CN209669338U - A kind of tool plated film cavity - Google Patents
A kind of tool plated film cavity Download PDFInfo
- Publication number
- CN209669338U CN209669338U CN201920091961.6U CN201920091961U CN209669338U CN 209669338 U CN209669338 U CN 209669338U CN 201920091961 U CN201920091961 U CN 201920091961U CN 209669338 U CN209669338 U CN 209669338U
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- plated film
- cavity
- interface
- film cavity
- door
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Abstract
The utility model discloses a kind of tool plated film cavitys, which is characterized in that including rotating multi sphere interface, cavity door on plated film cavity, chassis, window interface, small arc source interface, main pumping mouth, door；Plated film cavity is set on chassis；Several small arc source interfaces are set on the front of plated film cavity；Small arc source interface is in several rows；Small arc source interface is in isosceles triangle arrangement between the column and the column；Window interface is set between small arc source interface；In the side of plated film cavity, several main pumping mouths are set；In the reverse side of plated film cavity, cavity door is set；In the lower section of cavity door, rotation multi sphere interface on several doors is set；Several window interfaces are equally set on cavity door；The utility model has technical effect that, utilizes the change on plated film cavity in structure；The technical problem that plated film effective district is narrow in the prior art is changed, the efficiency of plated film is improved, improves the quality of coated product.
Description
Technical field
The utility model relates to filming equipment more particularly to tool plating cavitys.
Background technique
In existing vacuum coating equipment, due to all using small-sized plated film cavity in tool plating equipment
Carry out plated film processing, but the cavity of small-sized filming equipment there is installation amounts small, low efficiency, due to small-sized plated film cavity
Internal space is small, and plated film cavity causes plated film cavity remaining after the components such as installation pivoted frame, small arc source interface, cathode baffle
Space is small so that while can not improve yield on small-sized filming equipment, to can the product size of plated film have considerable restraint.
Cause production tool plated film low efficiency, can plated product range it is small.
Utility model content
The purpose of this utility model is according in place of above-mentioned the deficiencies in the prior art, and the utility model realizes a kind of tool
Plated film cavity, which is characterized in that including rotating multi sphere on plated film cavity, chassis, window interface, small arc source interface, main pumping mouth, door
Interface, cavity door；Plated film cavity is set on the chassis；Several small arc sources are set on the front of the plated film cavity
Interface；The small arc source interface is in several rows；The small arc source interface is in isosceles triangle arrangement between the column and the column；Described
Window interface is set between small arc source interface；In the side of the plated film cavity, several main pumping mouths are set；In the plating
Cavity door is arranged in the reverse side of membrane cavity body；In the lower section of the cavity door, rotation multi sphere interface on several doors is set；Described
Cavity door on several window interfaces are equally set.
Further, the plated film cavity is in cylindrical structure；The cavity door is similarly arc structure；The chamber
Body door is equal with the radius of plated film cavity.
Further, the small arc source interface is flange connection.
Further, the window interface is flange connection.
Further, one end of the main pumping mouth and the plated film cavity are in intersecting body connection structure；In the master
Flange arrangement is arranged in the other end for taking out mouth.
Further, it is flange connection that multi sphere interface is rotated on the door.
Further, footing leveling bolt is set below the chassis.
Further, the material of the tool plated film cavity is stainless steel material.
The utility model has technical effect that, using arc source interface, while small arc source interface are arranged on plated film cavity
Between in isosceles triangle arrange；Main pumping mouth is set in the side of plated film cavity and cavity door is set in the reverse side of plated film cavity；Chamber
The change in the structures such as multi sphere interface and the multiple window interfaces of setting is rotated on the lower section setting door of body door；Increase the class of target
Type and the spatial dimension for greatly increasing plated film effective district, improve the efficiency of plated film, improve the quality of coated product.
Detailed description of the invention
Fig. 1 is the right view of the utility model.
Fig. 2 is the main view of the utility model.
Fig. 3 is the schematic top plan view of the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
It clearly and completely describes, it is clear that described embodiment is only the utility model a part of the embodiment, rather than whole realities
Apply example.Based on the embodiments of the present invention, those of ordinary skill in the art institute without making creative work
The every other embodiment obtained, fall within the protection scope of the utility model.
