CN209674135U - A kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate - Google Patents
A kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate Download PDFInfo
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- CN209674135U CN209674135U CN201920555056.1U CN201920555056U CN209674135U CN 209674135 U CN209674135 U CN 209674135U CN 201920555056 U CN201920555056 U CN 201920555056U CN 209674135 U CN209674135 U CN 209674135U
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Abstract
The utility model discloses a kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate, including the first anti-reflection film disposed in parallel, first substrate, pattern electrode trace layer, insulating layer, pattern electrode, liquid crystal layer, liquid crystal alignment layer, public electrode, second substrate, and second anti-reflection film, pattern electrode trace layer, pattern electrode, and public electrode is made of grapheme material, pattern electrode includes that electricity controls loop wire electrode, electricity controls loop wire electrode tool, and there are two terminals, a pair of of through-hole is provided in pattern electrode trace layer, the terminal vertical that each through-hole controls respectively with the electricity of pattern electrode in loop wire electrode is corresponding, conductive material is filled in each through-hole, and it passes through insulating layer and is through to the terminal that electricity in its corresponding pattern electrode controls loop wire electrode.The utility model is able to solve that the efficiency of light energy utilization existing for existing electrically-controlled liquid crystal optically focused micro mirror is relatively low, light loss is larger and the technical problem of optically focused efficiency deficiency for transmission.
Description
Technical field
The utility model belongs to optical lens technical field, more particularly, to a kind of electricity with high-light-energy utilization rate
Draining crystalline substance optically focused micro mirror.
Background technique
Nowadays, increasingly extensive application, electrically-controlled liquid crystal optically focused micro mirror of today has been obtained in electrically-controlled liquid crystal optically focused micro mirror
It include mainly the electrically-controlled liquid crystal optically focused micro mirror for visible light and the electrically-controlled liquid crystal optically focused micro mirror for infrared light.
For the electrically-controlled liquid crystal collector lens for visible light, micro-circle or micro- square generally are used in light incident side
The hollow out conduction light-transmissive film of shape constitutes pattern electrode, and the material of the pattern electrode is tin indium oxide (Indium tin oxide, letter
Claim ITO), and in light exit side, it is using public electrode made of ITO material.The electrically-controlled liquid crystal collector lens is asked there are some
Topic: first, the control optical electric field based on pattern electrode building is to extend light-transmissive film into light-transmissive film from hollow out conduction light transmission film edge
10%~20% size in aperture is constituted, and fill factor is usually less than 60%, so that electrically-controlled liquid crystal collector lens is in
Existing small clear aperature and the low efficiency of light energy utilization；Second, since conductive light-transmissive film blocks effect with different degrees of to incident light,
Therefore the collector lens can have the transmission light loss for being up to 20%；Third equally can using public electrode made of ITO material
The collector lens is set to there is the transmission light loss for being up to 20%.
For the electrically-controlled liquid crystal collector lens for infrared light, common metal (aluminium, copper etc.) is generallyd use
Or micro-circle/the rectangular opening or its array composition pattern electrode of noble metal (gold, silver etc.) production.However, the automatically controlled liquid
There are still some defects that can not ignore for brilliant collector lens: firstly, motivating the control photoelectricity generated between its top and bottom electrode
Field can be cut into the liquid crystal layer covered by metal film by electrode edge in varying degrees, therefore cause to control effectively filling out for optical electric field
Coefficient is filled generally also 60% hereinafter, so that small clear aperature and the low efficiency of light energy utilization is presented in electrically-controlled liquid crystal collector lens；
Second, it is produced on pattern electrode and public electrode surface and directly contacts oriented layer (such as typical PI orientation of liquid crystal material
Film) very important transmission light loss is equally existed to infrared light；Third, micro-nano-scale liquid crystal anchor used in the collector lens
Determining groove (can be embodied in mould diffraction astigmatism and spectrum infrared beams space point to the incident stronger diffraction crosstalk of infrared light generation
From becoming a main source of stronger stray light, optical noise or device color difference), to significantly reduce the optically focused of collector lens
Efficiency.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, the utility model provides a kind of with high-light-energy utilization rate
Electrically-controlled liquid crystal optically focused micro mirror, it is intended that solving the efficiency of light energy utilization existing for existing electrically-controlled liquid crystal optically focused micro mirror relatively
Light loss is larger and the technical problem of optically focused efficiency deficiency for low, transmission.
