CN209693037U

CN209693037U - Vibrating elements

Info

Publication number: CN209693037U
Application number: CN201790001337.1U
Authority: CN
Inventors: 伊藤慎悟
Original assignee: Murata Manufacturing Co Ltd
Current assignee: Murata Manufacturing Co Ltd
Priority date: 2016-12-09
Filing date: 2017-11-22
Publication date: 2019-11-26
Anticipated expiration: 2027-11-22
Also published as: WO2018105392A1

Abstract

The utility model provides a kind of vibrating elements, and the significantly increase of the conductor losses of coil is inhibited while improving the electromagnetic force between oscillating plate and magnet.Vibrating elements has oscillating plate and the first magnet, and oscillating plate includes laminated body, and being laminated has flexible multiple insulated base material layers, and has the first interarea；And coil, it is formed in laminated body, there is wireline reel on the stacking direction of multiple insulated base material layers, coil includes the multiple coil patterns for the more than two insulated base material layers being respectively formed in multiple insulated base material layers, the at least part of line width for being arranged to the first main surface side coil pattern near the first interarea in multiple coil patterns is thinner than the line width of at least one of coil pattern in addition to it, from the winding axis direction of coil, first magnet configuration is in the position Chong Die with the forming region of coil, and the first main surface side coil pattern in multiple coil patterns and configure.

Description

Vibrating elements

Technical field

The utility model relates to vibrating elements, in particular to are formed with multiple coil patterns throughout multiple insulated base material layers Vibrating elements.

Background technique

In the past, it is known that the vibration that made of multiple insulated base material layers there is flexible laminated body to be formed with coil is being laminated Plate.For example, being disclosed in patent document 1 in order to increase the number of turns of coil and being formed with coil pattern throughout multiple insulated base material layers Structure oscillating plate.Such oscillating plate with magnet by being vibrated based on the interaction of electromagnetic force.

Citation

Patent document

Patent document 1: Japanese Unexamined Patent Application Publication 2014-517594 bulletin

Utility model content

The utility model project to be solved

Inventors etc. have found exist in oscillating plate as shown in Patent Document 1 during developing above-mentioned oscillating plate Following project.

(a) in the line width for the coil pattern that will be formed throughout multiple insulated base material layers to reduce the conductor losses of coil In the case where spending overstriking, the magnetic flux generated around coil pattern can tail off.Therefore, the phase interaction based on coil and magnet Electromagnetic force also becomes smaller, and the amplitude of oscillating plate can become smaller.

(b) on the contrary, making to increase the electromagnetic force of the interaction based on coil and magnet throughout multiple insulation bases In the case that the line width for the coil pattern that material layer is formed attenuates, the DCR of coil is got higher, and the conductor losses of coil can substantially increase Add.

The purpose of the utility model is to provide a kind of vibrating elements, have oscillating plate and magnet, and oscillating plate has packet Coil containing the multiple coil patterns formed throughout multiple insulated base material layers is improving oscillating plate and magnet in vibrating elements Between electromagnetic force while inhibit coil conductor losses significantly increase.

A technical solution to solve project

(1) vibrating elements of the utility model is characterized in that,

Have oscillating plate and the first magnet,

The oscillating plate includes

Laminated body, being laminated has flexible multiple insulated base material layers, and has the first interarea；And

Coil is formed in the laminated body, has wireline reel on the stacking direction of the multiple insulated base material layer,

The coil includes the more of the more than two insulated base material layers being respectively formed in the multiple insulated base material layer A coil pattern,

In the multiple coil pattern be arranged near first interarea the first main surface side coil pattern at least The line width of a part is thinner than the line width of at least one of coil pattern in addition to it,

From the winding axis direction of the coil, first magnet configuration is Chong Die with the forming region of the coil Position, and the first main surface side coil pattern in the multiple coil pattern and configure.

In general, compared with forming the thick situation of the line width of coil pattern (conductor) of coil, in coil pattern In the case that line width is thin, the magnetic flux generated around coil pattern is more.Therefore, with this configuration, it is based on the first magnetic The electromagnetic force of the interaction of iron and the first main surface side coil pattern becomes larger, and the drive efficiency raising of oscillating plate (is capable of increasing vibration The amplitude of movable plate).

In addition, with this configuration, and the conductor losses of coil is set as identical condition and keeps multiple coil patterns whole The identical situation of line width compare, be capable of increasing the electromagnetic force of the interaction based on the first magnet and coil.In addition, with will Electromagnetic force is set as identical condition and the situation for keeping the line width of multiple coil pattern wholes identical is compared, and can inhibit leading for coil The significantly increase of body loss.

(2) preferably, in above-mentioned (1), the laminated body has second interarea opposed with first interarea, described First main surface side coil pattern is on the stacking direction closer to first interarea compared with second interarea.By this Structure is compared compared with the first interarea closer to the case where the second interarea in the stacking direction with the first main surface side coil pattern, Because coil is configured close to the first magnet, the electricity of the interaction based on the first magnet and coil can be further increased Magnetic force.

(3) preferably, in above-mentioned (1), the first main surface side coil pattern is swirl shape, the first interarea side line The line width more than half cycle of the outermost circumferential portion in circular pattern is thinner than the line width of the coil pattern in addition to it.In circuit diagram Case is in gyrate situation (in the case where coil pattern is 1 circle or more), and the outermost circumferential portion of mainly coil pattern has Help the formation of the magnetic flux to interact with magnet.Therefore, by making the outermost circumferential portion of the first main surface side coil pattern Line width more than half cycle is thinner than the line width of the coil pattern in addition to it, so as in the conductor losses of suppression coil The significantly increased electromagnetic force for simultaneously effective increasing the interaction based on the first magnet and coil.

(4) preferably, in above-mentioned (1), the line width of the first main surface side coil pattern entirety is than in addition to it The line width of coil pattern is thin.With this configuration, the interaction based on the first magnet and coil can efficiently improved The increase of the conductor losses of suppression coil while electromagnetic force.

(5) preferably, in above-mentioned (1), it is also equipped with the second magnet, the laminated body has opposed with first interarea The second interarea, the coil includes three or more insulated base material layers being respectively formed in the multiple insulated base material layer Multiple coil patterns, the second main surface side coil pattern being arranged near second interarea in the multiple coil pattern At least part of line width and at least part of line width ratio of the first main surface side coil pattern are in addition to them At least one of coil pattern line width it is thin, from the winding axis direction of the coil, second magnet Configuration is in the position Chong Die with the forming region of the coil, and second interarea in the multiple coil pattern Side line circular pattern and configure.With this configuration, the electromagnetism of the interaction based on the first magnet and the first main surface side coil pattern Power becomes larger, and the electromagnetic force of the interaction based on the second magnet and the second main surface side coil pattern also becomes larger.Therefore, with only have The vibrating elements of standby first magnet compares, and the drive efficiency of oscillating plate, which further increases, (can further increase oscillating plate Amplitude).

(6) preferably, in above-mentioned (5), the second main surface side coil pattern is on the stacking direction with described One interarea is compared closer to second interarea.With this configuration, with the second main surface side coil pattern in the stacking direction with Two interareas are compared to be compared closer to the case where the first interarea, can be further because coil is configured close to the second magnet Increase the electromagnetic force of the interaction based on the second magnet and coil.

(7) preferably, in above-mentioned (5), the second main surface side coil pattern is swirl shape, the second interarea side line The line width more than half cycle of the outermost circumferential portion in circular pattern is thinner than the line width of the coil pattern in addition to them.In coil Pattern is the mainly outermost circumferential portion of coil pattern in gyrate situation (in the case where coil pattern is 1 circle or more) Facilitate the formation of the magnetic flux to interact with magnet.Therefore, by making the outermost circumferential portion of the second main surface side coil pattern Half cycle more than line width it is thinner than the line width of the coil pattern in addition to it, so as in the conductor losses of suppression coil The significantly increased electromagnetic force for simultaneously effective increasing the interaction based on the second magnet and coil.

(8) preferably, in above-mentioned (5), the line width and described second of the first main surface side coil pattern entirety The line width of main surface side coil pattern entirety is thinner than the line width of the coil pattern in addition to them.With this configuration, Neng Gou Press down while more efficiently improving the electromagnetic force of the interaction based on magnet (the first magnet and the second magnet) and coil The increase of the conductor losses of coil processed.

(9) preferably, in any one of above-mentioned (1) to (8), the first recess portion is formed in first interarea, from institute Stacking direction observation is stated, the inside of coil aperture of first recess arrangement in the coil, first magnet is at least A part configuration is in the inside of first recess portion.With this configuration, because coil is configured closer to the first magnet, The electromagnetic force of the interaction based on the first magnet and coil can be further increased.

(10) preferably, in above-mentioned (9), the side of first recess portion is from first interarea towards the laminated body Inside be formed as cone cell.With this configuration, when oscillating plate irregularly vibrates, the side of the first recess portion is supported with the first magnet It connects to which oscillating plate is moved to appropriate location, thus, it is possible to oscillating plate is modified to correct position relative to the first magnet to close System.

