CN202548108U - Gas chromatography detection system for analyzing trace impurities in ultrahigh pure gas - Google Patents
Gas chromatography detection system for analyzing trace impurities in ultrahigh pure gas Download PDFInfo
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- CN202548108U CN202548108U CN2012201672074U CN201220167207U CN202548108U CN 202548108 U CN202548108 U CN 202548108U CN 2012201672074 U CN2012201672074 U CN 2012201672074U CN 201220167207 U CN201220167207 U CN 201220167207U CN 202548108 U CN202548108 U CN 202548108U
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Abstract
The utility model relates to detection equipment for a gas chromatography instrument, and in particular relates to a gas chromatography detection system for analyzing trace impurities in ultrahigh pure gas. The gas chromatography detection system comprises a chromatographic column box, a signal acquisition processor and a tail gas processor, wherein the chromatographic column box comprises the following components: a first molecular sieve chromatographic column (51) arranged between a switching valve VI (1) and a switching valve VII (2); a second molecular sieve chromatographic column (52) is arranged between a switching valve VII (2) and a switching valve VIV (4); and a second column separator (62) is arranged between the switching valve VIII (3) and switching valve VIV (4). The gas chromatography detecting system is controlled through each valve corresponding to one external event, the sequence of actions is executed by using an event draw-up program, the entire analyzing process is controlled automatically, actions are rapid, consistent and reliable, and the data repeatability and accuracy of the system are ensured through a stable flow gas channel and accurate valve switching.
Description
Technical field
The utility model relates to a kind of gas chromatograph checkout equipment, relates in particular to the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas.
Background technology
At present, the domestic gas chromatograph that is used for Analysis of Gases of High Purity is generally all used and is adopted traditional T CD and FID or zirconia detecting device; Their detecting device is technology tradition or backwardness mostly; And very strong to impurity analysis selectivity in the gas, a kind of gas is often wanted many stratographic analyses, and the flow process abbreviated analysis component of analyzing repeatedly; System is less demanding to gas circuit, makes the big reduction of detection sensitivity of system; Gas chromatographic analysis is in multi-dimensional chromatograph isolation technics scheme, and often requiring nearly, 5-6 props up the chromatographic resolution pillar; And the special-purpose again transfer valve of the connection of the gas circuit between the multi-dimensional chromatograph pillar is realized; Particularly be applied in the gas separate colors spectrometer requirement that the design of many gas circuits independence temperature control post case has solved different column temperatures.
Fast development along with China's industrial economy; Gas has the title of " blood " in commercial production; Supply and demand two is prosperous; The production of high-purity gas and ultra-pure gas and supply make new in recent years gas industry national standard, in the standard that promulgation is carried out after particularly 2006,2008,2009 etc., like high (superelevation) pure hydrogen, height (superelevation) purity nitrogen, high-purity (superelevation) argon, high-purity (superelevation) helium, high-purity (superelevation) oxygen; Industrial gasses and used in electronic industry gas such as liquid nitrogen, liquid argon, liquid oxygen; In the standard because of having stipulated use ng/g (ppb) level highly sensitive PDHID helium ionization detector (being called for short PDD among this paper); This guarantees especially in the gas that to whole chromatographic analysis system trace or vestige component get into the PDHID detector response effectively, is that present pendulum is researched and developed a new problem in face of the Analysis of Gases of High Purity chromatogram at home; Company's design one cover is fit to national conditions for this reason, the user accepts, analyzes required ultra-pure gas chromatographic analysis flow process that is exclusively used in, and improves the gas-chromatography detection method that trace impurity is analyzed in ultra-pure gas.
Summary of the invention
The utility model is to gas chromatograph detector technologies tradition common in the prior art or backward; And it is very strong to impurity analysis selectivity in the gas; A kind of gas is often wanted many stratographic analyses; And the flow process abbreviated analysis component of analyzing repeatedly, and system is less demanding to gas circuit, makes the shortcomings such as the big reduction of detection sensitivity of system that a kind of ultra high purity gas analysis chromatography processes flow process of accomplishing all impurity compositions analyses in ultra-pure gas through the sub-sampling switching gas circuit is provided.