To achieve the above object, it according to the one aspect of the utility model, provides a kind of with high-light-energy utilization rate
Electrically-controlled liquid crystal optically focused micro mirror, including successively the first anti-reflection film disposed in parallel, the first substrate, pattern electrode lead from top to bottom
Layer, insulating layer, pattern electrode, liquid crystal layer, liquid crystal alignment layer, public electrode, the second substrate and the second anti-reflection film, pattern electricity
Pole with a thickness of 5 nanometers to 200 nanometers, pattern electrode includes that electricity controls loop wire electrode, the electricity control loop wire electrode be non-close
Annular, electricity control loop wire electrode tool there are two terminal, are provided with a pair of of through-hole in pattern electrode trace layer, each through-hole respectively with
The electricity of pattern electrode controls a terminal vertical in loop wire electrode and corresponds to, and is filled with conductive material in each through-hole, and wear
Cross insulating layer and be through in its corresponding pattern electrode electricity and control the terminal of loop wire electrode, thus formed pattern electrode trace layer and
Electrical connection between pattern electrode, the edge in pattern electrode trace layer close to circumference are provided with a pin, pattern electrode
Upper through-hole corresponding with the electric terminal vertical controled on the inside of loop wire electrode is electrically connected with the pin, then with external control signal U's
One input port is electrically connected, another input port of another through-hole and external control signal U on pattern electrode is electrically connected
It connects.
Preferably, pattern electrode trace layer is made of conductive metal or metal oxide materials, pattern electrode and public
Electrode is made of grapheme material.
Preferably, the first anti-reflection film and the second anti-reflection film are made of normal optical anti-reflection film, and the two thickness is identical,
Be 100 nanometers to 700 nanometers, the first substrate and the second substrate are made of translucent material, thickness be 1 millimeter to 5 milli
Rice, liquid crystal layer are made of electrooptical liquid crystal material, and for thickness between 1 micron to 100 microns, liquid crystal alignment layer is by polyamides Asia
Amine material is made, and thickness is between 100 nanometers to 700 nanometers.
Preferably, the outer profile of pattern electrode trace layer and pattern electrode is circle, and size is identical.
Preferably, electricity, which controls loop wire electrode, has multiple rotating parts in the part close to its notch, for avoiding electric current magnetic
The generation of effect.
Preferably, rotating part is that electricity controls loop wire electrode in the process for turning to non-close loop wire shape clockwise or counterclockwise
In, as long as close to notch, then it is oppositely wound, then when close to notch, then continue reversed, repeats, to control ring in the electricity
Multiple rotating parts are formd on line electrode.
For controling loop wire electrode preferably for electricity, the line of line spacing and different loop wires between different loop wires
Width be it is identical, electricity controls the line width of loop wire electrode Middle Ring Line between 1 micron to 20 microns, and the spacing between loop wire is 1 micro-
Rice is between 20 microns.
Preferably, public electrode is set between liquid crystal alignment layer and the second substrate, and uses annular design；Public electrode
With a thickness of 5 microns to 500 microns.
In general, it can obtain down the above technical solutions conceived by the present invention are compared with the prior art,
Column the utility model has the advantages that
1, as the liquid crystal layer of the utility model be setting the pattern electrode made of grapheme material and public electrode it
Between, there are stronger anchorings to act on to the liquid crystal molecule being in contact with it for graphene, so as to significantly improve electrically-controlled liquid crystal micro mirror
Incident light utilization efficiency and optically focused efficiency.
