CN209685951U - A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods - Google Patents

A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods Download PDF

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Publication number
CN209685951U
CN209685951U CN201920205474.8U CN201920205474U CN209685951U CN 209685951 U CN209685951 U CN 209685951U CN 201920205474 U CN201920205474 U CN 201920205474U CN 209685951 U CN209685951 U CN 209685951U
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China
Prior art keywords
locating piece
bottom plate
inches
arrangement locating
photoetching
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CN201920205474.8U
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Chinese (zh)
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叶嘉豪
陆旺
李辉
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Chengdu Tai Meike Crystal Tech Inc
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Chengdu Tai Meike Crystal Tech Inc
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Abstract

The utility model discloses a kind of drying glue jigs for 3 inches of large stretch of photoetching czochralski methods, including rectangular bottom plate, four stabilizer blades being respectively arranged in below the bottom plate quadrangle, multiple length directions along the bottom plate are arranged at intervals at the first V-arrangement locating piece of the bottom plate both sides of the edge and the second V-arrangement locating piece and a length direction along the bottom plate are fixedly installed in the right angle backup plate of top in the middle part of the bottom plate, wherein, the first V-arrangement locating piece, second V-arrangement locating piece and right angle backup plate are fixed with 3 inches of sheets, and the first V-arrangement locating piece, isosceles triangle is formed between second V-arrangement locating piece and 3 inches of sheets and the contact point of the right angle backup plate.The utility model can effectively prevent viscose glue phenomenon and reduce fragment rate.

