CN209707450U - A kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity - Google Patents
A kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity Download PDFInfo
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- CN209707450U CN209707450U CN201822214567.5U CN201822214567U CN209707450U CN 209707450 U CN209707450 U CN 209707450U CN 201822214567 U CN201822214567 U CN 201822214567U CN 209707450 U CN209707450 U CN 209707450U
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Abstract
The utility model relates to gas chromatographic technique fields, disclose a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity, including switching valve, chromatographic column, it is vented needle-valve, detector (9) and carrier gas gas circuit, switching valve includes switching valve V1 (1) and eight direction changeover valve V2 (2), chromatographic column includes the first chromatographic column (3), second chromatographic column (4) and third chromatographic column (5), being vented needle-valve includes the first emptying needle-valve (6) and the second emptying needle-valve (7), carrier gas gas circuit includes the first carrier gas gas circuit, second carrier gas gas circuit and third carrier gas gas circuit, it further include threeway switching ball valve (8).The gas circuit based on eight direction changeover valves of the utility model is realized with the trace impurity in 5A molecular sieve chromatography post detection separation high-purity gas, in addition, the gas circuit can be completed to detect the trace impurity for detecting the wide-range concentration for being limited to 0.1ppm or less and 5-10ppm or more in high-purity gas after being mounted with PDHID.
Description
Technical field
The utility model relates to gas chromatographic technique fields, more particularly to a kind of apply is based in Analysis of Gases of High Purity
The gas circuit of eight direction changeover valves.
Background technique
Existing conventional gas analysis gas chromatograph is generally turned using TCD thermal conductivity detector (TCD) or device nickel accelerant
Change technology measures inorganic impurity into fid detector, but its sensitivity is low, be difficult to detect concentration be 0.1ppm-10ppm with
Under component；And to O2It is very difficult with the separation of Ar.
With the rapid development of China's industrial gasses, industrial space division gas is solved from pure gas to high-purity gas increased quality
The demand of a large amount of high-purity gas users, therefore, the quality assurance of high-purity gas product will be divided by high-purity gas gas chromatograph
Analysis is completed.
Currently, the utility model patent of Patent No. 201320818912.0 discloses one kind for micro- in high-purity germane gas
Measure the helium ionized gas phase chromatographic instrument of impurity analysis, helium ionized gas phase chromatographic instrument includes that chromatograph box, temperature control system, signal are adopted
Collect processing system and exhaust treatment system, signal acquiring system include helium ionization detector and chromatographic column work station, chromatographic column
The structure of work station includes three switching valves, three chromatographic columns, four needle-valves and three carrier gas gas circuits, and three switching valves are one
Ten-way valve and two six-way valves, the connection of helium ionization detector and chromatographic column work station.The utility model is for high-purity
Trace impurity is analyzed in germane gas, is realized ppb rank impurity analysis by helium ionization detector high sensitivity, is realized one
The complete analysis to germane impurity is completed in secondary sample introduction operation, but the gas chromatograph is still unable to complete O2With the separation of Ar.
Utility model content
The utility model is low for prior art medium sensitivity, is difficult to detect the component of 0.1ppm-10ppm or less concentration
And to O2Difficult disadvantage, provides a kind of gas applied based on eight direction changeover valves in Analysis of Gases of High Purity with the separation of Ar
Road can analyze the O in high-purity gas when analyzing the trace impurity of high-purity gas (containing high purity oxygen gas)2+ Ar component utilizes
Secondary analysis obtains O with minusing again respectively2With Ar measured value, Ar, N in high purity oxygen gas can be also analyzed2And CH4Component.
