CN109631621A - A kind of heat exchanger and preparation method thereof suitable for the purification of high prefect dielectric - Google Patents
A kind of heat exchanger and preparation method thereof suitable for the purification of high prefect dielectric Download PDFInfo
- Publication number
- CN109631621A CN109631621A CN201910022318.2A CN201910022318A CN109631621A CN 109631621 A CN109631621 A CN 109631621A CN 201910022318 A CN201910022318 A CN 201910022318A CN 109631621 A CN109631621 A CN 109631621A
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- Prior art keywords
- heat exchanger
- supervisor
- purification
- coil pipe
- pipe
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- 238000000746 purification Methods 0.000 title claims abstract description 33
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 15
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 13
- 239000010935 stainless steel Substances 0.000 claims abstract description 13
- 238000003491 array Methods 0.000 claims abstract description 10
- 230000008676 import Effects 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 6
- 239000003599 detergent Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 238000007670 refining Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 210000004262 dental pulp cavity Anatomy 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/04—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being spirally coiled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D53/00—Making other particular articles
- B21D53/02—Making other particular articles heat exchangers or parts thereof, e.g. radiators, condensers fins, headers
- B21D53/06—Making other particular articles heat exchangers or parts thereof, e.g. radiators, condensers fins, headers of metal tubes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
- F28F21/081—Heat exchange elements made from metals or metal alloys
- F28F21/082—Heat exchange elements made from metals or metal alloys from steel or ferrous alloys
- F28F21/083—Heat exchange elements made from metals or metal alloys from steel or ferrous alloys from stainless steel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The present invention provides a kind of heat exchanger suitable for the purification of high prefect dielectric, including shell and setting in the intracorporal coil pipe of shell；The shell is successively made of cover board, stack shell, flange and bottom plate from top to down, the coil pipe includes bend pipe, input supervisor and output supervisor, the bend pipe is in cirque structure, and by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；Connection is responsible in the input end of the bend pipe and input, and outlet end and output supervisor connect, and the bend pipe and input supervisor and output are responsible for not in the same plane.The present invention also provides a kind of preparation methods of heat exchanger suitable for the purification of high prefect dielectric.Coil pipe of the invention is stainless steel EP pipe of the inner wall by EP processing, it more can be suitably used for high-purity gas environment required for semicon industry, refining effect is more preferable, and heat exchange manifold uses coil pipe processing mode close-packed arrays, heat exchange area is big, it is high-efficient, compared with the heat exchanger of same heat exchange efficiency, take up an area small volume.
Description
Technical field
The present invention relates to field of heat exchangers, and in particular, to a kind of heat exchanger and its system suitable for the purification of high prefect dielectric
Preparation Method.
Background technique
Since the booming and Chinese government of global electronic, photovoltaic industry advocates rejuvenate China by applying scientific and technological advances energetically, the country is partly led
Body, photovoltaic development of manufacturing are swift and violent.And it is needed in semiconductor, the common processing procedure of photovoltaic related industry commonly using special gas
Body, our countries, which also increasingly advocate, at present uses domestic technique and domestic gas, so the purification technique of high-purity gas is just shown
It obtains particularly critical.In the purification technique of previous ordinary heat exchanger, the pipeline that heat exchanger uses is common pipeline, and height is not achieved
Pure requirement, so the purification of high prefect dielectric is with regard to more some limitations, in addition the heat exchanger of equal efficiency in the market, does not accomplish close
Collect the effect of coil pipe, land occupation volume is larger.
EP, that is, electrobrightening (Electro Polishing), also referred to as electropolishing are produced in electrolytic cell using anode
Electrochemical dissolution phenomenon, make low-light convex portion on anode that method of the selective dissolution to form smooth surface occur.It is
One complicated anode oxidation process along with the dissolution and oxidation of workpiece surface, but is different from anodic oxidation.To stainless steel
Pipe carries out EP processing, manufactured stainless steel EP pipe be widely used in now semicon industry, liquid crystal industry, solar energy industry,
Medicine trade, instrument system, compressed air, ultra-pure gases, chemical systems, WFI system and other have it is high-purity and ultra-pure
It is required that gas pipeline system or dust free room or equipment aspect.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of heat exchangers suitable for the purification of high prefect dielectric
And preparation method thereof, coil pipe of the invention is stainless steel EP pipe of the inner wall by EP processing, can more be suitable for semicon industry
Required high-purity gas environment, refining effect is more preferable, and heat exchange manifold uses coil pipe processing mode close-packed arrays, heat-transfer surface
Product is big, high-efficient, compared with the heat exchanger of same heat exchange efficiency, takes up an area small volume.
