CN209690539U - The configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum - Google Patents
The configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum Download PDFInfo
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- CN209690539U CN209690539U CN201920411660.7U CN201920411660U CN209690539U CN 209690539 U CN209690539 U CN 209690539U CN 201920411660 U CN201920411660 U CN 201920411660U CN 209690539 U CN209690539 U CN 209690539U
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Abstract
This patent discloses the infrared and multispectral complex probe imaging devices of Terahertz that a kind of spectrum can configure, the patent is based on optical filtering technology and aperture segmentation technology, face battle array optical filter, face battle array lens and planar array detector are combined, aperture design is total to using infrared multispectral imaging band and Terahertz multispectral imaging channel, in conjunction with the configurable optical filter packet of reflecting mirror and channel with scanning function, the multispectral complex probe imaging for realizing target, is suitable for the fields such as deep space exploration, air remote sensing.
Description
Technical field
Optical spectrum imaging device involved in this patent is a kind of infrared, terahertz wave band of covering, can carry out light depending on the application
Compose the multispectral complex probe imaging device of configuration.The patent is based on optical filtering technology and aperture segmentation technology, use are infrared
Multispectral imaging channel and Terahertz multispectral imaging channel are total to aperture design, and face battle array optical filter, face battle array lens and face battle array are visited
It surveys device to combine, in conjunction with the configurable optical filter packet of reflecting mirror and channel with scanning function, realizes the multispectral multiple of target
Detection imaging is closed, the fields such as deep space exploration, air remote sensing are suitable for.
Background technique
Imaging spectrometer not only acquires the high resolution space information of ground object target, while also having acquisition atural object target light
The ability of spectrum information can directly analyze the material composition of target, thus more effectively resolution target from the remotely-sensed data of acquisition.
For different application target, needed for spectral coverage it is different.
Vibrational spectroscopy in modern mineral chemistry thinks, transition of the molecule between rotation, vibration level generate it is infrared-
The vibration of tera-hertz spectra, the group or lattice of polyatomic molecule generates infrared-tera-hertz spectra, passes through measurement minerals
Turn, vibrational spectrum, can be used to identify mineral types and obtain mineral formation, component, thermodynamic equilibrium constant, chemical bond classification
And some valuable information to react between them.According to " minerals infared spectrum collection " (Science Press, 1982
Year May) and the newest laboratory measurements published show sulfide, halide, oxide, hydroxide, nitric acid
There are rich in infrared-terahertz wave band (1 μm -100 μm) for the substances such as salt, carbonate, borate, sulfate, phosphate, silicate
Rich dactylogram.And silicate, carbonate, sulfate, phosphate, oxide, hydroxide are composition celestial body surface infrastructures
Main mine substance, it is therefore, remote by measurement silicate, carbonate, sulfate, phosphate, oxide, the heat radiation of hydroxide
Infrared-Terahertz spectrum can determine the rock constituents on celestial body surface, the abundance of mineral types, and the evolution of celestial body is inferred with this
Rule.
There are two types of the spectral instruments for being presently available for mineral analysis.One is be used in the infrared spectroscopy of air remote sensing at
As instrument, this instrument uses mercury-cadmium tellurid detector, and spectrometer can only farthest cover 15 μm.With Shanghai, Institute of Technical Physics is ground
For the infrared spectroscopy imager of the representative country highest level of system, which passes through grating beam splitting, In
The spectral information of 180 wave bands can be obtained in 8.0-12.5 μm of spectral region, but can not to work in wavelength longer for the instrument
Terahertz wave band.Another kind is the infrared Fourier spectrometer for being used in laboratory scientific research analysis, and this instrument is visited by replacement
Survey device attachment, wavelength can cover infrared to terahertz wave band, but the operating mode and moving parts defect of Time-Dependent scanning, make
It is not suitable for air remote sensing and deep-space detection field.
In terms of the shortcomings that above-mentioned prior art, is mainly reflected in following two: one, for the infrared light in air remote sensing field
Spectrometer can realize high light spectrum image-forming in infrared band, but be limited to the response wave band of detector and the service band of grating,
Longer wavelength band cannot be worked in；Two, for the infrared Fourier spectrometer of laboratory scientific research analysis purposes, it is limited by spectrum
Line acquisition time, moving parts defect and data redundancy constrain it in the application of air remote sensing and deep-space detection field.
