CN107121520A - Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic - Google Patents
Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic Download PDFInfo
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- CN107121520A CN107121520A CN201710529909.XA CN201710529909A CN107121520A CN 107121520 A CN107121520 A CN 107121520A CN 201710529909 A CN201710529909 A CN 201710529909A CN 107121520 A CN107121520 A CN 107121520A
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- 238000004458 analytical method Methods 0.000 title claims abstract description 40
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims abstract description 8
- 238000004817 gas chromatography Methods 0.000 title claims abstract description 7
- 238000004587 chromatography analysis Methods 0.000 claims abstract description 47
- 230000001105 regulatory effect Effects 0.000 claims abstract description 24
- 239000001307 helium Substances 0.000 claims abstract description 14
- 229910052734 helium Inorganic materials 0.000 claims abstract description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000012159 carrier gas Substances 0.000 claims abstract description 13
- 238000000926 separation method Methods 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 4
- 238000005303 weighing Methods 0.000 claims description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 17
- 229910002091 carbon monoxide Inorganic materials 0.000 description 17
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 14
- 239000012535 impurity Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 7
- 229910018503 SF6 Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000001569 carbon dioxide Substances 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000002808 molecular sieve Substances 0.000 description 4
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 3
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/16—Injection
- G01N30/20—Injection using a sampling valve
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/16—Injection
- G01N30/20—Injection using a sampling valve
- G01N2030/201—Injection using a sampling valve multiport valves, i.e. having more than two ports
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Abstract
The gas-chromatography valve path system and its application method adsorbed the invention discloses a kind of high-purity Nitrogen trifluoride analysis with anaerobic, using the valve path system of the post of four valve four, including 2 four-way valves, 2 ten-way valves, 2 quantitative loops, 4 root chromatogram columns, 11 pressure balance regulating valves and 1 chromatography with discharge ionization detector, system carrier gas is more than 99.9999% high-purity helium, the simple system, easy to operate, analysis is accurate.
Description
Technical field
The present invention relates to the analytical equipment of Nitrogen trifluoride and analysis method.
Background technology
Nitrogen trifluoride (NF3) because it has that etch-rate is fast, selectivity is high and does not stay residue being etched material surface
The advantage of matter, in field extensive applications such as integrated circuit, photovoltaic and displays (TFT-LCD).Due to the height of its purity
It is larger to material etch influential effect, therefore accurately analyze NF3Main gaseous impurities O2、N2、CO、CO2、N2O and SF6Content show
Obtain particularly important.
CN102636598A discloses a kind of gas chromatographic valve road system for the fluorine-containing electronic gas analysis of a variety of high-purities
System and its application method, using the post of five valve four, single injected sampling can complete to include NF3The special gas of the fluorine-containing electronics of a variety of high-purities inside
Gaseous impurities measure, but its system complex, and because pre-separation post can adsorb micro amount of oxygen, therefore inevitable influence
High-purity N F3The degree of accuracy that middle micro amount of oxygen component analysis is determined.
The content of the invention
The invention solves the problems that first technical problem be to provide the gas that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic
Phase chromatogram valve path system, the simple system is easy to operate, and analysis is accurate.
The invention solves the problems that second technical problem be to provide a kind of application method of the system.
To solve above-mentioned first problem, the present invention uses the valve path system of the post of four valve four, including 2 four-way valves, 2 ten
Port valve, 2 quantitative loops, 4 root chromatogram columns, 11 pressure balance regulating valves and 1 chromatography with discharge ionization detector, system carrier gas is
More than 99.9999% high-purity helium；
Connect after the 1st interface connection pressure-regulating valve 10 of first four-way valve 1 with helium gas source, the 2nd interface connection pressure is put down
Weighing apparatus regulating valve 19 is followed by gas vent, and interface 3 is connected with the 2nd interface of the second ten-way valve 3, and the 4th interface connection second is analyzed
Chromatographic column 8 is followed by the 4th interface of the second four-way valve 4；
1st interface of the first ten-way valve 2 is communicated by pressure-regulating valve 11 with helium gas source, and the 2nd interface connection first is analyzed
Chromatographic column 6 is followed by the 2nd interface of the second four-way valve 4, and the first preseparation chromatography post 5, the 4th are connected between interface 3 and the 9th interface
Interface is communicated by pressure-regulating valve 12 with helium gas source, and the first quantitative loop 20, the 6th interface are connected between the 5th interface and the 8th interface
It is connected with the 6th interface of the second ten-way valve 3, the 7th interface connection sample inlet, after the 10th interface connection pressure balance regulating valve 18
Connect gas vent；
1st interface of the second ten-way valve 3 is communicated by pressure-regulating valve 13 with helium gas source, between interface 3 and the 9th interface
The interface of the second preseparation chromatography post the 7, the 4th is connected to communicate with helium gas source by pressure-regulating valve 14, the 5th interface and the 8th interface it
Between connect the interface of the second quantitative loop the 21, the 7th connection sample export, the 10th interface connection pressure balance regulating valve 17 is followed by gas and gone out
Mouthful；
The 1st interface connection chromatography with discharge ionization detector 22 of second four-way valve 4, interface 3 connection pressure balance regulating valve
16 are followed by gas vent.
