CN209689435U - A kind of heat exchanger suitable for the purification of high prefect dielectric - Google Patents
A kind of heat exchanger suitable for the purification of high prefect dielectric Download PDFInfo
- Publication number
- CN209689435U CN209689435U CN201920038481.3U CN201920038481U CN209689435U CN 209689435 U CN209689435 U CN 209689435U CN 201920038481 U CN201920038481 U CN 201920038481U CN 209689435 U CN209689435 U CN 209689435U
- Authority
- CN
- China
- Prior art keywords
- heat exchanger
- supervisor
- purification
- shell
- coil pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 238000000746 purification Methods 0.000 title claims abstract description 31
- 238000012545 processing Methods 0.000 claims abstract description 13
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 12
- 239000010935 stainless steel Substances 0.000 claims abstract description 12
- 238000003491 array Methods 0.000 claims abstract description 9
- 230000008676 import Effects 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 6
- 239000003599 detergent Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 6
- 238000007670 refining Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 7
- 238000003466 welding Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 210000004262 dental pulp cavity Anatomy 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The utility model provides a kind of heat exchanger suitable for the purification of high prefect dielectric, including shell and setting in the intracorporal coil pipe of shell；The shell is successively made of cover board, stack shell, flange and bottom plate from top to down, the coil pipe includes bend pipe, input supervisor and output supervisor, the bend pipe is in cirque structure, and by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；Connection is responsible in the input end of the bend pipe and input, and outlet end and output supervisor connect, and the bend pipe and input supervisor and output are responsible for not in the same plane.The coil pipe of the utility model is stainless steel EP pipe of the inner wall by EP processing, high-purity gas environment required for semicon industry can be more suitable for, refining effect is more preferable, and heat exchange manifold uses coil pipe processing mode close-packed arrays, heat exchange area is big, it is high-efficient, compared with the heat exchanger of same heat exchange efficiency, take up an area small volume.
Description
Technical field
The utility model relates to field of heat exchangers, and in particular, to a kind of heat exchanger suitable for the purification of high prefect dielectric.
Background technique
Since the booming and Chinese government of global electronic, photovoltaic industry advocates rejuvenate China by applying scientific and technological advances energetically, the country is partly led
Body, photovoltaic development of manufacturing are swift and violent.And it is needed in semiconductor, the common processing procedure of photovoltaic related industry commonly using special gas
Body, our countries, which also increasingly advocate, at present uses domestic technique and domestic gas, so the purification technique of high-purity gas is just shown
It obtains particularly critical.In the purification technique of previous ordinary heat exchanger, the pipeline that heat exchanger uses is common pipeline, and height is not achieved
Pure requirement, so the purification of high prefect dielectric is with regard to more some limitations, in addition the heat exchanger of equal efficiency in the market, does not accomplish close
Collect the effect of coil pipe, land occupation volume is larger.
EP, that is, electrobrightening (Electro Polishing), also referred to as electropolishing are produced in electrolytic cell using anode
Electrochemical dissolution phenomenon, make low-light convex portion on anode that method of the selective dissolution to form smooth surface occur.It is
One complicated anode oxidation process along with the dissolution and oxidation of workpiece surface, but is different from anodic oxidation.To stainless steel
Pipe carries out EP processing, manufactured stainless steel EP pipe be widely used in now semicon industry, liquid crystal industry, solar energy industry,
Medicine trade, instrument system, compressed air, ultra-pure gases, chemical systems, WFI system and other have it is high-purity and ultra-pure
It is required that gas pipeline system or dust free room or equipment aspect.
Utility model content
For the defects in the prior art, the purpose of the utility model is to provide a kind of changing suitable for the purification of high prefect dielectric
Hot device, the coil pipe of the utility model are stainless steel EP pipe of the inner wall by EP processing, can be more suitable for needed for semicon industry
The high-purity gas environment wanted, refining effect is more preferable, and heat exchange manifold uses coil pipe processing mode close-packed arrays, heat exchange area
Greatly, high-efficient, compared with the heat exchanger of same heat exchange efficiency, take up an area small volume.