Summary of the invention
For the above-mentioned deficiency of the prior art, this patent provides a kind of compound spy of infrared-Terahertz that spectrum is configurable
Imaging device is surveyed, the fields such as air remote sensing, deep space exploration are suitable for.
The technical solution of this patent is as follows:
A kind of infrared-Terahertz complex probe imaging device that spectrum is configurable, including be arranged successively according to optic path
It is the plane of scanning motion reflecting mirror 1 of placement, parabolic mirror 3, spherical reflector 4, color separation film 6, infrared surface battle array optical filter 7, infrared
Face battle array lens 8, infrared planar array detector 9, Terahertz face battle array optical filter 11, Terahertz face battle array lens 12, the battle array detection of Terahertz face
Device 13, the infrared planar array detector 9 are also connected with infrared detector control processing system 10 and control acquisition process meter in turn
Calculation machine 15, the Terahertz planar array detector 13 are also connected with terahertz detector control processing system 14 and control acquisition in turn
Computer 15 is handled, the plane of scanning motion reflecting mirror 1 is also connected with scanning rotating mechanism 2 and control acquisition process computer in turn
15, the spherical reflector 4 is located in fastening frame 5, as shown in Figure of description 1.
The parabolic mirror 3, spherical reflector 4 and fastening frame 5 constitute Cassegrain telescope 16.It is described red
Outside battle array optical filter 7, infrared surface battle array lens 8, infrared planar array detector 9, infrared detector control processing system 10, constitute infrared
Detection channels 17.The Terahertz face battle array optical filter 11, Terahertz face battle array lens 12, Terahertz planar array detector 13, Terahertz
Detector controls processing system 14, constitutes terahertz detection channel 18.The plane of scanning motion reflecting mirror 1, Cassegrain telescope
16, color separation film 6, infrared acquisition channel 17, terahertz detection channel 18, the configurable compound spy of infrared-Terahertz of composition spectrum
Survey the optical system of imaging device.The scanning rotating mechanism 2, infrared detector control processing system 10, terahertz detector
It controls processing system 14 and controls acquisition process computer 15 and constitute the configurable infrared-Terahertz complex probe imaging dress of spectrum
The control processing system set.
The color separation film 6 is high-pass filter, and the infrared waves of 0.8-15 μm of reflection, transmission peak wavelength is greater than 15 μm of terahertz
Hereby wave realizes the separation of Terahertz and infrared beams.
The infrared surface battle array optical filter 7 is an optical filter packet, and comprising 72 kinds of different central wavelengths and side length is a pros
The wavelength of shape optical filter, optical filter meets,
λi=0.8+0.2* (i-1), i=1,2,3 ..., 70,71,72 (1)
Wherein, i indicates the number of optical filter, λiIt indicates the central wavelength of i-th of optical filter, can configure as needed every time
9 kinds of optical filters constitute the face battle array optical filter of 3*3, and as shown in Figure of description 2, different texture represents different central wavelengths in figure
Optical filter；The infrared surface battle array lens 8 by 9 side lengths are a, focal length f1Square silicon mirror, arrange according to 3*3 glued
It forms, as shown in Figure of description 3；The infrared planar array detector 9 is located at the focal plane of infrared surface battle array lens 8, by 9 m*m's
Small-scale infrared planar array detector composition, the pixel dimension for constituting the single-element detector of small-scale infrared planar array detector is X*X,
The size of each small-scale infrared planar array detector is mX*mX, the spacing d of adjacent small-scale infrared planar array detector1Meet (2)
Formula, as shown in Figure of description 5, wherein d1Indicate the spacing of small-scale infrared planar array detector, m indicates to constitute infrared surface battle array
The line number or columns of the small-scale infrared planar array detector of detector 9, X indicate to form the unit of small-scale infrared planar array detector
The pixel dimension of detector.