(11) preferably, in any one of above-mentioned (5) to (8), the second recess portion is formed in second interarea, from institute Stacking direction observation is stated, the inside of coil aperture of second recess arrangement in the coil, second magnet is at least A part configuration is in the inside of second recess portion.With this configuration, because coil is configured closer to the second magnet, The electromagnetic force of the interaction based on the second magnet and coil can be further increased.

(12) preferably, in above-mentioned (11), the side of second recess portion is from second interarea towards the stacking Be formed as cone cell on the inside of body.With this configuration, when oscillating plate irregularly vibrates, the side of the second recess portion and the second magnet It abuts to which oscillating plate is moved to appropriate location, thus, it is possible to oscillating plate is modified to correct position relative to the second magnet to close System.

(13) preferably, in above-mentioned (4) or (8), match compared with the surface layer of the laminated body on the stacking direction Set more by internal layer, the line width of the multiple coil pattern is thicker.It with this configuration, can be in the pliability for maintaining oscillating plate On the basis of, the electromagnetic force of the interaction based on magnet and coil is more efficiently improved, and be able to suppress the conductor of coil The increase of loss.

Utility model effect

According to the utility model, can be realized a kind of vibrating elements, have an oscillating plate and magnet, oscillating plate have comprising The coil of the multiple coil patterns formed throughout multiple insulated base material layers is improving oscillating plate and magnet in vibrating elements Between electromagnetic force while inhibit coil conductor losses significantly increase.

Detailed description of the invention

(A) of Fig. 1 is the stereoscopic figure for the oscillating plate 101 that first embodiment is related to, and (B) of Fig. 1 is oscillating plate 101 exploded perspective view.

Fig. 2 is the cross-sectional view at the face X-Z of oscillating plate 101.

(A) of Fig. 3 is the top view for showing the major part for the vibrating elements 201 that first embodiment is related to, Fig. 3's It (B) is the cross-sectional view for showing the major part of vibrating elements 201.

Fig. 4 is the cross-sectional view for successively showing the manufacturing process of oscillating plate 101.

(A) of Fig. 5 is the stereoscopic figure for the oscillating plate 102 that second embodiment is related to, and (B) of Fig. 5 is oscillating plate 102 exploded perspective view.

(A) of Fig. 6 is cuing open at the face X-Z that show the positional relationship of the first main surface side coil pattern, oscillating plate 102 View, (B) of Fig. 6 are the cross-sectional views at the face X-Z showing the positional relationship of the second main surface side coil pattern, oscillating plate 1O2.

Fig. 7 is the cross-sectional view for showing the major part for the vibrating elements 202 that second embodiment is related to.

(A) of Fig. 8 is the stereoscopic figure for the oscillating plate 103 that third embodiment is related to, and (B) of Fig. 8 is oscillating plate 103 exploded perspective view.

Fig. 9 is the cross-sectional view at the face X-Z of oscillating plate 103.

Figure 10 is the cross-sectional view at the face X-Z for the oscillating plate 104 that the 4th embodiment is related to.

(A) of Figure 11 is the stereoscopic figure for the oscillating plate 105 that the 5th embodiment is related to, and (B) of Figure 11 is oscillating plate 105 exploded perspective view.

(A) of Figure 12 is the top view of oscillating plate 105, and (B) of Figure 12 is the cross-sectional view at the face X-Z of oscillating plate 105.

Figure 13 is the cross-sectional view for showing the major part for the vibrating elements 205 that the 5th embodiment is related to.

Figure 14 is the cross-sectional view for successively showing the manufacturing process of oscillating plate 105.

(A) of Figure 15 is the stereoscopic figure for the oscillating plate 106 that sixth embodiment is related to, and (B) of Figure 15 is oscillating plate 106 cross-sectional view.

Figure 16 is the decomposition plan view of oscillating plate 106.

Figure 17 is the cross-sectional view for showing the major part for the vibrating elements 206 that sixth embodiment is related to.

Specific embodiment

Hereinafter, showing multiple modes for implementing the utility model referring to scheming and enumerating several specific examples.In Same appended drawing reference is marked to same position in each figure.It, for convenience, will in view of the explanation of main points or the easiness of understanding Embodiment is separately depicted, but is able to carry out aliquot replacement or the combination of the structure shown in various embodiments.In After second embodiment, the description about the item common with first embodiment is omitted, only difference is illustrated.It is special It is not, for same function and effect brought by same structure, not referred to gradually in each embodiment.

" first embodiment "

(A) of Fig. 1 is the stereoscopic figure for the oscillating plate 101 that first embodiment is related to, and (B) of Fig. 1 is oscillating plate 101 exploded perspective view.Fig. 2 is the cross-sectional view at the face X-Z of oscillating plate 101.In addition, in (B) of Fig. 1, in order to make to construct It is understandable, coil pattern CP1, CP2, CP3 are shown with dot pattern.In addition, large illustrating the thickness of each section in Fig. 2.It is right Cross-sectional view in later each embodiment is also same.

The coil 31 (explained later) and external electrode that oscillating plate 101 has laminated body 10A, is formed in laminated body 10A P1、P2。

Laminated body 10A is the plate of longitudinal direction Yu the consistent rectangle of X-direction, has the first mutually opposed interarea VS1 and the second interarea VS2.Laminated body 10A is made of thermoplastic resin, as shown in (B) of Fig. 1, by multiple insulated base material layers 13a, 12a, 11a and protective layer 1a are stacked gradually and are formed.Multiple insulated base material layer 11a, 12a, 13a respectively be have can Flexible and longitudinal direction and the consistent rectangle being made of resin material of X-direction plate.Multiple insulated base material layer 11a, 12a, 13a be, for example, using as thermoplastic resin liquid crystal polymer (LCP) or polyether-ether-ketone (PEEK) be main material sheet material.

Coil pattern CP1, external electrode P1, P2 and connection conductor CN1 are formed on the surface of insulated base material layer 11a. Coil pattern CP1 is the conductor of the rectangular ring of about 1 circle wound along the periphery of insulated base material layer 11a.External electrode P1 The rectangle being disposed near the first side (left side of the insulated base material layer 11a in (B) of Fig. 1) center of insulated base material layer 11a Conductor.External electrode P2 is disposed on the second side (right side of the insulated base material layer 11a in (B) of Fig. 1 of insulated base material layer 11a Side) center near rectangle conductor.Connection conductor CN1 be between external electrode P1 and the first end of coil pattern CP1 into The conductor of row connection.Coil pattern CP1, external electrode P1, P2 and connection conductor CN1 are, for example, the conductor being made of Cu foil etc. Pattern.

In addition, being formed with interlayer connection conductor V1, V4 in insulated base material layer 11a.

Coil pattern CP2 and conductor 22 are formed on the surface of insulated base material layer 12a.Coil pattern CP2 is along exhausted The conductor of the rectangular ring of about 1 circle of the periphery winding of edge substrate layer 12a.As shown in (B) of Fig. 1, the of coil pattern CP2 One end is connect via interlayer connection conductor V1 with the second end of coil pattern CP1.Conductor 22 is disposed on insulated base material layer 12a's The conductor of rectangle near the center of second side (the right of the insulated base material layer 12a in (B) of Fig. 1).Conductor 22 is via interlayer Connection conductor V4 is connect with external electrode P2.Coil pattern CP2 and conductor 22 are, for example, the conductor figure being made of Cu foil etc. Case.

In addition, being formed with interlayer connection conductor V2, V3 in insulated base material layer 12a.

Coil pattern CP3, conductor 21 and connection conductor CN2 are formed on the surface of insulated base material layer 13a.Coil pattern CP3 is the conductor of the rectangular ring of about 1 circle wound along the periphery of insulated base material layer 13a.As shown in (B) of Fig. 1, coil The first end of pattern CP3 is connect via interlayer connection conductor V2 with the second end of coil pattern CP2.Conductor 21 is disposed on insulation The conductor of rectangle near the second side (the right of the insulated base material layer 13a in (B) of Fig. 1) center of substrate layer 13a.Conductor 21 It is connect via interlayer connection conductor V3 with conductor 22.Connection conductor CN2 be to the second end of conductor 21 and coil pattern CP3 it Between the conductor that is attached.Coil pattern CP3, conductor 21 and connection conductor CN2 are, for example, the conductive pattern of Cu foil etc..

Protective layer 1a, which is formed in the substantially entire surface of the first side interarea VS1 of laminated body 10A and is coated, is formed in insulation The resin film of the coil pattern CP1 of substrate layer 11a (the first side interarea VS1).Protective layer 1a is corresponding with external electrode P1, P2 Position has opening AP1, AP2.Therefore, by forming protective layer 1a in the upper surface of insulated base material layer 11a, thus external electrode P1, P2 expose from the first interarea VS1.Protective layer 1a is, for example, solder mask or cover film etc..In addition, in the " vibration of the utility model Protective layer 1a is not required in movable plate ".

