CN209640410U - A kind of probe resistance testboard - Google Patents
A kind of probe resistance testboard Download PDFInfo
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- CN209640410U CN209640410U CN201821552480.2U CN201821552480U CN209640410U CN 209640410 U CN209640410 U CN 209640410U CN 201821552480 U CN201821552480 U CN 201821552480U CN 209640410 U CN209640410 U CN 209640410U
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- workbench
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- cam
- shaft
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Abstract
A kind of probe resistance testboard, including workbench, cam, motor and fine tuning screw rod, first fixed plate, the workbench is equipped with the first grip block and the second grip block, the workbench is equipped with test platform, shaft is connected on the cam, the shaft is equipped with the second connecting plate, the cam is equipped with connecting rod eccentric adjusting block, connecting rod is connected in the shaft, first fixed plate is equipped with support plate, the support plate is equipped with guide rail, fine-tuning screw is connected on the fixed block, probe resistance is connected with below the fine-tuning screw, stop block is connected on the probe resistance, the workbench is equipped with several fixing seats, the fixing seat is equipped with the first connecting plate, the utility model can do high-precision reciprocating motion by connecting rod described in the cam driven, so as to the accurate Gao Zhun of probe resistance Test, and reaction result can be reacted by the display table, and people is facilitated to operate, and precision is high.
Description
Technical field
The utility model relates to technical field of semiconductors, refer in particular to a kind of probe resistance testboard.
Background technique
When leaving the factory, portions of client requires the resistance value of clear probe to probe, it is therefore desirable to probe test equipment, currently, In
When testing substrate using probe test equipment, the loading floor in the probe station is usually backwards to gravity direction, so as to base
In the upward bearing substrate of gravity, and the probe card in detecting head is moved to the top of the loading floor, for holding
Substrate above microscope carrier face is tested, however during the test, since substrate is backwards to gravity direction and upwardly facing institute
Detecting head is stated, therefore the dust granule in detecting head or in test environment or pollutant are easy in gravity during the test
Under the action of fall and by the substrate support, to can directly be polluted to substrate.
Therefore, it is necessary to provide the new technical solution of one kind to overcome drawbacks described above.
Utility model content
The purpose of this utility model is to provide the probe resistance testboards that one kind can effectively solve above-mentioned technical problem.
For the purpose for reaching the utility model, adopt the following technical scheme that a kind of probe resistance testboard include workbench,
Cam, motor and fine tuning screw rod, the first fixed plate；The workbench is equipped with the first grip block and the second grip block, the work
Make platform equipped with test platform, the cam setting on the workbench, is connected with shaft on the cam, in the shaft
Equipped with the second connecting plate, the cam is equipped with connecting rod eccentric adjusting block, and connecting rod is connected in the shaft, and described first is fixed
Plate is equipped with support plate, and the top of the support plate is equipped with fixed block, and the support plate is equipped with guide rail, connects on the fixed block
It is connected to fine-tuning screw, probe resistance is connected with below the fine-tuning screw, stop block is connected on the probe resistance, it is described
The lower section of stop block is equipped with the second fixed plate, and the workbench is equipped with several fixing seats, and the fixing seat is equipped with first and connects
Fishplate bar, first grip block and second grip block are connect by screw with the workbench, and the test platform passes through
Screw is fixed on the workbench；The cam is set between first grip block and second grip block, described
Second connecting plate is connect with the cam by the shaft, the shaft through second connecting plate front and rear surfaces and with
Its sliding contact, the shaft are connect with the motor, and the motor is contained in the workbench, the motor and power supply electricity
Property connection, the connecting rod eccentric adjusting block acts against on the cam, and the cam and the connecting rod eccentric adjusting block pass through institute
Shaft connection is stated, the shaft is contacted with the rod slide, and first fixed plate is fixed by screws in the workbench
On, first fixed plate is fixedly connected with the support plate by screw, and the support plate and the fixed block pass through screw
Connection, the fine-tuning screw through the fixed block upper and lower surface and with its sliding contact, the probe resistance passes through described
The upper and lower surface of stop block and with its sliding contact, the stop block is fixedly connected with second fixed plate, and described second is solid
Fixed board is connected by screw to first fixed plate, and the lower section of second fixed plate is equipped with limiting plate, the limiting plate with
First fixed plate is fixedly connected, and the fixing seat is fixedly connected with the workbench by screw, first connecting plate
It is connect by screw with the fixing seat, display table acts against first grip block, and first connecting plate, which is equipped with, to be run through
The pin shaft of its upper and lower surface, the upper end of the pin shaft through the fixing seat of top upper and lower surface and with its sliding contact.