d1=a-mX (2)
The Terahertz face battle array optical filter 11 is an optical filter packet, and comprising 72 kinds of different central wavelengths and side length is a
The wavelength of square optical filter, optical filter meets (3) formula；
λj=16+2 (j-1) (μm), j=1,2,3 ..., 70,71,72 (3)
Wherein, j indicates the number of optical filter, λjIt indicates the central wavelength of j-th of optical filter, can configure as needed every time
9 kinds of optical filters constitute the face battle array optical filter of 3*3；Terahertz face battle array lens 12 by 9 side lengths are a, focal length f2Just
Rectangular silicon mirror is formed according to 3*3 arrangement gluing；The Terahertz planar array detector 13 is the coke positioned at Terahertz face battle array lens 12
Face is that 9 Terahertz single-element detectors are arranged according to 3*3, Terahertz single-element detector Pixel size be Y*Y, it is adjacent too
The spacing of hertz single-element detector is d2Meet (4) formula, as shown in Figure of description 5, wherein d2Indicate the detection of Terahertz unit
The spacing of device, Y indicate the pixel dimension of Terahertz single-element detector.
d2=a-Y (4)
The focal length f of the infrared surface battle array lens 8, Terahertz face battle array lens 121、f2It needs to meet:
Wherein f1、f2The focal length of infrared surface battle array lens 8, Terahertz face battle array lens 12 is respectively indicated, m indicates to constitute infrared surface
The line number or columns of the small-scale infrared planar array detector of array detector 9, X indicate to form the list of small-scale infrared planar array detector
The pixel dimension of first detector, Y indicate the pixel dimension of Terahertz single-element detector.
The field angle α of the configurable multispectral complex probe imaging device of infrared-Terahertz of the spectrum meets (6) formula:
Wherein, M indicates the vertical axis enlargement ratio of Cassegrain telescope 16, f2Indicate the coke of Terahertz face battle array lens 12
Away from Y indicates the pixel dimension of Terahertz single-element detector.
The multicomponent signal that the infrared detector control processing system 10 acquires infrared planar array detector 9 is located parallel
Reason, and pass through the infrared spectroscopic imaging of the control synthesis detected target of acquisition process computer 15；The terahertz detector control
Processing system 14 processed carries out parallel processing to the signal that Terahertz planar array detector 13 acquires, and is calculated by control acquisition process
Machine 15 synthesizes detected target tera-hertz spectra image.
Above-mentioned plane of scanning motion reflecting mirror 1 realizes target by the control control scanning rotating mechanism 2 of acquisition process computer 15
Big view field imaging.
The action principle of this patent is as follows:
When infinity target is imaged, infrared-THz wave of infinity target emanation is through plane of scanning motion reflecting mirror 1
Reflection, into Cassegrain telescope 16, the reflection through parabolic mirror 3 Yu spherical reflector 4, parallel incidence color separation
Piece 6 is simultaneously divided into two-way: it is wherein all the way 0.8-15 μm of infrared external reflection wave, filtering through infrared surface battle array optical filter 7 and infrared
The convergence of face battle array lens 8, is received by infrared planar array detector 9, acquires by infrared detector control processing system 10 and control
The processing for handling computer 15, forms the infrared spectroscopic imaging of target；Another way is the Terahertz transmitted wave greater than 15 μm, through too
The filtering of hertz face battle array optical filter 11 and the convergence of Terahertz face battle array lens 12, are received by Terahertz planar array detector 13, pass through
Terahertz detector controls processing system 14 and controls the processing of acquisition process computer 15, forms the terahertz light spectrogram of target
Picture.Plane of scanning motion reflecting mirror 1 is driven by the control control scanning rotating mechanism 2 of acquisition process computer 15, realizes sweeping for target
Retouch imaging.
Compared with prior art, a kind of configurable multispectral complex probe imaging device of infrared-Terahertz of spectrum has
Following advantages: one, compared with the infrared spectrometer in air remote sensing field, the configurable infrared-Terahertz of spectrum is multispectral compound
Detecting and imaging device has covering spectral coverage range wide, the simple advantage of structure；Two, compared with infrared Fourier spectrometer, spectrum
The real-time detection and imaging of target THz spectrum may be implemented in the multispectral complex probe imaging device of configurable infrared-Terahertz；
Three, the configurable multispectral complex probe imaging device of infrared-Terahertz of spectrum uses infrared multispectral imaging band and terahertz
Hereby multispectral imaging channel is total to aperture design, in conjunction with the optical filter for having direction, the reflecting mirror of scanning function and channel configurable
The multispectral complex probe imaging of target may be implemented in packet；Four, the configurable multispectral complex probe of infrared-Terahertz of spectrum
Imaging device uses optical filter as light-splitting device, has the advantages that structure is simple, small in size, is applicable to outdoor complicated and changeable
Environment.
