CN209685912U - A kind of bell-jar chemical vapor depsotition equipment - Google Patents
A kind of bell-jar chemical vapor depsotition equipment Download PDFInfo
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- CN209685912U CN209685912U CN201920048291.XU CN201920048291U CN209685912U CN 209685912 U CN209685912 U CN 209685912U CN 201920048291 U CN201920048291 U CN 201920048291U CN 209685912 U CN209685912 U CN 209685912U
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- bell jar
- bell
- jar
- cabinet
- cavity
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Abstract
The utility model proposes a kind of bell-jar chemical vapor depsotition equipments, including reacting cabinet, reaction cabinet is connect with the control cabinet, it reacts upper end in cabinet and is equipped with bell jar shell, bell jar insulating layer is equipped in bell jar shell, bell jar case is equipped in bell jar insulating layer, cavity is formed on the outside of bell jar insulating layer inner wall and bell jar case, bell jar case is equipped with venthole, reaction cabinet inner bottom is equipped with the hoistable platform connecting with hydraulic oil pump, hoistable platform upper end is equipped with sequentially connected housings close plate from bottom to up, keep the temperature closed plate, bin enclosure plate, the air inlet pipe for leading to cavity is equipped at left and right sides of bell jar shell, air inlet pipe is equipped with adapter, the escape pipe for leading to cavity is equipped at left and right sides of reaction cabinet, escape pipe upper and lower ends are equipped with ball valve, escape pipe is equipped with the water cooling tube connecting with cooling-water machine, bell jar insulating layer front and rear sides are equipped with the Si-Mo rod for leading to cavity；The utility model is suitble to larger-size product, has lifting device, and air inlet outlet is uniform.
Description
Technical field
The utility model relates to chemical vapour deposition technique fields, in particular to a kind of bell-jar chemical vapor deposition
Product equipment.
Background technique
Gas phase deposition technology is to utilize the physics occurred in gas phase, chemical process, forms functional or dress in workpiece surface
Metal, the nonmetallic or compound coat of decorations property；Gas phase deposition technology can be divided into chemical vapor deposition, object according to membrane formation mechanism
Physical vapor deposition and plasma gas phase deposition；The chemical vapor depsotition equipment in laboratory is mostly small-sized tube furnace, ruler at present
It is very little smaller, it is not suitable for biggish part, and air inlet outlet mode is uneven.
Utility model content
The utility model is based at least one above-mentioned technical problem, proposes a kind of new bell-jar chemical vapor deposition
Product equipment, is suitble to larger-size product, has lifting device, and air inlet outlet is uniform.
In view of this, the utility model proposes a kind of bell-jar chemical vapor depsotition equipment, including control cabinet, control cabinet
Inner Front End is equipped with controller, mass flow meter controller, the inlet connector connecting with mass flow meter controller, control cabinet rear end
It is successively arranged cooling-water machine, gasifier, vacuum pump, hydraulic oil pump from top to bottom；
It further include reaction cabinet, reaction cabinet is connect with the control cabinet, is reacted upper end in cabinet and is equipped with bell jar shell, the bell jar shell
It is interior to be equipped with bell jar insulating layer, bell jar case, shape on the outside of the bell jar insulating layer inner wall and bell jar case are equipped in the bell jar insulating layer
At cavity, the bell jar case is equipped with venthole, and the reaction cabinet inner bottom is equipped with the liter connecting with the hydraulic oil pump
Platform drops, and the hoistable platform upper end is equipped with sequentially connected housings close plate, heat preservation closed plate, bin enclosure from bottom to up
Plate, the bell jar shell left and right sides are equipped with the air inlet pipe for leading to the cavity, and the air inlet pipe is equipped with adapter, the reaction
The escape pipe for leading to the cavity is equipped at left and right sides of cabinet, the escape pipe upper and lower ends are equipped with ball valve, set on the escape pipe
There is the water cooling tube connecting with the cooling-water machine, bell jar insulating layer front and rear sides are equipped with the Si-Mo rod for leading to the cavity.
Preferably, the bell jar shell is equipped with the thermocouple for leading to the cavity.
Preferably, bell jar shell lower end is equipped with pressing device.
Preferably, the escape pipe is equipped with the bend pipe for leading to upper end in the bell jar shell.
Preferably, the bell jar case, the bin enclosure plate are made of carborundum plate.
Preferably, the hoistable platform is small-sized double shear hydraulic elevating platform.
The beneficial effects of the utility model are: being suitble to larger-size product by above technical scheme, being set with lifting
Standby, air inlet outlet is uniform.