Preferred carbon molecular sieve (CST) chromatographic column of first preseparation chromatography post 5.
The first analysis preferred 13X chromatographic columns of chromatographic column 6.
The preferred Hayesep D chromatographic columns of second preseparation chromatography post 7.
The second analysis preferred Hayesep DB chromatographic columns of chromatographic column 8.
This valve path system includes three parts：Carrier gas regulating system, component separation system and detector.
1. carrier gas regulating system includes 11 pressure balance regulating valves and connecting line.Drawn by pressure balance regulating valve 9
Enter high-purity helium to valve path system, pressure balance regulating valve 10~14 control respectively enter the first four-way valve 1, the first ten-way valve 2,
Second ten-way valve 3 and the pressure and flow velocity of the carrier gas of the second four-way valve 4；The control of pressure balance regulating valve 15 enters chromatography with discharge ionization inspection
Survey the pressure and flow speed stability of the carrier gas of device 22；Pressure balance regulating valve 16~19 controls the first four-way valve 1, the first ten-way valve respectively
2nd, the pressure and flow velocity of the second ten-way valve 3 and the gas vent of the second four-way valve 4.
2. component separation system includes 2 four-way valves, 2 ten-way valves, 2 preseparation chromatography posts and 2 analysis chromatographic columns；
3. detector is chromatography with discharge ionization detector 22；
Present system has the characteristics that：
1. the system includes two groups of sample collection-pre-separation-piece-rate systems, the first ten-way valve 2, the first quantitative loop 20, the
One preseparation chromatography post 5 and first analyzes chromatographic column 6 for first group；Second ten-way valve 3, the second quantitative loop 21, the second pre-separation
The analysis chromatographic column 8 of chromatographic column 7 and second is second group.After single injected sampling, the sample collected in two quantitative loops can be respectively enterd
Respective preseparation chromatography post and analysis chromatographic column.
2. the system has blowback and heartcut function.Sample all the way through the pre-separation of the first preseparation chromatography post 5, leads to
Cross the blowback of switching the first ten-way valve 2 and remove substrate NF3；The sample of another pre-separation of the second preseparation chromatography of road post 7, passes through
The heartcut substrate NF of one four-way valve 13, eliminate influence of the substrate components to trace impurity content analysis, it is to avoid pollution and damage
Evil detector.
3. preseparation chromatography post is used as using carbon molecular sieve (CST) chromatographic column, it is to avoid oxygen is adsorbed, and improves oxygen analysis
The degree of accuracy, reduces systematic error.The accurate quantitative analysis of all dirt component including oxygen can be achieved.