In conjunction with shown in attached drawing 1- attached drawing 3, a kind of tool plated film cavity, including plated film cavity 1, bottom are provided in the present embodiment
Frame 2, small arc source interface 4, main pumping mouth 5, rotates multi sphere interface 6, cavity door 7 on door at window interface 3；Plated film is set on chassis 2
Cavity 2；So that plated film plated film cavity 2 carries out vacantly；It is convenient to rotate multi sphere interface on the lower section of plated film cavity 2 setting door；For
It convenience and solves the problems, such as that plated film effective district is lesser, several small arc source interfaces 4 is set on the front of plated film cavity；It will be small
Arc source interface 4 is arranged in several rows；In being arranged between the column and the column in isosceles triangle for small arc source interface 4；Can effectively it evade in this way
The small arc source interface 4 lesser problem of effective district at work, so that small arc source, which is formed, covers entire plated film cavity, in order to observe chamber
Window interface 3 is arranged in body workpiece plated film situation between small arc source interface 4, the case where for observing inside cavity, meanwhile, depending on
Window interface 3 is arranged between small arc source interface 4, ensures the plated film situation it is observed that in cavity everywhere, in this way in order to evade master
Influence of the mouth for plated film is taken out, several main pumping mouths 5 are set in the side of plated film cavity 1；Main pumping mouth 5 is arranged in plated film cavity
1 side can reduce influence of the main pumping mouth 5 for coating effects as far as possible, for this purpose, main one end for taking out mouth 5 and plating membrane cavity
Body 1 is in intersecting body connection structure；In the main other end for taking out mouth 5, flange arrangement is set；By the connection type of intersecting body, in not shadow
In the case where ringing the main pumping effect for taking out mouth 5, main pumping mouth 5 is located at the place far from small arc source interface 4 as far as possible；For side
Just cavity door 7 is arranged in the reverse side of plated film cavity 1 in loading and unloading；In order to evade due to being provided with cavity door 7 for the shadow in arc source
It rings, rotation multi sphere interface 6 on several doors is set in the lower section of cavity door 7；Equally, in order to ensure being easy to happen dead angle the most
Place, be easy to be found plated film to lead to the problem of, so several window interfaces 3 are equally arranged on cavity door 7.
In conjunction with shown in attached drawing 1- attached drawing 3, plated film cavity 1 is in cylindrical structure；Cavity door 7 is similarly arc structure；Cavity
Door 7 is equal with the radius of plated film cavity 1, enables to cavity door 7 and plated film cavity 1 to be maintained on the same radian in this way, has
Conducive to the sealing of plated film cavity 1.
Meanwhile in order to the more convenient connection of multi sphere device is rotated on small arc source, form, door, by small arc source interface 4,
Multi sphere interface 6 is rotated in window interface 3 and door is set as flange connection.
The last balance for keeping tool plated film cavity for convenience, is arranged footing leveling bolt 8 below chassis 2.
In conjunction with described above, the material of the tool plated film cavity of the present embodiment is stainless steel material.Including plated film cavity 1,
Chassis 2, window interface 3, small arc source interface 4, main pumping mouth 5, that the materials such as multi sphere interface 6, cavity door 7 are rotated on door is all stainless
Steel material.
As the utility model preferred embodiment, it is obvious to a person skilled in the art that the utility model is unlimited
It, can in the details of above-mentioned exemplary embodiment, and without departing substantially from the spirit or essential attributes of the utility model
The utility model and the protection scope of the utility model are realized in other specific forms.Which point therefore, no matter come from
It sees, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by appended claims
Rather than above description limits, it is intended that by all changes that come within the meaning and range of equivalency of the claims capsule
It includes in the utility model.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (8)
1. a kind of tool plated film cavity, which is characterized in that including plated film cavity, chassis, window interface, small arc source interface, main pumping
Multi sphere interface, cavity door are rotated on mouth, door；Plated film cavity is set on the chassis；On the front of the plated film cavity
Several small arc source interfaces are set；The small arc source interface is in several rows；The small arc source interface is in product between the column and the column
Font arrangement；Window interface is set between the small arc source interface；In the side of the plated film cavity, several are set
Main pumping mouth；In the reverse side of the plated film cavity, cavity door is set；In the lower section of the cavity door, several Men Shangxuan are set
Turn multi sphere interface；Several window interfaces are equally set on the cavity door.
2. tool plated film cavity as described in claim 1, which is characterized in that the plated film cavity is in cylindrical structure；Institute
The cavity door stated is similarly arc structure.
3. tool plated film cavity as described in claim 1, which is characterized in that the small arc source interface is flanged joint knot
Structure.
4. tool plated film cavity as described in claim 1, which is characterized in that the window interface is flange connection.
5. tool plated film cavity as described in claim 1, which is characterized in that one end of the main pumping mouth and the plated film
Cavity is in intersecting body connection structure；In the other end of the main pumping mouth, flange arrangement is set.
6. tool plated film cavity as described in claim 1, which is characterized in that rotate multi sphere interface on the door for flange company
Binding structure.
7. tool plated film cavity as described in claim 1, which is characterized in that footing is arranged below the chassis and levels spiral shell
Bolt.
8. such as tool plated film cavity of any of claims 1-7, which is characterized in that the tool plated film cavity
Material is stainless steel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920091961.6U CN209669338U (en) | 2019-01-21 | 2019-01-21 | A kind of tool plated film cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920091961.6U CN209669338U (en) | 2019-01-21 | 2019-01-21 | A kind of tool plated film cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209669338U true CN209669338U (en) | 2019-11-22 |
Family
ID=68566158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920091961.6U Active CN209669338U (en) | 2019-01-21 | 2019-01-21 | A kind of tool plated film cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209669338U (en) |
-
2019
- 2019-01-21 CN CN201920091961.6U patent/CN209669338U/en active Active
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