Detailed description of the invention
Fig. 1 shows the structural schematic diagram of the bell-jar chemical vapor depsotition equipment of embodiment according to the present utility model；
Fig. 2 shows the structural schematic diagrams of the reaction cabinet main view of embodiment according to the present utility model；
Fig. 3 shows the structural schematic diagram of the reaction cabinet right view of embodiment according to the present utility model；
Fig. 4 shows the structural schematic diagram of the control cabinet main view of embodiment according to the present utility model；
Fig. 5 shows the structural schematic diagram of the control cabinet right view of embodiment according to the present utility model；
In figure: 1 is reaction cabinet, and 2 be bell jar shell, and 3 be bell jar insulating layer, and 4 be bell jar case, and 5 be venthole, and 6 is flat for lifting
Platform, 7 be housings close plate, and 8 is keep the temperature closed plate, and 9 be bin enclosure plate, and 10 be air inlet pipe, and 11 be adapter, and 12 be outlet
Pipe, 13 be bend pipe, and 14 be ball valve, and 15 be water cooling tube, and 16 be Si-Mo rod, and 17 be control cabinet, and 18 be mass flow meter controller, 19
It is cooling-water machine for inlet connector, 20,21 be gasifier, and 22 be vacuum pump, and 23 be hydraulic oil pump, and 24 be controller, and 25 be compression
Device, 26 be thermocouple.
Specific embodiment
In order to be more clearly understood that the above objects, features, and advantages of the utility model, with reference to the accompanying drawing and have
The utility model is further described in detail in body embodiment.It should be noted that in the absence of conflict, this Shen
The feature in embodiment and embodiment please can be combined with each other.
Many details are explained in the following description in order to fully understand the utility model, still, this is practical
Novel to be implemented using other than the one described here other modes, therefore, the protection scope of the utility model is simultaneously
It is not limited by the specific embodiments disclosed below.
The technical solution of the utility model is described further below in conjunction with Fig. 1 to Fig. 5.
As shown, the utility model proposes a kind of bell-jar chemical vapor depsotition equipment, including control cabinet 17, control
17 Inner Front End of cabinet is equipped with controller 24, mass flow meter controller 18, the inlet connector connecting with mass flow meter controller 18
19,17 rear end of control cabinet is successively arranged cooling-water machine 20, gasifier 21, vacuum pump 22, hydraulic oil pump 23 from top to bottom；
It further include reaction cabinet 1, reaction cabinet 1 is connect with control cabinet 17, is reacted upper end in cabinet 1 and is equipped with bell jar shell 2, bell jar shell 2
It is interior to be equipped with bell jar insulating layer 3, it is equipped with bell jar case 4 in bell jar insulating layer 3, is formed on the outside of 3 inner wall of bell jar insulating layer and bell jar case 4 empty
The cavity formed at left and right sides of chamber, 3 inner wall of bell jar insulating layer and bell jar case 4 is taper, and bell jar case 4 is equipped with venthole 5, convenient
Gas enters, and reaction 1 inner bottom of cabinet is equipped with the hoistable platform 6 that connect with hydraulic oil pump 23,6 upper end of hoistable platform equipped with from
Under supreme sequentially connected housings close plate 7, heat preservation closed plate 8, bin enclosure plate 9, hoistable platform 6 rise to highest point it
Afterwards, housings close plate 7, heat preservation closed plate 8, bin enclosure plate 9 are successively sealed with bell jar shell 2, bell jar insulating layer 3, the cooperation of bell jar case 4
Connection is closed, is equipped with the air inlet pipe 10 across bell jar insulating layer 3 for leading to cavity at left and right sides of bell jar shell 2, air inlet pipe 10 is equipped with
Adapter 11 is set on each adapter 11 there are two port, can connect two tracheaes simultaneously, react be equipped at left and right sides of cabinet 1 it is logical
To the escape pipe 12 of cavity bell jar insulating layer 3,12 upper and lower ends of escape pipe are equipped with ball valve 14, and gas is discharged in the ball valve 14 of upper end,
The ball valve 14 of lower end is equipped with and connect with cooling-water machine 20 to the liquid after gas condensation is discharged after reaction, 12 pipe of outlet
Water cooling tube 15, cooling reaction gas, 3 front and rear sides of bell jar insulating layer are equipped with the Si-Mo rod 16 for leading to cavity, and Si-Mo rod 16 is used to
Heat gas reaches reaction temperature, and bell jar shell 2 is equipped with the thermocouple 26 for leading to cavity, measures the temperature in cavity, clock
2 lower end of housing is equipped with pressing device 25, and pressing device 25 includes turn connecting with the handle of the rotation connection of bell jar shell 2, with handle
Dynamic stud, pressing device 25 are used to compress the frame cooperated with hoistable platform 6, and escape pipe 12, which is equipped with, to lead in bell jar shell 2
The bend pipe 13 at end, for the gas for draining to upper end in housing 2 is discharged, bell jar case 4, bin enclosure plate 9 are made of carborundum plate, rise
Drop platform 6 is small-sized double shear hydraulic elevating platform.