System mode as shown in Figure 1, the application method of apparatus of the present invention includes：
1. each valve of diagram is in "On" state, "Off" state is in after a valve actuation, "ON" shape is in after valve actuation again
State；
2. opening the first ten-way valve 2, collection of the sample in the first quantitative loop 20 is realized；The second ten-way valve 3 is opened,
Realize collection of the sample in the second quantitative loop 21；
3. close the first ten-way valve 2 and the second four-way valve 4, by the carrier gas of pressure balance regulating valve 12 by the first quantitative loop
The sample of 20 collections is blown into the first preseparation chromatography post 5；
4. after the pre-separation of the first preseparation chromatography post 5, pre-separation component O2、N2, CO enter first analysis chromatographic column 6；Beat
The first ten-way valve 2 is opened, other components are vented by blowback；
5. the O separated through the first analysis chromatographic column 62、N2, CO components, realized by the second four-way valve 4 to detector 22 tested
The detection of component；
6. closing the second ten-way valve 3, the first four-way valve 1 is opened, the outlet carrier gas of pressure balance regulating valve 14 is quantified second
The sample gathered in ring 21 is blown into the second preseparation chromatography post 7；
7. after the pre-separation of the second preseparation chromatography post 7, pre-separation component N2、O2, CO is through the second ten-way valve 3 to the 1st
Port valve 1 is vented；
8. closing the first four-way valve 1, the second four-way valve 4 is opened, through the pre-separation component CF of the second preseparation chromatography post 74With
A small amount of NF3Enter second through the first four-way valve 1 and analyze chromatographic column 8, after being separated through the second analysis chromatographic column 8, by the second four-way valve 4
The detection of tested component is realized to detector 22；
9. open the first four-way valve 1, a large amount of major constituent NF through the pre-separation of the second preseparation chromatography post 73Through the first four-way
Valve 1 is vented；
10. close the first four-way valve 1, the CO through the pre-separation of the second preseparation chromatography post 72、N2O、SF6With a small amount of NF3Through
One four-way valve 1 enters second and analyzes chromatographic column 8, after being separated through the second analysis chromatographic column 8, by the second four-way valve 4 to detector 22
Realize the detection of tested component.
The inventive method has the following advantages that compared with prior art：
1. the first preseparation chromatography post 5 is utilized by O2、N2, CO impurity compositions and substrate NF3Pre-separation, O2、N2, CO enter
One analysis chromatographic column 6 realizes separation, substrate NF3And other impurities are vented by switching the first ten-way valve 2 by blowback, O2、N2、CO
Impurity analysis is more accurate.
2. the second preseparation chromatography post 7 is utilized by impurity composition and substrate NF3Pre-separation, by switching the first four-way valve 1
Realize the cutting emptying of substrate components, it is to avoid the influence that substrate components analyzes impurity composition, and pollution to detector and
Infringement.
Brief description of the drawings
Fig. 1 is chromatogram valve path system schematic diagram of the present invention.
Wherein：1. the first four-way valve；2. the first ten-way valve；3. the second ten-way valve；4. the second four-way valve；5. the first pre-separation
Chromatographic column；6. the first analysis chromatographic column；7. the second preseparation chromatography post；8. the second analysis chromatographic column；9~19. pressure balances are adjusted
Save valve
Embodiment
To introduce technical scheme provided by the present invention in more detail, it is illustrated with reference to embodiment.
Embodiment 1
Gas-chromatography valve path system, the separation detection for trace impurity in Nitrogen trifluoride as shown in Figure 1.
The Nitrogen trifluoride trace impurity of purity more than 99.99% mainly includes：Oxygen (O2), nitrogen (N2), carbon monoxide (CO),
Carbon tetrafluoride (CF4), carbon dioxide (CO2), nitrous oxide (N2) and sulfur hexafluoride (SF O6)。
Carbon molecular sieve (CST) chromatographic column of first preseparation chromatography post 5 from long 2m.
13X molecular sieve chromatography post of the first analysis chromatographic column 6 from long 3m.
Hayesep D chromatographic column of the second preseparation chromatography post 7 from long 5m.
Hayesep DB chromatographic column of the second analysis chromatographic column 8 from long 5m.