Like this, in oscillating plate 101, multiple lines comprising being respectively formed at three insulated base material layers 11a, 12a, 13a Circular pattern CP1, CP2, CP3 and interlayer connection conductor V1, V2 and the coil 31 for forming the rectangular coil shape of about 3 circles.In addition, As shown in Fig. 2, the stacking direction (Z-direction) one of the wireline reel AX of coil 31 and multiple insulated base material layer 11a, 12a, 13a It causes.The first end of coil 31 is connect with external electrode P1, and the second end of coil 31 is connect with external electrode P2.

As shown in Fig. 2, the line width of coil pattern CP1 is thinner than the line width of coil pattern CP2, CP3 in addition to it.

In addition, as shown in Fig. 2, coil pattern CP1 is more leaned on compared with the second interarea VS2 in stacking direction (Z-direction) Nearly first interarea VS1.Specifically, by the coil pattern CP1 in Z-direction between the first interarea VS1 at a distance from be set as L11 And by the coil pattern CP1 in Z-direction and in the case that the distance between the second interarea VS2 is set as L12, L11 < L12 at It is vertical.

In the present embodiment, above-mentioned coil pattern CP1 is equivalent to " the first main surface side circuit diagram in the utility model Case ".So-called " the first main surface side coil pattern " in the utility model, refers to and is arranged in multiple coil patterns near first The coil pattern of interarea VS1.

In addition, so-called " coil pattern " in the utility model, refers to the magnetic flux for helping to interact with magnet The conductive pattern (coil pattern CP1, CP2, CP3 shown in dot pattern in (B) referring to Fig.1) of formation.In addition, it is believed that Connection conductor CN1, the CN2 connecting with the both ends of coil 31 are substantially helpless to the formation of the magnetic flux to interact with magnet, Therefore it is excluded from " coil pattern " of the utility model.

Then, vibrating elements of the present embodiment is illustrated referring to figure.(A) of Fig. 3 is to show the first implementation The top view of the major part for the vibrating elements 201 that mode is related to, (B) of Fig. 3 are the major parts for showing vibrating elements 201 Cross-sectional view.In addition, in (A) of Fig. 3, it is understandable in order to make to construct, the forming region CE of coil 31 is shown with dot pattern.

Vibrating elements 201 has oscillating plate 101 and magnet 41.

Both ends in the longitudinal direction of oscillating plate 101 quilt when vibrating elements 201 is assembled into electronic equipment (not shown) Fixed, magnet 41 is fixed on shell (or lid) of electronic equipment (not shown) etc..As shown in (A) of Fig. 3, seen from Z-direction It examines, magnet 41 is configured in the position Chong Die with the forming region CE of coil 31.

In the present embodiment, which is equivalent to " the first magnet " in the utility model.In addition, the utility model In so-called " the first magnet ", refer to the first main surface side coil pattern in multiple coil patterns and the magnet that configures.

In addition, external electrode P1, P2 of oscillating plate 101 are when vibrating elements 201 is assembled into electronic equipment (not shown) With the circuit connection of electronic equipment.Driving current is flowed through by the coil 31 in oscillating plate 101, so that oscillating plate 101 is Fig. 3's (B) it is vibrated on direction shown in the hollow arrow in.

The vibrating elements 201 being related to according to the present embodiment, achievees the effect that as follows.

(a) in vibrating elements 201 of the present embodiment, the first magnet (magnet 41) is near multiple coil patterns The first main surface side coil pattern (coil pattern CP1) in CP1, CP2, CP3 and configure.In addition, the first main surface side coil pattern Line width it is thinner than the line width of coil pattern CP2, CP3 in addition to it.In general, with formed coil coil pattern The situation that the line width of (conductor) is thick is compared, and in the case where the line width of coil pattern is thin, is generated around coil pattern Magnetic flux it is more.Therefore, with this configuration, the electromagnetism of the interaction based on the first magnet and the first main surface side coil pattern Power becomes larger, and the drive efficiency of oscillating plate 101 improves (amplitude for being capable of increasing oscillating plate 101).

In addition, in the present embodiment, the line width ratio of the first main surface side coil pattern (coil pattern CP1) is in addition to it Coil pattern CP2, CP3 line width it is thin.That is, by only making the line width of the first main surface side coil pattern attenuate, thus with The conductor losses of coil is set as identical condition and the situation for keeping the line width of multiple coil pattern wholes identical is compared, it can Increase the electromagnetic force of the interaction based on the first magnet and coil.In addition, with electromagnetic force is set as identical condition and is made more The situation that the line width of a coil pattern whole is identical is compared, and can inhibit the significantly increase of the conductor losses of coil.

(b) in the present embodiment, as shown in Fig. 2, the first main surface side coil pattern (coil pattern CP1) is in stacking direction Closer to the first interarea VS1 (L11 < L12) compared with the second interarea VS2 in (Z-direction).With this configuration, with the first interarea The case where side line circular pattern is in the Z-axis direction compared with the first interarea VS1 closer to the second interarea VS2 (L11 > L12) is compared, Because coil 31 is configured close to the first magnet, the interaction based on the first magnet and coil 31 can be further increased Electromagnetic force.

In addition, in general, when the vibration plate vibrates, the surface layer of oscillating plate (laminated body) is larger stretched than internal layer.That is, In the present embodiment, near the first interarea VS1 of the laminated body 10A substantially to stretch when the vibration plate vibrates, it is configured with line width The degree first main surface side coil pattern (L11 < L12) thinner than coil pattern CP2, CP3 in addition to it.In general, conductor The rigidity of pattern is the same as relatively high compared with the insulated base material layer that resin material is constituted.Therefore, with this configuration, vibration can be maintained Pliability near the first interarea VS1 of the laminated body 10A substantially to stretch when panel vibration is capable of increasing vibration when vibration panel vibration Width.

In addition, though showing the line width of the first main surface side coil pattern (coil pattern CP1) in the present embodiment The situation thinner than the line width of coil pattern CP2, CP3 in addition to it, but it is not limited to the structure.As long as the first interarea The line width of side line circular pattern is thinner than the line width of at least one of coil pattern in addition to it, just reach above-mentioned effect, Effect.But by keeping the line width of the first main surface side coil pattern thinner than the line width of the coil pattern in addition to it, thus The electromagnetic force of the interaction based on the first magnet and coil can be efficiently improved, and be able to suppress the conductor damage of coil 31 The increase of consumption.

Oscillating plate 101 of the present embodiment is for example manufactured by process below.Fig. 4 is successively to show oscillating plate The cross-sectional view of 101 manufacturing process.In addition, in Fig. 4, for convenience of description, with the manufacture work under monolithic (one chip) Sequence is illustrated, but the manufacturing process of actual oscillating plate is with the progress of assembly substrate state.

As shown in (1) in Fig. 4, firstly, preparing multiple insulated base material layer 11a, 12a, 13a.Then, in multiple insulation bases Material layer 11a, 12a, 13a are respectively formed coil pattern CP1, CP2, CP3, external electrode P1, P2 and conductor 21,22 etc..Specifically Metal foil (for example, Cu foil) is laminated to the unilateral interarea of insulated base material layer 11a, 12a, 13a of assembly substrate state by ground, and The metal foil is patterned by photoetching, coil pattern CP1, CP2, CP3, external electrode P1, P2 is consequently formed and is led Body 21,22.

Insulated base material layer 11a, 12a, 13a are, for example, the thermoplastic resin sheet of liquid crystal polymer etc..

In addition, forming other conductors (connection conductor in (B) of Fig. 1 in multiple insulated base material layer 11a, 12a, 13a CN1, CN2), interlayer connection conductor (interlayer connection conductor V1, V2, V3, V4 in (B) of Fig. 1).Interlayer connection conductor is by such as Under type is arranged, that is, after being provided with through hole with laser etc., be arranged comprising one of Cu, Ag, Sn, Ni, Mo etc. with It is upper or they alloy conductive paste, and its hardening (solidification) is made by subsequent heating pressurization.Therefore, interlayer connection conductor It is set as the low material of temperature of the fusing point (melting temperature) than subsequent heating pressurization when.

Then, as in Fig. 4 (2), shown in (3), stacked gradually on the high pedestal 2 of rigidity insulated base material layer 11a, 12a, 13a, and heating pressurization is carried out to multiple insulated base material layer 11a, 12a, 13a of stacking, thus constitute laminated body 10AP.Specifically Ground heats multiple insulated base material layer 11a, 12a, 13a of stacking, and the side of the hollow arrow shown in (2) in Fig. 4 To carry out using hydrostatic pressing etc. static pressure suppressions (pressurization).