2, (as usual not using the oriented layer generally used in existing electrically-controlled liquid crystal optically focused micro mirror by the utility model
The PI oriented film of rule), therefore effectively reduce transmission light loss.
It 3, can will be automatically controlled since the utility model is by using pattern electrode made of grapheme material and public electrode
The optically focused spectral domain of liquid crystal micro mirror extends to LONG WAVE INFRARED spectral coverage from visible light, therefore the utility model has wide excellent of work spectral domain
Point.
4, since the external control signal in the utility model is that the public electrode made of grapheme material is direct
Load is on liquid crystal layer, therefore the utility model can significantly reduce the voltage amplitude of external control signal.
5, since the power-up operations of the utility model electrically-controlled liquid crystal optically focused micro mirror can be in priori knowledge or wave beam convergence situation
Constraint, intervention or guidance it is lower carry out, therefore there is intelligent feature.
6, since the utility model uses grapheme material pattern-making electrode and public electrode, and oriented layer is eliminated
Structure, thus the stability compared to existing electrically-controlled liquid crystal optically focused micro mirror with higher structure, electricity and electro-optical parameters, and have
There is control feature with high accuracy.
7, the electrically-controlled liquid crystal optically focused micro mirror of the utility model is conveniently inserted in the optical path, easily with conventional visible or infrared light
It learns, photoelectricity or mechanical structure are coupled.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the electrically-controlled liquid crystal optically focused micro mirror that the utility model has high-light-energy utilization rate；
Fig. 2 is that there is the utility model pattern electrode trace layer in the electrically-controlled liquid crystal optically focused micro mirror of high-light-energy utilization rate to show
It is intended to；
Fig. 3 is the schematic diagram that the utility model has pattern electrode in the electrically-controlled liquid crystal optically focused micro mirror of high-light-energy utilization rate；
Fig. 4 is the schematic diagram that the utility model has public electrode in the electrically-controlled liquid crystal optically focused micro mirror of high-light-energy utilization rate；
Fig. 5 is the package structure diagram for the electrically-controlled liquid crystal optically focused micro mirror that the utility model has high-light-energy utilization rate.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
The first anti-reflection film of 1-；The first substrate of 2-；3- pattern electrode trace layer；4- insulating layer；5- pattern electrode；6- liquid crystal
Layer；7- public electrode；The second substrate of 8-；The second anti-reflection film of 9-；14- identifier；15- electronics interface；The first optical window of 16-；17-
Second optical window；51- rotating part.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below
The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
As shown in Figure 1, the utility model have high-light-energy utilization rate electrically-controlled liquid crystal optically focused micro mirror include from top to bottom according to
Secondary first anti-reflection film 1 disposed in parallel, the first substrate 2, pattern electrode trace layer 3, insulating layer 4, pattern electrode 5, liquid crystal layer 6,
Liquid crystal alignment layer 7, public electrode 8, the second substrate 9 and the second anti-reflection film 10.
Pattern electrode with a thickness of 5 nanometers to 200 nanometers.
First anti-reflection film 1 and the second anti-reflection film 10 are made of normal optical anti-reflection film, and the two thickness is identical, is
100 nanometers to 700 nanometers.
First substrate 2 and the second substrate 9 are made of translucent material (quartz, glass etc.), and thickness is 1 milli
Rice is to 5 millimeters.
Pattern electrode trace layer 3 is made of conductive metal or metal oxide materials, pattern electrode 5 and common electrical
Pole 8 is made of grapheme material, and the outer profile of pattern electrode trace layer 3 and pattern electrode 5 is circle, and size phase
Together.
As shown in figure 3, pattern electrode 5 includes that electricity controls loop wire electrode, it is non-close annular which, which controls loop wire electrode,.Though
So in Fig. 3, it is to be shown as non-close circular ring shape that electricity, which controls loop wire electrode, it should be understood that the utility model is not limited to
This, other non-close loop wire shapes, such as non-close elliptical ring are linear, the square loop wire shape of non-close, non-close straight-flanked ring are linear,
Non-close triangle loop wire shape, non-close five-pointed star loop wire shape etc., also each fall in the protection scope of the utility model.