Description

A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods
Technical field
The utility model belongs to drying glue jig technical field, more particularly, to one kind for 3 inches of large stretch of photoetching czochralski methods Drying glue jig.
Background technique
Czochralski method is also known as Czoncharlski method, is pulling growth high quality list in the slave melt of Czochralski utility model Brilliant method.With the development of science and technology to be further development of a kind of more advanced amorphous growing method-molten for czochralski method Body EFG technique, it is the czochralski method for controlling crystal shape, i.e., directly draws out from melt with various cross sectional shape crystal Growing technology, this is not only eliminated to machining heavy brought by artificial crystal in industrial production, also effective to save It raw material and reduces production cost, therefore is widely used.
It is frequently necessary to carry out drying glue processing to crystal in the use process of czochralski method, the effect of drying glue is to make raw rubber hardness Reduce, watery fusion, in order to processing of being cut and plasticated, while drying glue can also remove moisture therein etc..Wherein, drying glue Temperature is unsuitable excessively high, otherwise will affect the physical mechanical property of blob of viscose.It is uniform that drying glue must reach blob of viscose internal and external temperature, otherwise can Influence is plasticated quality and efficiency.Currently, the fixed form that drying glue jig uses sheet often makes stick to each other between sheet, And drying glue jig is not readily disengaged from, so as to cause higher fragment rate.
Utility model content
The purpose of this utility model is to provide a kind of drying glue jigs for 3 inches of large stretch of photoetching czochralski methods, it is intended to have Effect prevents viscose glue phenomenon and reduces fragment rate.
The utility model embodiment provides a kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods, including is in square The bottom plate of shape, four stabilizer blades being respectively arranged in below the bottom plate quadrangle, between multiple length directions along the bottom plate Every the first V-arrangement locating piece and the second V-arrangement locating piece that are set to the bottom plate both sides of the edge and one along the bottom plate Length direction is fixedly installed in the right angle backup plate of top in the middle part of the bottom plate, wherein the first V-arrangement locating piece, the second V-arrangement are fixed Position block and right angle backup plate are fixed with 3 inches of sheets, and the first V-arrangement locating piece, the second V-arrangement locating piece and described 3 inches big Isosceles triangle is formed between piece and the contact point of the right angle backup plate.
Further, the right angle backup plate further includes along the length direction of the right angle backup plate and close to the bottom plate one Multiple square through holes that side opens up.
Further, the right angle backup plate further includes along the length direction of the right angle backup plate and far from the bottom plate one Multiple first circular through holes that side opens up, wherein the diameter of first circular through hole is less than the length of the square through hole.
Further, the bottom plate offers multiple second circular through holes in the two sides of the right angle backup plate, the multiple Second circular through hole is arranged along the length direction interval of the bottom plate.
Further, the V-arrangement angle of the first V-arrangement locating piece and the second V-arrangement locating piece is respectively between 45-60 degree.
Further, four stabilizer blades pass through the first hexagon socket head cap screw respectively and are fixedly installed under the quadrangle of the bottom plate Side.
Further, it is solid to pass through the second hexagon socket head cap screw respectively for the multiple first V-arrangement locating piece and the second V-arrangement locating piece Dingan County is loaded on the bottom plate.
Further, the bottom plate is made of polytetrafluoroethylene (PTFE) and stainless steel material of aluminizing.
Further, 3 inches of sheets include crystal wafer, noncrystal, potsherd or sheet metal.
In conclusion the utility model is by multiple first V-arrangement locating pieces and the second V-arrangement locating piece along the length of the bottom plate Degree direction is arranged at intervals at the both sides of the edge of the bottom plate and consolidates a right angle backup plate along the length direction of the bottom plate Middle part top of the Dingan County loaded on the bottom plate.Wherein, the first V-arrangement locating piece, the second V-arrangement locating piece and right angle backup plate are fixed There are 3 inches of sheets, and the first V-arrangement locating piece, the second V-arrangement locating piece and 3 inches of sheets and the right angle backup plate Isosceles triangle is formed between contact point.Since the first V-arrangement locating piece and the second V-arrangement locating piece can reduce 3 inches of sheets With the contact area of drying glue jig, so as to effectively prevent viscose glue phenomenon and reduce fragment rate.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is a kind of knot of drying glue jig for 3 inches of large stretch of photoetching czochralski methods provided by the embodiment of the utility model Structure schematic diagram.
Fig. 2 is a kind of enlarged structure schematic diagram applied to the right angle backup plate in Fig. 1 provided by the embodiment of the utility model.
Fig. 3 is that a kind of the first V-arrangement locating piece applied in Fig. 1 and the second V-arrangement provided by the embodiment of the utility model are fixed The structural schematic diagram of position block.
Icon:
Bottom plate 100;Stabilizer blade 200;First V-arrangement locating piece 300;Second V-arrangement locating piece 400;Right angle backup plate 500;It is 3 inches big Piece 600;Square through hole 101;First circular through hole 102;Second circular through hole 103;First hexagon socket head cap screw 104;Six in second Corner bolt 105.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model Apply example, those of ordinary skill in the art's every other embodiment obtained without creative labor, all Belong to the range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.Meanwhile it is practical new at this In the description of type, term " first ", " second " etc. are only used for distinguishing description, are not understood to indicate or imply relatively important Property.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral;It can be Mechanical connection, is also possible to be electrically connected;It can be directly connected, two can also be can be indirectly connected through an intermediary The interaction relationship of connection or two elements inside element.It for the ordinary skill in the art, can basis Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
As shown in Figure 1-Figure 3, a kind of drying glue for 3 inches of large stretch of photoetching czochralski methods provided by the embodiment of the utility model Jig may include bottom plate 100, stabilizer blade 200, the first V-arrangement locating piece 300, the second V-arrangement locating piece 400 and right angle backup plate 500.Institute Stating 3 inches of sheets mainly includes crystal wafer, noncrystal, potsherd or sheet metal.
Wherein, the bottom plate 100 is rectangular.The quantity of the stabilizer blade 200 is four, and is respectively arranged in the bottom plate Below 100 quadrangle.The quantity of the first V-arrangement locating piece 300 be it is multiple, and multiple first V-arrangement locating pieces 300 along The length direction of the bottom plate 100 is arranged at intervals at the both sides of the edge of the bottom plate 100.The number of the second V-arrangement locating piece 400 Amount is multiple, and multiple second V-arrangement locating pieces 400 are arranged at intervals at the bottom along the length direction of the bottom plate 100 The both sides of the edge of plate 100.The the first V-arrangement locating piece 300 being disposed adjacent and the second V-arrangement locating piece 400, which can constitute one, to be determined Position block combination.The quantity of the right angle backup plate 500 is one, and is fixedly installed in institute along the length direction of the bottom plate 100 Above the middle part for stating bottom plate 100.
Preferably, four stabilizer blades 200 are fixedly installed in the bottom plate 100 by the first hexagon socket head cap screw 104 respectively Quadrangle below.And the multiple first V-arrangement locating piece 300 and the second V-arrangement locating piece 400 pass through hexagonal spiral shell in second respectively Bolt 105 is fixedly installed on the bottom plate 100.Therefore, the structure of the drying glue jig is simple, has quick detachable and difficult processing Spend the advantages that small.In addition, the bottom plate 100 is made of polytetrafluoroethylene (PTFE) and stainless steel material of aluminizing, to have hardness The advantages that high and high temperature resistant.
In the present embodiment, the first V-arrangement locating piece 300, the second V-arrangement locating piece 400 and right angle backup plate 500 are fixed with 3 Inch sheet 600.The first V-arrangement locating piece 300, the second V-arrangement locating piece 400 and 3 inches of sheets 600 and the right angle Isosceles triangle is formed between the contact point of backup plate 500.Due to the first V-arrangement locating piece 300 and 400 energy of the second V-arrangement locating piece The contact area of 3 inches of sheets 600 and drying glue jig is reduced, enough so as to effectively prevent viscose glue phenomenon and reduce fragmentation Rate.
In order to improve the locating effect of the first V-arrangement locating piece 300 and the second V-arrangement locating piece 400, first V-arrangement The V-arrangement angle of locating piece 300 and the second V-arrangement locating piece 400 is respectively between 45-60 degree.For example, 45 degree, 50 degree, 55 degree and 60 Degree etc..
Further, the right angle backup plate 500 further includes along the length direction of the right angle backup plate 500 and close to described Multiple square through holes 101 that 100 side of bottom plate opens up, the square through hole 101 are preferably 3.The multiple square through hole 101 For guaranteeing the uniform heat distribution on the right angle backup plate 500 and reducing by 3 inches of sheets 600 and the right angle backup plate 500 a possibility that coming into contact in a large area.
In addition, the right angle backup plate 500 further includes along the length direction of the right angle backup plate 500 and far from the bottom plate Multiple first circular through holes 102 that 100 sides open up.Wherein, the diameter of first circular through hole 102 is less than described rectangular logical The length in hole 101.First circular through hole 102 is preferably two.The setting of first circular through hole 102 is convenient for using special Fixed dedicated hook picks and places described drying glue jig etc..
In the present embodiment, the bottom plate 100 offers multiple second circular through holes in the two sides of the right angle backup plate 500 103, the multiple second circular through hole 103 is arranged along the length direction interval of the bottom plate 100.
When implementation, 3 inches of sheets 600 are subjected to spin coating processing on sol evenning machine first;Then by 3 English of spin coating Very little large stretch of 600 are placed on the drying glue jig, and by the first V-arrangement locating piece 300, the second V-arrangement locating piece 400 and straight The positioning of angle backup plate 500 is fixed;Then placed 3 inches of sheets 600 and drying glue jig are put into togerther high temperature oven Carry out drying glue processing;It is taken out after to drying glue from baking oven, finally completes entire coating technique.
In conclusion the utility model is by multiple first V-arrangement locating pieces 300 and the second V-arrangement locating piece 400 along the bottom The length direction of plate 100 is arranged at intervals at the both sides of the edge of the bottom plate 100 and by a right angle backup plate 500 along the bottom The length direction of plate 100 is fixedly installed in above the middle part of the bottom plate 100.Wherein, the first V-arrangement locating piece 300, second V-arrangement locating piece 400 and right angle backup plate 500 are fixed with 3 inches of sheets 600, and the first V-arrangement locating piece 300, the second V-arrangement are fixed Isosceles triangle is formed between position block 400 and 3 inches of sheets 600 and the contact point of the right angle backup plate 500.Due to the first V Shape locating piece 300 and the second V-arrangement locating piece 400 can reduce the contact area of 3 inches of sheets 600 and drying glue jig, from And viscose glue phenomenon can be effectively prevent and reduce fragment rate.
Above description is merely a prefered embodiment of the utility model, is not intended to limit the utility model, for For those skilled in the art, various modifications and changes may be made to the present invention.All spirit and original in the utility model Within then, any modification, equivalent replacement, improvement and so on be should be included within the scope of protection of this utility model.