1. as shown in Figure 1, each valve is in "On" state；
2. opening the first ten-way valve 2 and the second ten-way valve 3, sample enters the first quantitative loop 20 and the second quantitative loop along pipeline
In 21, the collection of two quantitative loop samples is realized；
3. the first ten-way valve 2 and the second four-way valve 4 are closed, by the carrier gas of pressure balance regulating valve 12 through the first ten-way valve
The preseparation chromatography post 5 of the interface of the interface of 2 the 4th interface → the 5th → interface of the first quantitative loop the 20 → the 8th → the 9th → first, is realized miscellaneous
Matter component O2、N2, CO and other components pre-separation；
4. after the pre-separation of the first preseparation chromatography post 5, pre-separation component O2、N2, interface 3s of the CO through the first ten-way valve 2
→ the 2 interface → first analyzes chromatographic column 6；Open the first ten-way valve 2, the CF through the pre-separation of the first preseparation chromatography post 54、CO2、
N2O、SF6With major constituent NF3The interface of the 9th interface through the first ten-way valve 2 → the 10th, is vented by blowback；
5. the O separated through the first analysis chromatographic column 62、N2, CO components, by the interface of the interface of the second four-way valve 4 the 2nd → the 1st →
Detector 22, realizes the detection of tested component, and peak sequence is followed successively by O2、N2、CO；
6. closing the second ten-way valve 3, the second four-way valve 4 is opened, it is logical through the 20th that pressure balance regulating valve 14 exports carrier gas
The interface of the interface of 4th interface of valve 3 → the 5th → interface of the second quantitative loop the 21 → the 8th → the 9th, the second pre-separation color is blown into by sample
Compose post 7；
7. after the pre-separation of the second preseparation chromatography post 7, pre-separation component N2、O2, interface 3s of the CO through the second ten-way valve 3
Interface 3 → 2 interfaces → equilibrated valve 19 of the four-way valve 1 of → the 2 interface → first is vented；
8. closing the first four-way valve 1, the second four-way valve 4 is opened, through the pre-separation component CF of the second preseparation chromatography post 74With
A small amount of NF3The analysis chromatographic column 8 of the interface of interface 3 through the first four-way valve 1 → the 4th → second, is separated through the second analysis chromatographic column 8
Afterwards, by the 4th interface → 1 interface → detector 22 of the second four-way valve 4, the detection of tested component is realized；
9. open the first four-way valve 1, a large amount of major constituent NF isolated through the second preseparation chromatography post 73Through the first four-way
The interface 3 of valve 1 → 2 interfaces → equilibrated valve 19 is vented；
10. close the first four-way valve 1, the CO through the pre-separation of the second preseparation chromatography post 72、N2O、SF6With a small amount of NF3Through
The analysis chromatographic column 8 of the interface of the interface 3 of one four-way valve 1 → the 4th → second, after being separated through the second analysis chromatographic column 8, by the two or four
The 4th interface → 1 interface → detector 22 of port valve 4, realizes the detection of tested component, and peak sequence is followed successively by CO2、N2O、
SF6。
After sample introduction, the final peak sequence of impurity is in Nitrogen trifluoride：O2、N2、CO、CF4、CO2、N2O、SF6.Appearance time
Respectively：2.45min、3.03min、4.81min、8.01min、15.44min、17.91min、21.83min.
Claims (3)
1. the gas-chromatography valve path system that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic, using the Zhu Fa roads system of four valve four
System, including 2 four-way valves, 2 ten-way valves, 2 quantitative loops, 4 root chromatogram columns, 11 pressure balance regulating valves and 1 discharge from
Sonization detector, system carrier gas is more than 99.9999% high-purity helium；
The 1st interface connection pressure-regulating valve (10) of first four-way valve (1) connects with helium gas source afterwards, and the 2nd interface connection pressure is put down
Weighing apparatus regulating valve (19) is followed by gas vent, and interface 3 is connected with the 2nd interface of the second ten-way valve (3), the 4th interface connection second
Analysis chromatographic column (8) is followed by the 4th interface of the second four-way valve (4)；
1st interface of the first ten-way valve (2) is communicated by pressure-regulating valve (11) with helium gas source, and the 2nd interface connection first is analyzed
Chromatographic column (6) is followed by the 2nd interface of the second four-way valve (4), and the first preseparation chromatography post is connected between interface 3 and the 9th interface
(5), the 4th interface is communicated by pressure-regulating valve (12) with helium gas source, and the first quantitative loop is connected between the 5th interface and the 8th interface
(20), the 6th interface is connected with the 6th interface of the second ten-way valve (3), the 7th interface connection sample inlet, the 10th interface connection pressure
Balance regulating valve (18) is followed by gas vent；
1st interface of the second ten-way valve (3) is communicated by pressure-regulating valve (13) with helium gas source, between interface 3 and the 9th interface
The second preseparation chromatography post (7) is connected, the 4th interface is communicated by pressure-regulating valve (14) with helium gas source, and the 5th interface and the 8th connects
Connected between mouthful after the second quantitative loop (21), the 7th interface connection sample export, the 10th interface connection pressure balance regulating valve (17)
Connect gas vent；
The 1st interface connection chromatography with discharge ionization detector (22) of second four-way valve (4), interface 3 connection pressure balance regulating valve
(16) it is followed by gas vent.