Preferably, first connecting plate is equipped with the receiver through its upper and lower surface, the lower end top of the receiver
It leans against in first fixed plate, the receiver is connect with the probe resistance by electric wire；Pass through electricity on the receiver
Line is connected with display table.
Preferably, the fixing seat sets there are two and is in setting up and down.
Preferably, the motor is AC asynchronous motor.
Preferably, the guide rail is set there are two symmetrical distribution.
Compared with prior art, the utility model can do high-precision reciprocal fortune by connecting rod described in the cam driven
Dynamic, so as to the test of accurate Gao Zhun, and reaction result can be reacted by the display table, and people is facilitated to operate, essence
Degree is high, and people is facilitated to be widely used.
Detailed description of the invention
Fig. 1 is the overall structure diagram of microspur cam probe tester described in the utility model,
Fig. 2 is the partial structure diagram of microspur cam probe tester described in the utility model,
Fig. 3 is the cam structure schematic diagram of microspur cam probe tester described in the utility model,
Fig. 4 is the connecting rod eccentric adjusting block structure schematic diagram of microspur cam probe tester described in the utility model.
Wherein: 1 workbench；2 cams；3 first grip blocks；4 display tables；5 pin shafts；6 first connecting plates；7 fixing seats；8
One fixed plate；9 second grip blocks；10 connecting rod eccentric adjusting blocks；11 shafts；12 connecting rods；13 fine-tuning screws；14 fixed blocks；15
Fagging；16 probe resistances；17 stop blocks；18 second fixed plates；19 guide rails；20 limiting plates；21 test platforms；22 second connections
Plate；23 motors.
Specific embodiment
Clear and complete explanation is made to the utility model probe resistance testboard below in conjunction with attached drawing.
As shown in Figs 1-4, the utility model probe resistance testboard includes workbench 1, cam 2, motor 23 and fine tuning spiral shell
Bar 13, the first fixed plate 8；The workbench 1 can be convenient the utility model and carry out resistance test, and the workbench 1 is equipped with
First grip block 3 and the second grip block 9, first grip block 3 and second grip block 9 pass through screw and the workbench
1 connection, the workbench 1 play the role of support, the workbench 1 to first grip block 3 and second grip block 9
It is equipped with test platform 21, the test platform 21 is fixed by screws on the workbench 1；The cam 2 is arranged in institute
It states on workbench 1, the cam 2 is set between first grip block 3 and second grip block 9, first clamping
Block 3 and second grip block 9 can prevent the cam 2 mobile, be connected with shaft 11, the shaft 11 on the cam 2
It is equipped with the second connecting plate 22, second connecting plate 22 is connect with the cam 2 by the shaft 11, and the shaft 11 is passed through
Wear the front and rear surfaces of second connecting plate 22 and with its sliding contact, the rotation for allowing the shaft 11 stable；It is described
Shaft 11 is connect with the motor 23, allows the motor 23 that the shaft 11 is driven to rotate, the motor 23 can band
It moves the cam 2 to rotate, the motor 23 is contained in the workbench 1, and the motor 23 connects with power supply electrical property (not shown)
It connects, provides electric energy for it, the motor 23 is equipped with switch (not shown), facilitates its opening and closing of control, which is alternating current asynchronous
Motor, watt level, which can according to need, to be adjusted；The cam 2 is equipped with connecting rod eccentric adjusting block 10, the connecting rod
Eccentric adjusting block 10 acts against on the cam 2, and the cam 2 is connected with the connecting rod eccentric adjusting block 10 by the shaft 11
It connects, the cam 2 can drive the connecting rod eccentric adjusting block 10 to rotate；Connecting rod 12 is connected in the shaft 11, it is described
Shaft 11 and 12 sliding contact of connecting rod, the shaft 11 can drive the connecting rod 12 to rotate；First fixed plate 8 is logical