In order to solve the problems of the technologies described above, the utility model is able to solve through following technical proposals:
The gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas; Comprise chromatograph box and signal acquisition process device; Exhaust gas treating device; Chromatograph box comprises and carries 1, carries 2, carries 3, carries 4 gas circuits that transfer valve V I and transfer valve V II, transfer valve V III and transfer valve V IV are provided with the first molecular sieve chromatography post between transfer valve V I and the transfer valve V II; Be provided with the second molecular sieve chromatography post between transfer valve V II and the transfer valve V IV; Be provided with needle-valve between transfer valve V I and the transfer valve V III, be provided with the second pillar separation vessel between transfer valve V III and the transfer valve V IV.
As preferably, carry that 1 gas circuit is connected with the 4. number interface of transfer valve V I, year 2 gas circuits are connected with the 7. number interface of transfer valve V I; Sample inlet is connected with the 1. number interface of transfer valve V I, and sample export is connected with the 2. number interface of transfer valve V I, and the 10. number interface of transfer valve V I is connected through pipeline with 3. number interface, also is provided with quantity tube on this pipeline; Carry 1 gas circuit and be connected with the 4. number interface of transfer valve V I, the pipeline that the 5. number interface of transfer valve V I is connected with 9. number interface is provided with the first pillar separation vessel; The upper end of needle-valve is connected with the 8. number interface of transfer valve V I, and the lower end is connected with the 1. number interface of transfer valve V III; Carrying 2 gas circuits is connected with the 7. number interface of transfer valve V I; One end of the first molecular sieve chromatography post is connected with the 6. number interface of transfer valve V I, and the other end is connected with the 1. number interface of transfer valve V II.
As preferably, carry 3 gas circuits and be connected with the 3. number interface of transfer valve V II; One end of the second molecular sieve chromatography post is connected with the 2. number interface of transfer valve V II, and the other end is connected with the 3. number interface of transfer valve V IV; 4. number interface of transfer valve V II is connected through pipeline with 5. number interface, and No. six interfaces of transfer valve V II are connected with variable valve A.
As preferably, carry 4 gas circuits and be connected with the 3. number interface of transfer valve V III; 4. number interface of transfer valve V III is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V III is connected with variable valve B; One end of the second pillar separation vessel is connected with the 2. number interface of transfer valve V III, and the other end is connected with the 1. number interface of transfer valve V IV.
As preferably, the 2. number interface of transfer valve V IV is connected with the helium ion detector, and the 4. number interface of transfer valve V IV is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V IV is connected with variable valve C.
As preferably, transfer valve V I is ten logically to purge pneumatic transfer valves, and transfer valve V II, V III, V IV are six logically to purge pneumatic transfer valves, carries 1, carries 2, carries 3, carries on 4 gas circuits and be respectively equipped with damper tube.Adopt the Valco band to purge pneumatic transfer valve; Guarantee the counter-infiltration of gas circuit handoff procedure air; Adopt Valco six direction changeover valves, four-way valve makes that the gas circuit stroke in the valve body is the shortest relatively; Adopting 316LValco 1/16 " 0.13mm makes the damping pipeline, the good and stability of flow of impermeability; The 5A chromatogram pillar that the research and development of employing company are produced, technological innovation and product quality not only ensure but also reliable; Adopt two heartcut systems, purpose emptying main component guarantees that as much as possible baseline is steady; Adopt ten-way valve just blowing mode, characteristics are that the gas circuit flow of native system changes little after valve body switches; Adopt the stainless steel metering pin valve, not only may command emptying flow but also can suppress the reverse osmosis of air; Adopt outside detached column case, make different chromatogram pillars have independent temperature controlling function.