In order to solve the above-mentioned technical problem, the utility model is addressed by following technical proposals:
A kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity, including switching valve, chromatographic column, emptying needle
Valve, detector and carrier gas gas circuit, switching valve include switching valve V1 and eight direction changeover valve V2, and chromatographic column includes the first chromatographic column, the
Two chromatographic columns and third chromatographic column, emptying needle-valve include the first emptying needle-valve and the second emptying needle-valve, and carrier gas gas circuit includes first
Carrier gas gas circuit, the second carrier gas gas circuit and third carrier gas gas circuit further include threeway switching ball valve；
First carrier gas gas circuit is connected to the first chromatographic column, and switching valve V1 is connected to the first chromatographic column and the second chromatographic column, the
Two chromatographic columns are connected to helium ionization detector, and switching valve V1 is connected to eight direction changeover valve V2, and eight direction changeover valve V2 are put with first
Needle-free valves, the second emptying needle-valve, third chromatographic column be connected tos with the second carrier gas gas circuit, threeway switch ball valve and third carrier gas gas circuit and
Eight direction changeover valve V2 connection.
Preferably, switching valve V1 is that four-way purges pneumatic switching valve, pneumatic switching is purged to four-way with clock-wise order
Valve carries out label, purges interface that pneumatic switching valve connect with the first chromatographic column with four-way as 1. number interface, the first chromatographic column and
Four-way purges the 1. number orifice of pneumatic switching valve, and the 2. number interface that the second chromatographic column and four-way purge pneumatic switching valve connects
Logical, the 1. number interface and four-way of eight direction changeover valve V2 purge the 4. number orifice of pneumatic switching valve, and eight direction changeover valve V2 are 4.
Number interface and four-way purge the 3. number orifice of pneumatic switching valve.
Preferably, switching valve V1 is that four-way purges pneumatic switching valve, pneumatic switching is purged to four-way with clock-wise order
Valve carries out label, purges interface that pneumatic switching valve connect with the first chromatographic column with four-way as 1. number interface, the first chromatographic column and
Four-way purges the 1. number orifice of pneumatic switching valve, and the 2. number interface that the second chromatographic column and four-way purge pneumatic switching valve connects
Logical, the 1. number interface and four-way of eight direction changeover valve V2 purge the 4. number orifice of pneumatic switching valve, and eight direction changeover valve V2 are 4.
Number interface and four-way purge the 3. number orifice of pneumatic switching valve；Label is carried out to eight direction changeover valve V2 with sequence counter-clockwise,
Purging the interface that pneumatic switching valve is connect with four-way with eight direction changeover valve V2 is that 1. number interface, the first emptying needle-valve and eight lead to switching
The 2. number orifice of valve V2, the 3. number orifice of the second carrier gas gas circuit and eight direction changeover valve V2, eight direction changeover valve V2 are 5.
Number interface passes through the 8. number orifice of third chromatographic column and eight direction changeover valve V2, and second is vented needle-valve and eight direction changeover valve V2
6. number orifice, threeway switches the 7. number orifice of ball valve and eight direction changeover valve V2.
Preferably, carrying out label to eight direction changeover valve V2 with sequence counter-clockwise, purged with eight direction changeover valve V2 and four-way
The interface of pneumatic switching valve connection is 1. number interface, the 2. number orifice of the first emptying needle-valve and eight direction changeover valve V2, second
The 3. number orifice of carrier gas gas circuit and eight direction changeover valve V2, the 5. number interface of eight direction changeover valve V2 by third chromatographic column with
The 8. number orifice of eight direction changeover valve V2, the 6. number orifice of the second emptying needle-valve and eight direction changeover valve V2, threeway switching
The 7. number orifice of ball valve and eight direction changeover valve V2.
Preferably, the first chromatographic column is 5A molecular sieve chromatography column, the second chromatographic column is 5A molecular sieve chromatography column, third color
Spectrum column is deoxidation column.
Preferably, detector is helium ionization detector (PDHID).
Preferably, four-way purging is pneumatically cut when four-way purges the 1. number interface of pneumatic switching valve with 2. number orifice
Changing valve closing, the first chromatographic column and the second Coupled columns, the first chromatographic column is for the impurity in pre-separation high-purity gas, and second
Chromatographic column is used to continue to separate the impurity in high-purity gas.
Preferably, eight direction changeover valve V2 are closed when the 1. number interface of eight direction changeover valve V2 is with 2. number orifice, three
Logical switching ball valve is connected to third chromatographic column, and threeway switching ball valve is for being loaded into carrier gas or deoxidation column regeneration gas.