Then, in an interarea of laminated body 10AP (upper surface of laminated body 10AP shown in (3) in Fig. 4) side shape At protective layer 1a.Protective layer 1a has opening in position corresponding with external electrode P1, P2.Therefore, by laminated body 10AP The upper surface of (insulated base material layer 11a) forms protective layer 1a, so that external electrode P1, P2 expose from the first interarea.Protective layer 1a It is the resin film that the oxidation of the forming face of coil pattern CP1 etc. prevents, for example, solder mask, cover film etc..

Finally, being separated into each monolithic from assembly substrate, the oscillating plate 101 as shown in (4) in Fig. 4 is obtained.

By above-mentioned manufacturing method, inhibited while the electromagnetic force between raising and magnet can be easily manufactured The significantly increased oscillating plate of the conductor losses of coil.

" second embodiment "

In this second embodiment, the structure and first for showing the coil pattern formed throughout multiple insulated base material layers are implemented The different example of mode.

(A) of Fig. 5 is the stereoscopic figure for the oscillating plate 102 that second embodiment is related to, and (B) of Fig. 5 is oscillating plate 102 exploded perspective view.(A) of Fig. 6 is the face X-Z that show the positional relationship of the first main surface side coil pattern, oscillating plate 102 The cross-sectional view at place, (B) of Fig. 6 are at the face X-Z that show the positional relationship of the second main surface side coil pattern, oscillating plate 102 Cross-sectional view.It is understandable in order to make to construct in addition, in (B) of Fig. 5, with dot pattern show coil pattern CP1, CP2, CP3, CP4, CP5。

The coil 32 (explained later) and external electrode that oscillating plate 102 has laminated body 10B, is formed in laminated body 10B P1、P2。

The coil 31 that coil of the present embodiment 32 is related to first embodiment the difference lies in that comprising respectively It is formed in five coil patterns of five insulated base material layers.In addition, the layer of the insulated base material layer of the laminated body 10B of present embodiment Folded number is different from the laminated body 10A that first embodiment is related to.It is substantially the same with oscillating plate 101 about other structures.

Hereinafter, the part different to the oscillating plate 101 being related to from first embodiment is illustrated.

As shown in (B) of Fig. 5, laminated body 10B stack gradually multiple insulated base material layer 15b, 14b, 13b, 12b, 11b with And protective layer 1b and formed.The structure of multiple insulated base material layer 11b, 12b, 13b, 14b, 15b with say in the first embodiment Bright insulated base material layer 11a, 12a, 13a is substantially the same.

Coil pattern CP1, external electrode P1, P2 and connection conductor CN1 are formed on the surface of insulated base material layer 11b. The structure of coil pattern CP1, external electrode P1, P2 and connection conductor CN1 and the structure illustrated in the first embodiment are real It is identical in matter.

In addition, being formed with interlayer connection conductor V1, V8 in insulated base material layer 11b.

Coil pattern CP2 and conductor 24 are formed on the surface of insulated base material layer 12b.Coil pattern CP2, conductor 24 with The coil pattern CP2 and conductor 22 illustrated in the first embodiment is substantially the same.As shown in (B) of Fig. 5, circuit diagram The first end of case CP2 is connect via interlayer connection conductor V1 with the second end of coil pattern CP1.Conductor 24 is led via interlayer connection Body V8 is connect with external electrode P2.

In addition, being formed with interlayer connection conductor V2, V7 in insulated base material layer 12b.

Coil pattern CP3 and conductor 23 are formed on the surface of insulated base material layer 13b.The structure of coil pattern CP3 with The coil pattern CP3 illustrated in the first embodiment is substantially the same.As shown in (B) of Fig. 5, the first of coil pattern CP3 End is connect via interlayer connection conductor V2 with the second end of coil pattern CP2.Conductor 23 is disposed on the of insulated base material layer 13b The conductor of rectangle near the center of two sides (the right of the insulated base material layer 13b in (B) of Fig. 5).Conductor 23 connects via interlayer Conductor V7 is met to connect with conductor 24.Conductor 23 is, for example, the conductive pattern of Cu foil etc..

In addition, being formed with interlayer connection conductor V3, V6 in insulated base material layer 13b.

Coil pattern CP4 and conductor 22 are formed on the surface of insulated base material layer 14b.Coil pattern CP4 is along exhausted The conductor of the rectangular ring of about 1 circle of the periphery winding of edge substrate layer 14b.As shown in (B) of Fig. 5, the of coil pattern CP4 One end is connect via interlayer connection conductor V3 with the second end of coil pattern CP3.Conductor 22 is disposed on insulated base material layer 14b's The conductor of rectangle near the center of second side (the right of the insulated base material layer 14b in (B) of Fig. 5).Conductor 22 is via interlayer Connection conductor V6 is connect with conductor 23.Coil pattern CP4 and conductor 23 are, for example, the conductive pattern of Cu foil etc..

In addition, being formed with interlayer connection conductor V4, V5 in insulated base material layer 14b.

Coil pattern CP5 and conductor 21 are formed on the surface of insulated base material layer 15b.Coil pattern CP5 is along exhausted The conductor of the rectangular ring for about 1 circle that the periphery of edge substrate layer 15b is formed.As shown in (B) of Fig. 5, the of coil pattern CP5 One end is connect via interlayer connection conductor V4 with coil pattern CP4.The second end of coil pattern CP5 is connect with conductor 21.Conductor 21 are disposed on the square near the second side (the right of the insulated base material layer 15b in (B) of Fig. 5) center of insulated base material layer 15b The conductor of shape.Conductor 21 is connect via interlayer connection conductor V5 with conductor 22.Coil pattern CP5 and conductor 21 are, for example, Cu foil Deng conductive pattern.

The structure of protective layer 1b and the protective layer 1a illustrated in the first embodiment are substantially the same.

Like this, in oscillating plate 102, comprising being respectively formed at five insulated base material layers 11b, 12b, 13b, 14b, 15b Multiple coil pattern CP1, CP2, CP3, CP4, CP5 and interlayer connection conductor V1, V2, V3, V4 and form the squares of about 5 circles The spiral helicine coil 32 of shape.In addition, the first end of coil 32 is connect with external electrode P1, the second end and external electrode of coil 31 P2 connection.

As shown in (A) of Fig. 6 and (B) of Fig. 6, the line width of coil pattern CP1, CP5 is than the coil in addition to them The line width of at least one of pattern CP2, CP3, CP4 (coil pattern CP2, CP4) are thin.

In addition, as Fig. 6 (A) shown in, coil pattern CP1 in stacking direction (Z-direction) with the second interarea VS2 phase Than closer to the first interarea VS1.Specifically, by the coil pattern CP1 in Z-direction between the first interarea VS1 at a distance from It is set as L11 and by the coil pattern CP1 in Z-direction and in the case that the distance between the second interarea VS2 is set as L12, L11 < L12 is set up.In addition, coil pattern CP5 is in the Z-axis direction closer to the compared with the first interarea VS1 as shown in (B) of Fig. 6 Two interarea VS2.Specifically, by the coil pattern CP5 in Z-direction between the first interarea VS1 at a distance from be set as L21 simultaneously By the coil pattern CP5 in Z-direction and in the case that the distance between the second interarea VS2 is set as L22, L21 > L22 is set up.

In the present embodiment, above-mentioned coil pattern CP1 is equivalent to " the first main surface side circuit diagram in the utility model Case ".In addition, in the present embodiment, above-mentioned coil pattern CP5 is equivalent to " the second interarea lateral coil in the utility model Pattern ".So-called " the second main surface side coil pattern " in the utility model refers to and is arranged in multiple coil patterns near The coil pattern of two interarea VS2.

Then, vibrating elements of the present embodiment is illustrated referring to figure.Fig. 7 is to show second embodiment to relate to And vibrating elements 202 major part cross-sectional view.

Vibrating elements 202 has oscillating plate 102 and magnet 41,42.

Both ends in the longitudinal direction of oscillating plate 102 quilt when vibrating elements 202 is assembled into electronic equipment (not shown) Fixed, magnet 41,42 is fixed on shell (or lid) of electronic equipment (not shown) etc..

In the present embodiment, which is equivalent to " the first magnet " in the utility model.In addition, in this embodiment party In formula, magnet 42 is equivalent to " the second magnet " in the utility model.In addition, so-called " the second magnet " in the utility model, Refer to the magnet configured near the second main surface side coil pattern in multiple coil patterns.

In addition, though illustration omitted, but from Z-direction, magnet 41,42 is configured in the forming region with coil 31 The position of (the forming region CE of the coil in (A) of reference Fig. 3) overlapping.

In addition, external electrode P1, P2 of oscillating plate 102 are when vibrating elements 202 is assembled into electronic equipment (not shown) With the circuit connection of electronic equipment.Driving current is flowed through by the coil 32 in oscillating plate 102, so that oscillating plate 102 is in Fig. 7 Hollow arrow shown in vibrate on direction.

The vibrating elements 202 being related to according to the present embodiment, other than the effect described in the first embodiment, also Achieve the effect that as follows.

(c) in vibrating elements 202 of the present embodiment, the first magnet (magnet 41) is near multiple coil patterns In the first main surface side coil pattern (coil pattern CP1) and configure, the second magnet (magnet 42) is near multiple coil patterns In the second main surface side coil pattern (coil pattern CP5) and configure.In addition, the first main surface side coil pattern and the second interarea The line width of side line circular pattern is thinner than the line width of at least one of coil pattern CP2, CP3, CP4 in addition to them.Cause This, with this configuration, the electromagnetic force of the interaction based on the first magnet and the first main surface side coil pattern becomes larger, and based on the The electromagnetic force of the interaction of two magnet and the second main surface side coil pattern also becomes larger.Therefore, with say in the first embodiment Bright vibrating elements 201 compares, and the drive efficiency of oscillating plate 102, which further increases, (can further increase oscillating plate 102 Amplitude).

(d) in addition, in the present embodiment, the line width of the first main surface side coil pattern (coil pattern CP1) and The line width of second main surface side coil pattern (coil pattern CP5) is thinner than the line width of coil pattern CP2, CP4 in addition to it. Therefore, with this configuration, compared with the situation for keeping the line width of multiple coil pattern wholes identical, it is capable of increasing based on magnet The electromagnetic force of the interaction of (the first magnet and the second magnet) and coil 32, and be able to suppress the conductor losses of coil 32 Significantly increase.

(e) in addition, in the present embodiment, as shown in (B) of Fig. 6, the second main surface side coil pattern (coil pattern CP5) Closer to the second interarea VS2 (L21 > L22) compared with the first interarea VS1 in stacking direction (Z-direction).With this configuration, It is compared compared with the second interarea VS2 closer to the case where the first interarea VS1 in the Z-axis direction with the second main surface side coil pattern, Because coil 32 is configured close to the second magnet (magnet 42), can further increase based on the second magnet and coil 32 The electromagnetic force of interaction.In addition, in the present embodiment, because the first main surface side coil pattern (coil pattern CP1) is in Z axis Closer to the first interarea VS1 (L11 < L12) compared with the second interarea VS2 on direction, so can further increase based on magnet With the whole electromagnetic force of the interaction of coil 32.

(f) in addition, in the present embodiment, substantially two interareas (the of flexible laminated body 10B when the vibration plate vibrates One interarea VS1 and the second interarea VS2) near, be respectively configured line width it is thinner than coil pattern CP2, CP4 in addition to it the One main surface side coil pattern and the second main surface side coil pattern (L11 < L12 and L21 > L22).Therefore, with this configuration, Two interareas (the first interarea VS1 and the second interarea VS2) of the laminated body 10B substantially to stretch when the vibration plate vibrates can be maintained attached Close pliability can further increase amplitude when vibration panel vibration.

" third embodiment "

In the third embodiment, the structure and second of the coil pattern formed throughout multiple insulated base material layers is shown in fact Apply the different example of mode.

(A) of Fig. 8 is the stereoscopic figure for the oscillating plate 103 that third embodiment is related to, and (B) of Fig. 8 is oscillating plate 103 exploded perspective view.Fig. 9 is the cross-sectional view at the face X-Z of oscillating plate 103.In addition, in (B) of Fig. 8, in order to make to construct It is understandable, coil pattern CP1, CP2, CP3, CP4, CP5 are shown with dot pattern.

The coil 33 (explained later) and external electrode that oscillating plate 103 has laminated body 10B, is formed in laminated body 10B P1、P2。

In coil 33 of the present embodiment, it is respectively formed at the knot of five coil patterns of five insulated base material layers Structure is different from the coil 32 that second embodiment is related to.It is substantially the same with oscillating plate 102 about other structures.

Hereinafter, the part different to the oscillating plate 102 being related to from second embodiment is illustrated.

In oscillating plate 103, comprising being respectively formed at the multiple of five insulated base material layers 11b, 12b, 13b, 14b, 15b Coil pattern CP1, CP2, CP3, CP4, CP5 and interlayer connection conductor V1, V2, V3, V4 and the rectangular coil for forming about 5 circles The coil 33 of shape.

As shown in figure 9, the first main surface side coil pattern (coil pattern CP1) is in stacking direction (Z axis direction) with second Interarea VS2 is compared closer to the first interarea VS1.In addition, the second main surface side coil pattern (coil pattern CP5) is in the Z-axis direction Closer to the second interarea VS2 compared with the first interarea VS1.

In addition, as shown in figure 9, being arranged to more lean on compared with the surface layer of laminated body 10C in stacking direction (Z-direction) The line width of internal layer, multiple coil pattern CP1, CP2, CP3, CP4, CP5 is thicker.Specifically, it is located at stacking in the Z-axis direction The first main surface side coil pattern (coil pattern CP1) on the most surface layer of body 10C and the second main surface side coil pattern (coil pattern CP5) line width is most thin among multiple coil pattern CP1, CP2, CP3, CP4, CPS, is located at laminated body 10C in the Z-axis direction Innermost layer coil pattern CP3 among multiple coil pattern CP1, CP2, CP3, CP4, CP5 line width it is most thick.Like this, In the present embodiment, in the Z-axis direction near the coil pattern of the first interarea VS1 or the second interarea VS2, line width It is thinner, it is more closer to the center height comprising the laminated body 10C including protective layer 1b in the Z-axis direction (in Fig. 9 Entreat height ML.) and the coil pattern of configuration, line width are thicker.

According to the present embodiment, other than the effect described in first embodiment, second embodiment, also reach Following effect.

(g) in oscillating plate 103 of the present embodiment, as shown in figure 9, the first main surface side coil pattern (circuit diagram Case CP1) line width and the second main surface side coil pattern (coil pattern CP5) line width than the coil in addition to them The line width of pattern CP2, CP3, CP4 are thin.With this configuration, the line width with the first main surface side coil pattern is than in addition to it The thin situation of the line width of coil pattern can be based on magnet more efficiently improving compared to (referring to first embodiment) The increase of the conductor losses of suppression coil while the electromagnetic force of the interaction of (the first magnet and the second magnet) and coil.

(h) in addition, other than the structure of above-mentioned (g), in the present embodiment, in stacking direction (Z-direction) with The surface layer of laminated body 10C, which is compared, to be arranged to more by internal layer, and the line width of multiple coil pattern CP1, CP2, CP3, CP4, CP5 are got over Slightly.With this configuration, it can more efficiently improve on the basis of maintaining the pliability of oscillating plate based on magnet and coil 33 The electromagnetic force of interaction, and it is able to suppress the increase of the conductor losses of coil 33.

" the 4th embodiment "

In the fourth embodiment, structure and the third for showing the coil pattern formed throughout multiple insulated base material layers are real Apply the different example of mode.

The coil 34 (explained later) and external electrode that oscillating plate 104 has laminated body 10B, is formed in laminated body 10B P1、P2。

In coil 34 of the present embodiment, it is respectively formed at matching for five coil patterns of five insulated base material layers It sets different from the coil 33 that third embodiment is related to.It is substantially the same with oscillating plate 103 about other structures.

Hereinafter, the part different to the oscillating plate 103 being related to from third embodiment is illustrated.

As shown in Figure 10, match in surface coiled coil pattern CP1, CP2, CP3, CP4, CP5 of multiple insulated base material layers It is consistent in the Z-axis direction respectively to be set to medial end, so that coil aperture expands to the maximum extent.

According to the present embodiment, the effect in addition to being described in first embodiment, second embodiment, third embodiment Other than fruit, also achieve the effect that as follows.

(i) in the present embodiment, because capableing of the coil aperture of spread loop 34, can be improved based on magnet and The electromagnetic force of the interaction of coil.

" the 5th embodiment "

In the 5th embodiment, shows to have and be formed with the example of the oscillating plate of the laminated body of recess portion in interarea.

(A) of Figure 11 is the stereoscopic figure for the oscillating plate 105 that the 5th embodiment is related to, and (B) of Figure 11 is oscillating plate 105 exploded perspective view.(A) of Figure 12 is the top view of oscillating plate 105, and (B) of Figure 12 is at the face X-Z of oscillating plate 105 Cross-sectional view.In addition, in (B) of Figure 11, it is understandable in order to make to construct, coil pattern CP1, CP2, CP3 are shown with dot pattern.This Outside, in (A) of Figure 12, coil aperture CO is shown with hachure.

Coil 31, external electrode P1, P2 that oscillating plate 105 has laminated body 10C, formed in laminated body 10C.This embodiment party The coil 31 that formula is related to is roughly the same with the coil illustrated in the first embodiment.

Laminated body 10C of the present embodiment and the laminated body of first embodiment 10A's the difference lies in that having the One recess portion HP1.In addition, the stacking number of the insulated base material layer of laminated body 10C is different from laminated body 10A.About other structures, with vibration Movable plate 101 is substantially the same.