The utility model switches through just blowing with blowback of ten direction changeover valves and six direction changeover valves; The change action of heartcut is all accomplished by system's countercharge chromatographic work station; The corresponding external event of each valve is controlled, and the order of its action also by incident executions that program, control by holistic approach process automation like this; Action is fast consistent reliable, the data repeatability of system and accuracy by the stable flow rate gas circuit and accurately valve switch and guarantee.
Description of drawings
Fig. 1 is the gas-chromatography detection system and the method flow synoptic diagram of the utility model.
Fig. 2 waits until the first pillar separation vessel synoptic diagram for the ten-way valve sampling with blowback CO2, C2+, H2O.
Fig. 3 is for the ten-way valve sample introduction and cut H2, N2, CH4 to the first molecular sieve chromatography post synoptic diagram in advance.
Fig. 4 enters into the second molecular sieve chromatography post synoptic diagram for the transfer valve V II first cutting center emptying first molecular sieve chromatography post main peak and purging peak to be detected.
Fig. 5 puts into peak to be detected in the second molecular sieve chromatography post for the transfer valve V II first cutting center and removes to separate synoptic diagram.
Fig. 6 is surplus main peak and H2O in the transfer valve V III second cutting center emptying first pillar separation vessel, C2+ etc.
Fig. 7 cuts CO2 for the transfer valve V III second cutting center or C2+ separates in the second pillar separation vessel.
Fig. 8 enters into the helium ion detector for H2, O2, N2, CH4, CO in the transfer valve V IV switch.
Fig. 9 enters into the helium ion detector for CO2 in the transfer valve V IV or C2+ switch.
Wherein 1-transfer valve V I, 2-transfer valve V II, 3-transfer valve V III, 4-transfer valve V IV, 8-helium ion detector, 9-needle-valve, 11-damper tube, 21-damper tube, 31-damper tube, 41-damper tube, 51-the first molecular sieve chromatography post, 52-the second molecular sieve chromatography post, 61-the first pillar separation vessel, 62-the second pillar separation vessel, 71-variable valve A, 72-variable valve B, 73-variable valve C.
Embodiment
Below in conjunction with accompanying drawing 1 to accompanying drawing 9 and embodiment the utility model is described in further detail:
The gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas; Comprise chromatograph box and signal acquisition process device; Exhaust gas treating device; Chromatograph box comprises and carries 1, carries 2, carries 3, carries 4 gas circuits, and transfer valve V I 1 and transfer valve V II 2, transfer valve V III 3 and transfer valve V IV 4, ten be logical to purge between pneumatic transfer valve V I 1 and the pneumatic transfer valve V II 2 of six logical purgings and be provided with the first molecular sieve chromatography post 51; Be provided with the second molecular sieve chromatography post 52 between transfer valve V II 2 and the transfer valve V IV 4; Be provided with needle-valve 9 between transfer valve V I 1 and the transfer valve V III 3, be provided with the second pillar separation vessel 62 between transfer valve V III 3 and the transfer valve V IV 4.The computer tube line length was come constant flow practice control after carrier gas 1, carrier gas 2, carrier gas 3, carrier gas 4 were all done damping with microporous pipe, and this mode gas circuit stability of flow is accurate; Can measure the subtle change of 2-3ml/min flow through the adjustment of every 5-10cm length.See accompanying drawing 1 for details.
Carry that 1 gas circuit is connected with the 4. number interface of transfer valve V I 1, year 2 gas circuits are connected with the 7. number interface of transfer valve V I 1; Sample inlet is connected with the 1. number interface of transfer valve V I 1, and sample export is connected with the 2. number interface of transfer valve V I 1, and the 10. number interface of transfer valve V I 1 is connected through pipeline with 3. number interface, also is provided with quantity tube 12 on this pipeline; Carry 1 gas circuit and be connected with the 4. number interface of transfer valve V I 1, the pipeline that the 5. number interface of transfer valve V I 1 is connected with 9. number interface is provided with the first pillar separation vessel 61; The upper end of needle-valve 9 is connected with the 8. number interface of transfer valve V I 1, and the lower end is connected with the 1. number interface of transfer valve V III 4; Carrying 2 gas circuits is connected with the 7. number interface of transfer valve V I 1; One end of the first molecular sieve chromatography post 51 is connected with the 6. number interface of transfer valve V I 1, and the other end is connected with the 1. number interface of transfer valve V II 2.
Carrying 3 gas circuits is connected with the 3. number interface of transfer valve V II 2; One end of the second molecular sieve chromatography post 52 is connected with the 2. number interface of transfer valve V II 2, and the other end is connected with the 3. number interface of transfer valve V IV 4; 4. number interface of transfer valve V II 2 is connected through pipeline with 5. number interface, and No. six interfaces of transfer valve V II 2 are connected with variable valve A71.
Carrying 4 gas circuits is connected with the 3. number interface of transfer valve V III 3; 4. number interface of transfer valve V III 3 is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V III 3 is connected with variable valve B72; One end of the second pillar separation vessel 62 is connected with the 2. number interface of transfer valve V III 3, and the other end is connected with the 1. number interface of transfer valve V IV 4.
2. number interface of transfer valve V IV 4 is connected with helium ion detector 8, and the 4. number interface of transfer valve V IV 4 is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V IV 4 is connected with variable valve C73.
The gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas, the sample introduction of employing sample gas secondary, main component is opened H2, O2 in the ten direction changeover valve V I 1 preparatory cuttings of sample introduction for the first time; Ar, N2, CH4; The component of CO and sample introduction blowback second time CO2, C2+, H2O component; Separate the back again and switch 8 analyses of entering helium ion detector, concrete steps are following:
A, transfer valve V I 1 adopt the forward sample introduction and the mode of blowback to change the gas circuit flow direction and link pipeline; Utilize 61 pairs of the first pillar separation vessels to carry component in the 1 gas circuit main body gas separately and behind the transfer valve: gas circuit changes stream goes other component blowbacks to separate to the first molecular sieve chromatography post 51, oppositely purges out residual air body composition and flow into the second pillar separation vessel 62 by carrying 2 gas circuits;
B, 2 pairs of main components of transfer valve V II are made first heartcut, the most main peak of emptying, and successively the impurity component is put into the second molecular sieve chromatography post 52 and goes to separate; And control well repeatedly switching time of valve the impurity component to be dropped to and go out the peak on the baseline, to improve its detection sensitivity;
Transfer valve V II 2 is as the first cutting center; The 5A molecular sieve chromatography pillar of respectively connecting before and after the valve is the first molecular sieve chromatography post 51 and the second molecular sieve chromatography post 52; The first molecular sieve chromatography post 51 is used for the most of main body of pre-separation and emptying peak; Remaining a small amount of main body peak the impurity peaks that comprises by emptying several times relatively with put into the second molecular sieve chromatography post 52 and come the removing impurities peak, the impurity peaks of analysis is got back on the horizontal base line, improve the detection sensitivity of impurity peaks.Like accompanying drawing 4, shown in 5.
C, transfer valve V III 3 mainly also are that the component that blowback is come is carried out surplus its main peak of secondary excision as the second cutting center, and the component that emptying is not wanted like trace water or sulfide, mainly obtains CO2 or C2+ to separate on the second pillar separation vessel 62;
Adopted V III six-way valve as the second cutting center, characteristics are accurate stainless steel metering pin valves that damping is used of series connection before the valve, are equal to the resistance of chromatographic column, and one second pillar separation vessel 62 special uses of series connection come separation of C O2 behind the V III valve, also can be used to separation of C 2+; The valve action of V III be emptying do not want be spread in the first pillar separation vessel 61 and surplus main body and component such as trace water or sulfide etc. that blowback goes out.See accompanying drawing 6,7 valves for details and switch synoptic diagram.
D, transfer valve V IV 4 switch to the impurity component that separates on the second molecular sieve chromatography post 52 and the second pillar separation vessel 62 respectively and go to respond out the peak in the helium ion detector.