Preferably, when applying in the analysis of high-purity hydrogen, high pure nitrogen or high-purity helium, the pneumatic switching of four-way purging
The 1. number interface of valve and 4. number orifice, four-way purge pneumatic switching valve and open, and the pneumatic switching valve of four-way purging is led to eight cuts
Valve V2 connection is changed, the 1. number interface of eight direction changeover valve V2 and 2. number orifice, eight direction changeover valve V2 are closed, the first emptying needle-valve
Bulk composition for being vented in high-purity hydrogen, high pure nitrogen or high-purity helium.
Preferably, when applying in high purity oxygen gas or O2When+Ar is analyzed, four-way purge the 1. number interface of pneumatic switching valve with
4. number orifice, four-way purges pneumatic switching valve and opens, and four-way purges pneumatic switching valve and is connected to eight direction changeover valve V2, and eight is logical
The 1. number interface of switching valve V2 and 8. number orifice, eight direction changeover valve V2 are opened, the first chromatographic column, the second chromatographic column and third
Coupled columns, the first chromatographic column is for the impurity in pre-separation high purity oxygen gas, O2+ Ar or O2Enter third color with residual impurity
Column is composed, third chromatographic column is for adsorbing O2, the second chromatographic column is for continuing separation Ar or residual impurity.
The operating path of the gas circuit based on eight direction changeover valves of the utility model is as follows:
(1) the pre-separation impurity H of sample is realized using the first chromatographic column for being connected to switching valve V12、O2+Ar、 N2、CH4、
The impurity peaks of CO and cut most of main body peak, remaining a small amount of main body peak comprising impurity peaks be relatively vented and put several times
Enter the second chromatographic column to separate impurity peaks, returns to the impurity peaks of analysis on horizontal base line, improve the detection sensitivity of impurity peaks；
(2) eight direction changeover valve V2 are vented bulk composition, while making O2+ Ar closes peak and enters third chromatographic column, third
Chromatographic column is to O2It is adsorbed, and separates Ar, obtain Ar and O2Separate peak, Ar, which enters the second chromatographic column, to be continued point
From.
The utility model is due to using above technical scheme, with significant technical effect:
A kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity of the utility model is realized with 5A points
Impurity in son sieve chromatography post detection separation high-purity gas.Since general 5A molecular sieve chromatography column is to O2+ Ar is to close peak to isolate
Come, one-component O can not be read2With the numerical value of Ar；The gas circuit based on eight direction changeover valves 401 deoxidation columns of having connected can be completed
To O2Absorption and isolate individual Ar component, then obtained in high-purity gas respectively with minusing again by secondary analysis
Impurity O2With Ar measured value；The utility model can also be completed into 401 deoxidation columns to main body O by cutting high purity oxygen gas2's
Absorption, isolates impurity A r, N2、CH4Component.Moreover, should gas circuit based on eight direction changeover valves be mounted with to complete after PDHID pair
The trace impurity that the wide-range concentration for being limited to 0.1ppm or less and 5-10ppm or more is detected in high-purity gas is detected.
Detailed description of the invention
Fig. 1 is the attachment structure schematic diagram of the utility model.
Fig. 2 is connection schematic diagram when switching valve V1 is opened and eight direction changeover valve V2 are closed.
Fig. 3 is connection schematic diagram when switching valve V1 is opened and eight direction changeover valve V2 are opened.
Fig. 4 is connection schematic diagram when switching valve V1 is closed and eight direction changeover valve V2 are closed.
The toponym that each number designation is referred in attached drawing is as follows: 1-switching valve V1,2-eight direction changeover valve V2,3-
First chromatographic column, the 4-the second chromatographic column, 5-third chromatographic columns, the 6-the first emptying needle-valve, the 7-the second emptying needle-valve, 8-three
Logical switching ball valve, 9-detectors.
Specific embodiment
The utility model is described in further detail with embodiment with reference to the accompanying drawing.
Embodiment 1
A kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity, as shown in Figure 1, including switching valve, color
Composing column, emptying needle-valve, helium ionization detector 9 and carrier gas gas circuit, switching valve includes switching valve V1 1 and eight direction changeover valve V2
2, chromatographic column includes the first chromatographic column 3, the second chromatographic column 4 and third chromatographic column 5, and emptying needle-valve includes the first emptying 6 He of needle-valve
Second emptying needle-valve 7, it further includes threeway that carrier gas gas circuit, which includes the first carrier gas gas circuit, the second carrier gas gas circuit and third carrier gas gas circuit,
Switch ball valve 8；
First carrier gas gas circuit is connected to the first chromatographic column 3, and switching valve V1 1 and the first chromatographic column 3 and the second chromatographic column 4 connect
Logical, the second chromatographic column 4 is connected to helium ionization detector 9, and switching valve V1 1 is connected to eight direction changeover valve V2 2, eight direction changeover valves
V2 2 is vented needle-valve 7, third chromatographic column 5 and the second carrier gas gas circuit with the first emptying needle-valve 6, second and is connected to, and threeway switches ball valve 8
It is connected to third carrier gas gas circuit and eight direction changeover valve V2 2.
Switching valve V1 1 is that four-way purges pneumatic switching valve, purges pneumatic switching valve to four-way with clock-wise order and marks
Number, purging the interface that pneumatic switching valve is connect with the first chromatographic column 3 with four-way is that 1. number interface, the first chromatographic column 3 are blown with four-way
The 1. number orifice of switching valve is moved in scavenging, and the second chromatographic column 4 purges the 2. number orifice of pneumatic switching valve with four-way, and eight is logical
The 1. number interface of switching valve V2 2 and four-way purge the 4. number orifice of pneumatic switching valve, 4. eight direction changeover valve V2's 2 number connects
Mouth purges the 3. number orifice of pneumatic switching valve with four-way.
Label is carried out to eight direction changeover valve V2 2 with sequence counter-clockwise, is pneumatically cut with eight direction changeover valve V2 2 and four-way purging
The interface of valve connection is changed as 1. number interface, first is vented the 2. number orifice of needle-valve 6 and eight direction changeover valve V2 2, the second carrier gas
The 3. number orifice of gas circuit and eight direction changeover valve V2 2, the 5. number interface of eight direction changeover valve V2 2 by third chromatographic column 5 with
The 8. number orifice of eight direction changeover valve V2 2, the 6. number orifice of the second emptying needle-valve 7 and eight direction changeover valve V2 2, threeway
Switch the 7. number orifice of ball valve 8 and eight direction changeover valve V2 2.
It is that Valco four-way purges pneumatic switching valve, outer diameter 1/16 " × i.d. 0.75mm that four-way, which purges pneumatic switching valve,；Eight
Direction changeover valve V2 2 is eight direction changeover valve of Valco C8UWT, outer diameter 1/16 " × i.d.0.75mm.
First chromatographic column 3 is outer diameter 1/8 " × i.d.2.1mm VCR connector 316L stainless steel tube production 5A molecular sieve color
Column is composed, the second chromatographic column 4 is outer diameter 1/8 " × i.d.2.1mm VCR connector 316L stainless steel tube production 5A molecular sieve chromatography
Column, third chromatographic column 5 are 401 deoxidation columns of outer diameter 5mm × i.d.4.0mm VCR connector 316L stainless steel tube production.
First emptying needle-valve 6 and the second emptying needle-valve 7 are the emptying metering needle of 1/16 " bore 316L material stainless steel production
Valve；Threeway switches the threeway that ball valve 8 is the production of 1/16 " bore 316L material stainless steel and switches ball valve；Helium ionization detector is
The helium ionization detector of VICI company.
Gas in first carrier gas gas circuit, the second carrier gas gas circuit and third carrier gas gas circuit is helium.
Embodiment 2
When four-way purges the 1. number interface of pneumatic switching valve with 2. number orifice, four-way purges pneumatic switching valve and closes,
First chromatographic column 3 is connected with the second chromatographic column 4, and the first chromatographic column 3 is for the impurity in pre-separation high-purity gas, the second chromatographic column
4 separate the impurity in high-purity gas for continuing.