Electricity control loop wire electrode tool there are two terminal (for example, the electricity of Fig. 3 control loop wire electrode tool there are two terminal A1 and
B1), which, which controls loop wire electrode, has multiple rotating parts 51 in the part close to its notch, for avoiding the production of magnetic effect of electric current
It is raw.The rotating part 51 is that electricity controls loop wire electrode during turning to non-close loop wire shape clockwise or counterclockwise, in every case
Close to notch, then reversed (i.e. counterclockwise or clockwise) coiling, then when close to notch, then continue it is reversed (i.e. clockwise or the inverse time
Needle), it repeats, forms multiple rotating parts on loop wire electrode to control in the electricity.
Line spacing and different loop wires for the electricity shown in Fig. 3 controls loop wire electrode, between different loop wires
Line width be identical.
In the present invention, the electric line width for controling loop wire electrode Middle Ring Line is between 1 micron to 20 microns, between loop wire
Spacing be between 1 micron to 20 microns.
As shown in Fig. 2, be provided with a pair of of through-hole (such as a1 and b1) in pattern electrode trace layer 3, each through-hole respectively with
The electricity of pattern electrode 5 controls a terminal vertical in loop wire electrode, and corresponding (such as the electricity of through-hole a1 and pattern electrode 5 controls ring
The terminal A1 of line electrode is vertically corresponded to, another terminal B1 that the electricity of through-hole b1 and pattern electrode 5 controls loop wire electrode is vertically right
Answer), it is filled with conductive material (such as indium metal) in each through-hole, and pass through insulating layer 4 and be through to its corresponding pattern electricity
Electricity controls the terminal of loop wire electrode in pole 5, to form the electrical connection between pattern electrode trace layer 3 and pattern electrode 5.
Edge in pattern electrode trace layer 3 close to circumference is provided with a pin (being shown in figure pin b2), schemes
Control the vertical corresponding through-hole of the terminal (being terminal B1 in Fig. 3) on the inside of loop wire electrode with electricity on pattern electrode 5 (is in Fig. 2
B1 it) is electrically connected, then is electrically connected with an input port of external control signal U, pattern electrode 5 with pin (being b2 in Fig. 2)
On another through-hole (being a1 in Fig. 2) be electrically connected with another input port of external control signal U.
Public electrode 8 is set between liquid crystal alignment layer 7 and the second substrate 9, uses annular design (as shown in Figure 4),
And public electrode 8 with a thickness of 5 nanometers to 200 nanometers.It should be noted that although public electrode 8 is illustrated as annulus in Fig. 4
Shape, but it does not constitute the restriction to public electrode shape, other square annular, rectangular loop, triangular rings etc.
It falls into scope of protection of the utility model.
Liquid crystal layer 6 is made of electrooptical liquid crystal material, and thickness is between 1 micron to 100 microns.
Liquid crystal alignment layer 7 is made of the classes material such as polyimides, and thickness is between 100 nanometers to 700 nanometers.
As shown in figure 5, it illustrates the encapsulation that the utility model has the electrically-controlled liquid crystal optically focused micro mirror of high-light-energy utilization rate
Structure chart, the entire electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate are packaged in circular cylindrical shell body, the circular cylindrical shell
The top and bottom of body are not provided with the first optical window 16 and the second optical window 17, and the side of cylindrical shell is provided with electronics interface
15, for drawing electric wire from each pin in the electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate and being connected to outside
Signal U is controlled, the provided circumferentially about of cylindrical shell top/bottom have identifier 14, in order to when in use, allow use
Person knows the position where pattern electrode, to avoid damaging or destroying the pattern electrode.