Detailed description of the invention
Fig. 1 is the multispectral complex probe imaging device schematic diagram of infrared-Terahertz.
Fig. 2 is infrared surface battle array optical filter schematic diagram.
Fig. 3 is infrared surface battle array lens schematic diagram.
Fig. 4 is infrared planar array detector schematic diagram.
Fig. 5 is Terahertz planar array detector schematic diagram.
Specific embodiment
1 pair of this patent further illustrates with reference to the accompanying drawings of the specification.
A kind of embodiment 1: multispectral complex probe imaging device of infrared-Terahertz that spectrum is configurable
This patent is used using following construction:
1. the bore 100mm*100mm of plane of scanning motion reflecting mirror 1, Al reflectance coating is plated on surface.
2. scanning rotating mechanism 2, the dimensional turntable of Shenji Group Kuming Tool Co., Ltd's production, model are selected
Are as follows: FG-2660, orientation workbench slewing area: 360 °, azimuth rotating platform indexing accuracy: 3 ", pitching workbench slewing area:
120 °, pitching rotary indexing accuracy: 5 ".
3. Cassegrain telescope 16 is manufactured by Nanjing ZhongKe astronomy Instruments Co., Ltd, wherein parabolic mirror 3
Bore 120mm, focal length 1586.12mm, center opening diameter 32mm；The bore 35mm of spherical reflector 4, focal length
530.55mm, the material of fastening frame 5 are silicon carbide.
4. the diameter of beam splitter 6 is 40mm, transmission peak wavelength is greater than 15 μm of THz wave, wave band average transmittance used
95%, the infrared waves of 0.8-15 μm of reflection, wave band average reflectance 80% used is manufactured by Russian TYDEX company.
5. the construction in infrared acquisition channel 17: the size of infrared surface battle array optical filter 7 is 30mm*30mm, according to mineralogical composition
Measurement needs, and central wavelength has been selected to be followed successively by 6.78 μm respectively, and 7.93 μm, 8.56 μm, 9.35 μm, 10.21 μm, 11.04 μm,
11.79 μm, 12.57 μm, the size of 14.88 μm of narrow band filter, single box filter is 10mm*10mm, by the Chinese of standing upright
The manufacture of light company；Infrared surface battle array lens 8 are silicon lens, and having a size of 30mm*30mm, the size of single rectangular sub-lens is
10mm*10mm, focal length 30mm；Infrared planar array detector 9 is made of 9 pieces of facet array detectors, and each partial array includes 200*
200 pixels, Pixel size 2um*2um.
6. the construction in terahertz detection channel 18: the size of Terahertz face battle array optical filter 11 is 30mm*30mm, according to mineral
Composition measurement need, selected respectively central wavelength be followed successively by 18.5 μm, 21 μm, 27.1 μm, 35.6 μm, 40.4 μm, 42.7 μm,
43.7 μm, 72.3 μm, 85.5 μm of narrow band filter, are manufactured by Russian TYDEX company, and the size of single box filter is
10mm*10mm；Terahertz face battle array lens 12 are silicon lens, and having a size of 30mm*30mm, the size of single rectangular sub-lens is
10mm*10mm, focal length 150mm；Terahertz planar array detector 13 is made of 9 unit terahertz detectors, and Pixel size is
2mm*2mm。
7. infrared detector controls processing system 10, terahertz detector control processing system 14 comprising corresponding reading
The functions such as circuit, preamplifier, filtering.
8. acquisition process computer 15 uses Hewlett-Packard (HP) computer, model i5-7300HQ.
The main working process of this patent are as follows:
1, it is switched on, infrared fileter and Terahertz optical filter is configured according to measurement target.