When the 1. number interface of eight direction changeover valve V2 2 is with 2. number orifice, eight direction changeover valve V2 2 are closed, threeway switching
Ball valve 8 is connected to third chromatographic column 5, and threeway switching ball valve 8 is for being loaded into carrier gas or deoxidation column regeneration gas.
When applying in the analysis of high-purity hydrogen, high pure nitrogen or high-purity helium, four-way purge pneumatic switching valve 1. number
Interface and 4. number orifice, four-way purge pneumatic switching valve and open, and four-way purges pneumatic switching valve and eight direction changeover valve V2 2
Connection, the 1. number interface of eight direction changeover valve V2 2 and 2. number orifice, eight direction changeover valve V2 2 are closed, the first emptying needle-valve 6
Bulk composition for being vented in high-purity hydrogen, high pure nitrogen or high-purity helium.
Utilize a kind of gas path analysis high-purity hydrogen applied in Analysis of Gases of High Purity based on eight direction changeover valves of embodiment 1
In trace impurity, the specific steps are as follows:
First carrier gas loads the main component H in high-purity hydrogen2With trace impurity component O2+Ar、N2、CH4, CO pass through the
One chromatographic column, 3 pre-separation.As main composition H2When being separated by the first chromatographic column 3, switching valve V1 1 is by external event controller
It opens (as shown in Figure 2), the main composition H to come in the first chromatographic column 32Enter first from the 2. number interface of eight direction changeover valve V2 2
Needle-valve 6 is vented to be discharged；
Work as O2When+Ar is separated by the first chromatographic column 3, switching valve V1 1 and eight direction changeover valve V2 2 are by external event control
Device processed opens (as shown in Figure 3), O2+ Ar, which is entered together in third chromatographic column 5, removes absorption composition O2, while Ar is from third chromatography
It is separated in column 5, and is connected in the second chromatographic column 4 by switching valve V1 1 and goes to separate；
As trace impurity N2When being separated by the first chromatographic column 3, switching valve V1 1 is closed (such as by external event controller
Shown in Fig. 4), N2It is put into the second chromatographic column 4 and continues to separate, similarly, switching valve V1 1 is opened by external event controller
(as shown in Figure 2) continues the remaining H of emptying2Main component simultaneously enters the first emptying needle from the 2. number interface of eight direction changeover valve V2 2
Valve 6 is discharged；
As trace impurity CH4When being separated by the first chromatographic column 3, switching valve V1 1 is closed by external event controller
(as shown in Figure 4), CH4It is put into the second chromatographic column 4 and continues to separate, similarly, switching valve V1 1 is by external event controller
It opens (as shown in Figure 2), continues the remaining a small amount of H of emptying2Main component simultaneously enters the from the 2. number interface of eight direction changeover valve V2 2
One emptying needle-valve 6 is discharged, and when trace impurity CO to the end is separated by the first chromatographic column 3 always, switching valve V1 1 is outer
Portion's event controller closes (as shown in Fig. 1), and CO, which is put into the second chromatographic column 4, to be continued to separate；
In this way, H2In all trace impurity such as Ar, N2、CH4, CO all continue to separate through the second chromatographic column 4, then into
Enter and goes to detect in helium ionization detector.
Same above method, second of main component H operated in the first carrier gas load high-purity hydrogen2, trace impurity O2+Ar
Pass through 3 pre-separation of the first chromatographic column.As main composition H2When being separated by the first chromatographic column 3, switching valve V1 1 is by external event
Controller opens (as shown in Figure 2), the main composition H to come in the first chromatographic column 32From the 2. number interface of eight direction changeover valve V2 2 into
Enter the discharge of the first emptying needle-valve 6；Work as O2When+Ar is separated by the first chromatographic column 3, switching valve V1 1 is by external event controller
It closes (as shown in Figure 4), impurity O2+ Ar, which is put into the second chromatographic column 4, to be continued to separate；Then, switching valve V1 1 is by external event
Controller opens (as shown in Figure 2), other a small amount of main composition H to come in the first chromatographic column 32And impurity N2、CH4, CO it is complete
Portion enters the first emptying needle-valve 6 from the 2. number interface of eight direction changeover valve V2 2 and is discharged；It in this way can be in secondary analysis hydrogen
Measure the conjunction peak O of impurity2+ Ar measured value.