Adopted V IV six-way valve to switch the isolated H2 of the first molecular sieve chromatography post, 51 pillars; O2/Ar, N2, CH4; CO component and the isolated CO2 of the second pillar separation vessel, 62 pillars or C2+ component get into 8 responses of helium ion detector, thereby measure the signal value of each impurity composition.See accompanying drawing 8,9 valves for details and switch synoptic diagram.Described ten logical all adopt the modular, pneumatically powered valve of the blowing and sweeping type Valco of VICI company with six direction changeover valves; Its principal character is the sweep gas protection gas circuit of design positive-pressure type in cavity; Guarantee that the air that the valve body rotor gap that mechanical seal causes when switching gas circuit has can't diffuse into by reverse osmosis, the malleation of protection gas is cut from carrier gas and the possible contact of air fully; Guarantee that the switching in valve body hole and hole just carries out between carrier gas.
Sample introduction comprises the steps: for the first time
A, switch V I ten-way valve and carry high purity nitrogen sample gas in the 1 gas circuit series connection quantity tube 12 and enter into the first pillar separation vessel 61 and cut the pillar pre-separation in advance and go out H2, O2/Ar, contain N2 main body peak, CH4, CO and be put into the first molecular sieve chromatography post 51 to go; As shown in Figure 3.
B, V I switching gas circuit then carry 1 gas circuit and enter into oppositely that the first pillar separation vessel 61 blows out remaining nitrogen and the remaining component of the CO2/C2+ that comprises; At this moment carry 2 gas circuits and enter into H2, the O2/Ar that the first molecular sieve chromatography post 51 removes to isolate earlier nitrogen; Put into and go in the second molecular sieve chromatography post 52 to continue to separate; In the time of just will having gone out the first molecular sieve chromatography post 51 Deng N2, then switch V II valve emptying N2 peak, when waiting CH4 that is diffused among the N2 will go out the first molecular sieve chromatography post 51; Then switch V II valve, put into CH4 and get into the second molecular sieve chromatography post 52 and go to separate;
C, likewise continue the surplus N2 of transfer valve emptying, then switch V II valve when waiting CO that is diffused among the N2 will go out the first molecular sieve chromatography post 51, put into CO and get into the second molecular sieve chromatography post 52 and go to separate;
D, adjust to well under the emptying N2 time each time and can the CH4, the CO that analyzed among the N2 be gone out the peak by the helium diluted of carrying in 3 to baseline;
E, the isolated H2 of the second molecular sieve chromatography post, 52 pillars, O2/Ar, CH4, CO component are switched response in the entering helium ion detector 8 by V IV valve; In this process the first pillar separation vessel 61 blow out remaining nitrogen and comprise in the remaining component of CO2/C2+ all switch emptying and fall by V II valve.
Sample introduction switches ten direction changeover valve V I 1 once more by the external event clock control for the second time; Carry high purity nitrogen sample gas in the 1 gas circuit series connection quantity tube 12 and enter into the first pillar separation vessel 61 and cut the pillar pre-separation in advance and go out H2, O2/Ar, contain N2 main body peak, CH4, CO and be put into the one the first molecular sieve chromatography post 51 molecular sieve chromatography posts 51 to go, and switch whole emptying by transfer valve V II 2 and fall; Control transfer valve V I 1 switching gas circuit then, carry 1 gas circuit and enter into oppositely that the first pillar separation vessel 61 blows out remaining nitrogen and the remaining component of the CO2/C2+ that comprises, C2+ is mainly alkane and alkene; Blow out remaining nitrogen by 3 emptying of transfer valve V III; Switching transfer valve V III 3 is put in the second pillar separation vessel, 62 pillars and is removed separation of C O2 or C2+ component when isolating the first pillar separation vessel 61 Deng CO2, and at this moment transfer valve V IV 4 performs in advance and switches response in CO2 or the C2+ entering helium ion detector 8.
Needle-valve 9 can be used to regulate and carries 1 with to carry 2 flow velocity balances consistent in transfer valve V I 1 valve in the gas circuit after the sub-sampling blowback, and make transfer valve V IV 4 switch laggard in the helium ion detector flow identical, its base flow variation is not quite.
Below we through this method is implemented in the impurity proximate analysis of ultra-pure nitrogen (99.9999%), reach the purpose that ultra-pure nitrogen is detected; Its implementation process is following: instrument sampling is for the first time automatically switched V I ten-way valve and is carried high purity nitrogen sample gas in the 1 gas circuit series connection 1ml quantity tube and enter into the first pillar separation vessel 61 and cut the pillar pre-separation in advance and go out H2, O2/Ar, contain N2 main body peak, CH4, CO and be put into first first molecular sieve chromatography post 51 to go; V I switching gas circuit carries 1 gas circuit and enters into oppositely that the first pillar separation vessel 61 blows out remaining nitrogen and the remaining component of the CO2/C2+ that comprises then; At this moment carry 2 gas circuits and enter into H2, the O2/Ar that the first molecular sieve chromatography post 51 removes to isolate earlier nitrogen; Put into and go in second the second molecular sieve chromatography post 52 to continue to separate; Just to go out 51 switchings of first molecular sieve chromatography post V II valve emptying N2 peak Deng N2; Then switch V II valve when CH4 among the N2 will go out the first molecular sieve chromatography post 51 Deng being diffused in, put into CH4 and get into the second molecular sieve chromatography post 52 and go to separate; Likewise continue the surplus N2 of transfer valve emptying, then switch V II valve when waiting CO that is diffused among the N2 will go out the first molecular sieve chromatography post 51, put into CO and get into the second molecular sieve chromatography post 52 and go to separate; Adjust to well under the emptying N2 time each time and can the CH4, the CO that analyzed among the N2 be gone out the peak by the helium diluted of carrying in 3 to baseline; The isolated H2 of the second molecular sieve chromatography post, 52 pillars, O2/Ar, CH4, CO component are got in the PDHID helium ion detector by the switching of V IV valve and respond; In this process the first pillar separation vessel 61 blow out remaining nitrogen and comprise in the remaining component of CO2/C2+ all switch emptying and fall by V II valve.
In a word, the above is merely the preferred embodiment of the utility model, and all equalizations of being done according to the utility model claim change and modify, and all should belong to the covering scope of the utility model patent.
Claims (6)
1. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas; Comprise chromatograph box and signal acquisition process device; Exhaust gas treating device; Chromatograph box comprises and carries 1, carries 2, carries 3, carries 4 gas circuits that transfer valve V I (1) and transfer valve V II (2), transfer valve V III (3) and transfer valve V IV (4) is characterized in that: be provided with the first molecular sieve chromatography post (51) between transfer valve V I (1) and the transfer valve V II (2); Be provided with the second molecular sieve chromatography post (52) between transfer valve V II (2) and the transfer valve V IV (4); Be provided with needle-valve (9) between transfer valve V I (1) and the transfer valve V III (3), be provided with the second pillar separation vessel (62) between transfer valve V III (3) and the transfer valve V IV (4).
2. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas according to claim 1 is characterized in that: year 1 gas circuit is connected, carries 2 gas circuits and is connected with the 7. number interface of transfer valve V I (1) with the 4. number interface of transfer valve V I (1); Sample inlet is connected with the 1. number interface of transfer valve V I (1), and sample export is connected with the 2. number interface of transfer valve V I (1), and the 10. number interface of transfer valve V I (1) is connected through pipeline with 3. number interface, also is provided with quantity tube (12) on this pipeline; Carry 1 gas circuit and be connected with the 4. number interface of transfer valve V I (1), the pipeline that the 5. number interface of transfer valve V I (1) is connected with 9. number interface is provided with the first pillar separation vessel (61); The upper end of needle-valve (9) is connected with the 8. number interface of transfer valve V I (1), and the lower end is connected with the 1. number interface of transfer valve V III (4); Carrying 2 gas circuits is connected with the 7. number interface of transfer valve V I (1); One end of the first molecular sieve chromatography post (51) is connected with the 6. number interface of transfer valve V I (1), and the other end is connected with the 1. number interface of transfer valve V II (2).
3. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas according to claim 1 is characterized in that: carry 3 gas circuits and be connected with the 3. number interface of transfer valve V II (2); One end of the second molecular sieve chromatography post (52) is connected with the 2. number interface of transfer valve V II (2), and the other end is connected with the 3. number interface of transfer valve V IV (4); 4. number interface of transfer valve V II (2) is connected through pipeline with 5. number interface, and No. six interfaces of transfer valve V II (2) are connected with variable valve A (71).
4. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas according to claim 1 is characterized in that: carry 4 gas circuits and be connected with the 3. number interface of transfer valve V III (3); 4. number interface of transfer valve V III (3) is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V III (3) is connected with variable valve B (72); One end of the second pillar separation vessel (62) is connected with the 2. number interface of transfer valve V III (3), and the other end is connected with the 1. number interface of transfer valve V IV (4).
5. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas according to claim 1; It is characterized in that: the 2. number interface of transfer valve V IV (4) is connected with helium ion detector (8); 4. number interface of transfer valve V IV (4) is connected through pipeline with 5. number interface, and the 6. number interface of transfer valve V IV (4) is connected with variable valve C (73).
6. the gas-chromatography detection system that trace impurity is analyzed in ultra-pure gas according to claim 1; It is characterized in that: described transfer valve V I (1) is the pneumatic transfer valves of ten logical purgings; Transfer valve V II, V III, V IV (2,3,4) are six logical to purge pneumatic transfer valves, carry 1, carry 2, carry 3, carry on 4 gas circuits and be respectively equipped with damper tube (11,21,31,41).
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| CN2012201672074U CN202548108U (en) | 2012-04-19 | 2012-04-19 | Gas chromatography detection system for analyzing trace impurities in ultrahigh pure gas |
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| CN2012201672074U CN202548108U (en) | 2012-04-19 | 2012-04-19 | Gas chromatography detection system for analyzing trace impurities in ultrahigh pure gas |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628846A (en) * | 2012-04-19 | 2012-08-08 | 杭州克柔姆色谱科技有限公司 | Gas chromatography detection system and method for analyzing trace impurities in ultrahigh pure gas |
| CN104931615A (en) * | 2015-06-11 | 2015-09-23 | 中国船舶重工集团公司第七一八研究所 | Device and method for analyzing trace impurities in gas |
| CN107121520A (en) * | 2017-06-23 | 2017-09-01 | 洛阳黎明大成氟化工有限公司 | Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic |
| CN109765310A (en) * | 2018-12-27 | 2019-05-17 | 杭州克柔姆色谱科技有限公司 | The detection system and method for trace impurity silicon tetrachloride in electron gas boron chloride |
-
2012
- 2012-04-19 CN CN2012201672074U patent/CN202548108U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628846A (en) * | 2012-04-19 | 2012-08-08 | 杭州克柔姆色谱科技有限公司 | Gas chromatography detection system and method for analyzing trace impurities in ultrahigh pure gas |
| CN102628846B (en) * | 2012-04-19 | 2014-04-23 | 杭州克柔姆色谱科技有限公司 | Gas chromatography detection system and method for analyzing trace impurities in ultrahigh pure gas |
| CN104931615A (en) * | 2015-06-11 | 2015-09-23 | 中国船舶重工集团公司第七一八研究所 | Device and method for analyzing trace impurities in gas |
| CN107121520A (en) * | 2017-06-23 | 2017-09-01 | 洛阳黎明大成氟化工有限公司 | Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic |
| CN109765310A (en) * | 2018-12-27 | 2019-05-17 | 杭州克柔姆色谱科技有限公司 | The detection system and method for trace impurity silicon tetrachloride in electron gas boron chloride |
| CN109765310B (en) * | 2018-12-27 | 2022-05-31 | 杭州克柔姆色谱科技有限公司 | System and method for detecting trace impurity silicon tetrachloride in electronic gas boron trichloride |
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