Claims (9)

1. a kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that including rectangular bottom plate, divide Four stabilizer blades not being installed below the bottom plate quadrangle, multiple length directions along the bottom plate are arranged at intervals at the bottom The the first V-arrangement locating piece and the second V-arrangement locating piece of plate both sides of the edge and the fixed peace of a length direction along the bottom plate Right angle backup plate loaded on top in the middle part of the bottom plate, wherein the first V-arrangement locating piece, the second V-arrangement locating piece and right angle backup plate 3 inches of sheets are fixed with, and the first V-arrangement locating piece, the second V-arrangement locating piece and 3 inches of sheets are leaned on the right angle Isosceles triangle is formed between the contact point of plate.
2. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that described straight Angle backup plate further includes the multiple square through holes opened up along the length direction and the close bottom plate side of the right angle backup plate.
3. the drying glue jig according to claim 2 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that described straight Angle backup plate further includes leading to along multiple first circles that the length direction and the separate bottom plate side of the right angle backup plate open up Hole, wherein the diameter of first circular through hole is less than the length of the square through hole.
4. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that the bottom Plate offers multiple second circular through holes in the two sides of the right angle backup plate, and the multiple second circular through hole is along the bottom plate Length direction interval setting.
5. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that described the The V-arrangement angle of one V-arrangement locating piece and the second V-arrangement locating piece is respectively between 45-60 degree.
6. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that described four A stabilizer blade passes through the first hexagon socket head cap screw respectively and is fixedly installed in below the quadrangle of the bottom plate.
7. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that described more A first V-arrangement locating piece and the second V-arrangement locating piece pass through the second hexagon socket head cap screw respectively and are fixedly installed on the bottom plate.
8. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that the bottom Plate is made of polytetrafluoroethylene (PTFE) and stainless steel material of aluminizing.
9. the drying glue jig according to claim 1 for being used for 3 inches of large stretch of photoetching czochralski methods, which is characterized in that 3 English It is very little large stretch of including crystal wafer, noncrystal, potsherd or sheet metal.
CN201920205474.8U 2019-02-18 2019-02-18 A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods Active CN209685951U (en)

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Application Number Priority Date Filing Date Title
CN201920205474.8U CN209685951U (en) 2019-02-18 2019-02-18 A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109609999A (en) * 2019-02-18 2019-04-12 成都泰美克晶体技术有限公司 A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109609999A (en) * 2019-02-18 2019-04-12 成都泰美克晶体技术有限公司 A kind of drying glue jig for 3 inches of large stretch of photoetching czochralski methods
CN109609999B (en) * 2019-02-18 2024-01-26 成都泰美克晶体技术有限公司 Glue drying jig for 3-inch large-piece photoetching pulling method

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