Finally, further through (O2+ Ar)-Ar=O2Obtain the impurity oxygen individual event value in high-purity hydrogen.
When selected high-purity gas is high-purity helium in one of the embodiments, surveyed using the gas circuit of embodiment 1 miscellaneous
Matter are as follows: H2、O2、Ar、N2、CH4,CO；
When selected high-purity gas is high pure nitrogen in one of the embodiments, surveyed using the gas circuit of embodiment 1 miscellaneous
Matter are as follows: H2、O2、Ar、CH4,CO；
When selected high-purity gas is high-purity argon gas in one of the embodiments, surveyed using the gas circuit of embodiment 1 miscellaneous
Matter are as follows: H2、N2、CH4、CO。
Embodiment 3
When four-way purges the 1. number interface of pneumatic switching valve with 2. number orifice, four-way purges pneumatic switching valve and closes,
First chromatographic column 3 is connected with the second chromatographic column 4, and the first chromatographic column 3 is for the impurity in pre-separation high-purity gas, the second chromatographic column
4 separate the impurity in high-purity gas for continuing.
When the 1. number interface of eight direction changeover valve V2 2 is with 2. number orifice, eight direction changeover valve V2 2 are closed, threeway switching
Ball valve 8 is connected to third chromatographic column 5, and threeway switching ball valve 8 is for being loaded into carrier gas or deoxidation column regeneration gas.
When applying in high purity oxygen gas or O2When+Ar is analyzed, four-way purges the 1. number interface and 4. number interface of pneumatic switching valve
Connection, four-way purge pneumatic switching valve and open, and four-way purges pneumatic switching valve and is connected to eight direction changeover valve V2 2, eight logical switchings
The 1. number interface of valve V2 2 and 8. number orifice, eight direction changeover valve V2 2 are opened, the first chromatographic column 3, the second chromatographic column 4 and the
The series connection of three chromatographic columns 5, the first chromatographic column 3 is for the impurity in pre-separation high purity oxygen gas, O2+ Ar or O2Enter the with residual impurity
Three chromatographic columns 5, third chromatographic column 5 is for adsorbing O2, the second chromatographic column 4 is for continuing separation Ar or residual impurity.
Utilize a kind of gas path analysis high purity oxygen gas applied in Analysis of Gases of High Purity based on eight direction changeover valves of embodiment 1
In trace impurity, the specific steps are as follows:
Trace impurity H in high purity oxygen gas2、O2+Ar、N2、CH4, CO pass through 3 pre-separation of the first chromatographic column.Work as trace impurity
H2When being separated by the first chromatographic column 3, switching valve V1 1 closes (as shown in Figure 4) by external event controller, trace impurity H2
It is put into the second chromatographic column 4, switching valve V1 1 and eight direction changeover valve V2 2 are opened by external event controller (such as Fig. 3 institute
Show), behind the O that comes in the first chromatographic column 32Main component Ar containing trace impurity, N2、CH4It is entered in third chromatographic column 5 together
It goes to adsorb main composition O2, while other trace impurities Ar, N2、CH4It is separated from third chromatographic column 5；And pass through switching valve V1
1 is connected in the second chromatographic column 4 and goes to separate, to the last one component C H in the second chromatographic column 44It is separated from third chromatographic column 5
After detecting into PDHID, at this moment switching valve V1 1 and eight direction changeover valve V2 2 is closed by external event controller (such as Fig. 4 institute
Show), the most end component C O that the first chromatographic column 3 is separated, which enters in the second chromatographic column 4, to be continued to separate, then with helium ionized inspection
Survey device detection.