2. infrared-THz wave of infinity target emanation is hoped through the reflection of plane of scanning motion reflecting mirror 1 into Cassegrain
Remote system 16, the reflection through parabolic mirror 3 Yu spherical reflector 4, parallel incidence color separation film 6 are simultaneously divided into two-way: wherein
It is all the way 0.8-15 μm of infrared external reflection wave, the convergence of filtering and infrared surface battle array lens 8 through infrared surface battle array optical filter 7 is infrared
Planar array detector 9 receives, and by the processing of infrared detector control processing system 10 and control acquisition process computer 15, is formed
The infrared spectroscopic imaging of target；Another way is the Terahertz transmitted wave that wavelength is greater than 15 μm, through Terahertz face battle array optical filter 11
Filtering and the convergence of Terahertz face battle array lens 12 are received by Terahertz planar array detector 13, are handled by terahertz detector control
The processing of system 14 and control acquisition process computer 15, forms the tera-hertz spectra image of target.By controlling acquisition process
The control scanning rotating mechanism 2 of computer 15 drives the scanning imagery of the realization target of plane of scanning motion reflecting mirror 1.
Claims (5)
1. a kind of configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum, including plane of scanning motion reflecting mirror
(1), parabolic mirror (3), spherical reflector (4), color separation film (6), infrared surface battle array optical filter (7), infrared surface battle array lens
(8), infrared planar array detector (9), Terahertz face battle array optical filter (11), Terahertz face battle array lens (12), the battle array detection of Terahertz face
Device (13), the infrared planar array detector (9) are also connected with infrared detector control processing system (10) and control acquisition in turn
It handles computer (15), it is characterised in that:
The composition of the imaging device is followed successively by plane of scanning motion reflecting mirror (1), parabolic reflector according to optic path sequencing
Mirror (3), spherical reflector (4), color separation film (6), infrared surface battle array optical filter (7), infrared surface battle array lens (8), the detection of infrared surface battle array
Device (9), Terahertz face battle array optical filter (11), Terahertz face battle array lens (12), Terahertz planar array detector (13)；The infrared surface
Array detector (9) is connected with infrared detector control processing system (10) and control acquisition process computer (15) in turn, described
Terahertz planar array detector (13) is connected with terahertz detector control processing system (14) in turn and control acquisition process calculates
Machine (15), the plane of scanning motion reflecting mirror (1) are connected with scanning rotating mechanism (2) and control acquisition process computer in turn
(15)；
At the infrared surface battle array optical filter (7), infrared surface battle array lens (8), infrared planar array detector (9) and infrared detector control
Reason system (10) constitutes infrared acquisition channel (17)；Terahertz face battle array optical filter (11), Terahertz face battle array lens (12), too
Hertz planar array detector (13) and terahertz detector control processing system (14) constitute terahertz detection channel (18)；It is described to sweep
Retouch plane mirror (1), Cassegrain telescope (16), color separation film (6), infrared acquisition channel (17) and terahertz detection channel
(18), the optical system of the configurable infrared-Terahertz complex probe imaging device of composition spectrum；
The spherical reflector (4) is located in fastening frame (5), collectively forms Cassegrain with parabolic mirror (3) and looks in the distance
Mirror (16)；The scanning rotating mechanism (2), infrared detector controls processing system (10), terahertz detector controls processing system
Unite (14) and control the control that acquisition process computer (15) constitute the configurable infrared-Terahertz complex probe imaging device of spectrum
Processing system processed；
Infrared-THz wave of infinity target emanation is through the reflection of plane of scanning motion reflecting mirror (1), into Cassegrain telescope
(16), the reflection through parabolic mirror (3) Yu spherical reflector (4), parallel incidence color separation film (6) are simultaneously divided into two-way by it:
It is wherein all the way 0.8-15 μm of infrared external reflection wave, the meeting of filtering and infrared surface battle array lens (8) through infrared surface battle array optical filter (7)
It is poly-, it is received by infrared planar array detector (9), is calculated using infrared detector control processing system (10) and control acquisition process
The processing of machine (15), forms the infrared spectroscopic imaging of target；Another way is the Terahertz transmitted wave greater than 15 μm, through Terahertz face
The filtering of battle array optical filter (11) and the convergence of Terahertz face battle array lens (12) are received by Terahertz planar array detector (13), using
Terahertz detector controls processing system (14) and controls the processing of acquisition process computer (15), forms the terahertz light of target
Spectrogram picture；It is realized by control acquisition process computer (15) control scanning rotating mechanism (2) driving plane of scanning motion reflecting mirror (1)
The scanning imagery of target.