Optical window is made of the high light transmission glass of adaptation different-waveband, if the utility model is used in infrared/visible light
In, then the optical window uses infrared/visible light glass.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (8)
1. a kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate, including successively the first increasing disposed in parallel from top to bottom
Permeable membrane, the first substrate, pattern electrode trace layer, insulating layer, pattern electrode, liquid crystal layer, liquid crystal alignment layer, public electrode, second
Substrate and the second anti-reflection film, which is characterized in that
Pattern electrode with a thickness of 5 nanometers to 200 nanometers；
Pattern electrode includes that electricity controls loop wire electrode, and it is non-close annular which, which controls loop wire electrode,；
Electricity controls loop wire electrode tool there are two terminal, is provided with a pair of of through-hole in pattern electrode trace layer, each through-hole respectively with
It is corresponding that the electricity of pattern electrode controls a terminal vertical in loop wire electrode；
It is filled with conductive material in each through-hole, and is through to electricity in its corresponding pattern electrode across insulating layer and controls loop wire
The terminal of electrode, to form the electrical connection between pattern electrode trace layer and pattern electrode；
Edge in pattern electrode trace layer close to circumference is provided with a pin, controls loop wire electrode with electricity on pattern electrode
The corresponding through-hole of the terminal vertical of inside is electrically connected with the pin, then is electrically connected with an input port of external control signal U,
Another through-hole on pattern electrode is electrically connected with another input port of external control signal U.
2. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that
Pattern electrode trace layer is made of conductive metal or metal oxide materials；
Pattern electrode and public electrode are made of grapheme material.
3. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that
First anti-reflection film and the second anti-reflection film are made of normal optical anti-reflection film, and the two thickness is identical, are 100 nanometers and arrive
700 nanometers；
First substrate and the second substrate are made of translucent material, and thickness is 1 millimeter to 5 millimeters
Liquid crystal layer is made of electrooptical liquid crystal material, and thickness is between 1 micron to 100 microns；
Liquid crystal alignment layer is made of polyimide material, and thickness is between 100 nanometers to 700 nanometers.
4. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that pattern electrode trace layer and pattern electrode
Outer profile be circle, and size is identical.
5. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that electricity controls loop wire electrode and lacks close to it
The part of mouth has multiple rotating parts, for avoiding the generation of magnetic effect of electric current.
6. electrically-controlled liquid crystal optically focused micro mirror according to claim 5, which is characterized in that rotating part is that electricity controls loop wire electrode and exists
During turning to non-close loop wire shape clockwise or counterclockwise, as long as close to notch, then it is oppositely wound, then close to notch
When, then continue reversely, to repeat, form multiple rotating parts on loop wire electrode to control in the electricity.
7. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that for electricity controls loop wire electrode,
The line width of line spacing and different loop wires between its different loop wire is identical, the electric line width for controling loop wire electrode Middle Ring Line
Between 1 micron to 20 microns, the spacing between loop wire is between 1 micron to 20 microns.
8. electrically-controlled liquid crystal optically focused micro mirror according to claim 1, which is characterized in that
Public electrode is set between liquid crystal alignment layer and the second substrate, and uses annular design；
Public electrode with a thickness of 5 nanometers to 200 nanometers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920555056.1U CN209674135U (en) | 2019-04-23 | 2019-04-23 | A kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate |
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| CN201920555056.1U CN209674135U (en) | 2019-04-23 | 2019-04-23 | A kind of electrically-controlled liquid crystal optically focused micro mirror with high-light-energy utilization rate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113745244A (en) * | 2021-07-30 | 2021-12-03 | 惠科股份有限公司 | Array substrate, preparation method of array substrate and display screen |
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2019
- 2019-04-23 CN CN201920555056.1U patent/CN209674135U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113745244A (en) * | 2021-07-30 | 2021-12-03 | 惠科股份有限公司 | Array substrate, preparation method of array substrate and display screen |
| CN113745244B (en) * | 2021-07-30 | 2022-10-21 | 惠科股份有限公司 | Array substrate, preparation method of array substrate and display screen |
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