Screw to be crossed to be fixed on the workbench 1, the workbench 1 plays the role of support to first fixed plate 8, and described
One fixed plate 8 is equipped with support plate 15, and first fixed plate 8 is fixedly connected with the support plate 15 by screw, and described the
One fixed plate 8 plays the role of support to the support plate 15, and the top of the support plate 15 is equipped with fixed block 14, the support
Plate 15 is connected by screw to the fixed block 14, and the support plate 15 plays the role of support to the fixed block 14, described
The left and right sides of support plate 15 is equipped with guide rail 19, moves left and right convenient for the connecting rod 12, convenient for test；Connect on the fixed block 14
Be connected to fine-tuning screw 13, the fine-tuning screw 13 through the fixed block 14 upper and lower surface and with its sliding contact so that institute
The rotation that fine-tuning screw 13 can be stable is stated, the lower section of the fine-tuning screw 13 is connected with probe resistance 16, convenient to probe electricity
Resistance is tested；Stop block 17 is connected on the probe resistance 16, the probe resistance 16 passes through the upper of the stop block 17
Lower surface and with its sliding contact, allow the probe resistance 16 is stable to move up and down；The lower section of the stop block 17
Equipped with the second fixed plate 18, the stop block 17 is fixedly connected with second fixed plate 18, second fixed plate, 18 pairs of institutes
It states stop block 17 and plays the role of support, second fixed plate 18 is connected by screw to first fixed plate 8, and described
One fixed plate 8 plays the role of support to second fixed plate 18；The lower section of second fixed plate 18 is equipped with limiting plate
21, the limiting plate 21 is fixedly connected with first fixed plate 8, and first fixed plate 8 plays branch to the limiting plate 20
The effect of support；The workbench 1 is equipped with several fixing seats 7, the fixing seat 7 set there are two and in setting up and down, it is described solid
Reservation 7 is fixedly connected with the workbench 1 by screw, and the fixing seat 7 is equipped with the first connecting plate 6, first connection
Plate 6 is connected by the fixing seat 7 of screw and lower section, and the fixing seat 7 plays the work of support to first connecting plate 6
With；First connecting plate 6 is equipped with the receiver (not shown) through its upper and lower surface, and the lower end of the receiver acts against
In first fixed plate 8, the receiver 8 is connect with the probe resistance 16 by electric wire, can receive the probe
The signal that resistance 16 transmits, and then judge the test result of probe resistance；Display table is connected with by electric wire on the receiver
4, on the signal reaction to the display table 4 that the receiver can transmit the probe resistance 16, to judge probe electricity
The test result of resistance, the display table 4 act against first grip block 3, and first grip block 3 plays the display table 4
To the effect of support；First connecting plate 6 is equipped with the pin shaft 5 through its upper and lower surface, and the upper end of the pin shaft 5 is through upper
Side fixing seat 7 upper and lower surface and with its sliding contact, the rotation for allowing the pin shaft 5 stable.
When use: connection power supply first opens the switch of motor 23, so that the cam 2 rotates, the then cam 2
The connecting rod 12 is driven to do high-precision reciprocating movement on the guide rail 3 of the left and right sides, and on the test platform 21, so
The fine-tuning screw 13 can according to circumstances be rotated afterwards moves down the probe resistance 16, so that it is tested,
Then result can reflect on the display table 4, can carry out judging the spy by the numerical bias of the display table 4
The test result quality of needle resistance 16.
The above is only the specific application examples of the utility model, do not constitute any limit to the protection scope of the utility model
System.Any technical scheme formed by adopting equivalent transformation or equivalent replacement, all fall within the utility model rights protection scope it
It is interior.