According to an aspect of the present invention, a kind of heat exchanger suitable for the purification of high prefect dielectric is provided, including shell and is set
It sets in the intracorporal coil pipe of shell (1)；The shell is from top to down successively by cover board (2), stack shell (3), flange (4) and bottom plate (5) structure
At the cover board (2), stack shell (3) and flange (4) form the cavity for accommodating coil pipe (1), the flange (4) by being welded to connect
The gasket of sealing is equipped between bottom plate (5), the flange (4) is connected and fixed with bottom plate (5) by screw bolt and nut；It is described
Cover board (2) is equipped with 2 openings, the respectively exhaust outlet (6) when heat exchanger cavity internal temperature is increased for exhaust, and
In detergent line for exhausting the discharging hole (7) of foul and cleansing medium in pipeline, the inside of the cover board (2) is equipped with 2
A fluting (8) for being used to fix coil pipe (1)；The inside of the bottom plate (5) is equipped with 4 openings, and respectively heat transferring medium passes in and out
Shell side import (9) and shell-side outlet (10), and purification substance disengaging tube side import (11) and tube side export (12), it is described
The discharge outlet (13) for discharging substance in heat exchanger cavity is additionally provided on bottom plate (5)；
The coil pipe (1) includes bend pipe (14), input supervisor (15) and output supervisor (16), and the bend pipe (14) is in annulus
Shape structure, by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；The bend pipe
(14) input end with input supervisor (15) connect, outlet end with export be responsible for (16) connect, and the bend pipe (14) with it is defeated
Enter supervisor (15) and output is responsible for (16) not in the same plane.Because the tube length of standard is 6 meter Yi Gen, and in heat exchanger
When every root canal as bend pipe is more than 6 meters, needs first to weld the standard pipes of 6 meter Yi Gen, then carry out coil pipe work again
Make.
Preferably, the bend pipe (14) is vertically arranged with input supervisor (15) and output supervisor (16).
Preferably, the diameter of the bend pipe (14) is smaller than the diameter of input supervisor (15) and output supervisor (16).
Preferably, the one side wall of the stack shell (3) is equipped with fixed plate, pacifies in the fixed plate by the way that riveting method is fixed
Equipped with nameplate (17).
Preferably, the top of the cover board (2) is connected with the lifting lug (18) of whole heat exchanger of lifting.
Preferably, the cover board (2), stack shell (3), flange (4), bottom plate (5) and gasket are circular configuration.
Preferably, for the wall of the bottom plate (5) along being above symmetrically arranged with mounting plate (19), the mounting plate (19) is equipped with peace
Fill hole.
Preferably, the input supervisor (15) and output supervisor (16) export (12) with tube side import (11) and tube side respectively
Connection.
Second aspect, the present invention also provides a kind of preparation methods of heat exchanger suitable for the purification of high prefect dielectric, including
Following steps:
Several standard stainless steel EP pipe head and the tail are welded to connect the sample cell at setting length by step 1；
The input end of the sample cell is successively connected to input supervisor (15) welding by step 2；
Step 3 carries out coil pipe processing by angle pipe equipment, and close-packed arrays form the bend pipe (14) of cirque structure；
Step 4, then the outlet end of bend pipe (14) is connected to output supervisor (16) welding, complete coil pipe (1) is made；
Coil pipe (1) is put into the cavity that cover board (2), stack shell (3) and flange (4) welding are formed, and passes through lid by step 5
Fluting (8) on plate (2) is fixed, finally successively installs gasket and bottom plate (5), and passes through screw bolt and nut for flange (4) and bottom
Plate (5) is connected and fixed.
Working principle are as follows: heat transferring medium (such as water) is entered in the cavity of heat exchanger by shell side import, required purification
Substance (such as NH3) enter to input by tube side import and be responsible for, then flow into bend pipe；Pass through the high temperature or low temperature of heat transferring medium
Purifying substances are gasified or liquefied, repeatedly circulation achievees the purpose that purification.