2. a kind of configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum according to claim 1,
It is characterized in that, the infrared surface battle array optical filter (7) is an optical filter packet, comprising 72 kinds of different central wavelengths and side length is
The wavelength of a square optical filter, optical filter meets,
λi=0.8+0.2* (i-1), i=1,2,3 ..., 70,71,72
Wherein, i indicates the number of optical filter, λiIt indicates the central wavelength of i-th of optical filter, 9 kinds of filters can be configured as needed every time
Mating plate constitutes the face battle array optical filter of 3*3；The infrared surface battle array lens (8) by 9 side lengths are a, focal length f1Square thoroughly
Mirror is formed according to 3*3 arrangement gluing；The infrared planar array detector (9) is located at the focal plane of infrared surface battle array lens (8), by 9 m*
The small-scale infrared planar array detector composition of m, the spacing of adjacent small-scale infrared planar array detector meet
d1=a-mX
Wherein, d1Indicate the spacing of small-scale infrared planar array detector, m indicates to constitute the small-scale of infrared planar array detector (9)
The line number or columns of infrared planar array detector, X indicate to form the pixel ruler of the single-element detector of small-scale infrared planar array detector
It is very little.
3. a kind of configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum according to claim 1,
It is characterized in that, the Terahertz face battle array optical filter (11) is an optical filter packet, include 72 kinds of different central wavelengths and side length
It is a square optical filter, the wavelength of optical filter meets；
λj=16+2 (j-1) (μm), j=1,2,3 ..., 70,71,72
Wherein, j indicates the number of optical filter, λjIt indicates the central wavelength of j-th of optical filter, 9 kinds of filters can be configured as needed every time
Mating plate constitutes the face battle array optical filter of 3*3；Terahertz face battle array lens (12) by 9 side lengths are a, focal length f2Square
Silicon mirror is formed according to 3*3 arrangement gluing；The Terahertz surface detector (13) is the coke positioned at Terahertz face battle array lens (12)
Face is that 9 Terahertz single-element detectors are arranged according to 3*3, and the spacing of adjacent Terahertz single-element detector meets
d2=a-Y
Wherein, d2Indicate the spacing of Terahertz single-element detector, Y indicates the pixel dimension of Terahertz single-element detector.
4. a kind of configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum according to claim 1,
It is characterized in that, the focal length of the focal length of the infrared surface battle array lens (8) and Terahertz face battle array lens (12) needs to meet:
Wherein f1Indicate infrared surface battle array lens (8), f2Indicate that the focal length of Terahertz face battle array lens (12), m indicate to constitute infrared surface battle array
The line number or columns of the small-scale infrared planar array detector of detector (9), X indicate to form the list of small-scale infrared planar array detector
The pixel dimension of first detector, Y indicate the pixel dimension of Terahertz single-element detector.
5. a kind of configurable infrared and multispectral complex probe imaging device of Terahertz of spectrum according to claim 1,
It is characterized in that, the field angle α of system meets:
Wherein, M indicates the vertical axis enlargement ratio of Cassegrain telescope (16), f2Indicate the focal length of Terahertz face battle array lens (12),
The pixel dimension of Y expression Terahertz single-element detector.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946750A (en) * | 2019-03-29 | 2019-06-28 | 中国科学院上海技术物理研究所 | A kind of infrared and multispectral complex probe imaging device of Terahertz that spectrum is configurable |
| CN114942069A (en) * | 2022-07-25 | 2022-08-26 | 长春长光辰谱科技有限公司 | Wide-spectrum micro spectrometer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946750A (en) * | 2019-03-29 | 2019-06-28 | 中国科学院上海技术物理研究所 | A kind of infrared and multispectral complex probe imaging device of Terahertz that spectrum is configurable |
| CN109946750B (en) * | 2019-03-29 | 2023-12-26 | 中国科学院上海技术物理研究所 | Spectrum-configurable infrared and terahertz multispectral composite detection imaging device |
| CN114942069A (en) * | 2022-07-25 | 2022-08-26 | 长春长光辰谱科技有限公司 | Wide-spectrum micro spectrometer |
| CN114942069B (en) * | 2022-07-25 | 2022-10-21 | 长春长光辰谱科技有限公司 | Wide-spectrum micro spectrometer |
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