Claims (5)
1. a kind of probe resistance testboard, including workbench, cam, motor and fine tuning screw rod, the first fixed plate, feature exist
In: the workbench is equipped with the first grip block and the second grip block, and the workbench is equipped with test platform, and the cam is set
It sets on the workbench, shaft is connected on the cam, the shaft is equipped with the second connecting plate, and the cam is equipped with
Connecting rod eccentric adjusting block, is connected with connecting rod in the shaft, and first fixed plate is equipped with support plate, the support plate it is upper
Side is equipped with fixed block, and the support plate is equipped with guide rail, is connected with fine-tuning screw on the fixed block, under the fine-tuning screw
Side is connected with probe resistance, and stop block is connected on the probe resistance, and the lower section of the stop block is equipped with the second fixed plate, institute
Workbench is stated equipped with several fixing seats, the fixing seat is equipped with the first connecting plate, first grip block and described second
Grip block is connect by screw with the workbench, and the test platform is fixed by screws on the workbench；It is described convex
Wheel is set between first grip block and second grip block, and second connecting plate and the cam are turned by described
Axis connection, the shaft through second connecting plate front and rear surfaces and with its sliding contact, the shaft and the motor
Connection, the motor are contained in the workbench, and the motor is electrically connected with the power supply, and the connecting rod eccentric adjusting block abuts against
On the cam, the cam is connect with the connecting rod eccentric adjusting block by the shaft, the shaft and the connecting rod
Sliding contact, first fixed plate are fixed by screws on the workbench, first fixed plate and the support plate
It is fixedly connected by screw, the support plate is connected by screw to the fixed block, and the fine-tuning screw runs through the fixation
The upper and lower surface of block and with its sliding contact, the upper and lower surface and sliding with it that the probe resistance passes through the stop block connects
Touching, the stop block are fixedly connected with second fixed plate, and second fixed plate and first fixed plate pass through screw
The lower section of connection, second fixed plate is equipped with limiting plate, and the limiting plate is fixedly connected with first fixed plate, described solid
Reservation is fixedly connected with the workbench by screw, and first connecting plate is connect by screw with the fixing seat, is shown
Table acts against first grip block, and first connecting plate is equipped with the pin shaft through its upper and lower surface, the pin shaft it is upper
End through top fixing seat upper and lower surface and with its sliding contact.
2. probe resistance testboard as described in claim 1, it is characterised in that: first connecting plate is equipped with through thereon
The receiver of lower surface, the lower end of the receiver act against in first fixed plate, the receiver and probe electricity
Resistance is connected by electric wire；Display table is connected with by electric wire on the receiver.
3. probe resistance testboard as claimed in claim 2, it is characterised in that: the fixing seat sets there are two and presents and divides into
It sets.
4. probe resistance testboard as claimed in claim 3, it is characterised in that: the motor is AC asynchronous motor.
5. probe resistance testboard as claimed in claim 4, it is characterised in that: the guide rail is set there are two symmetrical point
Cloth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821552480.2U CN209640410U (en) | 2018-09-21 | 2018-09-21 | A kind of probe resistance testboard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821552480.2U CN209640410U (en) | 2018-09-21 | 2018-09-21 | A kind of probe resistance testboard |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209640410U true CN209640410U (en) | 2019-11-15 |
Family
ID=68471076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821552480.2U Active CN209640410U (en) | 2018-09-21 | 2018-09-21 | A kind of probe resistance testboard |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209640410U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088992A (en) * | 2021-11-17 | 2022-02-25 | 佛山中科灿光微电子设备有限公司 | Resistance substrate center positioning clamping device and resistance measuring instrument comprising same |
-
2018
- 2018-09-21 CN CN201821552480.2U patent/CN209640410U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088992A (en) * | 2021-11-17 | 2022-02-25 | 佛山中科灿光微电子设备有限公司 | Resistance substrate center positioning clamping device and resistance measuring instrument comprising same |
| CN114088992B (en) * | 2021-11-17 | 2024-03-19 | 佛山中科灿光微电子设备有限公司 | Resistor substrate center positioning clamping device and resistor measuring instrument comprising same |
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| GR01 | Patent grant |