Compared with prior art, the present invention have it is following the utility model has the advantages that
(1) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, coil pipe are inner wall
The stainless steel EP pipe handled by EP, can more be suitable for high-purity gas environment required for semicon industry, refining effect is more
It is good；
(2) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, heat exchange manifold is adopted
With coil pipe processing mode close-packed arrays, heat exchange area is big, high-efficient, compared with the heat exchanger of same heat exchange efficiency, takes up an area volume
It is smaller；
(3) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, structure is simple, sets
Count ingenious, significant effect；
(4) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, installation and replacement are simple
It is convenient, it is practical, it is easy to engineer application；
(5) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, can be according to practical need
The pipe that different length is made in the welding of several stainless steel EP pipes is subjected to coil pipe processing again, it is flexible and changeable, have a wide range of application；
(6) heat exchanger and preparation method thereof according to the present invention suitable for the purification of high prefect dielectric, the preparation work of coil pipe
Skill is simple, at low cost, and cost performance is high, suitable for large-scale promotion.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of the heat exchanger purified suitable for high prefect dielectric；
Fig. 2 is the top view of the coil pipe suitable for the heat exchanger that high prefect dielectric purifies；
Fig. 3 is the side view of the coil pipe suitable for the heat exchanger that high prefect dielectric purifies；
Fig. 4 is the structural schematic diagram of the heat exchanger cover plate purified suitable for high prefect dielectric；
Fig. 5 is the structural schematic diagram of the heat exchanger insole board purified suitable for high prefect dielectric；
In Fig. 1,2,3,4 and 5: 1 being coil pipe, 2 be cover board, 3 be stack shell, 4 be flange, 5 be bottom plate, 6 be exhaust outlet, 7 be
Discharging hole, 8 be fluting, 9 be shell side import, 10 be shell-side outlet, 11 be tube side import, 12 be tube side outlet, 13 be discharge outlet,
14 it is bend pipe, 15 be input supervisor, 16 be output supervisor, 17 be nameplate, 18 be lifting lug, 19 is mounting plate.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection scope.
Embodiment
The present embodiment provides a kind of heat exchanger suitable for the purification of high prefect dielectric, structure is detailed in 1,2,3,4 and 5 institute of attached drawing
Show: including shell and being arranged in the intracorporal coil pipe 1 of shell；The shell is from top to down successively by cover board 2, stack shell 3, flange 4 and bottom
Plate 5 is constituted, and the cover board 2, stack shell 3 and flange 4 form the cavity for accommodating coil pipe 1, the flange 4 and bottom plate by being welded to connect
The gasket of sealing is equipped between 5, the flange 4 is connected and fixed with bottom plate 5 by screw bolt and nut；The cover board 2 is equipped with 2
A opening, the respectively exhaust outlet 6 when heat exchanger cavity internal temperature is increased for exhaust, and be used in detergent line
The discharging hole 7 of the foul and cleansing medium in pipeline is exhausted, the inside of the cover board 2 is equipped with 2 for fixing the fluting of coil pipe 1
8；The inside of the bottom plate 5 is equipped with 4 openings, respectively the shell side import 9 of heat transferring medium disengaging and shell-side outlet 10, Yi Jiti
The tube side import 11 of pure substance disengaging and tube side export 12, are additionally provided on the bottom plate 5 for discharging object in heat exchanger cavity
The discharge outlet 13 of matter；
The coil pipe 1 includes bend pipe 14, input supervisor 15 and output supervisor 16, and the bend pipe 14 is in cirque structure, by
Several inner walls close-packed arrays after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled are made；The input end of the bend pipe 14 with
15 connection of input supervisor, outlet end are connect with output supervisor 16, and the bend pipe 14 and input supervisor 15 and output supervisor 16
Not in the same plane.Because the tube length of standard is 6 meter Yi Gen, and every root canal in heat exchanger as bend pipe is more than 6
Meter Shi needs first to weld the standard pipes of 6 meter Yi Gen, then carries out coil pipe work again.
Further, the bend pipe 14 is vertically arranged with input supervisor 15 and output supervisor 16.
Further, the diameter of the bend pipe 14 is smaller than the diameter of input supervisor 15 and output supervisor 16.