Trace impurity in the entire high purity oxygen gas of the present embodiment (removes CO2Outside) in the first chromatographic column 3 and the second chromatography
It is isolated in the connecting of column 4 and third chromatographic column 5.
In above-described embodiment 3 after high purity oxygen gas analysis repeatedly, third chromatographic column 5 is to O2Absorption can gradually be saturated, can
According to actual needs, as shown in figure 4, threeway periodically to be switched to third chromatographic column 5 the deoxidation column regeneration gas H of ball valve 82Incision
Third chromatographic column 5 is restored into third chromatographic column 5.This need to increase column temperature to complete 5 aging of third chromatographic column to saturation also
It is former.
The preparation of 401 deoxidation columns uses partial size for 401 deoxidiers of 60-80 mesh, and 401 deoxidiers are filled after Overheating Treatment
Into deoxidation column, H then is passed through in deoxidation column2In-situ activation deoxidation column；Due to having selected eight direction changeover valve V2 2 and deoxidation
The column joint of column VCR mode, so that 401 deoxidation columns can complete preparation under 350 DEG C of high temperature.Its daily aging and regeneration
Same mode carries out, and 401 deoxidation column of deactivation can be in logical H2Under the conditions of the reduction of 250 DEG C of column temperatures.
In short, the above is only the preferred embodiment of the present invention, it is all according to present utility model application the scope of the patents institute
The equivalent changes and modifications of work should all belong to the covering scope of the utility model patent.
Claims (10)
1. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity, including switching valve, chromatographic column, emptying needle
Valve, detector (9) and carrier gas gas circuit, it is characterised in that: switching valve includes switching valve V1 (1) and eight direction changeover valve V2 (2), chromatography
Column includes the first chromatographic column (3), the second chromatographic column (4) and third chromatographic column (5), and emptying needle-valve includes the first emptying needle-valve (6)
With the second emptying needle-valve (7), carrier gas gas circuit includes the first carrier gas gas circuit, the second carrier gas gas circuit and third carrier gas gas circuit, further includes
Threeway switches ball valve (8)；
First carrier gas gas circuit is connected to the first chromatographic column (3), switching valve V1 (1) and the first chromatographic column (3) and the second chromatographic column (4)
Connection, the second chromatographic column (4) are connected to detector (9), and switching valve V1 (1) is connected to eight direction changeover valve V2 (2), eight direction changeover valves
V2 (2) is connected to the first emptying needle-valve (6), the second emptying needle-valve (7), third chromatographic column (5) and the second carrier gas gas circuit, and threeway is cut
Valve (8) of changing the shuttle is connected to third carrier gas gas circuit and eight direction changeover valve V2 (2).
2. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 1, feature
Be: switching valve V1 (1) is that four-way purges pneumatic switching valve, purges pneumatic switching valve to four-way with clock-wise order and marks
Number, the interface that pneumatic switching valve is connect with the first chromatographic column (3) is purged as 1. number interface, the first chromatographic column (3) and four with four-way
The 2. number interface that the 1. number orifice of the logical pneumatic switching valve of purging, the second chromatographic column (4) and four-way purge pneumatic switching valve connects
Logical, the 1. number interface and four-way of eight direction changeover valve V2 (2) purge the 4. number orifice of pneumatic switching valve, eight direction changeover valve V2
(2) 4. number interface and four-way purges the 3. number orifice of pneumatic switching valve.
3. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 2, feature
It is: label is carried out to eight direction changeover valve V2 (2) with sequence counter-clockwise, is pneumatically cut with eight direction changeover valve V2 (2) and four-way purging
The interface for changing valve connection is 1. number interface, the 2. number orifice of the first emptying needle-valve (6) and eight direction changeover valve V2 (2), second
The 5. number interface of the 3. number orifice of carrier gas gas circuit and eight direction changeover valve V2 (2), eight direction changeover valve V2 (2) passes through third chromatography
The 8. number orifice of column (5) and eight direction changeover valve V2 (2), 6. the second emptying needle-valve (7) and eight direction changeover valve V2's (2) number connects
Mouth connection, threeway switch the 7. number orifice of ball valve (8) and eight direction changeover valve V2 (2).
4. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 1, feature
It is: label is carried out to eight direction changeover valve V2 (2) with sequence counter-clockwise, is connect with eight direction changeover valve V2 (2) with switching valve V1 (1)
Interface be 1. number interface, the 2. number orifice of the first emptying needle-valve (6) and eight direction changeover valve V2 (2), the second carrier gas gas circuit
With the 3. number orifice of eight direction changeover valve V2 (2), the 5. number interface of eight direction changeover valve V2 (2) by third chromatographic column (5) with
The 8. number orifice of eight direction changeover valve V2 (2), the 6. number orifice of the second emptying needle-valve (7) and eight direction changeover valve V2 (2),
The 7. number orifice of threeway switching ball valve (8) and eight direction changeover valve V2 (2).
5. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 1, feature
Be: the first chromatographic column (3) is 5A molecular sieve chromatography column, and the second chromatographic column (4) is 5A molecular sieve chromatography column, third chromatographic column
It (5) is deoxidation column.
6. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 1, feature
Be: detector (9) is helium ionization detector.
7. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 3, feature
Be: when four-way purges the 1. number interface of pneumatic switching valve with 2. number orifice, four-way purges pneumatic switching valve and closes, and first
Chromatographic column (3) is connected with the second chromatographic column (4), and the first chromatographic column (3) is for the impurity in pre-separation high-purity gas, the second chromatography
Column (4) is used to continue to separate the impurity in high-purity gas.
8. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 7, feature
Be: when the 1. number interface of eight direction changeover valve V2 (2) is with 2. number orifice, eight direction changeover valve V2 (2) are closed, and threeway switches ball
Valve (8) is connected to third chromatographic column (5), and threeway switching ball valve (8) is for being loaded into carrier gas or deoxidation column regeneration gas.
9. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 3, feature
Be: when applying in the analysis of high-purity hydrogen, high pure nitrogen or high-purity helium, four-way purges the 1. number interface of pneumatic switching valve
With 4. number orifice, four-way purges pneumatic switching valve and opens, and four-way purges pneumatic switching valve and eight direction changeover valve V2 (2) even
Logical, the 1. number interface of eight direction changeover valve V2 (2) and 2. number orifice, eight direction changeover valve V2 (2) are closed, the first emptying needle-valve
(6) bulk composition for being vented in high-purity hydrogen, high pure nitrogen or high-purity helium.
10. a kind of gas circuit applied based on eight direction changeover valves in Analysis of Gases of High Purity according to claim 3, feature
It is: when applying in high purity oxygen gas or O2When+Ar is analyzed, four-way purges the 1. number interface of pneumatic switching valve and 4. number interface connects
Logical, four-way purges pneumatic switching valve and opens, and four-way purges pneumatic switching valve and is connected to eight direction changeover valve V2 (2), eight direction changeover valves
The 1. number interface of V2 (2) and 8. number orifice, eight direction changeover valve V2 (2) are opened, the first chromatographic column (3), the second chromatographic column (4)
It connects with third chromatographic column (5), the first chromatographic column (3) is for the impurity in pre-separation high purity oxygen gas, O2+ Ar or O2It is miscellaneous with residue
Matter enters third chromatographic column (5), and third chromatographic column (5) is for adsorbing O2, the second chromatographic column (4) is for continuing separation Ar or residue
Impurity.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114755349A (en) * | 2022-06-14 | 2022-07-15 | 四川晟实科技有限公司 | Automatic analysis system and method for low-temperature double-column chromatography of atmospheric volatile organic compounds |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114755349A (en) * | 2022-06-14 | 2022-07-15 | 四川晟实科技有限公司 | Automatic analysis system and method for low-temperature double-column chromatography of atmospheric volatile organic compounds |
| CN114755349B (en) * | 2022-06-14 | 2022-09-02 | 四川晟实科技有限公司 | Automatic analysis system and method for low-temperature double-column chromatography of atmospheric volatile organic compounds |
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