One aspect according to the present utility model provides a kind of heat exchanger suitable for the purification of high prefect dielectric, including shell
With setting in the intracorporal coil pipe of shell (1)；The shell is from top to down successively by cover board (2), stack shell (3), flange (4) and bottom plate
(5) it constitutes, the cover board (2), stack shell (3) and flange (4) form the cavity for accommodating coil pipe (1), the method by being welded to connect
The gasket of sealing is equipped between blue (4) and bottom plate (5), the flange (4) connect with bottom plate (5) by screw bolt and nut solid
It is fixed；The cover board (2) is equipped with 2 openings, the respectively exhaust outlet when heat exchanger cavity internal temperature is increased for exhaust
(6), for exhausting the discharging hole (7) of foul and cleansing medium in pipeline and in detergent line, the cover board (2) it is interior
Side is equipped with 2 for fixing the fluting (8) of coil pipe (1)；The inside of the bottom plate (5) is equipped with 4 openings, respectively heat transferring medium
The shell side import (9) of disengaging and shell-side outlet (10), and purification substance disengaging tube side import (11) and tube side export
(12), the discharge outlet (13) for discharging substance in heat exchanger cavity is additionally provided on the bottom plate (5)；
The coil pipe (1) includes bend pipe (14), input supervisor (15) and output supervisor (16), and the bend pipe (14) is in annulus
Shape structure, by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；The bend pipe
(14) input end with input supervisor (15) connect, outlet end with export be responsible for (16) connect, and the bend pipe (14) with it is defeated
Enter supervisor (15) and output is responsible for (16) not in the same plane.Because the tube length of standard is 6 meter Yi Gen, and in heat exchanger
When every root canal as bend pipe is more than 6 meters, needs first to weld the standard pipes of 6 meter Yi Gen, then carry out coil pipe work again
Make.
Preferably, the bend pipe (14) is vertically arranged with input supervisor (15) and output supervisor (16).
Preferably, the diameter of the bend pipe (14) is smaller than the diameter of input supervisor (15) and output supervisor (16).
Preferably, the one side wall of the stack shell (3) is equipped with fixed plate, pacifies in the fixed plate by the way that riveting method is fixed
Equipped with nameplate (17).
Preferably, the top of the cover board (2) is connected with the lifting lug (18) of whole heat exchanger of lifting.
Preferably, the cover board (2), stack shell (3), flange (4), bottom plate (5) and gasket are circular configuration.
Preferably, for the wall of the bottom plate (5) along being above symmetrically arranged with mounting plate (19), the mounting plate (19) is equipped with peace
Fill hole.
Preferably, the input supervisor (15) and output supervisor (16) export (12) with tube side import (11) and tube side respectively
Connection.
Second aspect, the utility model additionally provide a kind of preparation method of heat exchanger suitable for the purification of high prefect dielectric,
The following steps are included:
Several standard stainless steel EP pipe head and the tail are welded to connect the sample cell at setting length by step 1；
The input end of the sample cell is successively connected to input supervisor (15) welding by step 2；
Step 3 carries out coil pipe processing by angle pipe equipment, and close-packed arrays form the bend pipe (14) of cirque structure；
Step 4, then the outlet end of bend pipe (14) is connected to output supervisor (16) welding, complete coil pipe (1) is made；
Coil pipe (1) is put into the cavity that cover board (2), stack shell (3) and flange (4) welding are formed, and passes through lid by step 5
Fluting (8) on plate (2) is fixed, finally successively installs gasket and bottom plate (5), and passes through screw bolt and nut for flange (4) and bottom
Plate (5) is connected and fixed.
Working principle are as follows: heat transferring medium (such as water) is entered in the cavity of heat exchanger by shell side import, required purification
Substance (such as NH3) enter to input by tube side import and be responsible for, then flow into bend pipe；Pass through the high temperature or low temperature of heat transferring medium
Purifying substances are gasified or liquefied, repeatedly circulation achievees the purpose that purification.