Further, the one side wall of the stack shell 3 is equipped with fixed plate, pacifies in the fixed plate by the way that riveting method is fixed
Equipped with nameplate 17.
Further, the top of the cover board 2 is connected with the lifting lug 18 of whole heat exchanger of lifting.
Further, the cover board 2, stack shell 3, flange 4, bottom plate 5 and gasket are circular configuration.
Further, the wall of the bottom plate 5 is equipped with installation along mounting plate 19, the mounting plate 19 is above symmetrically arranged with
Hole.
Further, the input supervisor 15 and output supervisor 16 connect with tube side import 11 and tube side outlet 12 respectively.
Second aspect, the present embodiment additionally provide a kind of preparation method of heat exchanger suitable for the purification of high prefect dielectric, packet
Include following steps:
Several standard stainless steel EP pipe head and the tail are welded to connect the sample cell at setting length by step 1；
The input end of the sample cell is successively connected to 15 welding of input supervisor by step 2；
Step 3 carries out coil pipe processing by angle pipe equipment, and close-packed arrays form the bend pipe 14 of cirque structure；
Step 4, then the outlet end of bend pipe 14 is connected to 16 welding of output supervisor, complete coil pipe 1 is made；
Coil pipe 1 is put into the cavity that cover board 2, stack shell 3 and the welding of flange 4 are formed by step 5, and by cover board 2
Fluting 8 is fixed, finally successively installs gasket and bottom plate 5, and be connected and fixed flange 4 and bottom plate 5 by screw bolt and nut.
Working principle are as follows: heat transferring medium (such as water) is entered in the cavity of heat exchanger by shell side import, required purification
Substance (such as NH3) enter to input by tube side import and be responsible for, then flow into bend pipe；Pass through the high temperature or low temperature of heat transferring medium
Purifying substances are gasified or liquefied, repeatedly circulation achievees the purpose that purification.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (9)
1. a kind of heat exchanger suitable for the purification of high prefect dielectric, which is characterized in that including shell and be arranged in the intracorporal coil pipe of shell
(1)；The shell is successively made of cover board (2), stack shell (3), flange (4) and bottom plate (5) from top to down, the cover board (2), cylinder
Body (3) and flange (4) form the cavity of receiving coil pipe (1) by being welded to connect, and are equipped between the flange (4) and bottom plate (5)
The gasket of sealing, the flange (4) are connected and fixed with bottom plate (5) by screw bolt and nut；The cover board (2) is equipped with 2
Opening, the respectively exhaust outlet (6) when heat exchanger cavity internal temperature is increased for exhaust, and be used in detergent line
The discharging hole (7) of the foul and cleansing medium in pipeline is exhausted, the inside of the cover board (2) is equipped with 2 for fixing coil pipe (1)
Fluting (8)；The inside of the bottom plate (5) is equipped with 4 openings, respectively the shell side import (9) of heat transferring medium disengaging and shell side
It exports (10), and the tube side import (11) and tube side outlet (12) of the substance disengaging purified, is additionally provided with use on the bottom plate (5)
In the discharge outlet (13) of substance in discharge heat exchanger cavity；
The coil pipe (1) includes bend pipe (14), input supervisor (15) and output supervisor (16), and the bend pipe (14) is in circular ring shape knot
Structure, by several inner walls, close-packed arrays are made after the stainless steel EP Guan Zaijing coil pipe processing that EP is handled；The bend pipe (14)
Input end is connect with input supervisor (15), and outlet end is connect with output supervisor (16), and the bend pipe (14) and input are responsible for
(15) and output is responsible for (16) not in the same plane.
2. it is according to claim 1 suitable for high prefect dielectric purification heat exchanger, which is characterized in that the bend pipe (14) with
Input supervisor (15) and output supervisor (16) are vertically arranged.
3. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the bend pipe (14)
Diameter is smaller than the diameter of input supervisor (15) and output supervisor (16).
4. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the stack shell (3)
One side wall is equipped with fixed plate, is fixedly installed with nameplate (17) by riveting method in the fixed plate.
5. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the cover board (2)
Top is connected with the lifting lug (18) of whole heat exchanger of lifting.
6. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the cover board (2), cylinder
Body (3), flange (4), bottom plate (5) and gasket are circular configuration.