As shown in (B) of Figure 11, laminated body 10C stacks gradually multiple insulated base material layer 14c, 13c, 12c, 11c and guarantor Sheath 1c and formed.The structure of multiple insulated base material layer 11c, 12c, 13c, 14c and protective layer 1c in first embodiment Insulated base material layer 11a, 12a, 13a and protective layer 1a of middle explanation are substantially the same.

As shown in (B) of Figure 11, opening portion H1, H2 are respectively formed in insulated base material layer 11c, 12c.Opening portion H1 is The hole of the rectangle of two interareas of insulated base material layer 11c is penetrated through, is configured in the region surrounded by coil pattern CP1.Opening portion H2 It is the hole for penetrating through the rectangle of two interareas of insulated base material layer 12c, configures in the region surrounded by coil pattern CP2.

The structure of protective layer 1c and the protective layer 1a illustrated in the first embodiment are substantially the same.Protective layer 1c with The corresponding position external electrode P1, P2 has opening AP1, AP2, in position corresponding with the opening portion H1 of insulated base material layer 11c With opening AP3.

It is recessed that the opening AP3 of above-mentioned protective layer 1c and opening portion H1, H2 of insulated base material layer 11c, 12c constitutes first Portion HP1 (explained later).

As shown in (B) of Figure 12, the line width of the first main surface side coil pattern (coil pattern CP1) is than the line in addition to it The line width of circular pattern CP2, CP3 are thin.In addition, being configured compared with the surface layer of laminated body 10C in stacking direction (Z axis direction) It obtains and more leans on internal layer, the line width of multiple coil pattern CP1, CP2, CP3 are thicker.

As shown in (B) of (A) of Figure 11, (A) of Figure 12 and Figure 12, the first recess portion HP1 is formed in laminated body 10C's First interarea VS1.First recess portion HP1 be inside (-Z direction) from the first interarea VS1 towards laminated body 10C formed fall four The opening of pyramid mesa-shaped.

As shown in (A) of Figure 12, from Z-direction, the first recess portion HP1 configures the coil aperture CO in coil 31 Inside.In addition, as shown in (B) of Figure 12, the side of the first recess portion HP1 is from the first interarea VS1 towards the inside of laminated body 10C (-Z direction) is formed as cone cell.

Then, vibrating elements of the present embodiment is illustrated referring to figure.Figure 13 is to show the 5th embodiment The cross-sectional view of the major part for the vibrating elements 205 being related to.

Vibrating elements 205 has oscillating plate 105 and magnet 41.

Both ends in the longitudinal direction of oscillating plate 105 quilt when vibrating elements 205 is assembled into electronic equipment (not shown) Fixed, magnet 41 is fixed in shell (or lid) of electronic equipment (not shown) etc..As shown in figure 13, magnet 41 is at least A part configuration is in the inside of the first recess portion HP1.

In the present embodiment, which is equivalent to " the first magnet " in the utility model.

In addition, external electrode P1, P2 of oscillating plate 105 are when vibrating elements 205 is assembled into electronic equipment (not shown) With the circuit connection of electronic equipment.Driving current is flowed through by the coil 31 in oscillating plate 105, so that oscillating plate 105 is in Figure 13 In hollow arrow shown in vibrate on direction.

The vibrating elements 205 being related to according to the present embodiment, other than the effect described in the first embodiment, also Achieve the effect that as follows.

(j) in the present embodiment, the line width of the first main surface side coil pattern (coil pattern CP1) is than in addition to it The line width of coil pattern CP2, CP3 is thin.In addition, matching compared with the surface layer of laminated body 10C in stacking direction (Z axis direction) Set more by internal layer, the line width of multiple coil pattern CP1, CP2, CP3P4, CP5 are thicker.With this configuration, it can maintain On the basis of the pliability of oscillating plate, more efficiently improving based on magnet (the first magnet and the second magnet) and coil 33 The increase of the conductor losses of suppression coil 33 while the electromagnetic force of interaction.

(k) in the present embodiment, the first recess portion HP1, the first magnet are formed in the first interarea VS1 of laminated body 10C At least part of (magnet 41) is configured in the inside of the first recess portion HP1.With this configuration, with not by the first magnet configuration The case where inside of one recess portion HP1, is compared, because coil 31 is configured close to the first magnet, can further increase and be based on The electromagnetic force of the interaction of first magnet and coil 31.

(m) in addition, in the present embodiment, from Z-direction, the coil that the first recess portion HP1 configured in coil 31 is opened The inside of mouth CO.That is, the first recess portion HP1 is along the rigid insulated base material layer than being made of resin material as shown in (B) of Figure 12 High coil pattern CP1, CP2, CP3 and formed, therefore the shape of the first recess portion HP1 is added by coil pattern CP1, CP2, CP3 By force.Therefore, it even if laminated body 10C (resin substrate layer) is the resin material being easily deformed, is also easy to maintain the first recess portion HP1's Shape.

(n) in addition, in the present embodiment, the side of the first recess portion HP1 is from the first interarea VS1 towards laminated body 10C's Inside is formed as cone cell, and at least part of the first magnet (magnet 41) is configured in the inside of the first recess portion HP1.Pass through the knot Structure, when oscillating plate 105 irregularly vibrates, the side of the first recess portion HP1 is abutted with the first magnet to which oscillating plate 105 is to suitable When position moves, thus, it is possible to oscillating plate 105 is modified to correct positional relationship relative to the first magnet.

Oscillating plate 105 of the present embodiment is for example manufactured by process below.Figure 14 is successively to show vibration The cross-sectional view of the manufacturing process of plate 105.In addition, in Figure 14, for convenience of description, with the manufacture under monolithic (one chip) Process is illustrated, but the manufacturing process of actual oscillating plate is with the progress of assembly substrate state.

Firstly, preparing multiple insulated base material layer 11c, 12c, 13c, 14c as shown in (1) in Figure 14.

Then, coil pattern CP1, CP2, CP3, external electrode are respectively formed in multiple insulated base material layer 11c, 12c, 13c P1, P2, conductor 21,22, other conductors (connection conductor CN1, CN2 in (B) of Figure 12) and interlayer connection conductor etc..

In addition, being respectively formed opening portion H1a, opening portion H2a in insulated base material layer 11c, 12c.Opening portion H1a is disposed on The through hole in region surrounded by coil pattern CP1.Opening portion H2a is disposed in the region surrounded by coil pattern CP2 Through hole.Opening portion H1a, H2a are for example formed by being etched using laser etc..In addition, opening portion H1a, H2a can also By being formed using the grinding of drill bit etc., grinding or punching.

In addition, in the present embodiment, the area of the opening portion H1a from Z-direction is greater than from Z-direction The area of opening portion H2a.

Then, as shown in (2) in Figure 14, stacked gradually on the high pedestal 2 of rigidity insulated base material layer 14c, 13c, 12c,11c.At this point, the opening portion H2a of insulated base material layer 12c is configured to, from stacking direction (Z-direction), it is contained in absolutely The inside of the opening portion H1a of edge substrate layer 11c.That is, when insulated base material layer 11c and insulated base material layer 12c has been laminated, opening Portion H1a, H2a overlapping.

Then, by the way that multiple insulated base material layer 11c, 12c, 13c, 14c of stacking are carried out heating pressurization, thus forming layer Stack 10CP.Specifically, multiple insulated base material layers of stacking are heated, and the side of the arrow shown in (2) in Figure 14 (pressurization) is suppressed to by the high component 3 of rigidity.Meanwhile the part that do not pressurizeed by component 3 is from shown in (2) in Figure 14 Hollow arrow direction be utilized hydrostatic pressing etc. static pressure suppressions.Component 3 is one side (structure shown in (2) in Figure 14 The upper surface of part 3) area be greater than another side (lower surface of component 3 shown in (2) in Figure 14) area tetragonous cone table The component of shape, e.g. metal clamp dog.

In above-mentioned heating, pressurization, component 3 is configured to the inside of opening portion H1a, H2a positioned at overlapping.Therefore, it is overlapped The side of opening portion H1a, H2a abut and be pressurized with the end face of component 3, become the shape of the end face along component 3.This Sample forms the first recess portion HP1a that side is cone cell.

Then, it is formed in an interarea of laminated body 10CP (upper surface of laminated body 10CP shown in (3) in Figure 14) Protective layer 1c.Protective layer 1c has opening in position corresponding with external electrode P1, P2, in position corresponding with the first recess portion HP1a Setting has opening.Therefore, by forming protective layer 1c in the upper surface of laminated body 10CP (insulated base material layer 11c), thus external Electrode P1, P2 expose from the first interarea, form the first recess portion HP1.

After above-mentioned process, it is separated into each monolithic from assembly substrate, obtains shaking as shown in (4) in Figure 14 Movable plate 105.