Compared with prior art, the utility model have it is following the utility model has the advantages that
(1) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, coil pipe are that inner wall is handled by EP
Stainless steel EP pipe, can more be suitable for high-purity gas environment required for semicon industry, refining effect is more preferable；
(2) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, heat exchange manifold is using at coil pipe
Reason mode close-packed arrays, heat exchange area is big, high-efficient, compared with the heat exchanger of same heat exchange efficiency, takes up an area small volume；
(3) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, structure is simple, it is ingenious in design,
Significant effect；
(4) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, installation and replacement are simple and convenient, practical
Property is strong, is easy to engineer application；
(5) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, can according to actual needs will be several
The pipe that different length is made in the welding of stainless steel EP pipe carries out coil pipe processing again, flexible and changeable, has a wide range of application；
(6) heat exchanger involved in the utility model suitable for the purification of high prefect dielectric, at low cost, cost performance is high, is suitble to
It is a wide range of to promote.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model
Sign, objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of the heat exchanger purified suitable for high prefect dielectric；
Fig. 2 is the top view of the coil pipe suitable for the heat exchanger that high prefect dielectric purifies；
Fig. 3 is the side view of the coil pipe suitable for the heat exchanger that high prefect dielectric purifies；
Fig. 4 is the structural schematic diagram of the heat exchanger cover plate purified suitable for high prefect dielectric；
Fig. 5 is the structural schematic diagram of the heat exchanger insole board purified suitable for high prefect dielectric；
In Fig. 1,2,3,4 and 5: 1 being coil pipe, 2 be cover board, 3 be stack shell, 4 be flange, 5 be bottom plate, 6 be exhaust outlet, 7 be
Discharging hole, 8 be fluting, 9 be shell side import, 10 be shell-side outlet, 11 be tube side import, 12 be tube side outlet, 13 be discharge outlet,
14 it is bend pipe, 15 be input supervisor, 16 be output supervisor, 17 be nameplate, 18 be lifting lug, 19 is mounting plate.
Specific embodiment
The utility model is described in detail combined with specific embodiments below.Following embodiment will be helpful to this field
Technical staff further understands the utility model, but does not limit the utility model in any form.It should be pointed out that ability
For the those of ordinary skill in domain, without departing from the concept of the premise utility, various modifications and improvements can be made.
These are all within the protection scope of the present invention.
Embodiment
The present embodiment provides a kind of heat exchanger suitable for the purification of high prefect dielectric, structure is detailed in 1,2,3,4 and 5 institute of attached drawing
Show: including shell and being arranged in the intracorporal coil pipe 1 of shell；The shell is from top to down successively by cover board 2, stack shell 3, flange 4 and bottom
Plate 5 is constituted, and the cover board 2, stack shell 3 and flange 4 form the cavity for accommodating coil pipe 1, the flange 4 and bottom plate by being welded to connect
The gasket of sealing is equipped between 5, the flange 4 is connected and fixed with bottom plate 5 by screw bolt and nut；The cover board 2 is equipped with 2
A opening, the respectively exhaust outlet 6 when heat exchanger cavity internal temperature is increased for exhaust, and be used in detergent line
The discharging hole 7 of the foul and cleansing medium in pipeline is exhausted, the inside of the cover board 2 is equipped with 2 for fixing the fluting of coil pipe 1
8；The inside of the bottom plate 5 is equipped with 4 openings, respectively the shell side import 9 of heat transferring medium disengaging and shell-side outlet 10, Yi Jiti
The tube side import 11 of pure substance disengaging and tube side export 12, are additionally provided on the bottom plate 5 for discharging object in heat exchanger cavity
The discharge outlet 13 of matter；
The coil pipe 1 includes bend pipe 14, input supervisor 15 and output supervisor 16, and the bend pipe 14 is in cirque structure, by
Several inner walls close-packed arrays after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled are made；The input end of the bend pipe 14 with
15 connection of input supervisor, outlet end are connect with output supervisor 16, and the bend pipe 14 and input supervisor 15 and output supervisor 16
Not in the same plane.Because the tube length of standard is 6 meter Yi Gen, and every root canal in heat exchanger as bend pipe is more than 6
Meter Shi needs first to weld the standard pipes of 6 meter Yi Gen, then carries out coil pipe work again.
Further, the bend pipe 14 is vertically arranged with input supervisor 15 and output supervisor 16.
Further, the diameter of the bend pipe 14 is smaller than the diameter of input supervisor 15 and output supervisor 16.
Further, the one side wall of the stack shell 3 is equipped with fixed plate, pacifies in the fixed plate by the way that riveting method is fixed
Equipped with nameplate 17.
Further, the top of the cover board 2 is connected with the lifting lug 18 of whole heat exchanger of lifting.
Further, the cover board 2, stack shell 3, flange 4, bottom plate 5 and gasket are circular configuration.
Further, the wall of the bottom plate 5 is equipped with installation along mounting plate 19, the mounting plate 19 is above symmetrically arranged with
Hole.
Further, the input supervisor 15 and output supervisor 16 connect with tube side import 11 and tube side outlet 12 respectively.
Second aspect, the present embodiment additionally provide a kind of preparation method of heat exchanger suitable for the purification of high prefect dielectric, packet
Include following steps:
Several standard stainless steel EP pipe head and the tail are welded to connect the sample cell at setting length by step 1；
The input end of the sample cell is successively connected to 15 welding of input supervisor by step 2；
Step 3 carries out coil pipe processing by angle pipe equipment, and close-packed arrays form the bend pipe 14 of cirque structure；
Step 4, then the outlet end of bend pipe 14 is connected to 16 welding of output supervisor, complete coil pipe 1 is made；
Coil pipe 1 is put into the cavity that cover board 2, stack shell 3 and the welding of flange 4 are formed by step 5, and by cover board 2
Fluting 8 is fixed, finally successively installs gasket and bottom plate 5, and be connected and fixed flange 4 and bottom plate 5 by screw bolt and nut.
Working principle are as follows: heat transferring medium (such as water) is entered in the cavity of heat exchanger by shell side import, required purification
Substance (such as NH3) enter to input by tube side import and be responsible for, then flow into bend pipe；Pass through the high temperature or low temperature of heat transferring medium
Purifying substances are gasified or liquefied, repeatedly circulation achievees the purpose that purification.
Specific embodiment of the utility model is described above.It is to be appreciated that the utility model not office
It is limited to above-mentioned particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims,
This has no effect on the substantive content of the utility model.
Claims (8)
1. a kind of heat exchanger suitable for the purification of high prefect dielectric, which is characterized in that including shell and be arranged in the intracorporal coil pipe of shell
(1)；The shell is successively made of cover board (2), stack shell (3), flange (4) and bottom plate (5) from top to down, the cover board (2), cylinder
Body (3) and flange (4) form the cavity of receiving coil pipe (1) by being welded to connect, and are equipped between the flange (4) and bottom plate (5)
The gasket of sealing, the flange (4) are connected and fixed with bottom plate (5) by screw bolt and nut；The cover board (2) is equipped with 2
Opening, the respectively exhaust outlet (6) when heat exchanger cavity internal temperature is increased for exhaust, and be used in detergent line
The discharging hole (7) of the foul and cleansing medium in pipeline is exhausted, the inside of the cover board (2) is equipped with 2 for fixing coil pipe (1)
Fluting (8)；The inside of the bottom plate (5) is equipped with 4 openings, respectively the shell side import (9) of heat transferring medium disengaging and shell side
It exports (10), and the tube side import (11) and tube side outlet (12) of the substance disengaging purified, is additionally provided with use on the bottom plate (5)
In the discharge outlet (13) of substance in discharge heat exchanger cavity；
The coil pipe (1) includes bend pipe (14), input supervisor (15) and output supervisor (16), and the bend pipe (14) is in circular ring shape knot
Structure, by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；The bend pipe (14)
Input end is connect with input supervisor (15), and outlet end is connect with output supervisor (16), and the bend pipe (14) and input are responsible for
(15) and output is responsible for (16) not in the same plane.
2. it is according to claim 1 suitable for high prefect dielectric purification heat exchanger, which is characterized in that the bend pipe (14) with
Input supervisor (15) and output supervisor (16) are vertically arranged.
3. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the bend pipe (14)
Diameter is smaller than the diameter of input supervisor (15) and output supervisor (16).
4. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the stack shell (3)
One side wall is equipped with fixed plate, is fixedly installed with nameplate (17) by riveting method in the fixed plate.
5. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the cover board (2)
Top is connected with the lifting lug (18) of whole heat exchanger of lifting.
6. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the cover board (2), cylinder
Body (3), flange (4), bottom plate (5) and gasket are circular configuration.
7. the heat exchanger according to claim 6 suitable for the purification of high prefect dielectric, which is characterized in that the bottom plate (5)
For wall along being above symmetrically arranged with mounting plate (19), the mounting plate (19) is equipped with mounting hole.
8. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the input supervisor
(15) it is connected and fixed respectively with tube side import (11) and tube side outlet (12) with output supervisor (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038481.3U CN209689435U (en) | 2019-01-10 | 2019-01-10 | A kind of heat exchanger suitable for the purification of high prefect dielectric |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038481.3U CN209689435U (en) | 2019-01-10 | 2019-01-10 | A kind of heat exchanger suitable for the purification of high prefect dielectric |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209689435U true CN209689435U (en) | 2019-11-26 |
Family
ID=68598454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920038481.3U Withdrawn - After Issue CN209689435U (en) | 2019-01-10 | 2019-01-10 | A kind of heat exchanger suitable for the purification of high prefect dielectric |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209689435U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109631621A (en) * | 2019-01-10 | 2019-04-16 | 上海盛韬半导体科技有限公司 | A kind of heat exchanger and preparation method thereof suitable for the purification of high prefect dielectric |
-
2019
- 2019-01-10 CN CN201920038481.3U patent/CN209689435U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109631621A (en) * | 2019-01-10 | 2019-04-16 | 上海盛韬半导体科技有限公司 | A kind of heat exchanger and preparation method thereof suitable for the purification of high prefect dielectric |
| CN109631621B (en) * | 2019-01-10 | 2023-11-10 | 上海盛韬半导体科技有限公司 | Heat exchanger suitable for purifying high-purity medium and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209689435U (en) | A kind of heat exchanger suitable for the purification of high prefect dielectric | |
| CN111076593A (en) | Annular fin type efficient heat storage reactor based on metal hydride | |
| CN208066152U (en) | A kind of U-shaped unit block of tubular filter film | |
| CN212512613U (en) | Continuous spiral baffle type heat exchanger | |
| CN109631621A (en) | A kind of heat exchanger and preparation method thereof suitable for the purification of high prefect dielectric | |
| CN110108138A (en) | A kind of heat exchanger apparatus | |
| CN201780037U (en) | Sealing device for graphite heat exchange tube in graphite heat exchanger | |
| CN215063887U (en) | Efficient heat exchange type reactor | |
| CN216457970U (en) | Wall-mounted liquid ammonia heat exchanger | |
| CN208171065U (en) | A kind of novel graphite heat exchanger | |
| CN2632613Y (en) | Enamel glass sleeve heat exchanger | |
| CN219347449U (en) | Pull-rod-free tube-in-tube heat exchanger | |
| CN215639013U (en) | Sealing structure of three-phase heat exchanger | |
| CN211290641U (en) | Novel condenser device | |
| CN213543286U (en) | Sealing device for inlet liquid of shell-and-tube heat exchanger | |
| CN215003069U (en) | Shell and tube heat exchanger convenient to it is clean | |
| CN215085034U (en) | A solvent recovery unit for ultraviolet absorbent production | |
| CN218511519U (en) | Waste heat recycling device | |
| CN217127406U (en) | Novel positive and negative pressure protector | |
| CN217979933U (en) | Efficient energy-saving shell-and-tube heat exchanger | |
| CN213067210U (en) | Detachable gas cooler | |
| CN216244215U (en) | Stainless steel steam generator | |
| CN212932535U (en) | PH meter detection device | |
| CN217155132U (en) | Vertical heat exchanger exhaust structure | |
| CN219693976U (en) | Connecting device for shell-and-tube heat exchanger |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20191126 Effective date of abandoning: 20231110 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20191126 Effective date of abandoning: 20231110 |