7. the heat exchanger according to claim 6 suitable for the purification of high prefect dielectric, which is characterized in that the bottom plate (5)
For wall along being above symmetrically arranged with mounting plate (19), the mounting plate (19) is equipped with mounting hole.
8. the heat exchanger according to claim 1 suitable for the purification of high prefect dielectric, which is characterized in that the input supervisor
(15) it is connected and fixed respectively with tube side import (11) and tube side outlet (12) with output supervisor (16).
9. a kind of preparation method of the heat exchanger suitable for the purification of high prefect dielectric, which comprises the following steps:
Several standard stainless steel EP pipe head and the tail are welded to connect the sample cell at setting length by step 1；
The input end of the sample cell is successively connected to input supervisor (15) welding by step 2；
Step 3 carries out coil pipe processing by angle pipe equipment, and close-packed arrays form the bend pipe (14) of cirque structure；
Step 4, then the outlet end of bend pipe (14) is connected to output supervisor (16) welding, complete coil pipe (1) is made；
Coil pipe (1) is put into the cavity that cover board (2), stack shell (3) and flange (4) welding are formed, and passes through cover board by step 5
(2) fluting (8) on is fixed, finally successively installs gasket and bottom plate (5), and passes through screw bolt and nut for flange (4) and bottom plate
(5) it is connected and fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910022318.2A CN109631621B (en) | 2019-01-10 | 2019-01-10 | Heat exchanger suitable for purifying high-purity medium and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910022318.2A CN109631621B (en) | 2019-01-10 | 2019-01-10 | Heat exchanger suitable for purifying high-purity medium and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109631621A true CN109631621A (en) | 2019-04-16 |
| CN109631621B CN109631621B (en) | 2023-11-10 |
Family
ID=66061700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910022318.2A Active CN109631621B (en) | 2019-01-10 | 2019-01-10 | Heat exchanger suitable for purifying high-purity medium and preparation method thereof |
Country Status (1)
| Country | Link |
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| CN (1) | CN109631621B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4191246A (en) * | 1979-03-05 | 1980-03-04 | Combustion Engineering, Inc. | Device to reduce local heat flux through a heat exchanger tube |
| RU2119134C1 (en) * | 1995-08-09 | 1998-09-20 | Акционерное общество открытого типа "Самарский научно-технический комплекс "Двигатели НК" | Gas liquefaction plant |
| CN103968686A (en) * | 2014-04-15 | 2014-08-06 | 张家港市科华化工装备制造有限公司 | Efficient anti-plugging heat exchanger |
| CN104677142A (en) * | 2013-12-03 | 2015-06-03 | 开封东京空分集团换热设备有限公司 | Novel heat exchanger for carbon dioxide purifier |
| CN204752210U (en) * | 2015-07-13 | 2015-11-11 | 攀枝花市圆富化工有限责任公司 | Industrial sulphuric acid purification device |
| CN209689435U (en) * | 2019-01-10 | 2019-11-26 | 上海盛韬半导体科技有限公司 | A kind of heat exchanger suitable for the purification of high prefect dielectric |
-
2019
- 2019-01-10 CN CN201910022318.2A patent/CN109631621B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4191246A (en) * | 1979-03-05 | 1980-03-04 | Combustion Engineering, Inc. | Device to reduce local heat flux through a heat exchanger tube |
| RU2119134C1 (en) * | 1995-08-09 | 1998-09-20 | Акционерное общество открытого типа "Самарский научно-технический комплекс "Двигатели НК" | Gas liquefaction plant |
| CN104677142A (en) * | 2013-12-03 | 2015-06-03 | 开封东京空分集团换热设备有限公司 | Novel heat exchanger for carbon dioxide purifier |
| CN103968686A (en) * | 2014-04-15 | 2014-08-06 | 张家港市科华化工装备制造有限公司 | Efficient anti-plugging heat exchanger |
| CN204752210U (en) * | 2015-07-13 | 2015-11-11 | 攀枝花市圆富化工有限责任公司 | Industrial sulphuric acid purification device |
| CN209689435U (en) * | 2019-01-10 | 2019-11-26 | 上海盛韬半导体科技有限公司 | A kind of heat exchanger suitable for the purification of high prefect dielectric |
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| Publication number | Publication date |
|---|---|
| CN109631621B (en) | 2023-11-10 |
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