It (is open shown in (1) in Figure 14 in addition, though being shown in above-mentioned manufacturing method and will form opening portion Portion H1a, H2a) insulating substrate layer stackup and form the example of the first recess portion HP1, but the forming method of the first recess portion HP1 is simultaneously It is not limited to this.First recess portion HP1 can also pass through the interarea with laser, drill bit etc. to laminated body after foring laminated body It is ground, ground, being etched to be formed.In addition, forming laminated body.

First recess portion is formed in the first interarea VS1 of laminated body 10C in addition, though showing in the present embodiment The example of HP1, but it is not limited to the structure.Recess portion can also being formed in the second interarea VS2 of laminated body 10C, (this is practical " the second recess portion " in novel), and at least part of the second magnet is configured in the inside of the second recess portion.In addition, the first recess portion The number of HP1 (or second recess portion) is not limited to one, is also possible to multiple.In addition, the first recess portion HP1 (or second is recessed Portion) position can suitably change.

In addition, although showing the first recess portion HP1 (or second recess portion) in the present embodiment is the master from laminated body 10C The example of the opening of the mesa-shaped of falling rectangular pyramid formed facing towards inside, but the first recess portion HP1 (or second recess portion) is not limited In the shape.The shape of first recess portion HP1 (or second recess portion) can be changed suitably, such as be also possible to down polygonal pyramid Shape, inverted cone mesa-shaped, rounding column, inverted cone-shaped, hemispherical etc..That is, the side of the first recess portion HP1 (or second recess portion) is not necessarily to Be formed as cone cell.But from the effect of above-mentioned (n) etc., effect aspect, the side of the first recess portion HP1 (or second recess portion) Face is preferably formed into cone cell.

In turn, it is also possible to construct as follows, that is, at least part of the first magnet is configured in the inside of the first recess portion HP1, And second magnet at least part configure in the inside of the second recess portion.With this configuration, coil 31 is closer to the first magnet And configure and coil 31 is configured closer to the second magnet, therefore it is capable of increasing the phase interaction based on the first magnet and coil 31 Electromagnetic force, and it is capable of increasing the electromagnetic force of the interaction based on the second magnet and coil 31.Therefore, with the first magnet The structure that at least part is configured at the first recess portion HP1 is compared, and the drive efficiency of oscillating plate, which further increases, (can further increase The amplitude of big oscillating plate).

Although the first recess portion HP1 is configured in coil 31 in addition, showing from Z-direction in the present embodiment The example of the inside of coil aperture CO, but it is not limited to the structure.From Z-direction, the first recess portion HP1 can not also The inside for the coil aperture CO configured in coil 31.But from the effect of above-mentioned (m) etc., effect aspect, from Z axis side To observation, the first recess portion HP1 (or second recess portion) is preferably configured in the inside of the coil aperture CO of coil 31.

" sixth embodiment "

In sixth embodiment, showing multiple coil patterns is gyrate example.

(A) of Figure 15 is the stereoscopic figure for the oscillating plate 106 that sixth embodiment is related to, and (B) of Figure 15 is oscillating plate 106 cross-sectional view.Figure 16 is the decomposition plan view of oscillating plate 106.In addition, in Figure 16, it is understandable in order to make to construct, use dot pattern Coil pattern CP1A, CP2A, CP3A, CP4A are shown.In addition, in Figure 16, by the outermost circumferential portion of coil pattern CP1A with than The dense dot pattern of other parts is shown.

Oscillating plate 106 has laminated body 10D, the coil 36 for being formed in laminated body 10D, external electrode P1, P2.This embodiment party The difference for the oscillating plate 101 that the oscillating plate 106 and first embodiment that formula is related to are related to is have coil 36.About vibration The other structures of movable plate 106, it is substantially the same with oscillating plate 101.

As shown in figure 16, laminated body 10D stacks gradually multiple insulated base material layer 14d, 13c, 12d, 11d and protective layer 1d and formed.The structure of multiple insulated base material layer 11d, 12d, 13d, 14d and protective layer 1d with say in the first embodiment Bright multiple insulated base material layer 11a, 12a, 13a, 14a and protective layer 1a are substantially the same.

Coil pattern CP1A, external electrode P1, P2 and connection conductor are formed on the surface of insulated base material layer 11d CN1.Coil pattern CP1A is the gyrate conductor of rectangle more than about 1.5 circles along the periphery winding of insulated base material layer 11d. External electrode P1, P2 and the structure for connecting conductor CN1 are identical as the structure illustrated in the first embodiment.

In addition, being formed with interlayer connection conductor V1, V6 in insulated base material layer 11d.

Coil pattern CP2A and conductor 23 are formed on the surface of insulated base material layer 12d.Coil pattern CP2A be along The gyrate conductor of rectangle more than about 1.5 circles of the periphery winding of insulated base material layer 12d.As shown in figure 16, coil pattern The first end of CP2A is connect via interlayer connection conductor V1 with the second end of coil pattern CP1A.Conductor 23 is disposed on insulation The conductor of rectangle near the second side (the right of the insulated base material layer 12d in Figure 16) center of substrate layer 12d.Conductor 23 passes through It is connect by interlayer connection conductor V6 with external electrode P2.

In addition, being formed with interlayer connection conductor V2, V5 in insulated base material layer 12d.

Coil pattern CP3A and conductor 22 are formed on the surface of insulated base material layer 13d.Coil pattern CP3A be along The gyrate conductor of rectangle more than about 1.5 circles of the periphery winding of insulated base material layer 13d.As shown in figure 16, coil pattern The first end of CP3A is connect via interlayer connection conductor V2 with the second end of coil pattern CP2A.As shown in figure 16, conductor 22 is The conductor for the rectangle near the center of the second side (the right of the insulated base material layer 13d in Figure 16) configured in insulated base material layer 13d. Conductor 22 is connect via interlayer connection conductor V5 with conductor 23.

In addition, being formed with interlayer connection conductor V3, V4 in insulated base material layer 13d.

Coil pattern CP4A, conductor 21 and connection conductor CN2 are formed on the surface of insulated base material layer 14d.Circuit diagram Case CP4A is the gyrate conductor of rectangle of about 1.5 circles wound along the periphery of insulated base material layer 14d.As shown in figure 16, The first end of coil pattern CP4A is connect via interlayer connection conductor V3 with the second end of coil pattern CP3A.Conductor 21 is configuration The conductor of rectangle near the center of the second side (the right of the insulated base material layer 14d in Figure 16) of insulated base material layer 14d.Conductor 21 connect via interlayer connection conductor V4 with conductor 22.Connection conductor CN2 is the second end to conductor 21 and coil pattern CP4A Between the conductor that is attached.

Like this, in oscillating plate 106, comprising being respectively formed at the more of four insulated base material layers 11d, 12d, 13d, 14d A coil pattern CP1A, CP2A, CP3A, CP4A and interlayer connection conductor V1, V2, V3 and the coil 36 for forming about 6.5 circles. In addition, the first end of coil 36 is connect with external electrode P1, the second end of coil 36 is connect with external electrode P2.

As shown in figure 16, the line width ratio of a part of the first main surface side coil pattern (coil pattern CP1A) is in addition to it Coil pattern CP2A, CP3A, CP4A line width it is thin.Specifically, the outermost circumferential portion of the first main surface side coil pattern (is located at About 1 circle of the most peripheral of coil pattern CP1A) line of the line width than coil pattern CP2A, CP3A, CP4A in addition to it Width is thin.

In addition, the first main surface side coil pattern (coil pattern CP1A) is in stacking direction (Z axis as shown in (B) of Figure 15 Direction) on compared with the second interarea VS2 closer to the first interarea VS1 (L11 < L12).

Then, vibrating elements of the present embodiment is illustrated referring to figure.Figure 17 is to show sixth embodiment The cross-sectional view of the major part for the vibrating elements 206 being related to.

Vibrating elements 206 has oscillating plate 106 and magnet 41.

Both ends in the longitudinal direction of oscillating plate 106 quilt when vibrating elements 206 is assembled into electronic equipment (not shown) Fixed, magnet 41 is fixed in shell (or lid) of electronic equipment (not shown) etc..

In addition, though illustration omitted, but from Z-direction, magnet 41 is configured in the forming region with coil 36 The position of (the forming region CE of the coil in (A) of reference Fig. 3) overlapping.

In addition, external electrode P1, P2 of oscillating plate 106 are when vibrating elements 202 is assembled into electronic equipment (not shown) With the circuit connection of electronic equipment.Driving current is flowed through by the coil 36 in oscillating plate 106, so that oscillating plate 106 is in Figure 17 In hollow arrow shown in vibrate on direction.

Even if in the first main surface side coil pattern (coil pattern CP1A) as oscillating plate 106 of the present embodiment A part line width it is thinner than the line width of coil pattern CP2, CP3 in addition to it in the case where, also reach real first Apply in mode describe as effect, effect.