When work, product is put on bin enclosure plate 9, hoistable platform 6, which rises, is sent into product in bell jar case 4, is passed through
Impurity air in its bell jar shell 2 is discharged gas, and Si-Mo rod 16, which heats in bell jar case 4, reaches reaction temperature, according to unused
Product is passed through different gas, and vapor deposition reaction occurs for heating；17 Inner Front End of control cabinet is equipped with controller 24, mass flowmenter
Controller 18, the inlet connector 19 connecting with mass flow meter controller 18,17 rear end of control cabinet are successively arranged cold from top to bottom
Water dispenser 20, gasifier 21, vacuum pump 22, hydraulic oil pump 23, controller 24 include control screen and key, controller 24 and bell jar
Working equipment connection in formula chemical vapor depsotition equipment is shown by button controller open and close etc. by controlling screen
Reaction temperature, time etc., vacuum pump 22 are connect with escape pipe 12, facilitate gas bleeding, and liquid bulk is converted to gas by gasifier 21
Body, three inlet connectors 19, the gasifier 21 of air inlet are connect with mass flow meter controller 18, later from four chargings of outlet
19 outlet of connector is connected on adapter 11, and mass flow meter controller 18 controls gas admission velocity.
The technical solution of the utility model is had been described in detail above with reference to the accompanying drawings, the technical solution of the utility model proposes
A kind of new bell-jar chemical vapor depsotition equipment is suitble to larger-size product, is set with lifting by above technical scheme
Standby, air inlet outlet is uniform.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of bell-jar chemical vapor depsotition equipment, including control cabinet, control cabinet Inner Front End is equipped with controller, mass flowmenter
Controller, the inlet connector connecting with mass flow meter controller, control cabinet rear end are successively arranged cooling-water machine, gasification from top to bottom
Device, vacuum pump, hydraulic oil pump, it is characterised in that:
Cabinet is reacted, reaction cabinet is connect with the control cabinet, is reacted upper end in cabinet and is equipped with bell jar shell, is equipped with bell jar in the bell jar shell
Insulating layer, the bell jar insulating layer is interior to be equipped with bell jar case, and cavity is formed on the outside of the bell jar insulating layer inner wall and bell jar case, described
Bell jar case is equipped with venthole, and the reaction cabinet inner bottom is equipped with the hoistable platform connecting with the hydraulic oil pump, described
Hoistable platform upper end is equipped with sequentially connected housings close plate, heat preservation closed plate, bin enclosure plate from bottom to up, the bell jar shell
The left and right sides is equipped with the air inlet pipe for leading to the cavity, and the air inlet pipe is equipped with adapter, sets at left and right sides of the reaction cabinet
There is the escape pipe for leading to the cavity, the escape pipe upper and lower ends are equipped with ball valve, and the escape pipe is equipped with and the cold water
The water cooling tube of machine connection, bell jar insulating layer front and rear sides are equipped with the Si-Mo rod for leading to the cavity, set on the bell jar shell
There is the thermocouple for leading to the cavity.
2. bell-jar chemical vapor depsotition equipment according to claim 1, it is characterised in that: bell jar shell lower end is equipped with
Pressing device.
3. bell-jar chemical vapor depsotition equipment according to claim 2, it is characterised in that: the escape pipe is equipped with logical
The bend pipe of upper end into the bell jar shell.
4. bell-jar chemical vapor depsotition equipment according to claim 3, it is characterised in that: the bell jar case, the case
Body closed plate is made of carborundum plate.
5. bell-jar chemical vapor depsotition equipment according to claim 4, it is characterised in that: the hoistable platform is small-sized
Double shear hydraulic elevating platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920048291.XU CN209685912U (en) | 2019-01-11 | 2019-01-11 | A kind of bell-jar chemical vapor depsotition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920048291.XU CN209685912U (en) | 2019-01-11 | 2019-01-11 | A kind of bell-jar chemical vapor depsotition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209685912U true CN209685912U (en) | 2019-11-26 |
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ID=68598646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920048291.XU Expired - Fee Related CN209685912U (en) | 2019-01-11 | 2019-01-11 | A kind of bell-jar chemical vapor depsotition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209685912U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115142049A (en) * | 2022-07-28 | 2022-10-04 | 苏州涌真光电科技有限公司 | CVD film coating machine with stacked lifting device |
-
2019
- 2019-01-11 CN CN201920048291.XU patent/CN209685912U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115142049A (en) * | 2022-07-28 | 2022-10-04 | 苏州涌真光电科技有限公司 | CVD film coating machine with stacked lifting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191126 Termination date: 20210111 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |