, the opening area of through hole 120 gradually increases outward from 110 center of cover board body
Greatly.Advantageously ensure that position is uniformly sprayed around from middle position for the material of injection, ejects to advantageously ensure that in this way
Evaporation material uniformity.
On the basis of aforementioned embodiments, evaporation source 200 further includes magnetic part 130.Magnetic part 130 is fixed on cover board sheet
The inside of body 110 or the side of evaporation source cover board 100.Preferably, magnetic part 130 is fixed on the periphery of evaporation source cover board 100
Face.Magnetic part 130 is by rotation after magnetic drive and evaporation source cover board 100 is driven to rotate.
Specifically, the side of cover board body 110 has annular groove 114, magnetic part 130 is embedded in groove 114.Certainly,
The position of magnetic part 130 is without being limited thereto.
On the basis of aforementioned embodiments, evaporation source 200 further includes being set to the driving machine of 100 side of evaporation source cover board
Structure 230.Driving mechanism 230 include for drive magnetic part 130 rotate magnetic wheel 231 and for driving 231 turns of magnetic wheel
Dynamic motor (not shown).
Wherein, the distance between driving mechanism 230 and evaporation source cover board 100 can be adjusted according to the size of driving force
It is whole.
Wherein, motor is located at the outside of vapor deposition chamber, and the axis of magnetic wheel 231 guarantees that chamber is deposited by magnet fluid sealing mode
Indoor vacuum degree and cleannes.When motor rotates, driving magnetic wheel 231 rotates, so that magnetic force drives magnetic part 130 to rotate.
Present embodiment is driven to realize contactless transmission using magnetic wheel 231, is effectively reduced in machine driving vacuum chamber
Particle is generated.Certainly, driving mechanism 230 can also can play the mechanism of driving effect for other.
On the basis of aforementioned embodiments, evaporation source cover board 100 is provided with receiving on the inner sidewall of supporter 210
The space of bearing 240 is connected between evaporation source cover board 100 and supporter 210 using bearing 240.Specifically, evaporation source cover board
Rotation connection is realized using the connection of bearing 240 between 100 and supporter 210.
In addition, evaporation source 200 can also include the material carrier platform 220 for carrying evaporation material.Material carrier platform 220 is located at vapor deposition
In the region that source cover board 100 and supporter 210 surround.The evaporation source 200 of present embodiment during the work time, material carrier platform 220
It is loaded with evaporation material.Evaporation material is preferably luminous organic material or blocky inorganic material.
Further, it is also possible to be provided with heating unit (such as heating wire) and temperature conditioning unit in the upper surface of cover board body 110
(such as thermocouple) can prevent evaporation material from condensing at threaded hole, so that evaporation material be avoided to block threaded hole.
Using the evaporation source of technical solutions of the utility model, since evaporation material can be sprayed from through slot to be deposited
On substrate, during vapor deposition, the rotation of evaporation source cover board can make evaporation material rotate diffusion in injection, guarantee injection
The uniformity of evaporation material out, to be conducive to improve the uniformity of film forming.
Fig. 3 is referred to, the evaporation coating device 300 of an embodiment includes above-mentioned evaporation source 200.
Using the evaporation coating device of technical solutions of the utility model, since evaporation material can be sprayed from through slot to wait steam
On plated substrate, during vapor deposition, the rotation of evaporation source cover board can make evaporation material rotate diffusion in injection, guarantee spray
The uniformity of the evaporation material of injection, to be conducive to improve the uniformity of film forming.
Further, since film uniformity can be improved into rotation, therefore it can suitably reduce evaporation source 200 and substrate to be deposited
The distance between 400 T, deposition of the material on vapor deposition cavity, vapor deposition baffle is reduced, to improve the utilization rate of evaporation material.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (14)
1. a kind of evaporation source characterized by comprising evaporation source cover board is used to support the supporter of the evaporation source cover board；Institute
Evaporation source cover board is stated relative to the rotatable setting of the supporter；Wherein, the evaporation source cover board includes cover board body, the lid
Plate ontology is equipped at least one through slot through the cover board body, and at least one described through slot is arranged in the shape of a spiral
Cloth.
2. evaporation source according to claim 1, which is characterized in that the rotation center of the evaporation source cover board and it is described at least
The helical arrangement center of one through slot overlaps.
3. evaporation source according to claim 2, which is characterized in that the rotation center is Chong Die with cover board body center to be set
It sets.
4. evaporation source according to claim 1, which is characterized in that be provided with a through slot, institute on the cover board body
It states through slot to extend in the shape of a spiral, alternatively, being provided with multiple through slots on the cover board body, and multiple through slot head and the tail
It is connected and arranges in the shape of a spiral.
5. evaporation source according to claim 2, which is characterized in that at least one described through slot includes close to the spiral
First starting point at arrangement center, first starting point and the helical arrangement center be not be overlapped.
6. evaporation source according to claim 5, which is characterized in that at least one described through slot and the helical arrangement
It further include at least one connecting groove between the heart, the connecting groove includes the second starting point close to the helical arrangement center.
7. evaporation source according to claim 6, which is characterized in that the connecting groove is by first starting point and accordingly
Through slot is connected.
8. evaporation source according to claim 7, which is characterized in that the connecting groove is arc.
9. evaporation source according to claim 1, which is characterized in that the longitudinal section of the evaporation source cover board include by it is described extremely
Multiple through holes that a few through slot is formed, the through hole is close to a side at the cover board body center and far from described
The a side at cover board body center is parallel, and the angle between the face normal of the axis of the through hole and the cover board body is most
Big value is acute angle, and/or
The a side of the through hole close to the cover board body center is parallel to the face normal, and the through hole is far from described
The a side at cover board body center and the face normal angle maximum value are acute angle.
10. evaporation source according to claim 9, which is characterized in that the angle from the cover board body center outward by
It is cumulative big, and/or
The opening area of the through hole is gradually increased outward from the cover board body center.
11. evaporation source according to claim 1, which is characterized in that the evaporation source further includes magnetic part, the magnetic part
It is fixed on the inside of the cover board body or the side of the evaporation source cover board.
12. evaporation source according to claim 11, which is characterized in that the magnetic part is fixed on the evaporation source cover board
Outer peripheral surface.
13. evaporation source according to claim 11, which is characterized in that the evaporation source further includes being set to the evaporation source
The driving mechanism of cover board side, the driving mechanism include magnetic wheel for driving magnetic part rotation and for driving
The motor of the magnetic wheel rotation.
14. a kind of evaporation coating device, which is characterized in that including such as described in any item evaporation sources of claim 1-13.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920182065.0U CN209722279U (en) | 2019-02-01 | 2019-02-01 | Evaporation source and evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920182065.0U CN209722279U (en) | 2019-02-01 | 2019-02-01 | Evaporation source and evaporation coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209722279U true CN209722279U (en) | 2019-12-03 |
Family
ID=68682534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920182065.0U Active CN209722279U (en) | 2019-02-01 | 2019-02-01 | Evaporation source and evaporation coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209722279U (en) |
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2019
- 2019-02-01 CN CN201920182065.0U patent/CN209722279U/en active Active
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