In addition, gyrate first main surface side coil pattern a part line width than the coil pattern in addition to it Line width it is thin in the case where, the outermost circumferential portion (positioned at about 1 circle of most peripheral) of preferably the first main surface side coil pattern Line width more than half cycle is thinner than the line width of the coil pattern in addition to it.(the In in the case where coil pattern is gyrate situation In the case that coil pattern is 1 circle or more), the outermost circumferential portion of mainly coil pattern helps to interact with the first magnet Magnetic flux formation.Therefore, by make the first main surface side coil pattern outermost circumferential portion half cycle more than line width ratio The line width of coil pattern in addition to it is thin, so as to while the significantly increase of the conductor losses of suppression coil 36 Effectively increase the electromagnetic force of the interaction based on the first magnet and coil 36.In addition, from above-mentioned effect, effect in terms of It sets out, preferably makes the line width of the outermost circumferential portion entirety of the first main surface side coil pattern than the line of the coil pattern in addition to it Width is thin.In addition, this is also same for the second main surface side coil pattern and the relationship of the second magnet.

" other embodiment "

Although showing the example for the plate that laminated body is rectangle in each embodiment illustrated above, and unlimited Due to the structure.The flat shape of laminated body can be carried out suitably in the range of having the function that the utility model, effect Change, such as it is also possible to circle, ellipse, polygon etc..In addition, the first interarea VS1 and the second interarea VS2 of laminated body Be not limited to complete plane, can also a part be curved surface etc..

Although showing the example for the laminated body being made of thermoplastic resin in each embodiment illustrated above, It is not limited to the structure.The laminated body of the utility model can also be made of thermosetting resin.

Although having in addition, being shown in each embodiment illustrated above by three to five insulating substrate layer stackups And the oscillating plate of the laminated body constituted, but it is not limited to the structure.The number of plies for forming the insulated base material layer of laminated body is reaching It can suitably be changed in the range of to the effect of the utility model, effect.

In addition, though showing about the oscillating plate that each embodiment illustrated above is related to comprising being respectively formed at three To about 1 circle of five insulated base material layers multiple coil patterns and have the example of spiral helicine coil, but do not limit In the structure.The oscillating plate of the utility model is also possible to have helical form or ring comprising multiple coil patterns less than 1 circle The structure of the coil of shape can also be have the structure for the coil for containing cyclic annular and gyrate multiple coil patterns.This Outside, the oscillating plate of the utility model is also possible to have the complications for containing and being respectively formed at multiple insulated base material layers (meander) structure of the coil of the coil pattern of shape.The shape and winding number of coil in the utility model are reaching this It can suitably be changed in the range of the effect of utility model, effect.In addition, as long as the coil in the utility model wraps Structure containing the coil pattern for being respectively formed at least two insulated base material layer.

Although in addition, showing the vibrating elements for only having the first magnet in each embodiment illustrated above or having First magnet and the vibrating elements of the second magnet both sides the two examples, but it is not limited to the structure.The utility model Vibrating elements is also possible to the structure for only having the second magnet.Although in addition, being shown in each embodiment illustrated above Vibrating elements has the example of one or two magnet, but it's not limited to that for the number of magnet, or three or more. In the case where vibrating elements has three or more magnet, it can be vibrating elements and have multiple first magnet, be also possible to Vibrating elements has multiple second magnet.

External electrical is provided in the first side interarea VS1 of laminated body although showing in each embodiment illustrated above The example of pole P1, P2, but the oscillating plate in the utility model is not limited to the structure.About external electrode P1, P2 Number, shape, configuration etc. can be changed suitably in the range of having the function that the utility model, effect.External electrode Also it can be set in the second side interarea VS2, the first interarea VS1 and the second interarea VS2 both sides can also be set.

Although being formed in addition, being shown in each embodiment illustrated above in the first side interarea VS1 of laminated body The example of protective layer, but it is not limited to the structure.As described above, protective layer is not for the oscillating plate of the utility model It is required.In addition, protective layer can also be formed in the second side interarea VS2 of laminated body, it is additionally formed in the first interarea VS1 Side and the second interarea VS2 side both sides.

Finally, the explanation of above-mentioned embodiment is to illustrate in all aspects, it is not limiting.To this field skill For art personnel, it can be suitably deformed and change.The scope of the utility model is shown by above-mentioned embodiment Out, it but is shown in the claims.In turn, the scope of the utility model include from in the range being equal in claims Embodiment carry out change.

Description of symbols

AP1, AP2, AP3: opening；

AX: the wireline reel of coil；

CE: the forming region of coil；

CN1, CN2: connection conductor；

CO: coil aperture；

CP1, CP1A: coil pattern (the first main surface side coil pattern)；

CP2, CP2A, CP3, CP3A, CP4, CP4A, CP5: coil pattern；

H1, H1a, H2, H2a: opening portion；

HP1, HP1a: the first recess portion；

P1, P2: external electrode；

ML: center height；

V1, V2, V3, V4, V5, V6, V7, V8: interlayer connection conductor；

VS1: the first interarea；

VS2: the second interarea；

1,1a, 1b, 1c, 1d: protective layer；

2: pedestal；

3: component；

10A, 10AP, 10B, 10C, 10CP, 10D: laminated body；

11a, 11b, 11c, 11d, 12a, 12b, 12c, 12d, 13a, 13b, 13c, 13d, 14b, 14c, 14d, 15b: insulation Substrate layer；

21,22,23,24: conductor；

31,32,33,34,36: coil；

41: magnet (the first magnet)；

42: magnet (the second magnet)；

101,102,103,104,105,106: oscillating plate；

201,202,205,206: vibrating elements.

Claims

1. a kind of vibrating elements, which is characterized in that

Have oscillating plate and the first magnet,

The oscillating plate includes

The coil includes the multiple lines for the more than two insulated base material layers being respectively formed in the multiple insulated base material layer Circular pattern,

At least one for being arranged to the first main surface side coil pattern near first interarea in the multiple coil pattern Point line width it is thinner than the line width of at least one of coil pattern in addition to it,

From the winding axis direction of the coil, first magnet configuration is in the position Chong Die with the forming region of the coil Set, and the first main surface side coil pattern in the multiple coil pattern and configure.

2. vibrating elements according to claim 1, which is characterized in that

The laminated body has second interarea opposed with first interarea,

The first main surface side coil pattern is main closer to described first compared with second interarea on the stacking direction Face.

3. vibrating elements according to claim 1, which is characterized in that

The first main surface side coil pattern is swirl shape,

The line width more than half cycle of the outermost circumferential portion in the first main surface side coil pattern is than the circuit diagram in addition to it The line width of at least one of case is thin.

4. vibrating elements according to claim 1, which is characterized in that

The line width of the first main surface side coil pattern entirety is thinner than the line width of the coil pattern in addition to it.

5. vibrating elements according to claim 1, which is characterized in that

It is also equipped with the second magnet,

The laminated body has second interarea opposed with first interarea,

The coil includes the multiple lines for three or more insulated base material layers being respectively formed in the multiple insulated base material layer Circular pattern,

At least one for being arranged to the second main surface side coil pattern near second interarea in the multiple coil pattern At least part of line width of the line width and the first main surface side coil pattern that divide is than the circuit diagram in addition to them The line width of at least one of case is thin,

From the winding axis direction of the coil, second magnet configuration is Chong Die with the forming region of the coil Position, and the second main surface side coil pattern in the multiple coil pattern and configure.

6. vibrating elements according to claim 5, which is characterized in that

The second main surface side coil pattern is main closer to described second compared with first interarea on the stacking direction Face.

7. vibrating elements according to claim 5, which is characterized in that

The second main surface side coil pattern is swirl shape,

The line width more than half cycle of the outermost circumferential portion in the second main surface side coil pattern is than the coil in addition to them The line width of at least one of pattern is thin.

8. vibrating elements according to claim 5, which is characterized in that

The line width of the line width of the first main surface side coil pattern entirety and the second main surface side coil pattern entirety Line width than the coil pattern in addition to them is thin.

9. according to claim 1 to vibrating elements described in any one of 8, which is characterized in that

The first recess portion is formed in first interarea,

From the stacking direction, the inside of coil aperture of first recess arrangement in the coil,

At least part of first magnet is configured in the inside of first recess portion.

10. vibrating elements according to claim 9, which is characterized in that

The side of first recess portion from first interarea towards the laminated body on the inside of be formed as cone cell.

11. the vibrating elements according to any one of claim 5 to 8, which is characterized in that

The second recess portion is formed in second interarea,

From the stacking direction, the inside of coil aperture of second recess arrangement in the coil,

At least part of second magnet is configured in the inside of second recess portion.

12. vibrating elements according to claim 11, which is characterized in that

The side of second recess portion from second interarea towards the laminated body on the inside of be formed as cone cell.

13. according to claim 4 or vibrating elements according to any one of claims 8, which is characterized in that

It is arranged to compared with the surface layer of the laminated body on the stacking direction more by internal layer, the line of the multiple coil pattern Width is thicker.