2. gas-chromatography valve path system according to claim 1, it is characterized in that：First preseparation chromatography post (5) is carbon point
Son sieve chromatographic column；First analysis chromatographic column (6) is 13X chromatographic columns；Second preseparation chromatography post (7) is Hayesep D chromatographic columns；
Second analysis chromatographic column (8) is Hayesep DB chromatographic columns.
3. a kind of application method of the gas-chromatography valve path system described in claim 1 or 2, including：
(1) is in "On" state using each valve of original state, and "Off" state is in after a valve actuation, is in again after valve actuation
"On" state；
(2) opens the first ten-way valve (2), realizes collection of the sample in the first quantitative loop (20)；Open the second ten-way valve
(3) collection of the sample in the second quantitative loop (21), is realized；
(3) closes the first ten-way valve (2) and the second four-way valve (4), is determined by the carrier gas of pressure balance regulating valve (12) by first
The sample of amount ring (20) collection is blown into the first preseparation chromatography post (5)；
(4) is after first preseparation chromatography post (5) pre-separation, pre-separation component O2、N2, CO enter first analysis chromatographic column (6)；
The first ten-way valve (2) is opened, other components are vented by blowback；
(5) Os of the through the first analysis chromatographic column (6) separation2、N2, CO components, by the second four-way valve (4) to detector (22) realize
The detection of tested component；
(6) closes the second ten-way valve (3), opens the first four-way valve (1), and pressure balance regulating valve (14) exports carrier gas by second
The sample of collection is blown into the second preseparation chromatography post (7) in quantitative loop (21)；
(7) is after second preseparation chromatography post (7) pre-separation, pre-separation component N2、O2, CO is through the second ten-way valve (3) to first
Four-way valve (1) is vented；
(8) closes the first four-way valve (1), the second four-way valve (4) is opened, through second preseparation chromatography post (7) pre-separation component CF4
With a small amount of NF3The second analysis chromatographic column (8) is entered through the first four-way valve (1), after the second analysis chromatographic column (8) separation, by
Second four-way valve (4) realizes the detection of tested component to detector (22)；
(9) opens the first four-way valve (1), a large amount of major constituent NF through second preseparation chromatography post (7) pre-separation3Through the first four-way
Valve (1) is vented；
(10) closes the first four-way valve (1), the CO through second preseparation chromatography post (7) pre-separation2、N2O、SF6With a small amount of NF3Enter
Enter the second analysis chromatographic column (8), after the second analysis chromatographic column (8) separation, realized by the second four-way valve (4) to detector (22)
The detection of tested component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710529909.XA CN107121520A (en) | 2017-06-23 | 2017-06-23 | Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710529909.XA CN107121520A (en) | 2017-06-23 | 2017-06-23 | Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic |
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| CN107121520A true CN107121520A (en) | 2017-09-01 |
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| CN201710529909.XA Pending CN107121520A (en) | 2017-06-23 | 2017-06-23 | Gas-chromatography valve path system and its application method that a kind of high-purity Nitrogen trifluoride analysis is adsorbed with anaerobic |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157303A (en) * | 2020-01-22 | 2020-05-15 | 中国科学院寒区旱区环境与工程研究所 | Sampling and analyzing device and method for nitrogen, oxygen and carbon dioxide isotopes in atmosphere |
| CN112268970A (en) * | 2020-10-21 | 2021-01-26 | 朗析仪器（上海）有限公司 | Impurity component analysis system for electronic gas nitrogen trifluoride |
| CN112485348A (en) * | 2020-11-05 | 2021-03-12 | 北京高麦克仪器科技有限公司 | NF3Method for separating and analyzing medium impurities |
| CN113419019A (en) * | 2021-08-10 | 2021-09-21 | 云南大学 | Gas chromatography system and method for detecting content of high-purity germanium tetrafluoride impurities |
| CN114965828A (en) * | 2022-06-13 | 2022-08-30 | 北京高麦克仪器科技有限公司 | Electronic grade hydrogen chloride analysis method |
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